Latest Inventions, Goods, Services
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2024
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Invention
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Plasma-resistant glass, inner chamber component for semiconductor manufacturing process, and meth... |
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Invention
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Component for semiconductor etching process, and manufacturing method therefor. The present inven... |
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2023
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Invention
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Plasma-resistant glass, chamber interior part for semiconductor manufacturing process, and method... |
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Invention
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Plasma-resistant glass, inner chamber component for semiconductor manufacturing process, and manu... |
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Invention
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Plasma-resistant glass, chamber inner part for semiconductor manufacturing process, and manufactu... |
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2022
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Invention
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Plasma-resistant glass, chamber interior parts for semiconductor manufacturing process, and metho... |
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2021
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Invention
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Vacuum microwave spray coating device, method therefor and coating layer formed thereby. Embodime... |
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