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2025
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G/S
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Industrial robots; Industrial robots for handling and transporting reticles, substrates, wafers, ... |
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G/S
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Machines for cleaning wafer carriers; Machines for contamination control in semiconductor device ... |
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G/S
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Machines for inspecting wafer carriers, front opening unified pods (FOUPs), and front opening shi... |
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G/S
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Machines for contamination control in semiconductor device manufacturing with integrated recorded... |
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G/S
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Machines for manufacturing semiconductors; Semiconductor manufacturing machines; Machines for con... |
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Invention
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Substrate processing apparatus.
A linear electrical substrate transporting machine including: a ... |
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2024
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Invention
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Substrate processing apparatus.
A transfer apparatus, for transporting substrates, includes a dr... |
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Invention
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Distributed network controls apparatus for substrate handlers. A linear electrical machine includ... |
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Invention
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Scalable substrate handler apparatus and processing apparatus including the same. A linear electr... |
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Invention
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Workpiece transport apparatus with integrated vision end effector detection. A configurable robot... |
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Invention
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Substrate transport apparatus.
A substrate transport apparatus includes a pair of dual arms havi... |
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Invention
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Compartmental link substrate transport apparatus. A transfer apparatus includes a frame forming a... |
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Invention
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Substrate transport apparatus with integral power and data transmission. A substrate transport ap... |
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Invention
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Active thermal management of substrate, heated end effector, and transport of apparatus including... |
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Invention
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Substrate transport apparatus.
A brushless electrical machine includes: a frame; an electric mac... |
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Invention
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Buffer for substrate transport apparatus and substrate transport apparatus including the buffer. ... |
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Invention
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Substrate transport apparatus. A brushless electrical machine includes: a frame; an electric mach... |
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Invention
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Robotic transport system and method therefor. A robot is provided. In some embodiments, the robot... |
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Invention
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Substrate processing apparatus. A substrate transport apparatus includes a frame, a first SCARA a... |
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Invention
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Substrate processing system.
A substrate processing system comprising, a frame forming a substra... |
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Invention
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Substrate transport apparatus. A substrate processing apparatus includes a frame, a substrate tra... |
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Invention
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Substrate mapping apparatus and method therefor.
A semiconductor wafer mapping apparatus compris... |
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Invention
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Substrate transport apparatus. A transfer apparatus including a frame, multiple arms connected to... |
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Invention
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Substrate processing system. A substrate processing system comprising, a frame forming a substrat... |
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Invention
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Substrate processing apparatus. A linear electrical machine comprising a frame with a level refer... |
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2023
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Invention
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Substrate transport apparatus.
A substrate transport apparatus including, a torsional motion dri... |
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Invention
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Substrate processing apparatus.
A substrate processing apparatus including a frame, a first SCAR... |
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Invention
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Method and apparatus for brushless electrical machine control.
A variable reluctance motor load ... |
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Invention
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Robot embedded vision apparatus.
A substrate transport apparatus includes a transport chamber, a... |
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Invention
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Substrate transport apparatus with multiple movable arms utilizing a mechanical switch mechanism.... |
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Invention
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Sealed robot drive.
A transport apparatus including a housing, a drive mounted to the housing, a... |
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Invention
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Method and apparatus for health assessment of a transport apparatus.
Method for health assessmen... |
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Invention
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Compact direct drive spindle.
A sealed actuator including stacked motor modules. Each motor modu... |
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Invention
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On the fly automatic wafer centering method and apparatus.
Substrate processing apparatus includ... |
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Invention
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Automatic wafer centering method and apparatus.
A substrate transport apparatus including a tran... |
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Invention
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Substrate processing apparatus.
A substrate processing apparatus including a frame, a SCARA arm ... |
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Invention
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Automated teach apparatus for robotic systems and method therefor.
An automatic teaching system ... |
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Invention
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Transport apparatus and adapter pendant.
A semiconductor process transport apparatus including a... |
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Invention
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Process apparatus with on-the-fly substrate centering.
A substrate processing apparatus includin... |
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Invention
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Substrate transport. A substrate transport system includes a carrier having a housing forming an ... |
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Invention
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Intelligent condition monitoring and fault diagnostic system for preventative maintenance.
A sys... |
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Invention
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Substrate processing apparatus.
A substrate processing apparatus having a frame and at least one... |
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Invention
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Dual arm robot. A substrate processing apparatus including a frame, a first arm coupled to the fr... |
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Invention
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Load port module. Substrate loading device including a frame adapted to connect the substrate loa... |
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Invention
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Load lock fast pump vent.
A semiconductor processing tool is disclosed, the tool having a frame ... |
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Invention
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Substrate transport apparatus. A substrate transport apparatus including, a torsional motion driv... |
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Invention
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Substrate processing apparatus.
A substrate transport apparatus having a drive section and at le... |
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2022
|
Invention
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Transport apparatus with linear bearing. A vacuum substrate transport apparatus including a frame... |
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Invention
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Substrate processing apparatus.
A substrate processing apparatus includes a frame and a transpor... |
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Invention
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Substrate processing apparatus. A linear electrical machine including a frame with a level refere... |
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Invention
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Load port module. A substrate loading device including a frame adapted to connect to a substrate ... |
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Invention
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Tool auto-teach method and apparatus. A substrate transport apparatus auto-teach system for auto-... |
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Invention
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Sealed switched reluctance motor.
A motor including a sealed rotor with at least one salient rot... |
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2021
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G/S
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Reticle stockers. |
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G/S
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Reticle stockers being machines for manufacturing
semiconductors. |
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G/S
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Machines for contamination control in semiconductor device
manufacturing; machines for cleaning ... |
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G/S
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Devices and machines for cleaning wafer carriers; Devices and machines for cleaning reticle carri... |
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2020
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G/S
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Reticle stockers |
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G/S
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Machines for contamination control in semiconductor device manufacturing; machines for cleaning w... |
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2019
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G/S
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Semiconductor device manufacturing machines; semiconductor wafer processing equipment for use in ... |
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G/S
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Semiconductor device manufacturing machines; semiconductor
wafer processing equipment; semicondu... |
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G/S
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Semiconductor device manufacturing machines; semiconductor wafer processing equipment; semiconduc... |
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2015
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G/S
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Industrial robot used for transport in the process of
manufacturing integrated circuits and elec... |
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2012
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G/S
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Ionization gauge tubes; vacuum valves. Semiconductor manufacturing machines, semiconductor wafer ... |
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2011
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G/S
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Repair and maintenance services for fab manufacturing equipment, namely, for semiconductor manufa... |
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G/S
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Computer software for operating semiconductor wafer handling systems, semiconductor manufacturing... |
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2008
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G/S
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Computer hardware for use in the field of manufacturing automation, except for coolers for graphi... |
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2006
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G/S
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Load port module for use in the field of manufacturing automation (computer and electronics hardw... |
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G/S
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Computer software for use in the field of manufacturing automation, except for computer software ... |
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G/S
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Robotic manipulator, being automatic handling machines or robots, for use in the field of manufac... |
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G/S
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A modular environmental module for use in the field of manufacturing automation, namely, semicond... |
