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2023
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Invention
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Vacuum pump device and vacuum pump anomaly determination method. This vacuum pump anomaly determi... |
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Invention
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Vacuum pump device. This vacuum pump device (1) comprises: a collection unit (31) that collects o... |
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Invention
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Dry vacuum pump. This dry vacuum pump (1) is provided with a seal mechanism (18) that seals a sha... |
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2022
|
Invention
|
Pump support mechanism and pump device. A pump support mechanism (2) of a pump device (1) support... |
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2021
|
Invention
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Dry vacuum pump. To ensure gas sealing between an interior end face (63) of a pump chamber (6) an... |
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Invention
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Dry vacuum pump. A dry vacuum pump (1) comprises a purge gas supply passage (9). Between a fixed-... |
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Invention
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Silencer and vacuum evacuation device. A silencer case (10A) of a silencer (10) comprises: a devi... |
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Invention
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Muffler and evacuation device. A muffler (10) with a check valve is attached to an exhaust port (... |
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2020
|
Invention
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Air intake port joint for dry vacuum pump. An air intake port joint (10) of a dry vacuum pump (1)... |
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Invention
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Vacuum exhaust device provided with silencer. A vacuum exhaust device (1) is provided with: a joi... |
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Invention
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Extending life cycles of vacuum pumps used in manufacturing processes. An abatement system with l... |
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2019
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Invention
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Vacuum pump. In a vacuum pump (1), side plates (6, 7) defining both ends of a pump chamber (2) co... |
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Invention
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Vacuum pump. In a vacuum pump (1), a rotor end face protruding part (33a) formed on a rotor end f... |
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2017
|
Invention
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Method of reducing powder load of dry vacuum pump and powder load reducer. The purpose of the pre... |
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2011
|
Invention
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Concentric multi-stage vane compressor. Disclosed is a vane compressor in which cylinders concent... |
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Invention
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Vane compressor. Disclosed is a vane compressor (1A) in which cylinders (35, 36) concentrically f... |
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2009
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Invention
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Positive displacement dry vacuum pump. A decompression chamber (3) of a positive displacement dry... |
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2007
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Invention
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Roots pump and method of producing roots pump. A Roots pump has a simple structure enabling highl... |
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2006
|
Invention
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Multistage roots-type vacuum pump. The invention reduces power consumption and makes a rotor with... |
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Invention
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Screw rotor and vacuum pump.
The invention provides a low-cost screw rotor that is capable of co... |
