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2025
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Invention
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Large-area/wafer-scale cmos-compatible 2d-material intercalation doping tools, processes, and met... |
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Invention
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Throughput improvements for low-temperature/beol-compatible highly scalable graphene synthesis me... |
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Invention
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Low-temperature/beol-compatible highly scalable graphene synthesis tool.
In one aspect, a highly... |
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Invention
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Techniques, methods, and structures for rapid and efficient intercalation-doping of large-area mu... |
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Invention
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Techniques for rapid and efficient intercalation-doping of large-area multi-layered graphene shee... |
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2024
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Invention
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Low-temperature/beol-compatible highly scalable graphene synthesis tool.
A scalable diffusion-co... |
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Invention
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Graphene beol integration interconnection structures. An interconnection structure, including: a ... |
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2023
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Invention
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Large-area wafer-scale cmos-compatible 2d-material intercalation doping tools, processes, and met... |
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Invention
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Methods of low-temperature/beol-compatible highly scalable graphene synthesis. A method is descri... |
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2022
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G/S
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Semiconductor wafer processing equipment |
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Invention
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Low-temperature/beol-compatible highly scalable graphene synthesis tool. In one aspect, a highly ... |
