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2025
|
Invention
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Line narrowing device and electronic device manufacturing method.
A line narrowing device includ... |
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2024
|
Invention
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Laser apparatus, laser system, and method for manufacturing electronic devices.
A laser apparatu... |
|
|
Invention
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Chamber for gas laser device, gas laser device, and electronic device manufacturing method.
A ch... |
|
|
Invention
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Photosensitive substrate developing method, photomask creating method, and electronic device manu... |
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|
Invention
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Laser system and electronic device manufacturing method.
A laser system includes a pump laser de... |
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|
Invention
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Line narrowing module, manufacturing method of line narrowing module, and electronic device manuf... |
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|
Invention
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Discharge electrodes, manufacturing method of anode, and electronic device manufacturing method. ... |
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Invention
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Electric component box and extreme ultraviolet light generation apparatus.
An electric component... |
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Invention
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Laser device and electronic device manufacturing method.
A laser device includes a laser chamber... |
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|
Invention
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Extreme ultraviolet light generation apparatus and electronic device manufacturing method.
An ex... |
|
|
Invention
|
Laser apparatus and method for manufacturing electronic devices.
A laser apparatus includes a fi... |
|
|
Invention
|
Laser apparatus, method for controlling wavelength of laser light from laser apparatus, and metho... |
|
|
Invention
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Chamber, extreme ultraviolet light generation system, and electronic device manufacturing method.... |
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|
Invention
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Differential evacuation device and electronic device manufacturing method.
A differential evacua... |
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|
Invention
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Line narrowing laser device, and electronic device manufacturing method.
A line narrowing laser ... |
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|
Invention
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Laser apparatus, method for measuring spectral linewidth, and method for manufacturing electronic... |
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|
Invention
|
Method of baking chamber of gas laser apparatus and electronic device manufacturing method.
A me... |
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|
Invention
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Chamber of gas laser apparatus and electronic device manufacturing method.
In a chamber of a gas... |
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|
Invention
|
Gas laser device and electronic device manufacturing method.
A gas laser device includes a chamb... |
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|
Invention
|
Optical pulse stretcher, laser device, and electronic device manufacturing method.
An optical pu... |
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Invention
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Training model creating method, laser device, and electronic device manufacturing method.
A trai... |
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Invention
|
Residual pulse cost calculation method and processor.
A residual pulse cost calculation method f... |
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|
Invention
|
Euv light generation system and electronic device manufacturing method.
An EUV light generation ... |
|
|
Invention
|
Gas laser device and electronic device manufacturing method.
A gas laser device includes a power... |
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|
Invention
|
Laser device, laser processing system, and laser processing method.
A laser device, to be used i... |
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Invention
|
Discharge electrode, method of manufacturing discharge electrode, and electronic device manufactu... |
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|
Invention
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Laser processing apparatus and method for processing workpiece.
A laser processing apparatus inc... |
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Invention
|
Laser apparatus, optical path adjusting method, and electronic device manufacturing method.
A la... |
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Invention
|
Laser system and electronic device manufacturing method.
A laser system includes a first semicon... |
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Invention
|
Extreme ultraviolet light generation chamber device and electronic device manufacturing method.
... |
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|
Invention
|
Gas laser device and electronic device manufacturing method.
A gas laser device includes a laser... |
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|
Invention
|
Photomask creating method, data creating method, and electronic device manufacturing method.
Pro... |
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|
Invention
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Electronic device manufacturing method, laser device, and wavelength sequence calculation system.... |
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2023
|
Invention
|
Laser apparatus, method for controlling wavelength of laser apparatus, and method for manufacturi... |
|
|
Invention
|
Laser device and method for manufacturing electronic device. A laser device according to one aspe... |
|
|
Invention
|
Laser processing apparatus, method for controlling laser processing apparatus, and method for man... |
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|
Invention
|
Laser apparatus and method of producing electronic device. This laser apparatus comprises: a lase... |
|
|
Invention
|
Exposure method and method for manufacturing electronic device. This exposure method comprises: a... |
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|
Invention
|
Chamber apparatus, gas laser apparatus, and method for producing electronic device. A chamber app... |
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|
Invention
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Gas laser apparatus and method for manufacturing electronic device. In the present invention, a g... |
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|
Invention
|
Laser device and method of producing electronic device. This laser device is provided with: a fir... |
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|
Invention
|
Laser apparatus and method for manufacturing electronic device. A laser apparatus according to on... |
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|
Invention
|
Wavelength detection device, laser device, and method for manufacturing electronic device. This w... |
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|
Invention
|
Gas laser apparatus and method for manufacturing electronic device. This gas laser apparatus ampl... |
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|
Invention
|
Narrow-band module, narrow-band laser device, and method for manufacturing electronic device. In ... |
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|
Invention
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Laser device and optical element deterioration determination method. This laser device comprises:... |
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|
Invention
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Laser device, exposure device, and method for manufacturing electronic device. This laser device ... |
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|
Invention
|
Laser system and method for manufacturing electronic device. This laser system comprises: a laser... |
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2022
|
P/S
|
Laser apparatus, namely, a laser machine for semiconductor manufacturing; extreme ultraviolet lig... |
|
|
P/S
|
Laser apparatus for semiconductor manufacturing; extreme
ultraviolet light generation apparatus ... |
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2018
|
P/S
|
Computer software platforms for managing semi-conductor manufacturing machines; computer software... |
|
|
P/S
|
Computer software platforms used for semi-conductor
manufacturing machines; computer software us... |
|
2016
|
P/S
|
Laser apparatus, namely, a laser machine for semiconductor manufacturing; [ extreme ultraviolet l... |
