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2024
|
Invention
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Nuclear fusion apparatus.
A controlled nuclear fusion system includes a vacuum chamber, an elect... |
|
2023
|
Invention
|
Large capacity deposition system.
A plasma deposition apparatus includes a vacuum chamber, and a... |
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Invention
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Vacuum deposition into trenches and vias and etch of trenches and via. A plasma deposition appara... |
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Invention
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Vacuum deposition into trenches and vias. A plasma deposition apparatus includes a first plasma s... |
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2022
|
Invention
|
Versatile vacuum deposition sources and system thereof. A versatile high throughput deposition ap... |
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2021
|
Invention
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High throughput vacuum deposition sources and system. A high throughput deposition apparatus incl... |
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2019
|
Invention
|
High throughput vacuum deposition sources and system thereof.
A high throughput deposition appar... |
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2015
|
G/S
|
Industrial surface treatment equipment, namely, corona treatment systems comprised of a high freq... |
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2011
|
Invention
|
Deposition system and methods having improved material utilization. A method for substrate proces... |
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2009
|
Invention
|
Multi-chamber vacuum processing and transfer system. An apparatus for processing a work piece in ... |
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2008
|
Invention
|
Deposition system. A deposition system includes a chamber, a plurality of targets in a center reg... |
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2007
|
Invention
|
System and process for fabricating photovoltaic cell. A substrate processing system includes a so... |
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Invention
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Substrate processing system having improved substrate transport system. A substrate processing sy... |
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|
Invention
|
Magnetron source for deposition on large substrates. A magnetron source for producing a magnetic ... |
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2005
|
Invention
|
Vacuum processing and transfer system. An apparatus for processing a work piece in a vacuum envir... |
|
|
Invention
|
Single-process-chamber deposition system. A deposition system includes a process chamber, a workp... |
