|
2018
|
Invention
|
Film structure body and method for manufacturing the same. A film structure body has: a substrate... |
|
|
Invention
|
Electrode, ferroelectric ceramics and manufacturing method thereof.
To obtain a piezoelectric fi... |
|
|
Invention
|
Pbnzt ferroelectric film, sol-gel solution, film forming method and method for producing ferroele... |
|
2017
|
Invention
|
Film structure and method for manufacturing the same. 3. In the composition formulae, x satisfies... |
|
|
Invention
|
Method for manufacturing crystal film. 2 film on a substrate heated to 700° C. or more, by a vapo... |
|
2016
|
Invention
|
Film structure body, actuator, motor and method for manufacturing film structure body. To enhance... |
|
|
Invention
|
Ferroelectric film and method for manufacturing the same.
0.3≦X≦0.7.
|
|
2015
|
Invention
|
Piezoelectric film and piezoelectric ceramics. An object is to cause a piezoelectric film to perf... |
|
|
Invention
|
Ferroelectric ceramics, electronic component and manufacturing method of ferroelectric ceramics. ... |
|
|
Invention
|
Feroelectric ceramics and method for manufacturing the same.
0
|
|
|
Invention
|
Ferroelectric ceramics and manufacturing method thereof. 2 film and is oriented in (200) and a pi... |
|
|
Invention
|
Ferroelectric film and manufacturing method thereof.
To provide a ferroelectric film having impr... |
|
2014
|
Invention
|
Piezoelectric film, ferroelectric ceramics and inspection method of piezoelectric film. A+C)≧0.1 ... |
|
|
Invention
|
Ferroelectric ceramics and method for manufacturing the same. 2 film is formed on the film formed... |
|
2013
|
Invention
|
Ferroelectric film containing a perovskite structure oxide and method for manufacturing a ferroel... |
|
2011
|
Invention
|
Poling treatment method, magnetic field poling device, and piezoelectric film. To perform poling ... |
|
|
Invention
|
Method for manufacturing ferroelectric film.
0.3≦X≦0.7.
|
|
2010
|
Invention
|
Pressurizing-type lamp annealing device, method for producing thin film, and method for using pre... |
|
|
Invention
|
Substrate treatment apparatus and method for manufacturing thin film. a that is connected to each... |
