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2024
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Invention
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Micromechanical gyroscope and electronic product.
Provided are a micromechanical gyroscope and a... |
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2023
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Invention
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Accelerometer.
The present invention relates to an accelerometer, which comprises a substrate an... |
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Invention
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Dual-axis gyroscope and electronic device.
The present invention provides a dual-axis gyroscope ... |
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Invention
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Mems speaker.
A MEMS speaker is provided, including only a substrate enclosing a cavity, a piezo... |
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Invention
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Mems loudspeaker manufacturing method and mems loudspeaker.
A MEMS loudspeaker manufacturing met... |
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Invention
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Multimass mems gyroscope featuring orthogonal arrangement.
The present invention provides a mult... |
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Invention
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Accelerometer.
An accelerometer includes a substrate. The substrate includes anchor points. An e... |
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Invention
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Micromechanical gyroscope and electronic product. A micromechanical gyroscope and an electronic p... |
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Invention
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Mems loudspeaker. Provided in the present utility model is an MEMS loudspeaker. The MEMS loudspea... |
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Invention
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Mems gyroscope and electronic product technical field.
The present invention provides an MEMS gy... |
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Invention
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Biaxial gyroscope and electronic device. A biaxial gyroscope and an electronic product. The biaxi... |
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Invention
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Method for manufacturing mems acoustic sensor.
Provided is a method for manufacturing a MEMS aco... |
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Invention
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Micro-mechanical gyroscope and electronic product.
The present disclosure provides a micro-mecha... |
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Invention
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Micromechanical gyroscope and electronic product. Embodiments of the present application provide ... |
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Invention
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Earphone.
An embodiment of the present disclosure provides an earphone, which includes a housing... |
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Invention
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Accelerometer. An accelerometer. The accelerometer comprises a substrate (100); the substrate (10... |
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Invention
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Accelerometer. An accelerometer. The accelerometer comprises a substrate (100) and measurement de... |
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Invention
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Micromechanical gyroscope and electronic product. The present application provides a micromechani... |
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Invention
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Manufacturing process for mems loudspeaker and mems loudspeaker. The present invention provides a... |
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Invention
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Manufacturing method for mems acoustic sensor. A manufacturing method for an MEMS acoustic sensor... |
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Invention
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Capacitive micromechanical accelerometer.
The present invention provides a capacitive micromecha... |
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Invention
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Mems piezoelectric speaker.
The present invention provides a micro electromechanical system (MEM... |
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2022
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Invention
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Fully decoupled three-axis mems gyroscope. Provided is a fully decoupled MEMS gyroscope, includin... |
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Invention
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Accelerometer.
The present invention provides an accelerometer, including base, anchor points, s... |
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Invention
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Three-axis gyroscope.
The present invention provides a three-axis gyroscope and electronic produ... |
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Invention
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Orthogonally arranged multi-mass mems gyroscope. An orthogonally arranged multi-mass MEMS gyrosco... |
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Invention
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Earphone. Provided in the present application is an earphone, comprising a housing having a cavit... |
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Invention
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Piezoelectric mems loudspeaker. The present invention provides a piezoelectric MEMS loudspeaker. ... |
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Invention
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Mems speaker. The invention provides a MEMS speaker including a substrate enclosing a cavity, a c... |
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Invention
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Fully-decoupled three-axis mems gyroscope. A fully-decoupled MEMS gyroscope, comprising an anchor... |
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Invention
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Capacitive micromechanical accelerometer. A capacitive micromechanical accelerometer, comprising:... |
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Invention
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Accelerometer. An accelerometer, comprising a base, anchors (1) arranged on the base, seesaw stru... |
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Invention
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Three-axis gyroscope. Provided in the present application is a three-axis gyroscope. The three-ax... |
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Invention
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Accelerometer. An accelerometer, comprising a substrate and a detection structure (1) connected t... |
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Invention
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Fully decoupled three-axis mems gyroscope.
Provided is a fully decoupled MEMS gyroscope, includi... |
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Invention
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Fully decoupled three-axis mems gyroscope. A fully decoupled MEMS gyroscope, comprising a substra... |
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Invention
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Mems microphone.
Provided is a MEMS microphone, including a base which forms a back cavity, and ... |
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Invention
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Three-axis mems gyroscope. A three-axis MEMS gyroscope includes a substrate, a sensing unit conne... |
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Invention
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Micromechanical gyroscope and electronic device. A micromechanical gyroscope and an electronic de... |
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Invention
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Mems speaker.
The present disclosure discloses a MEMS speaker including a substrate with a cavit... |
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Invention
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Mems speaker. The present disclosure discloses a MEMS speaker including a housing with a receivin... |
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Invention
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Mems loudspeaker. Provided in the present utility model is an MEMS loudspeaker, comprising a subs... |
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Invention
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Mems gyroscope for three-axis detection. A MEMS gyroscope for three-axis detection relates to the... |
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Invention
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Mems single-axis gyroscope. A MEMS single-axis gyroscope includes an anchor point structure, a se... |
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Invention
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Micromachined gyroscope and electronic product. A micromachined gyroscope and an electronic produ... |
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Invention
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Mems gyroscope. A MEMS gyroscope includes an anchor point unit, a sensing unit elastically connec... |
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Invention
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Piezoelectric mems speaker. The present utility model provides a piezoelectric MEMS speaker, comp... |
