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2023
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Invention
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Reflective photomask blank and reflective photomask. The purpose of the present disclosure is to ... |
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Invention
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Photomask blank, photomask, and method for manufacturing photomask. Provided are: a photomask bla... |
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Invention
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Phase shift mask and method for manufacturing phase shift mask. Provided are: a phase shift mask ... |
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Invention
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Phase shift mask and method for manufacturing phase shift mask. Provided are a phase shift mask h... |
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2022
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Invention
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Reflective photomask and method for manufacturing reflective photomask. The purpose of the presen... |
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Invention
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Reflective photomask blank and reflective photomask. The present invention provides a reflective ... |
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Invention
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Phase shift mask blank, phase shift mask, and method for manufacturing phase shift mask. Provided... |
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Invention
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Phase-shift mask blank, phase-shift mask, method of manufacturing phase-shift mask, and method of... |
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Invention
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Reflective photomask blank and reflective photomask. Provided are a reflective photomask and a re... |
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2020
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Invention
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Reflective photomask blank and reflective photomask. There are provided a reflective photomask bl... |
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2019
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Invention
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Reflective photomask blank and reflective photomask. There is provided a reflective photomask bla... |
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Invention
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Photomask blank, photomask, and photomask manufacturing method. A photomask blank and a photomask... |
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2018
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Invention
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Reflective photomask blank and reflective photomask. A reflective photomask blank (10) of a first... |
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2016
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Invention
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Reflective mask, reflective mask blank, and manufacturing method therefor. There are provided a r... |
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Invention
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Reflective photomask and production method therefor. A reflective photomask includes: a substrate... |
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2014
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Invention
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Mask blank for reflection-type exposure, and mask for reflection-type exposure. 2, and at least o... |
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Invention
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Reflective mask and method for manufacturing same. A reflective mask having a light-shielding fra... |
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2012
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Invention
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Light pattern exposure method, halftone phase shift mask, and halftone phase shift mask blank. 2. |
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Invention
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Light pattern exposure method, photomask, and photomask blank. 2. |
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Invention
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Photomask blank and method for manufacturing photomask. According to one embodiment, a photomask ... |
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2011
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Invention
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Photomask blank and making method, photomask, light pattern exposure method, and design method of... |
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2010
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Invention
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Verification and modification method of rules of do-not-inspect regions, computer program, and ap... |
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Invention
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Photomask blank and photomask making method. A photomask blank comprises a transparent substrate,... |
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Invention
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Photomask blank and photomask. A photomask blank is provided comprising an etch stop film which i... |
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Invention
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Reflective photomask and reflective photomask blank. Provided is a reflective photomask reflectin... |
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Invention
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Photomask blank and photomask. A photomask blank to be used as a material for a photomask is prov... |
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2008
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Invention
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Reflection type photomask blank, manufacturing method thereof, reflection type photomask, and man... |
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2007
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Invention
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Photomask blank. A photomask blank has a light-shielding film composed of a single layer of a mat... |
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2006
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Invention
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Photomask blank, photomask and fabrication method thereof. −1 for light having a wavelength of 45... |
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Invention
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Half-tone stacked film, photomask-blank, photomask and fabrication method thereof. 2. |
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2005
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Invention
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Photomask blank, photomask and fabrication method thereof. A light-shieldable film is formed on o... |
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Invention
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Photomask blank, photomask and method for producing those. A metal film is provided as a light sh... |
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Invention
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Halftone phase shift mask blank, halftone phase shift mask, and pattern transfer method. In a hal... |
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2004
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Invention
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Phase shift mask blank, phase shift mask, and pattern transfer method. In a phase shift mask blan... |
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2003
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Invention
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Photomask defect testing method, photomask manufacturing method and semiconductor integrated circ... |
