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2024
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Invention
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Water-cooling jacket device and single-crystal furnace.
The present application discloses a wate... |
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2023
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Invention
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Driving ring, carrying device and double-sided lapping device. The present application relates to... |
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Invention
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Silicon wafer defect measurement method and apparatus. A silicon wafer defect measurement method ... |
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Invention
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Method and apparatus for eliminating wafer surface defects, medium and wafer manufacturing method... |
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Invention
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Silicon wafer tray and semiconductor process apparatus. Provided in the present disclosure are a ... |
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Invention
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Flow guide tube apparatus for single crystal furnace, single crystal furnace and single crystal s... |
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Invention
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Single crystal furnace and preparation method for monocrystalline silicon. A single crystal furna... |
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Invention
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Crystal ingot growth method and crystal ingot growth apparatus. The present disclosure relates to... |
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Invention
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Device and method for cleaning wafer. Disclosed in the embodiments of the present application are... |
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Invention
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Water cooling device and single crystal furnace. The present application relates to a water cooli... |
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Invention
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Flow guide tube and crystal pulling furnace used in process of pulling crystal rod by czochralski... |
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Invention
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Apparatus and method for calibrating position of silicon wafer relative to base, and epitaxial de... |
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Invention
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Single crystal furnace heating structure and single crystal furnace. The present application rela... |
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Invention
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Monitoring device and method for epitaxial reaction chamber. The present disclosure relates to th... |
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Invention
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Method and apparatus for identifying wafer edge defect type, medium and wafer processing method. ... |
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Invention
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Water cooling jacket and single-crystal furnace. A water cooling jacket, applied to a single-crys... |
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Invention
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Static pressure pad, lapping device, and silicon wafer. Disclosed in the embodiments of the prese... |
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Invention
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Method and apparatus for dynamically adjusting standby position of overhead crane, medium, and sy... |
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Invention
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Machine vision identification method and device for silicon wafer surface defect, and medium. Emb... |
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Invention
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Method and apparatus for controlling conveying of semiconductor material, and device, medium and ... |
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Invention
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Single crystal furnace and crystal bar growth method. The present application relates to a single... |
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Invention
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Epitaxial wafer fabrication device, and epitaxial wafer fabrication method and apparatus. An epit... |
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2022
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Invention
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Crystal-bar manufacturing management method and crystal-bar manufacturing management system. Prov... |
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Invention
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Method for growing single-crystal silicon ingots and single-crystal silicon ingots. A method for ... |
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Invention
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Drawing method for monocrystalline silicon rod, and monocrystalline silicon rod. A drawing method... |
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Invention
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Method and system for positioning center of v-type notch of wafer, and computer storage medium. A... |
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Invention
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Crucible and single crystal furnace. A crucible and a single crystal furnace. The crucible is use... |
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Invention
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Water-cooled jacket and single crystal furnace. A water-cooled jacket and a single crystal furnac... |
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Invention
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Heater assembly and single crystal puller. A heater assembly is for a single crystal puller. The ... |
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Invention
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Heater and single crystal growing apparatus.
A heater that may be included in a single crystal g... |
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Invention
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Silicon material processing apparatus, silicon ingot production equipment, and silicon material p... |
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Invention
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Crystal puller and method for pulling single-crystal silicon ingot, and single-crystal silicon in... |
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Invention
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Heater assembly and single crystal furnace. A heater assembly and a single crystal furnace. The s... |
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Invention
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Thermal field control device for crystal pulling furnace and crystal pulling furnace. A thermal f... |
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Invention
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Heater and single crystal furnace. The present application provides a heater and a single crystal... |
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Invention
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Water-cooled jacket device and single crystal furnace. A water-cooled jacket device, comprising a... |
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Invention
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Water cooling jacket apparatus and single-crystal furnace. A water cooling jacket apparatus and a... |
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Invention
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Crystal pulling furnace and method for pulling single crystal silicon rod, and single crystal sil... |
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Invention
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Silicon material processing apparatus, silicon rod production device, and silicon material proces... |
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Invention
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Method for producing nitrogen-doped single crystal silicon ingot and nitrogen-doped single crysta... |
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Invention
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Equipment for manufacturing nitrogen-doped monocrystalline silicon and method for manufacturing t... |
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Invention
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Apparatus and method for regulating hot zone for single crystal growth.
An apparatus for regulat... |
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Invention
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Crystal puller, method for manufacturing monocrystalline silicon ingots and monocrystalline silic... |
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Invention
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Thermal field adjusting device and method for single crystal growth. A thermal field adjusting de... |
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Invention
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Crystal puller for pulling monocrystalline silicon ingots.
Embodiments of the present disclosure... |
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Invention
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Method, apparatus, equipment for accurately adjusting adc camera and computer storage medium.
A ... |
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Invention
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Quartz crucible and crystal puller. A quartz crucible and a crystal puller for growing a crystal ... |
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Invention
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Processing method and system for reducing warp of nitrogen-doped wafer.
A processing method for ... |
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Invention
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Acquisition equipment and method for acquiring nitrogen-doped silicon melt and manufacturing syst... |
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2021
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Invention
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Heater in hot-zone of single crystal pulling apparatus and single crystal pulling apparatus.
The... |
