A power control system may include a housing having a plurality of panel walls, a central interconnect system within the housing, a plurality of inputs arranged along the housing, and a plurality of power control modules, where each power control module includes: a power control device configured to receive power and data communication from the plurality of inputs, a sensing device coupled to the power control device to sense one or more operating conditions; and a connector configured to extend through one panel wall of the plurality of panel walls when coupled to the central interconnect system and configured to couple to one or more connections of a heater controller, wherein the connector is accessible from an exterior of the housing; and a controller configured to control power output by the connector based on the one or more sensed operating conditions of the plurality of power control modules.
In various forms, methods and systems are provided for measuring a thermal performance of a thermal component. A method includes: providing a plurality of sensors coupled between one or more intermediate wires; providing at least two lead wires coupled to the plurality of sensors; receiving, by a control module, sensor data from the at least two lead wires; determining, by the control module, a resistance associated with each of the plurality of sensors based on the sensor data from the at least two lead wires; determining, by the control module, a temperature at each of the plurality of sensors based on the respective resistance; and generating, by the control module, temperature data of the thermal component based on the temperature at each of the plurality of sensors.
G01K 1/02 - Moyens d’indication ou d’enregistrement spécialement adaptés aux thermomètres
G01K 7/16 - Mesure de la température basée sur l'utilisation d'éléments électriques ou magnétiques directement sensibles à la chaleur utilisant des éléments résistifs
G01M 99/00 - Matière non prévue dans les autres groupes de la présente sous-classe
A heater core assembly includes a flexible core and at least one resistive heating element. The flexible core includes of a plurality of continuous fused fiber filaments. The plurality of continuous fused fiber filaments are twisted together along a length of the flexible core. The at least one resistive heating element is wound around the flexible core along the length and extends into the plurality of continuous fused fiber filaments such that at least a portion of the plurality of continuous fused fiber filaments are plastically deformed.
A heater assembly includes an insulative core, at least one resistive heating element wound around the insulative core along a length of the insulative core, an inner layer of dielectric medium surrounding the at least one resistive heating element and the insulative core, and insulation members arranged longitudinally along the heater assembly and surrounding the inner layer of dielectric medium. The inner insulation members defining a respective inner gap between adjacent inner insulation members. At least one coupling is disposed within at least one of the respective inner gaps between the adjacent inner insulation members, and corresponding outer insulation members are arranged longitudinally along the heater assembly and surround the inner insulation members. The corresponding outer insulation members define a respective outer gap between adjacent outer insulation members, and a portion of the at least one coupling extends within the respective outer gap between the adjacent outer insulation members.
H01B 3/08 - Isolateurs ou corps isolants caractérisés par le matériau isolantEmploi de matériaux spécifiés pour leurs propriétés isolantes ou diélectriques composés principalement de substances inorganiques quartzIsolateurs ou corps isolants caractérisés par le matériau isolantEmploi de matériaux spécifiés pour leurs propriétés isolantes ou diélectriques composés principalement de substances inorganiques verreIsolateurs ou corps isolants caractérisés par le matériau isolantEmploi de matériaux spécifiés pour leurs propriétés isolantes ou diélectriques composés principalement de substances inorganiques laine de verreIsolateurs ou corps isolants caractérisés par le matériau isolantEmploi de matériaux spécifiés pour leurs propriétés isolantes ou diélectriques composés principalement de substances inorganiques laine de laitierIsolateurs ou corps isolants caractérisés par le matériau isolantEmploi de matériaux spécifiés pour leurs propriétés isolantes ou diélectriques composés principalement de substances inorganiques émaux vitreux
H05B 3/06 - Éléments chauffants combinés constructivement avec des éléments d'accouplement ou avec des supports
H05B 3/42 - Éléments chauffants ayant la forme de tiges ou de tubes non flexibles
H05B 3/14 - Éléments chauffants caractérisés par la composition ou la nature des matériaux ou par la disposition du conducteur caractérisés par la composition ou la nature du matériau conducteur le matériau étant non métallique
A cloth heater is formed by a three-dimensional (3D) knitting machine. The cloth heater includes an outer layer, an inner layer, and a carrier layer disposed between the inner layer and the outer layer. The carrier layer includes a carrier substrate and a resistive heating element sewn to the carrier substrate in a pattern by the 3D knitting machine. An insulation layer is disposed between the outer layer and the carrier layer, and the outer layer and the inner carrier layer are formed by the 3D knitting machine.
H05B 3/34 - Éléments chauffants ayant une surface s'étendant essentiellement dans deux dimensions, p. ex. plaques chauffantes flexibles, p. ex. grillages ou tissus chauffants
H05B 3/02 - Chauffage par résistance ohmique Détails
A system is provided, which includes a heating apparatus, a plurality of sensing elements, and a control system. The heating apparatus includes a plurality of heaters that define a plurality of heating zones. Each sensing element is provided at a predetermined heating zone from among the plurality of heating zones and is configured to detect data indicative of an operating characteristic of the predetermined heating zone. The control system includes a buildup detection module configured to determine whether a potential material buildup exists within at least one of the plurality of heating zones based on the data from the plurality of sensing elements.
F28F 27/00 - Commandes ou dispositifs de sécurité spécialement adaptés pour les appareils d'échange ou de transfert de chaleur
F28F 19/00 - Prévention de la formation de dépôts ou de la corrosion, p. ex. en utilisant des filtres
F28G 15/00 - NETTOYAGE DES SURFACES INTERNES OU EXTERNES DES CONDUITS DES ÉCHANGEURS DE CHALEUR OU DE TRANSFERT DE CHALEUR, p. ex. TUBES D'EAU DE CHAUDIÈRES Parties constitutives
7.
SYSTEMS AND METHODS FOR DETECTING BUILDUP ON A SURFACE OF A HEATER
A method for monitoring a surface characteristic of a heater provided in a fluid flow conduit of a fluid flow system includes obtaining sensor data from one or more sensors of the fluid flow system, and generating simulation data based on one or more inputs, a mathematical model of the fluid flow system, and the sensor data. The method further includes training a machine learning model based on the sensor data and determining whether the machine learning model satisfies one or more model conditions based on the simulation data. The method also includes predicting, in response to the machine learning model satisfying the one or more model conditions, the surface characteristic of the heater at a plurality of locations of the heater based on the machine learning model, wherein the plurality of locations includes an undetectable location of the heater.
G06F 30/28 - Optimisation, vérification ou simulation de l’objet conçu utilisant la dynamique des fluides, p. ex. les équations de Navier-Stokes ou la dynamique des fluides numérique [DFN]
G06F 30/27 - Optimisation, vérification ou simulation de l’objet conçu utilisant l’apprentissage automatique, p. ex. l’intelligence artificielle, les réseaux neuronaux, les machines à support de vecteur [MSV] ou l’apprentissage d’un modèle
A method of monitoring a surface condition of a component in a thermal system includes heating the component to a steady-state, introducing a thermal disturbance to the component, determining a thermal response of at least one of the component, another system component, or the thermal system response in response to the thermal disturbance, and predicting the surface condition of the component based on a comparison between the thermal response and a reference response.
G01N 25/48 - Recherche ou analyse des matériaux par l'utilisation de moyens thermiques en recherchant la production de quantités de chaleur, c.-à-d. la calorimétrie, p. ex. en mesurant la chaleur spécifique, en mesurant la conductivité thermique sur une solution, sorption ou réaction chimique n'impliquant pas une oxydation par combustion ou catalyse
A mounting structure includes a connector with a central bore accommodating a sensor assembly, an adaptor fitting for system component connection, and a radio frequency (RF) shielding member affixed to the connector. The RF shielding member surrounds the sensor assembly, making contact with its outer surface at multiple discrete locations. This configuration effectively shields the sensor assembly from RF interference, providing more accurate and reliable sensor operation within an environment.
G01K 1/08 - Dispositifs de protection, p. ex. étuis
G01K 1/14 - SupportsDispositifs de fixationDispositions pour le montage de thermomètres en des endroits particuliers
G01K 7/02 - Mesure de la température basée sur l'utilisation d'éléments électriques ou magnétiques directement sensibles à la chaleur utilisant des éléments thermo-électriques, p. ex. des thermocouples
G01K 7/16 - Mesure de la température basée sur l'utilisation d'éléments électriques ou magnétiques directement sensibles à la chaleur utilisant des éléments résistifs
A sensor assembly for use with an insulation jacket includes a resilient mounting bracket, a sensor, and a set of sensor wires. The resilient mounting bracket has an upper leg, a lower leg, and a sidewall joining the upper leg to the lower leg, and a receiving space is defined between the upper leg and the lower leg to receive the insulation jacket. The sensor is mounted to an interior surface of the lower leg, and the sensor wires are coupled to the sensor. In routing, the sensor wires extend along the upper leg, along the sidewall, and along the lower leg.
G01D 11/30 - Supports spécialement adaptés à un instrumentSupports spécialement adaptés à un ensemble d'instruments
G01K 1/14 - SupportsDispositifs de fixationDispositions pour le montage de thermomètres en des endroits particuliers
G01K 13/02 - Thermomètres spécialement adaptés à des fins spécifiques pour mesurer la température de fluides en mouvement ou de matériaux granulaires capables de s'écouler
11.
ADVANCED CONTROL SYSTEMS AND METHODS FOR TEMPERATURE CONTROL
Methods and systems for controlling a heater, for example within a semiconductor etch operation, include generating first control signals to the heater based on setpoint temperature data; storing, in a data storage device, sample data associated with the first control signals generated over a time period; computing, by a processor, at least one signal adjustment value based on the sample data; applying, by the processor, the at least one signal adjustment value to subsequent control signals to provide adjusted control signals; and generating the adjusted control signals to the heater.
G05D 23/30 - Commandes automatiques avec un dispositif de chauffage auxiliaire affectant l'élément sensible, p. ex. pour prévoir les variations de température
G05B 11/42 - Commandes automatiques électriques avec les dispositions nécessaires pour obtenir des caractéristiques particulières, p. ex. proportionnelles, intégrales, différentielles pour obtenir une caractéristique à la fois proportionnelle et dépendante du temps, p. ex. P.I., P.I.D.
H01L 21/67 - Appareils spécialement adaptés pour la manipulation des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide pendant leur fabrication ou leur traitementAppareils spécialement adaptés pour la manipulation des plaquettes pendant la fabrication ou le traitement des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide ou de leurs composants
12.
METHOD FOR EARLY THERMAL PERFORMANCE ASSESSMENT OF A HEATER COMPONENT
In various forms, methods and systems are provided for evaluating the performance of a heater component. A method includes: controlling power to the heater component; receiving sensor data measured, by a sensor, of a heater component while the power is controlled to the heater; generating first thermal image data of the heater component based on the sensor data; determining a power distribution of the heater component based on a first model of the heater component and the first thermal image data; computing second thermal image data of the heater component based on a second model of at least one of the heater component and an assembly comprising the heater component, and the power distribution; and evaluating a performance of the heater component based on the second thermal image data.
H01L 21/67 - Appareils spécialement adaptés pour la manipulation des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide pendant leur fabrication ou leur traitementAppareils spécialement adaptés pour la manipulation des plaquettes pendant la fabrication ou le traitement des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide ou de leurs composants
A component for use in controlled atmosphere chambers, such as a shaft of a pedestal in a semiconductor processing chamber, includes an outer wall and a thermally structured infill pattern of radial walls extending from the outer wall radially inward. A hollow internal bore is formed within and along a length of the component. The component may be formed using an additive manufacturing process such that complex geometries can be created to reduce thermal losses during operation.
H01L 21/687 - Appareils spécialement adaptés pour la manipulation des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide pendant leur fabrication ou leur traitementAppareils spécialement adaptés pour la manipulation des plaquettes pendant la fabrication ou le traitement des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide ou de leurs composants pour le maintien ou la préhension en utilisant des moyens mécaniques, p. ex. mandrins, pièces de serrage, pinces
H01L 21/67 - Appareils spécialement adaptés pour la manipulation des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide pendant leur fabrication ou leur traitementAppareils spécialement adaptés pour la manipulation des plaquettes pendant la fabrication ou le traitement des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide ou de leurs composants
14.
ELASTOMER BOND METHOD FOR ELECTROSTATIC CHUCK ASSEMBLIES WITH THERMALLY ACTIVATED FILLERS FOR ADJUSTABLE LOW TEMPERATURE DEBONDING PROCESS
A bonded assembly includes a first component, a second component, and a bond layer joining the first component to the second component. The bond layer includes a bonding composition that has a silicone elastomer and expandable graphite (EG) powder uniformly dispersed throughout the silicone elastomer. The EG powder is in an amount of about 1.0 to about 5.0 wt.% of the bonding composition and has an average particle size of about 400 μm.
H01L 21/687 - Appareils spécialement adaptés pour la manipulation des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide pendant leur fabrication ou leur traitementAppareils spécialement adaptés pour la manipulation des plaquettes pendant la fabrication ou le traitement des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide ou de leurs composants pour le maintien ou la préhension en utilisant des moyens mécaniques, p. ex. mandrins, pièces de serrage, pinces
H01L 21/683 - Appareils spécialement adaptés pour la manipulation des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide pendant leur fabrication ou leur traitementAppareils spécialement adaptés pour la manipulation des plaquettes pendant la fabrication ou le traitement des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide ou de leurs composants pour le maintien ou la préhension
Systems and methods are provided for controlling power to a load. In one form a system includes: a digital communication bus; a main controller communicatively coupled to the digital communication bus; and a plurality of thyristor-based drivers configured to control power to a respective load, each thyristor-based driver communicatively coupled to the digital communication bus, wherein each of the thyristor-based drivers is configured to communicate digital messages at least one of to and from the main controller via the digital communications bus, wherein the digital messages include sampling data or firing order data.
H02P 7/18 - Dispositions pour réguler ou commander la vitesse ou le couple de moteurs électriques à courant continu pour réguler ou commander individuellement un moteur dynamo-électrique à courant continu en faisant varier le champ ou le courant d'induit par commande maîtresse avec puissance auxiliaire
H02P 7/03 - Dispositions pour réguler ou commander la vitesse ou le couple de moteurs électriques à courant continu pour commander le sens de rotation des moteurs à courant continu
H05B 1/02 - Dispositions de commutation automatique spécialement adaptées aux appareils de chauffage
Methods, processes, and systems for monitoring a resistive element and determining temperature are provided. A method includes: dividing the resistive element into n-number of segments and a sensor segment; measuring, by a sensing unit, total resistance data of the resistive element; measuring, by the sensing unit, temperature data of the sensor segment; computing, by a processor, resistance data of the sensor segment based on the temperature data to generate sensor segment resistance data; computing, by the processor, temperature distribution data for each of the n-number of segments based on the total resistance data, the sensor segment resistance data, and the temperature data; and generating, by the processor, output data based on the temperature distribution data for each of the n-number of segments.
H05B 3/12 - Éléments chauffants caractérisés par la composition ou la nature des matériaux ou par la disposition du conducteur caractérisés par la composition ou la nature du matériau conducteur
G01K 1/02 - Moyens d’indication ou d’enregistrement spécialement adaptés aux thermomètres
17.
HIGH TEMPERATURE HEAT EXCHANGER WITH REMOVABLE HEATER BUNDLES
A heat exchanger including resistive heaters, standoff conduits, and electrical conductors. Each resistive heater includes a heating element conduit and a resistive heating element. The heating element conduit includes fluid flowing therethrough. The resistive heating element is disposed within the heating element conduit. Each standoff conduit is disposed at an end of the heat exchanger opposite the resistive heater and is configured to provide thermal isolation and convective cooling from extreme process temperatures and be coupled to an electrical enclosure through means of an electrically isolating compression fitting feature, thereby accomplishing pressure boundary requirements and enabling easy field replacement of the element by end users. Each of the standoff conduits has an axial end that is fluidly sealed. Each electrical conductor extends through a respective standoff conduit and has a first end electrically coupled to a power supply and a second end electrically coupled to a respective resistive heater.
F24H 9/1818 - Disposition ou montage des éléments chauffants électriques
F24H 9/20 - Disposition ou montage des dispositifs de commande ou de sécurité
F24H 1/10 - Chauffe-eau instantanés, c.-à-d. dans lesquels il n'y a production de chaleur que lorsque l'eau s'écoule, p. ex. avec contact direct de l'eau avec l'agent chauffant
F24H 9/02 - EnveloppesCouvercles de protectionPanneaux décoratifs
H05B 3/04 - Joints étanches à l'eau ou à l'air pour appareils de chauffage
H05B 3/50 - Éléments chauffants ayant la forme de tiges ou de tubes non flexibles le conducteur chauffant enrobé dans un matériau isolant le conducteur chauffant disposé dans des tubes métalliques, la surface rayonnante ayant des nervures conductrices de la chaleur
H05B 3/14 - Éléments chauffants caractérisés par la composition ou la nature des matériaux ou par la disposition du conducteur caractérisés par la composition ou la nature du matériau conducteur le matériau étant non métallique
H05B 3/06 - Éléments chauffants combinés constructivement avec des éléments d'accouplement ou avec des supports
A converted gas-fired furnace includes at least one lower radiant heating zone, an upper convective heating zone, electric ceramic fiber heaters, and duct heaters. The lower radiant heating zone includes a plurality of lower tubes configured to carry a fluid to be heated. The upper convective heating zone includes a plurality of upper tubes configured to carry the fluid to be heated. The electric ceramic fiber heaters are disposed within the lower radiant heating zone and are configured to heat the fluid in the lower tubes. The duct heaters are configured to heat the fluid in the upper tubes.
An electrical termination assembly includes a ceramic insert defining a plurality of bores and a plurality of liners disposed within each of the plurality of bores. Each liner has a blind bore and a distal end face, the distal end face being exposed through the respective bore of the ceramic insert. A plurality of termination pins are secured within each of the blind bores of the plurality of liners, and the plurality of liners are made of a ceramic material having a coefficient of thermal expansion (CTE) between a CTE of the ceramic insert and a CTE of the termination pins.
In one form, an electrical termination assembly includes a first ceramic member, a second ceramic member secured to the first ceramic member, and at least one electrical component embedded between the first ceramic member and the second ceramic member. An electrical termination extends through a bore and into a recess of the first and second ceramic members and is in electrical contact with the electrical component. The electrical termination includes a rod disposed within the bore and a flange disposed within the recess. At least one interface member is disposed between the flange and the recess. The electrical termination and the interface member each define different materials having tailored coefficients of thermal expansion such that when the rod is in tension the first ceramic member and the second ceramic member are in compression.
H01J 37/32 - Tubes à décharge en atmosphère gazeuse
H01L 21/683 - Appareils spécialement adaptés pour la manipulation des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide pendant leur fabrication ou leur traitementAppareils spécialement adaptés pour la manipulation des plaquettes pendant la fabrication ou le traitement des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide ou de leurs composants pour le maintien ou la préhension
21.
METHOD FOR ROBUST ELECTRICAL TERMINATION OF EMBEDDED CIRCUITS WITHIN A CERAMIC PEDESTAL HEATER
An electrical termination assembly includes a first disk having a central recess, a second disk spaced apart from the first disk, the second disk having a central opening, a plurality of connector pins in electrical contact with and extending between the first disk and the second disk, and a termination pin extending through the central opening of the second disk and into the central recess of the first disk. The termination pin is electrically connected to the first disk and the second disk.
H01J 37/32 - Tubes à décharge en atmosphère gazeuse
H01L 21/687 - Appareils spécialement adaptés pour la manipulation des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide pendant leur fabrication ou leur traitementAppareils spécialement adaptés pour la manipulation des plaquettes pendant la fabrication ou le traitement des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide ou de leurs composants pour le maintien ou la préhension en utilisant des moyens mécaniques, p. ex. mandrins, pièces de serrage, pinces
22.
BERYLLIUM ALUMINATE BASED DIELECTRIC MATERIAL FOR SEMICONDUCTOR MANUFACTURING AND PROCESSING APPLICATIONS
A beryllium aluminate ceramic material includes greater than 0 wt.% and up to 10 wt.% of at least one of an alkaline earth metal material, rare earth metal material, or combinations thereof, with a beryllium aluminum oxide remainder, and trace impurities. The ceramic material may include at least one of a beryllium oxide, aluminum oxide, aluminum nitride material, or combinations thereof. The ceramic material may include beryllium aluminate grains with a solid solution of at least one of the alkaline earth metal material, rare earth metal material, a boron material, a carbon material, a titanium material, a nitride material, a zirconium material, or combinations thereof.
C04B 35/44 - Produits céramiques mis en forme, caractérisés par leur compositionCompositions céramiquesTraitement de poudres de composés inorganiques préalablement à la fabrication de produits céramiques à base d'oxydes à base d'aluminates
23.
COUPLING BOX HAIRPIN REPLACEMENT FOR HIGH VOLTAGE HEATING FIELD
A heater assembly includes a pair of heating sections, each heating section including a conductive portion, and a coupling assembly. The coupling assembly includes a coupling enclosure having a housing and an end cap, the end cap secured to a distal end portion of the housing and defining an aperture extending therethrough. A coupling member is disposed inside the housing, and the conductive portions of the pair of heating sections are connected by the coupling member. A closure assembly is disposed within the housing and located between the coupling member and the end cap, the closure assembly defining at least one channel that is in fluid communication with the aperture of the end cap and configured to guide a fluid flowing therein toward an area where the end cap is secured to the housing.
A monolithic heated 3D body includes a thin-walled substrate defining a complex curved exterior surface, and a layered heater applied to the complex curved exterior surface of the thin-walled substrate. The layered heater includes at least one resistive heating layer, a set of termination pads in electrical contact with the at least one resistive heating layer, and a dielectric layer disposed over the at least one resistive heating layer.
H05B 3/26 - Éléments chauffants ayant une surface s'étendant essentiellement dans deux dimensions, p. ex. plaques chauffantes non flexibles le conducteur chauffant monté sur une base isolante
H05B 3/06 - Éléments chauffants combinés constructivement avec des éléments d'accouplement ou avec des supports
An electrostatic chuck (ESC) for use in semiconductor processing includes a main body comprising an upper mounting surface, the upper mounting surface defining a surface profile and a guide plate coupled to the upper mounting surface of the main body. The guide plate includes a lower mounting surface. The lower mounting surface defines a surface profile that follows the surface profile of the upper mounting surface of the main body. The ESC further includes a heater embedded within the main body and a radio frequency (RF) electrode embedded within the guide plate. The main body is coupled to the guide plate via a connection consisting of a mechanical interlock.
H01L 21/683 - Appareils spécialement adaptés pour la manipulation des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide pendant leur fabrication ou leur traitementAppareils spécialement adaptés pour la manipulation des plaquettes pendant la fabrication ou le traitement des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide ou de leurs composants pour le maintien ou la préhension
H01L 21/67 - Appareils spécialement adaptés pour la manipulation des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide pendant leur fabrication ou leur traitementAppareils spécialement adaptés pour la manipulation des plaquettes pendant la fabrication ou le traitement des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide ou de leurs composants
H01L 21/687 - Appareils spécialement adaptés pour la manipulation des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide pendant leur fabrication ou leur traitementAppareils spécialement adaptés pour la manipulation des plaquettes pendant la fabrication ou le traitement des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide ou de leurs composants pour le maintien ou la préhension en utilisant des moyens mécaniques, p. ex. mandrins, pièces de serrage, pinces
26.
SYSTEM AND METHOD FOR HEATING FLUID USING GALVANICALLY ISOLATED ELECTRICAL ENERGY HAVING ZERO VOLTAGE TO GROUND
A thermal control system for a fluid heating system including a tube defining an inlet and an outlet includes a galvanically isolated power supply to be electrically connected to the tube to provide an electric energy to heat the tube. The thermal control system also includes a power controller to control the galvanically isolated power supply. The power controller is to adjust an electric current to be provided by the galvanically isolated power supply to the tube. The galvanically isolated power supply is to provide at least two low voltage terminals at the tube and at least one high voltage terminal at the tube. The at least one high voltage terminal is disposed between the at least two low voltage terminals. The galvanically isolated power supply is to provide substantially zero voltage at the inlet and substantially zero voltage at the outlet of the tube.
A control system includes a controller that is configured to determine a differential current of a heater based on a difference between a power conductor current of the heater and a neutral conductor current of the heater, determine whether the differential current of the heater is greater than a threshold differential current, and selectively perform a corrective action in response to the differential current being greater than the threshold differential current.
G05D 23/30 - Commandes automatiques avec un dispositif de chauffage auxiliaire affectant l'élément sensible, p. ex. pour prévoir les variations de température
H05B 3/34 - Éléments chauffants ayant une surface s'étendant essentiellement dans deux dimensions, p. ex. plaques chauffantes flexibles, p. ex. grillages ou tissus chauffants
H05B 3/40 - Éléments chauffants ayant la forme de tiges ou de tubes
28.
SYSTEMS AND METHODS FOR DETERMINING POLYMER BUILD-UP WITHIN A CHEMICAL PROCESSING CHAMBER
A method for monitoring polymer build-up within a chemical processing chamber and in response to generating thermal energy during a chemical process includes determining a response characteristic in response to generating the thermal energy, where the response characteristic includes an operational characteristic associated with the heater, a wall characteristic associated with at least one external wall surface of the chemical processing chamber, or a combination thereof. The method includes correlating the response characteristic to an amount of polymer build¬ up within the chemical processing chamber based on a response characteristic- polymer build-up correlation model and an emissivity range of the polymer build-up.
H01L 21/67 - Appareils spécialement adaptés pour la manipulation des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide pendant leur fabrication ou leur traitementAppareils spécialement adaptés pour la manipulation des plaquettes pendant la fabrication ou le traitement des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide ou de leurs composants
A tailored thermal body includes a substrate and a plurality of material regions extending throughout the substrate, the plurality of material regions having a variable thermal conductivity. At least one heating element is secured to the substrate. The substrate and the plurality of material regions are formed using at least one additive manufacturing process, and materials of the substrate and the plurality of material regions are chemically fused together.
A method for enhancing resistance measurements of a load includes obtaining a plurality of sample resistance values of the load, determining an average resistance value based on the plurality of sample resistance values, determining a resistance difference based on the average resistance value and a nominal resistance value associated with the load, updating an offset correction value of a controller in response to the resistance difference being greater than a resistance tolerance, and measuring a resistance of the load based on the offset correction value and one or more electrical characteristics of the load.
G01R 35/00 - Test ou étalonnage des appareils couverts par les autres groupes de la présente sous-classe
G01R 27/02 - Mesure de résistances, de réactances, d'impédances réelles ou complexes, ou autres caractéristiques bipolaires qui en dérivent, p. ex. constante de temps
G01R 19/00 - Dispositions pour procéder aux mesures de courant ou de tension ou pour en indiquer l'existence ou le signe
G01R 19/165 - Indication de ce qu'un courant ou une tension est, soit supérieur ou inférieur à une valeur prédéterminée, soit à l'intérieur ou à l'extérieur d'une plage de valeurs prédéterminée
A temperature sensing system to detect a temperature of a surface includes a sensor assembly and first and second lead wires. The sensor assembly includes a probe head and a temperature sensor disposed within the probe head. The first and second lead wires suspend the probe head such that the probe head abuts the surface. The first and second lead wires comprising different materials. The first and second lead wires are configured to provide multiple degrees of freedom of movement to the probe head and temperature measurements.
G01K 1/143 - SupportsDispositifs de fixationDispositions pour le montage de thermomètres en des endroits particuliers pour la mesure de la température de surfaces
G01K 1/02 - Moyens d’indication ou d’enregistrement spécialement adaptés aux thermomètres
G01K 1/16 - Dispositions particulières pour conduire la chaleur de l'objet à l'élément sensible
G01K 7/00 - Mesure de la température basée sur l'utilisation d'éléments électriques ou magnétiques directement sensibles à la chaleur
A heater system for semiconductor processing includes a base, a plurality of gas processing components, and a heater. The plurality of gas processing components are secured to the base. The heater is disposed along a length of the base and between the base and the plurality of gas processing components. The heater is configured to provide heat to the plurality of gas processing components.
H01L 21/67 - Appareils spécialement adaptés pour la manipulation des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide pendant leur fabrication ou leur traitementAppareils spécialement adaptés pour la manipulation des plaquettes pendant la fabrication ou le traitement des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide ou de leurs composants
33.
HYBRID SHAFT ASSEMBLY FOR THERMAL CONTROL IN HEATED SEMICONDUCTOR PEDESTALS
A hybrid shaft assembly for use in controlled atmosphere chambers, such as by way of example heated pedestals for semiconductor manufacturing, includes a substrate, a hub having an upper portion and a lower portion, the upper portion being secured to the substrate with an upper joining layer, and a shaft secured to the lower portion of the hub with a lower joining layer. The shaft comprises a material having a thermal conductivity lower than a material of the hub and a material of the substrate.
H01L 21/683 - Appareils spécialement adaptés pour la manipulation des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide pendant leur fabrication ou leur traitementAppareils spécialement adaptés pour la manipulation des plaquettes pendant la fabrication ou le traitement des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide ou de leurs composants pour le maintien ou la préhension
H01L 21/67 - Appareils spécialement adaptés pour la manipulation des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide pendant leur fabrication ou leur traitementAppareils spécialement adaptés pour la manipulation des plaquettes pendant la fabrication ou le traitement des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide ou de leurs composants
H01L 21/687 - Appareils spécialement adaptés pour la manipulation des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide pendant leur fabrication ou leur traitementAppareils spécialement adaptés pour la manipulation des plaquettes pendant la fabrication ou le traitement des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide ou de leurs composants pour le maintien ou la préhension en utilisant des moyens mécaniques, p. ex. mandrins, pièces de serrage, pinces
H01J 37/32 - Tubes à décharge en atmosphère gazeuse
34.
MEDIUM VOLTAGE BUS SYSTEM FOR ELECTRIC CIRCULATION HEATERS
A terminal assembly for a heater system includes a plurality of resistive heating elements arranged in multiple power phases includes a plurality of power busbars, a neutral busbar, a phase barrier disposed between each of the plurality of power busbars, and a plurality of interchangeable couplers. Each power busbar corresponds to a power phase of the multiple power phases and is configured to connect a power lead from one of the multiple power phases and a first end of a plurality of resistive heating elements. The resistive heating elements are in electrical communication with the power lead. The neutral busbar is offset longitudinally from the power busbars and configured to receive a second end of the resistive heating elements. The interchangeable couplers are configured to connect at least a subset of the resistive heating elements to at least one power busbar or at least one neutral busbar.
A layered assembly for use in a controlled atmosphere chamber includes a plurality of substrates and an electrically functioning layer embedded between two adjacent substrates of the plurality of substrates, the electrically functioning layer being a material configured to secure the two adjacent substrates together using a solid- state bonding process. An electrical termination area is integral with the electrically functioning layer, and a peripheral sealing band is embedded between and extends around a periphery of internal faces of the two adjacent substrates, the peripheral sealing band being a material configured to secure and seal the two adjacent substrates together using the solid-state bonding process. Dielectric regions are present between the two adjacent substrates and between edge boundaries of the electrically functioning layer, the dielectric regions being sealed between the two adjacent substrates by the peripheral sealing band.
H01L 21/687 - Appareils spécialement adaptés pour la manipulation des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide pendant leur fabrication ou leur traitementAppareils spécialement adaptés pour la manipulation des plaquettes pendant la fabrication ou le traitement des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide ou de leurs composants pour le maintien ou la préhension en utilisant des moyens mécaniques, p. ex. mandrins, pièces de serrage, pinces
H01L 21/67 - Appareils spécialement adaptés pour la manipulation des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide pendant leur fabrication ou leur traitementAppareils spécialement adaptés pour la manipulation des plaquettes pendant la fabrication ou le traitement des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide ou de leurs composants
H01L 21/683 - Appareils spécialement adaptés pour la manipulation des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide pendant leur fabrication ou leur traitementAppareils spécialement adaptés pour la manipulation des plaquettes pendant la fabrication ou le traitement des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide ou de leurs composants pour le maintien ou la préhension
H01J 37/32 - Tubes à décharge en atmosphère gazeuse
36.
METHOD OF GENERATING A DIGITAL TWIN OF THE ENVIRONMENT OF INDUSTRIAL PROCESSES
A method of generating a digital twin of an environment (10) includes generating one or more mathematical-based variables based on a mathematical model (304) of the environment and sensor data from one or more sensors of the environment, generating one or more machine learning-based variables based on a machine learning-based model of the environment (308) and the sensor data, and stacking the one or more mathematical-based variables and the one or more machine learning-based variables based on a meta-learning model to generate a machine learning input (312) for predicting a performance characteristic of the environment (320).
G06F 30/27 - Optimisation, vérification ou simulation de l’objet conçu utilisant l’apprentissage automatique, p. ex. l’intelligence artificielle, les réseaux neuronaux, les machines à support de vecteur [MSV] ou l’apprentissage d’un modèle
G05B 17/02 - Systèmes impliquant l'usage de modèles ou de simulateurs desdits systèmes électriques
37.
SHAPED ELECTRICAL INTERCONNECTIONS FOR MULTI-LAYER HEATER CONSTRUCTIONS
An electrical interconnect for use in connecting layers of a multi-layer heater includes a shaped body having a lower end portion and an upper end portion. The lower end portion has a smaller contact area than a contact area of the upper end portion, and the contact area of the lower end portion is proximate a heating layer and the contact area of the upper end portion is proximate a routing layer.
H05B 3/26 - Éléments chauffants ayant une surface s'étendant essentiellement dans deux dimensions, p. ex. plaques chauffantes non flexibles le conducteur chauffant monté sur une base isolante
H01L 21/67 - Appareils spécialement adaptés pour la manipulation des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide pendant leur fabrication ou leur traitementAppareils spécialement adaptés pour la manipulation des plaquettes pendant la fabrication ou le traitement des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide ou de leurs composants
38.
METHOD AND SYSTEM FOR CALCULATING ELECTRICAL CHARACTERISTICS OF AN ELECTRIC HEATER
A method of controlling temperature of a heater including a resistive heating element includes measuring a voltage count and a current count based on data from an analog-digital converter (ADC) circuit of a sensor circuit, where the sensor circuit is electrically coupled to the heater. The method includes selecting one or more dynamic gain levels of the ADC from among a plurality of dynamic gain levels based on a shift gain correlation, determining a resistance of the resistive heating element based on the voltage count, the current count, and the one or more dynamic gain levels, and controlling power to the heater based on the resistance.
A temperature sensing system includes an outer casing, a thermocouple including a thermocouple junction, and a reference sensor. The thermocouple and the reference sensor are received within the outer casing. The reference sensor is disposed proximate an end of the thermocouple opposing the thermocouple junction and is configured to provide a reference temperature based on which a temperature measured by the thermocouple is determined.
A standoff assembly for use in terminating a plurality of resistive heaters disposed within a fluid vessel includes a pressure adapter plate, an electrical enclosure adapter plate, and a plurality of conduits. An end portion of each of the resistive heating elements extends through the pressure adapter plate. The electrical enclosure adapter plate is spaced apart from the pressure adapter plate to define a dry volume therebetween. The conduits are secured to the pressure adapter plate and the electrical enclosure adapter plate. Each conduit is aligned concentrically with each of the resistive heating elements. An electrical termination portion of each resistive heating element is disposed within the conduit.
An electric heater system includes an inlet, an outlet, a plurality of heat exchanger assemblies, and one or more connectors. The plurality of heat exchanger assemblies are connected in series. Each heat exchanger assembly includes a vessel, heating elements disposed within the vessel, and a fluid guide member. The connectors secure the vessels of the plurality of heat exchanger assemblies to each other. The connectors are also in fluid communication with the vessels. Fluid entering the inlet flows through the heat exchanger assemblies and through one or more connectors where it exits the outlet. The fluid guide members of the heat exchanger assemblies are of different or the same combinations to generate a predetermined pressure drop between the inlet and the outlet.
F24H 1/10 - Chauffe-eau instantanés, c.-à-d. dans lesquels il n'y a production de chaleur que lorsque l'eau s'écoule, p. ex. avec contact direct de l'eau avec l'agent chauffant
F24H 9/00 - APPAREILS DE CHAUFFAGE DE FLUIDES, p. ex. DE L'AIR OU DE L'EAU, COMPORTANT DES MOYENS DE PRODUCTION DE CHALEUR, p. ex. DES POMPES À CHALEUR, EN GÉNÉRAL Parties constitutives
A thermal insulation structure includes an insulation layer having a first surface proximate a cooling device and a second surface opposing the first surface. A heater is disposed proximate the second surface, and a protective layer is disposed proximate the heater layer such that the heater layer is disposed between the insulation layer and the protective layer. The heater layer is configured to reduce frost or ice buildup on an exterior surface of the insulation layer.
H01L 21/67 - Appareils spécialement adaptés pour la manipulation des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide pendant leur fabrication ou leur traitementAppareils spécialement adaptés pour la manipulation des plaquettes pendant la fabrication ou le traitement des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide ou de leurs composants
43.
METAL HEATER ASSEMBLY WITH EMBEDDED RESISTIVE HEATERS
A metal heater includes a metal substrate with a groove, a resistive heater disposed within the groove, and a fill metal disposed over the resistive heater and substantially filling the groove, wherein the fill metal has a lower melting temperature than the metal substrate. The fill metal can be indium and a cover plate can be bonded to the metal substrate and over the indium. A method of manufacturing the metal heater and a method of operating the metal heater are also provided.
H05B 3/24 - Éléments chauffants ayant une surface s'étendant essentiellement dans deux dimensions, p. ex. plaques chauffantes non flexibles le conducteur chauffant étant autoportant
44.
CABLE HEATER ASSEMBLY WITH CABLE END ADAPTER SYSTEM
A cable heater assembly includes a cable heater and an adapter system. The cable heater includes an outer sheath and a conductor. A portion of the conductor is exposed from the outer sheath. The adapter system includes an adapter body mounted to an end of the cable heater and a cap joined to the adapter body to enclose the portion of the conductor inside the cap.
A method of detecting a leak-induced abnormal condition in a fluid line system having a plurality of heaters includes determining a plurality of temperature characteristics at a plurality of locations of the fluid line system, where each temperature from among the plurality of temperature characteristics is associated with at least one heater from among the plurality of heaters and monitoring, for each of the plurality of heaters, an electrical characteristic of the heater. The method includes determining the leak-induced abnormal condition is present within the fluid line system in response to the electrical characteristic of a given heater from among the plurality of heaters and the temperature characteristic associated with the given heater satisfying a temperature-and-electrical characteristics (TEC) deviation condition and performing a corrective action in response to determining the leak-induced abnormal condition is present.
A method of providing power via a plurality of power control systems forming a power network is provided. Each power control system includes a power controller and a power switch operable by the power controller. The method includes defining, by each power controller of the power network, a power allocation schedule for a power cycle using a dynamic load scheduling model based on a members list of the power network. The power cycle is divided into a plurality of power units, and the power allocation schedule identifies one or more designated power control systems from among the plurality of power control systems to provide power to a load during each of the power units. For the power cycle, the method includes providing power to the load by the one or more designated power control systems during a respective power unit based on the power allocation schedule.
A termination assembly for a heater assembly includes a plurality of resistive heaters (26) arranged in discrete power phases, each resistive heater comprising a resistive heating element surrounded by dielectric material and a sheath. The termination assembly includes a plurality of electrically nonconductive members (76). Each electrically nonconductive member (76) includes a plurality of apertures configured to receive power pins (80) of the plurality of resistive heaters. The termination assembly includes a plurality of connectors (82) configured to connect the power pins to the electrically nonconductive members. Each electrically nonconductive member includes a number of the plurality of connectors corresponding to a number of power pins being terminated. The termination assembly includes an electrical circuit (85) embedded in or disposed on at least one of the plurality of electrically nonconductive members.
H05B 3/06 - Éléments chauffants combinés constructivement avec des éléments d'accouplement ou avec des supports
F24H 1/10 - Chauffe-eau instantanés, c.-à-d. dans lesquels il n'y a production de chaleur que lorsque l'eau s'écoule, p. ex. avec contact direct de l'eau avec l'agent chauffant
H05B 3/42 - Éléments chauffants ayant la forme de tiges ou de tubes non flexibles
48.
COUPLING BOX HAIRPIN REPLACEMENT FOR HIGH VOLTAGE HEATING ELEMENT
A heater assembly includes a pair of heating sections (22) and a coupling assembly (24). The heating sections each include a conductive portion (52). The coupling assembly (24) includes a coupling enclosure (26) and a coupling member (28) disposed inside the coupling enclosure (26). The conductive portions of the pair of heating sections are connected by the coupling member inside the coupling enclosure.
H05B 3/42 - Éléments chauffants ayant la forme de tiges ou de tubes non flexibles
H05B 3/06 - Éléments chauffants combinés constructivement avec des éléments d'accouplement ou avec des supports
F24H 1/10 - Chauffe-eau instantanés, c.-à-d. dans lesquels il n'y a production de chaleur que lorsque l'eau s'écoule, p. ex. avec contact direct de l'eau avec l'agent chauffant
49.
DEVICES FOR DETECTING MATERIAL DEPOSITS IN FLUID FLOW CONDUITS
A sensor for detecting material deposits in a fluid flow conduit includes a body and an array of pairs of temperature sensors disposed within the body, where each pair of temperature sensors is spaced a distance apart along a primary flow direction of the fluid flow conduit.
A method of detecting accumulation of material deposits within a fluid flow conduit includes providing, by a controller, an excitation signal to a heating element of the fluid flow conduit. The method includes obtaining, by the controller, thermodynamic data of the fluid flow conduit in response to providing the excitation signal, where the thermodynamic data includes heat flux data, diffusivity data, time data, temperature differential data, or a combination thereof. The method includes determining, by the controller, an amount of material deposits based on the thermodynamic data.
G01F 1/696 - Circuits à cet effet, p. ex. débitmètres à courant constant
G01F 1/00 - Mesure du débit volumétrique ou du débit massique d'un fluide ou d'un matériau solide fluent, dans laquelle le fluide passe à travers un compteur par un écoulement continu
G01N 17/00 - Recherche de la résistance des matériaux aux intempéries, à la corrosion ou à la lumière
G01N 25/18 - Recherche ou analyse des matériaux par l'utilisation de moyens thermiques en recherchant la conductivité thermique
51.
METHOD AND SYSTEM FOR CONTROLLING AN ELECTRIC HEATER USING CONTROL ON ENERGY
A method for controlling a heated process of an electric heater includes obtaining a setpoint variable indicating a target temperature of the heater. The method includes identifying an energy profile for the heater based on the setpoint variable. The energy profile provides a defined magnitude of initial electrical energy to be applied to the heater to have a temperature of the heated process reach the target temperature. The method includes obtaining a process variable indicating a performance characteristic of the heated process. The method includes providing electrical energy to the heater based on at least one of the energy profile and the process variable.
In one form, the present disclosure is directed toward a method for controlling temperature of a heater including a resistive heating element. The method includes applying power to the resistive heating element of the heater at a variable ramp rate to increase temperature of the heater to a desired temperature setpoint. The variable ramp rate is set to a desired ramp rate. The method further includes monitoring an electric current flowing through the resistive heating element of the heater, and reducing the variable ramp rate from the desired ramp rate to a permitted ramp rate in response to the electric current being greater than a lower limit of an electric current limit band. An upper limit of the electric current limit band is provided as a system current limit.
In one form, the present disclosure is directed toward a method of controlling temperature of a heater including a resistive heating element. The method includes applying power to the resistive heating element at a variable ramp rate to decrease temperature of the heater to a desired temperature setpoint, where the variable ramp rate is set to a desired ramp rate. The method further includes monitoring the temperature of the heater to detect a runaway condition and adjusting the variable ramp rate from the desired ramp rate to a permitted ramp rate in response to the runaway condition being detected.
A method of controlling a thermal system of an industrial process includes monitoring intermediate data, associating the intermediate data with correlation data, wherein the correlation data includes an internal process control input, an external heater control input, the output control, or a combination thereof. The method further includes generating a model that defines a relationship between the intermediate data and the correlation data, identifying a state of the heater system based on the model, and selectively performing a corrective action based on the identified state of the heater system.
G05B 17/02 - Systèmes impliquant l'usage de modèles ou de simulateurs desdits systèmes électriques
G05B 11/42 - Commandes automatiques électriques avec les dispositions nécessaires pour obtenir des caractéristiques particulières, p. ex. proportionnelles, intégrales, différentielles pour obtenir une caractéristique à la fois proportionnelle et dépendante du temps, p. ex. P.I., P.I.D.
55.
MULTIPOINT SERIES SENSOR IN ELECTRIC HEATING ELEMENTS
A temperature sensing system includes a plurality of resistive segments connected in electrical series. Each resistive segment defines a material different from a material of an adjacent resistive segment, and the plurality of resistive segments are joined at sensing junctions to define a plurality of sensing junctions along a length of the resistive segments. A temperature deviation is calculated from the plurality of sensing junctions based on electric potential at each of the sensing junctions.
G01K 1/02 - Moyens d’indication ou d’enregistrement spécialement adaptés aux thermomètres
G01K 7/02 - Mesure de la température basée sur l'utilisation d'éléments électriques ou magnétiques directement sensibles à la chaleur utilisant des éléments thermo-électriques, p. ex. des thermocouples
F24H 1/00 - Appareils de chauffage de l’eau, p. ex. chauffe-eau, chauffe-eau instantanés en continu ou chauffe-eau à accumulation
H05B 1/00 - Détails des dispositifs de chauffage électrique
56.
MODULAR HEATER ASSEMBLIES FOR USE IN FLUID CONDUITS
A modular heater assembly includes resistive heaters disposed along sections of a fluid conduit system, insulation members around the resistive heaters, and at least one insulation block around a fitting. The fitting is configured to join at least two adjacent sections of the fluid conduit system and defines an exterior geometric profile. The insulation block includes a central recess extending axially in a direction of one of the at least two adjacent sections and defining an internal geometric profile substantially matching the external geometric profile of the fitting, and a peripheral aperture. The peripheral aperture is open to the central recess, defines an internal geometric profile substantially matching an external geometric profile of another of the at least two adjacent sections, extends through a sidewall of the insulation block, and is axially aligned with the another of the at least two adjacent sections.
F16L 53/38 - Chauffage par résistance ohmique en utilisant des éléments de chauffage électrique allongés, p. ex. des fils ou des rubans
F16L 59/02 - Forme ou configuration de matériaux isolants, avec ou sans revêtement formant un tout avec les matériaux isolants
F16L 59/16 - Dispositions spécialement adaptées aux nécessités localisées telles qu'à l'endroit des brides, des jonctions, des soupapes ou d'autres éléments similaires
F16L 59/18 - Dispositions spécialement adaptées aux nécessités localisées telles qu'à l'endroit des brides, des jonctions, des soupapes ou d'autres éléments similaires adaptées aux raccords
F16L 59/22 - Dispositions spécialement adaptées aux nécessités localisées telles qu'à l'endroit des brides, des jonctions, des soupapes ou d'autres éléments similaires adaptées aux coudes
57.
PASSIVE AND ACTIVE CALIBRATION METHODS FOR A RESISTIVE HEATER
A method of calibrating a heater includes powering the heater to a first temperature setpoint. The heater includes a resistive heating element that has a varying temperature coefficient of resistance. The method further includes concurrently obtaining a plurality of resistance measurements of the resistive heating element and a plurality of reference temperature measurements of a reference member as the heater cools from a first temperature setpoint to a second temperature setpoint that is lower than the first temperature setpoint, and generating a resistance- temperature calibration table that correlates the plurality of resistance measurements with the plurality of reference temperature measurements.
A method includes providing thermal energy to a component, determining a thermal response of the component in response to providing the thermal energy, and determining a thermal characteristic of the component based on a reference thermal response and the thermal response. The method includes predicting a surface condition of the component based on the thermal characteristic and a predictive analytic model, where the predictive analytic model correlates the thermal characteristics of the component to an estimated surface condition of the component.
A power converter system provides adjustable power to a heater and includes an input rectifier and a full-bridge isolating converter. The input rectifier is configured to rectify a line power having a line energy. The full-bridge isolating converter configured to generate an isolated output voltage based on the rectified line power. The isolated output voltage is electrically isolated from the line energy.
H02M 3/335 - Transformation d'une puissance d'entrée en courant continu en une puissance de sortie en courant continu avec transformation intermédiaire en courant alternatif par convertisseurs statiques utilisant des tubes à décharge avec électrode de commande ou des dispositifs à semi-conducteurs avec électrodes de commande pour produire le courant alternatif intermédiaire utilisant des dispositifs du type triode ou transistor exigeant l'application continue d'un signal de commande utilisant uniquement des dispositifs à semi-conducteurs
H05B 6/00 - Chauffage par champs électriques, magnétiques ou électromagnétiques
H02M 1/00 - Détails d'appareils pour transformation
60.
MODULAR HEATER ASSEMBLY WITH INTERCHANGEABLE AUXILIARY SENSING JUNCTIONS
A heater system is provided, which includes a plurality of heaters, a controller for supplying power to the plurality of heaters, a plurality sets of auxiliary wires extending from the plurality of heaters, and a wire harness for connecting the plurality sets of auxiliary wires to the controller. Each set of auxiliary wires includes three wires, two of the three wires being made of different materials and being joined to form a thermocouple junction, such that each of the plurality of heaters is operable to function as both a heater and a temperature sensor.
H05B 3/48 - Éléments chauffants ayant la forme de tiges ou de tubes non flexibles le conducteur chauffant enrobé dans un matériau isolant
G01K 7/02 - Mesure de la température basée sur l'utilisation d'éléments électriques ou magnétiques directement sensibles à la chaleur utilisant des éléments thermo-électriques, p. ex. des thermocouples
G01K 7/08 - Mesure de la température basée sur l'utilisation d'éléments électriques ou magnétiques directement sensibles à la chaleur utilisant des éléments thermo-électriques, p. ex. des thermocouples l'objet à mesurer formant l'un des matériaux thermo-électriques, p. ex. du genre en pointe
61.
RESISTANCE CALIBRATION AND MONITORING OF THERMAL SYSTEMS
A method of calibrating temperature of a resistive element having a material with a Curie temperature includes generating a standard resistance-temperature (R-T) curve for the resistive element in isothermal conditions to identify values of the R-T curve and an inflection point at the Curie temperature, generating operational R-T curves for the resistive element over an operational time period, comparing the standard R-T curve to the operational R-T curves, and adjusting the operational curves to the standard R-T curve at the Curie temperature to calibrate temperature of the resistive element.
G01K 7/02 - Mesure de la température basée sur l'utilisation d'éléments électriques ou magnétiques directement sensibles à la chaleur utilisant des éléments thermo-électriques, p. ex. des thermocouples
G01K 7/16 - Mesure de la température basée sur l'utilisation d'éléments électriques ou magnétiques directement sensibles à la chaleur utilisant des éléments résistifs
G01K 7/38 - Mesure de la température basée sur l'utilisation d'éléments électriques ou magnétiques directement sensibles à la chaleur utilisant des éléments magnétiques, p. ex. des aimants, des bobines les variations de température agissant sur la perméabilité magnétique
A method of dynamically calibrating a heater having a plurality of zones defined by one or more resistive heating elements includes controlling power to a heater having a plurality of zones based on a dynamic resistance-temperature (R-T) model to control a temperature of the heater to a temperature setpoint. For each of the plurality of zones, the method further includes measuring a temperature of a respective zone based on a resistance of the resistive heating elements of the respective zone and the dynamic R-T model, measuring a reference temperature for the respective zone, and incrementally adjusting a resistance value associated with the temperature setpoint provided in the dynamic R-T model for the respective zone to a calibrated resistance value. The method further includes providing the dynamic R-T model that correlates the calibrated resistance values of the plurality of zones with the temperature setpoint as a calibrated R-T model.
H05B 1/02 - Dispositions de commutation automatique spécialement adaptées aux appareils de chauffage
H01L 21/67 - Appareils spécialement adaptés pour la manipulation des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide pendant leur fabrication ou leur traitementAppareils spécialement adaptés pour la manipulation des plaquettes pendant la fabrication ou le traitement des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide ou de leurs composants
H01L 21/683 - Appareils spécialement adaptés pour la manipulation des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide pendant leur fabrication ou leur traitementAppareils spécialement adaptés pour la manipulation des plaquettes pendant la fabrication ou le traitement des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide ou de leurs composants pour le maintien ou la préhension
63.
CONTROL AND MONITORING SYSTEM FOR GAS DELIVERY SYSTEM
A method for monitoring a semiconductor processing system including a gas delivery system, a thermal system, and a fluid flow line includes obtaining a plurality of operational data from the gas delivery system, the thermal system, or a combination thereof and determining a performance characteristic of the fluid flow line based on one or more operational data of the plurality of operational data. The method includes identifying one or more locations associated with the one or more operational data in a reference virtual model and generating a dynamic state model of the fluid flow line based on the reference virtual model, the one or more identified locations, and the determined performance characteristic, where the dynamic state model is a digital representation of the fluid flow line.
G06Q 10/06 - Ressources, gestion de tâches, des ressources humaines ou de projetsPlanification d’entreprise ou d’organisationModélisation d’entreprise ou d’organisation
H01L 21/67 - Appareils spécialement adaptés pour la manipulation des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide pendant leur fabrication ou leur traitementAppareils spécialement adaptés pour la manipulation des plaquettes pendant la fabrication ou le traitement des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide ou de leurs composants
H05B 1/02 - Dispositions de commutation automatique spécialement adaptées aux appareils de chauffage
An electric heater includes a first busbar, a second busbar, a third busbar, a neutral busbar, a plurality of first heating elements, a plurality of second heating elements, and a plurality of third heating element. A first end of each first heating element is coupled to the first busbar for electrical communication therewith. A second end of each first heating element is coupled to the neutral busbar for electrical communication therewith. A first end of each second heating element is coupled to the second busbar for electrical communication therewith. A second end of each second heating element is coupled to the neutral busbar for electrical communication therewith. A first end of each third heating element is coupled to the third busbar for electrical communication therewith. A second end of each third heating element is coupled to the neutral busbar for electrical communication therewith.
H05B 3/42 - Éléments chauffants ayant la forme de tiges ou de tubes non flexibles
F24H 1/50 - Appareils de chauffage de l'eau pour chauffage central comprenant des moyens pour chauffer l'eau sanitaire comprenant des réservoirs d'eau sanitaire
65.
CERAMIC HEATER AND METHOD OF FORMING USING TRANSIENT LIQUID PHASE BONDING
A heater includes an aluminum nitride (AIN) substrate and a heating layer. The heating layer is made from a molybdenum material and is bonded to the AIN substrate via transient liquid phase bonding. The heater can also include a routing layer and a plurality of first conductive vias connecting the heating layer to the routing layer. The routing layer and the plurality of first conductive vias can be made from the molybdenum material and at least one of the routing layer and the plurality of first conductive vias are bonded to the AIN substrate via a transient liquid phase bond. A plurality of second conductive vias connecting the routing layer to a surface of the AIN substrate can be included and the plurality of second conductive vias are made of the molybdenum material and can be bonded to the AIN substrate via a transient liquid phase bond.
H05B 3/26 - Éléments chauffants ayant une surface s'étendant essentiellement dans deux dimensions, p. ex. plaques chauffantes non flexibles le conducteur chauffant monté sur une base isolante
H05B 3/14 - Éléments chauffants caractérisés par la composition ou la nature des matériaux ou par la disposition du conducteur caractérisés par la composition ou la nature du matériau conducteur le matériau étant non métallique
A method of constructing an E-puck includes forming at least one trench into a lower substrate, depositing an electrode material onto the lower substrate and into the at least one trench, removing excess electrode material from the lower substrate to leave the electrode material within the at least one trench to form an electrode, and forming a dielectric on the lower substrate and the electrode such that the electrode is between the lower substrate and the upper substrate. Forming the at least one trench into the lower substrate forms at least one standoff portion adjacent to the at least one trench and the at least one standoff portion reduces dishing of the electrode material during removal of the excess electrode material from the lower substrate.
H01L 21/683 - Appareils spécialement adaptés pour la manipulation des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide pendant leur fabrication ou leur traitementAppareils spécialement adaptés pour la manipulation des plaquettes pendant la fabrication ou le traitement des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide ou de leurs composants pour le maintien ou la préhension
H05B 3/28 - Éléments chauffants ayant une surface s'étendant essentiellement dans deux dimensions, p. ex. plaques chauffantes non flexibles le conducteur chauffant enrobé dans un matériau isolant
An electrostatic chuck is formed by depositing a diffuser layer onto an electrostatic puck and removing areas of the diffuser layer to form discrete diffuser segments separated by gaps. The discrete diffuser segments may define continuous concentric rings, discontinuous concentric rings, or a combination of continuous concentric rings and discontinuous concentric rings. The discrete diffuser segments are separated from each other by forming at least one trench in the diffuser layer. The trench may extend partially through the diffuser layer, completely through the diffuser layer to the electrostatic puck, or have a first portion that extends partially through the diffuser layer and a second portion that extends completely through the diffuser layer. Also, the trench can have a constant width or have a variable width.
H01L 21/67 - Appareils spécialement adaptés pour la manipulation des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide pendant leur fabrication ou leur traitementAppareils spécialement adaptés pour la manipulation des plaquettes pendant la fabrication ou le traitement des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide ou de leurs composants
H01L 21/683 - Appareils spécialement adaptés pour la manipulation des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide pendant leur fabrication ou leur traitementAppareils spécialement adaptés pour la manipulation des plaquettes pendant la fabrication ou le traitement des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide ou de leurs composants pour le maintien ou la préhension
68.
INDUSTRIAL CONTROL PROJECTIVE CAPACITIVE TOUCH INTERFACE
An industrial control device includes a display, a body, and a controller. The body includes a capacitive slider sensor, a graphic, and a window. The graphic overlaps the capacitive slider sensor. The window is transparent and aligned with the display to permit the display to be viewed through the window. The controller is coupled to an output of the capacitive slider sensor to receive signals from the capacitive slider sensor. The controller is coupled to the display and configured to control the display.
A method of monitoring a condition of a dynamic system includes installing a vibration signal acquisition device at a predetermined location of the dynamic system, acquiring vibration signals by the vibration signal acquisition device, analyzing the vibration signals in a frequency domain, and predicting a change in the condition of the dynamic system based on the vibration signals in the frequency domain. A system is also provided, and a condition of the dynamic system includes clogging.
G01M 7/00 - Test de vibration des structures ou des ouvragesTest de résistance au choc des structures ou des ouvrages
F04D 15/00 - Commande, p. ex. régulation de pompes, d'installations ou de systèmes de pompage
H01L 21/67 - Appareils spécialement adaptés pour la manipulation des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide pendant leur fabrication ou leur traitementAppareils spécialement adaptés pour la manipulation des plaquettes pendant la fabrication ou le traitement des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide ou de leurs composants
70.
SYSTEM AND METHOD FOR CALIBRATING A CONTROL SYSTEM OPERATING AN ELECTRIC HEATER
A method for calibrating a control system configured to control a two-wire heater includes providing power to a load electrically coupled to the control system, generating, an initial measured characteristic and a calibrated measured characteristic of the load by the control system and a controller calibration system, respectively. The method further includes defining a calibrated measurement reference based on a correlation of the initial measured characteristic and the calibrated measured characteristic. With the calibrated measure reference, the control system is further calibrated to define a resistance-temperature calibration reference for determining a working temperature of the two-wire heater based on a measured resistance of the two-wire heater.
A method of adjusting a watt density distribution of a resistive heater includes designing a baseline heater circuit. A detection circuit is designed having a constant trace watt density and the detection circuit overlaps the baseline heater circuit. The detection circuit is manufactured, and its baseline thermal map is obtained. The baseline heater circuit is manufactured, and a nominal thermal map is obtained. A subsequent detection circuit is manufactured, and an actual thermal map is obtained. A subtraction thermal image is created by subtracting the baseline thermal map from the actual thermal map, and a subsequent baseline heater circuit is modified according to the subtraction thermal image.
H05B 3/26 - Éléments chauffants ayant une surface s'étendant essentiellement dans deux dimensions, p. ex. plaques chauffantes non flexibles le conducteur chauffant monté sur une base isolante
A temperature limiting device for a thermal system includes a modular unit that is configured to connect to a two-wire heater of the thermal system. More particularly, the modular unit includes a heater interface configured to connect to a two-wire heater of the thermal system, a power interface configured to connect to a power source to receive power; and a controller including a sensor circuit. The sensor circuit is configured to measure an electrical characteristic of the two-wire heater, which includes voltage, current, or a combination thereof. The controller is configured to calculate a temperature of the thermal system based on the measured electrical characteristic and determine whether the temperature is greater than a temperature setpoint.
33 3 storage condition of aftertreatment system, an ambient temperature, and combinations thereof. The control device modulates power to the heater based on the at least one input such that the heater provides a continuously variable heating output during operation of the exhaust system.
F02D 41/02 - Dispositions de circuits pour produire des signaux de commande
F01N 3/20 - Silencieux ou dispositifs d'échappement comportant des moyens pour purifier, rendre inoffensifs ou traiter les gaz d'échappement pour rendre les gaz d'échappement inoffensifs par conversion thermique ou catalytique des composants nocifs des gaz d'échappement caractérisés par les méthodes d'opérationCommande spécialement adaptés à la conversion catalytique
74.
SYSTEM AND METHOD FOR A CLOSED-LOOP BAKE-OUT CONTROL
A control system for operating a heater includes a controller configured to determine an operational power level based on a measured performance characteristic of the heater, a power set-point, and a power control algorithm, determine a bake-out power level based on a measured leakage current at the heater, a leakage current threshold, and a moisture control algorithm, and select a power level to be applied to the heater. The selected power level is the lower power level from among the operational power level and the bake-out power level.
A wireless sensor assembly includes a housing defining a first aperture and a second aperture. A first communication port is provided at the first aperture and configured to communicably couple to an external sensor and a second communication port is provided at the second aperture and configured to physically connect to an external communication device. A wireless power source disposed in the housing. One or more electronics receives power from the wireless power source and acquire data from the external sensor. The one or more electronics includes a wireless module operable to form a wireless communication link, and is configured to transmit the acquired data to an external computing device by the second communication port and/or the wireless module.
G01D 5/24 - Moyens mécaniques pour le transfert de la grandeur de sortie d'un organe sensibleMoyens pour convertir la grandeur de sortie d'un organe sensible en une autre variable, lorsque la forme ou la nature de l'organe sensible n'imposent pas un moyen de conversion déterminéTransducteurs non spécialement adaptés à une variable particulière utilisant des moyens électriques ou magnétiques influençant la valeur d'un courant ou d'une tension en faisant varier la capacité
A temperature sensing unit is provided, which includes a temperature sensor for measuring a temperature of an object and a mounting member. The mounting member is elastic and is attached to the temperature sensor for securing the temperature sensor around the object, and the temperature sensor in one form defines a first thermocouple ribbon and a second thermocouple ribbon with a very low profile and high temperature capability.
G01K 1/14 - SupportsDispositifs de fixationDispositions pour le montage de thermomètres en des endroits particuliers
G01K 7/02 - Mesure de la température basée sur l'utilisation d'éléments électriques ou magnétiques directement sensibles à la chaleur utilisant des éléments thermo-électriques, p. ex. des thermocouples
A method of constructing a heater includes the steps of forming a sintered assembly including a ceramic substrate and a plurality of first slugs embedded therein, forming a functional element on one of opposing surfaces of the sintered assembly such that the functional element is connected to the plurality of first slugs, and forming a monolithic substrate in which the functional element and the plurality of first slugs are embedded.
H05B 3/06 - Éléments chauffants combinés constructivement avec des éléments d'accouplement ou avec des supports
H05B 3/28 - Éléments chauffants ayant une surface s'étendant essentiellement dans deux dimensions, p. ex. plaques chauffantes non flexibles le conducteur chauffant enrobé dans un matériau isolant
78.
FIBER OPTIC PROBE WITH DUAL SEALING AND COMPRESSION ELEMENT
Temperature sensing probes for sensing the temperature of a substrate based on fluorescence are disclosed. The temperature sensing probes include a fiber optic cable having at a cold end an optical interface and at a hot end a temperature sensing element for contacting a substrate. A sheath surrounds at least a portion of the hot end of the fiber optic cable. A retaining member securely and removably engages the sheath with a support member. The sheath forms a vacuum seal around the contact between the temperature sensing element and the substrate.
G01K 11/32 - Mesure de la température basée sur les variations physiques ou chimiques, n'entrant pas dans les groupes , , ou utilisant des changements dans la transmittance, la diffusion ou la luminescence dans les fibres optiques
An assembly includes a first member, a second member adjacent to the first member, and an aluminum material. At least one of the first member and the second member defines at least one trench. The aluminum material is disposed within the trench and bonds the first member to the second member along adjacent faces. In one form, a spacing between the first member and the second member along the adjacent faces is less than 5 μm.
A heater includes a ceramic substrate and a heating layer made of aluminum material disposed in the ceramic substrate. The ceramic substrate includes a first plate member in which the heating layer is disposed and a second plate member through which a plurality of first vias made of the aluminum material extend. A routing layer made of the aluminum material can be disposed in the second plate member. The first plate member and the second plate member are bonded to each other by the aluminum material. The ceramic substrate can include a third plate member through which a plurality of second vias made from the aluminum material extend. The second plate member and the third plate member are bonded to each other by the aluminum material. Also, terminal wires can be bonded to the plurality of second vias.
H05B 3/26 - Éléments chauffants ayant une surface s'étendant essentiellement dans deux dimensions, p. ex. plaques chauffantes non flexibles le conducteur chauffant monté sur une base isolante
The present disclosure is directed toward a heater that includes a resistive heating element, a first power pin, and a second power pin. The first power pin forms a first junction with a first end of the resistive heating element, and the second power pin forms a second junction with the second end of the resistive heating element. The second power pin includes a first lead wire and a second lead wire. The first lead wire forms the second junction with the second end of the resistive heating element and defines a first conductive material. The second lead wire forms a primary sensing junction with the first lead wire at a first reference area, and defines a second conductive material different from the first conductive material to measure a temperature at the first reference area based on a voltage change created by the primary sensing junction.
H05B 3/40 - Éléments chauffants ayant la forme de tiges ou de tubes
G01K 7/02 - Mesure de la température basée sur l'utilisation d'éléments électriques ou magnétiques directement sensibles à la chaleur utilisant des éléments thermo-électriques, p. ex. des thermocouples
The present disclosure is directed toward a temperature detector probe that includes a housing, a pair of electrical connectors, a support cap, and a sensor. The housing defines a bore longitudinally extending through the housing, and the pair of electrical connectors extend through the bore. The support cap is disposed at a first end portion of the housing. The sensor is provided on the support cap and is electrically coupled to the pair of electrical connectors. The support cap is positioned between the pair of electrical connectors and the support cap.
The present disclosure is directed toward a control system for controlling a heater system. The control system includes a plurality of zone control circuits, at least two auxiliary controllers, and a primary controller. The zone control circuits are operable to provide power to a plurality of heater zones of the heater system and to sense performance characteristics of the zones. The auxiliary controllers are coupled to the plurality of zone control circuits to control power to the plurality of zones and to monitor operation of the heater zones based on the performance characteristics. The primary controller is coupled to the auxiliary controllers and is configured to provide an operation set-point for each of the heater zones based on the performance characteristics. The auxiliary controllers operate the zone control circuits to supply power to the heater system based on the operation set-point.
An electrical heater (10) and method includes heating member (14), a cable (18), and a connector (22). A resistance heating element (30) is within a sheath (26) of the heating member. A proximal end of the sheath is inserted into a slot of a first fitting (110) and welded to the first fitting with first and second leads extending into the first fitting. The second fitting (114) is threadably engaged with the first fitting. The second fitting defines a central bore disposed about the axis. An end of a power cable extends into the second central bore. A first wire is coupled to the first lead. A second wire is coupled to the second lead.
H01R 4/20 - Connexions conductrices de l'électricité entre plusieurs organes conducteurs en contact direct, c.-à-d. se touchant l'un l'autreMoyens pour réaliser ou maintenir de tels contactsConnexions conductrices de l'électricité ayant plusieurs emplacements espacés de connexion pour les conducteurs et utilisant des organes de contact pénétrant dans l'isolation effectuées uniquement par torsion, enroulage, pliage, sertissage ou autre déformation permanente par sertissage en utilisant un manchon de sertissage
H05B 3/08 - Éléments chauffants combinés constructivement avec des éléments d'accouplement ou avec des supports ayant des connexions électriques adaptées spécialement aux températures élevées
H01R 13/6592 - Caractéristiques ou dispositions spécifiques de raccordement du blindage aux organes conducteurs l'organe conducteur étant un câble blindé
The present disclosure is directed toward a control system for controlling a heater that includes at least one heating element. The control system includes a power converter operable to supply an adjustable voltage output to the heater, a sensor circuit that measures an electrical characteristic of the heating element of the heater, a reference temperature sensor that measures a reference temperature of a reference at the heater, and a controller. The controller is configured to calculate a primary temperature of a heater element based on the electrical characteristic and determines the voltage output to be applied to the heater based on at least one of the reference temperature and the primary temperature. The controller is configured to operate in at least one of an operation mode and a learn mode, and execute protection protocols when voltage is being supplied to the heater.
H01L 21/67 - Appareils spécialement adaptés pour la manipulation des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide pendant leur fabrication ou leur traitementAppareils spécialement adaptés pour la manipulation des plaquettes pendant la fabrication ou le traitement des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide ou de leurs composants
H02M 7/5387 - Transformation d'une puissance d'entrée en courant continu en une puissance de sortie en courant alternatif sans possibilité de réversibilité par convertisseurs statiques utilisant des tubes à décharge avec électrode de commande ou des dispositifs à semi-conducteurs avec électrode de commande utilisant des dispositifs du type triode ou transistor exigeant l'application continue d'un signal de commande utilisant uniquement des dispositifs à semi-conducteurs, p. ex. onduleurs à impulsions à un seul commutateur dans une configuration en pont
H05B 1/02 - Dispositions de commutation automatique spécialement adaptées aux appareils de chauffage
H05B 6/06 - Commande, p. ex. de la température, de la puissance
A method of constructing a heater includes providing a substrate, forming at least one trench into the substrate, depositing a functional material onto the substrate and into the at least one trench to form a functional element, and providing an electrical termination in contact with the functional element.
H05B 3/26 - Éléments chauffants ayant une surface s'étendant essentiellement dans deux dimensions, p. ex. plaques chauffantes non flexibles le conducteur chauffant monté sur une base isolante
The present disclosure relates to a sensing system and method that includes a plurality of resistive elements coupled to a plurality of nodes and a control system configured to index through a plurality of modes to measure an electrical characteristic for each resistive element. Each mode of the plurality of modes represents a different combination of power, return, or open circuit condition applied to each of the plurality of nodes, and the control system is configured to calculate, for each of the modes, a total power consumed by the system and a power consumed by each of the resistive elements based on the measured electrical characteristics, to determine a physical parameter.
G01K 7/16 - Mesure de la température basée sur l'utilisation d'éléments électriques ou magnétiques directement sensibles à la chaleur utilisant des éléments résistifs
G01K 1/02 - Moyens d’indication ou d’enregistrement spécialement adaptés aux thermomètres
G01K 3/00 - Thermomètres donnant une indication autre que la valeur instantanée de la température
G01R 27/08 - Mesure de la résistance par mesure à la fois de la tension et de l'intensité
H05B 1/02 - Dispositions de commutation automatique spécialement adaptées aux appareils de chauffage
H01L 21/67 - Appareils spécialement adaptés pour la manipulation des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide pendant leur fabrication ou leur traitementAppareils spécialement adaptés pour la manipulation des plaquettes pendant la fabrication ou le traitement des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide ou de leurs composants
G01N 27/04 - Recherche ou analyse des matériaux par l'emploi de moyens électriques, électrochimiques ou magnétiques en recherchant l'impédance en recherchant la résistance
The present disclosure provides a support pedestal that includes a support member including a resistive layer having at least two zones, a routing layer, and a plurality of conductive vias. The resistive layer and the routing layer are disposed in different planes of the support member and are connected by the plurality of vias. The number of zones of the resistive layer is greater than or equal to a number of wires coupled to the routing layer. The routing layer may include a plurality of arm portions that extend from a central region of the routing layer. The support pedestal may further include a second resistive layer disposed along the same plane as the routing layer.
H01L 21/67 - Appareils spécialement adaptés pour la manipulation des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide pendant leur fabrication ou leur traitementAppareils spécialement adaptés pour la manipulation des plaquettes pendant la fabrication ou le traitement des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide ou de leurs composants
A support pedestal is provided that includes a substrate having a top resistive layer defining a first set of zones and a bottom resistive layer defining a second set of zones. Each zone of the first and second set of zones is coupled to at least two electric terminals from among a plurality of electric terminals, and a total number of electric terminals is less than or equal to a total of the first and second set of zones.
H01L 21/67 - Appareils spécialement adaptés pour la manipulation des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide pendant leur fabrication ou leur traitementAppareils spécialement adaptés pour la manipulation des plaquettes pendant la fabrication ou le traitement des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide ou de leurs composants
A fiber optic sensing system includes a plurality of optical probes, a light source, and a light splitting unit connecting the light source to the plurality of optical probes. The light splitting unit splits a light emitted from the light source into a plurality of divided lights, the divided lights being transmitted to the plurality of optical probes.
G01K 11/32 - Mesure de la température basée sur les variations physiques ou chimiques, n'entrant pas dans les groupes , , ou utilisant des changements dans la transmittance, la diffusion ou la luminescence dans les fibres optiques
A method of manufacturing a pedestal includes having a support plate including a substrate, an electric element embedded in the substrate, and a conductive member connected to the electric element, preparing a tubular shaft that defines a chamber, securing the tubular shaft to the support plate, the conductive member being exposed in the chamber of the tubular shaft, and applying a protective layer on the conductive member by an atomic layer deposition (ALD) process. A system for manufacturing the pedestal and a pedestal are also provided in the present disclosure.
H01L 21/67 - Appareils spécialement adaptés pour la manipulation des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide pendant leur fabrication ou leur traitementAppareils spécialement adaptés pour la manipulation des plaquettes pendant la fabrication ou le traitement des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide ou de leurs composants
H01L 21/687 - Appareils spécialement adaptés pour la manipulation des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide pendant leur fabrication ou leur traitementAppareils spécialement adaptés pour la manipulation des plaquettes pendant la fabrication ou le traitement des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide ou de leurs composants pour le maintien ou la préhension en utilisant des moyens mécaniques, p. ex. mandrins, pièces de serrage, pinces
A ceramic pedestal assembly and a method of forming a ceramic pedestal assembly is provided. The ceramic pedestal assembly includes a ceramic substrate defining an upper surface and a lower surface, at least one via extending through the ceramic substrate, an upper conductive foil layer extending across the upper surface of the ceramic substrate and a lower conductive foil layer extending across the lower surface of the ceramic substrate. Each via includes an upper via defining a cavity and a lower via defining a corresponding tapered insert. In one form, the upper via, the lower via, and the conductive foil layers define a material having a melting temperature greater than 2,000°C and a CTE less than or equal to the ceramic substrate.
H01L 21/67 - Appareils spécialement adaptés pour la manipulation des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide pendant leur fabrication ou leur traitementAppareils spécialement adaptés pour la manipulation des plaquettes pendant la fabrication ou le traitement des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide ou de leurs composants
H01L 21/683 - Appareils spécialement adaptés pour la manipulation des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide pendant leur fabrication ou leur traitementAppareils spécialement adaptés pour la manipulation des plaquettes pendant la fabrication ou le traitement des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide ou de leurs composants pour le maintien ou la préhension
H01L 21/687 - Appareils spécialement adaptés pour la manipulation des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide pendant leur fabrication ou leur traitementAppareils spécialement adaptés pour la manipulation des plaquettes pendant la fabrication ou le traitement des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide ou de leurs composants pour le maintien ou la préhension en utilisant des moyens mécaniques, p. ex. mandrins, pièces de serrage, pinces
A heater assembly includes a continuous series of perforated helical members and a plurality of heating elements. The perforated helical members cooperate to define a geometric helicoid disposed about a longitudinal axis of the heater assembly. Each perforated helical member defines opposed edges and a predetermined pattern of perforations. The perforations extend through each perforated helical member parallel to the longitudinal axis. The heating elements extend through the perforations.
F28F 9/22 - Dispositions pour diriger les sources de potentiel calorifique dans des compartiments successifs, p. ex. aménagement des plaques de guidage
F28D 7/16 - Appareils échangeurs de chaleur comportant des ensembles de canalisations tubulaires fixes pour les deux sources de potentiel calorifique, ces sources étant en contact chacune avec un côté de la paroi d'une canalisation les canalisations étant espacées parallèlement
F28D 7/06 - Appareils échangeurs de chaleur comportant des ensembles de canalisations tubulaires fixes pour les deux sources de potentiel calorifique, ces sources étant en contact chacune avec un côté de la paroi d'une canalisation les canalisations ayant une courbure en U unique
94.
SENSOR SYSTEM AND INTEGRATED HEATER-SENSOR FOR MEASURING AND CONTROLLING PERFORMANCE OF A HEATER SYSTEM
A fluid sensor system detects one or more performance characteristics of a heating system that heats a fluid. The sensor system includes a probe having a finite length a portion of which is to be immersed in the fluid. The probe includes a resistive heating element and a fluid temperature sensor for measuring one or more performance characteristics, wherein the fluid temperature sensor is configured to measure a fluid temperature, and the resistive heating element is operable as a heater to create a temperature differential between the fluid and air to detect the fluid, and as a sensor to measure a fluid level.
G01F 23/24 - Indication ou mesure du niveau des liquides ou des matériaux solides fluents, p. ex. indication en fonction du volume ou indication au moyen d'un signal d'alarme en mesurant des variables physiques autres que les dimensions linéaires, la pression ou le poids, selon le niveau à mesurer, p. ex. par la différence de transfert de chaleur de vapeur ou d'eau en mesurant les variations de résistance de résistances électriques produites par contact avec des fluides conducteurs
A47J 37/12 - Friteuses, p. ex. pour la friture du poisson ou des frites
H05B 1/02 - Dispositions de commutation automatique spécialement adaptées aux appareils de chauffage
An assembly, which in one form is a pedestal, includes an upper member, a lower member bonded to the upper member, and a thermal phase diffuser disposed between the upper member and the lower member within a hermetically sealed volume. The thermal phase diffuser diffuses heat by way of a phase change of a working fluid within the hermetically sealed volume. The assembly/pedestal is capable of operating at high temperatures, in excess of 1000°C, with a high degree of temperature uniformity, and in one form is an aluminum nitride (AIN) material.
H01L 21/67 - Appareils spécialement adaptés pour la manipulation des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide pendant leur fabrication ou leur traitementAppareils spécialement adaptés pour la manipulation des plaquettes pendant la fabrication ou le traitement des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide ou de leurs composants
The present disclosure provides a method of treating a diesel exhaust system that includes heating a reagent to a temperature such that at least a portion of the reagent is heated to a gaseous phase, injecting the reagent into a diesel exhaust stream upstream of a catalyst, and reacting the diesel exhaust with the heated reagent over the catalyst to convert NOx into N2 and H2O. The heating modulates a mass flow rate of the reagent by converting a state of matter of the reagent at least partially to the gaseous phase, and the heated reagent in the gaseous form reduces deposit formations within the diesel exhaust system.
F01N 3/20 - Silencieux ou dispositifs d'échappement comportant des moyens pour purifier, rendre inoffensifs ou traiter les gaz d'échappement pour rendre les gaz d'échappement inoffensifs par conversion thermique ou catalytique des composants nocifs des gaz d'échappement caractérisés par les méthodes d'opérationCommande spécialement adaptés à la conversion catalytique
F01N 3/08 - Silencieux ou dispositifs d'échappement comportant des moyens pour purifier, rendre inoffensifs ou traiter les gaz d'échappement pour rendre les gaz d'échappement inoffensifs
A wireless sensor assembly includes a housing, a wireless power source, and electronics. The housing defines an interior space and at least one aperture sized to receive at least one external sensor. The wireless power source is mounted within the housing. The electronics are mounted within the housing and are configured to receive power from the wireless power source and to be in electrical communication with the external sensor. The electronics include a wireless communications component, and firmware configured to manage a rate of data transmittal from the wireless communications component to an external device such that the wireless communications component has a power consumption less than about 0.5 mW. The electronics are powered exclusively by the wireless power source and the wireless sensor assembly defines a volume less than about 2 in3.
H04B 1/38 - Émetteurs-récepteurs, c.-à-d. dispositifs dans lesquels l'émetteur et le récepteur forment un ensemble structural et dans lesquels au moins une partie est utilisée pour des fonctions d'émission et de réception
98.
HIGH POWER DENSITY INSULATED EXHAUST HEATING SYSTEM
A heating apparatus for an exhaust gas system, or a fluid flow system, is provided by the present disclosure. The heating apparatus has a container body and includes at least one heater element and a support member disposed inside the container body and configured for restricting movement of the at least one heater element in the container body. The support member defines a tortuous geometry and flanks opposed sides of the at least one insulated heater element along a majority of a length of the at least one insulated heater element, wherein the support member increases heat transfer from the at least one heater element to an exhaust gas flowing through the container body.
F01N 5/02 - Silencieux ou dispositifs d'échappement combinés ou associés à des dispositifs bénéficiant de l'énergie des gaz évacués les dispositifs utilisant la chaleur
F23G 7/00 - Procédés ou appareils, p. ex. incinérateurs, spécialement adaptés à la combustion de déchets particuliers ou de combustibles pauvres, p. ex. des produits chimiques
F01N 3/027 - Silencieux ou dispositifs d'échappement comportant des moyens pour purifier, rendre inoffensifs ou traiter les gaz d'échappement pour refroidir ou pour enlever les constituants solides des gaz d'échappement au moyen de filtres utilisant des moyens pour régénérer les filtres, p. ex. par combustion des particules piégées en utilisant un chauffage électrique ou magnétique
F01N 3/20 - Silencieux ou dispositifs d'échappement comportant des moyens pour purifier, rendre inoffensifs ou traiter les gaz d'échappement pour rendre les gaz d'échappement inoffensifs par conversion thermique ou catalytique des composants nocifs des gaz d'échappement caractérisés par les méthodes d'opérationCommande spécialement adaptés à la conversion catalytique
A heater includes at least one resistive element. The at least one resistive element includes a material having a high temperature coefficient of resistance (TCR) such that the resistive element functions as a heater and as a temperature sensor, the resistive element being a material selected from the group consisting of greater than about 95% nickel, a nickel copper alloy, stainless steel, a molybdenum-nickel alloy, niobium, a nickel-iron alloy, tantalum, zirconium, tungsten, molybdenum, Nisil, and titanium. In one form, the heater is a tubular heater with compacted MgO insulation and a metal sheath.
H05B 3/12 - Éléments chauffants caractérisés par la composition ou la nature des matériaux ou par la disposition du conducteur caractérisés par la composition ou la nature du matériau conducteur
100.
HEATER BUNDLE FOR ADAPTIVE CONTROL AND METHOD OF REDUCING CURRENT LEAKAGE
A method of controlling a heating system is provided that includes having at least one heater assembly, the heater assembly comprising a plurality of heater units, each heater unit defining at least one independently controlled heating zone, supplying power to each of the heater units through power conductors electrically connected to each of the independently controlled heating zones in each of the heater units, and modulating power supplied to each of the independently controlled heating zones. A voltage is selectively supplied to each of the independently controlled heating zones such that a reduced number of independently controlled heating zones receives the voltage at a time, or at least a subset of the independently controlled heating zones receive a reduced voltage at all times.
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