2023
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Invention
|
Micro-capillary high voltage isolator for gas delivery to vacuum.
A gas delivery conduit configu... |
2017
|
Invention
|
Inductively coupled plasma ion source with tunable radio frequency power. In a plasma ion source ... |
2016
|
Invention
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Electron emitter source. An electron emitter that consists of: a low work function material inclu... |
2013
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Invention
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Rf system, magnetic filter, and high voltage isolation for an inductively coupled plasma ion sour... |
2009
|
Invention
|
High voltage isolation and cooling for an inductively coupled plasma ion source. A plasma source ... |
|
G/S
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Focused ion beam instruments for ion imaging, for material removal and for material deposition; I... |
2003
|
Invention
|
Electrically conductive synthetic diamond apertures for electron and other particulate beam syste... |