|
2015
|
Invention
|
Method of processing discharge gas discharged from production process. The present invention prov... |
|
|
Invention
|
Method for refining hydrogen. The present invention is to provide a method for refining hydrogen ... |
|
|
Invention
|
Oil removing device and ammonia purification apparatus using the same. The present invention prov... |
|
2014
|
Invention
|
Palladium alloy membrane unit, storage structure thereof, and method of purifying hydrogen by usi... |
|
|
Invention
|
Method of processing discharge gas discharged from production process of gallium nitride compound... |
|
2013
|
Invention
|
Method of recovering ammonia and method of recycling ammonia by using the same. There are provide... |
|
2012
|
Invention
|
Cleaning apparatus and cleaning method for components of metal organic chemical vapor deposition ... |
|
2011
|
Invention
|
Vapor phase epitaxy apparatus of group iii nitride semiconductor. [Problem] Provided is a vapor p... |
|
2010
|
Invention
|
Vapor phase epitaxy apparatus of group iii nitride semiconductor.
Provided is a vapor phase epit... |
|
2009
|
Invention
|
Chemical vapor deposition apparatus. A chemical vapor deposition apparatus which comprises a susc... |
|
2008
|
Invention
|
Heat generating sheet and heat generating sheet bag.
The present invention relates to a heat gen... |
|
2007
|
Invention
|
Heating body.
A heating body is provided. The heating body utilizes a heating composition that g... |
|
|
Invention
|
Expandable heating sheet, method of manufacturing the same, and heating sheet bag for the same.
... |
|
|
Invention
|
Electrochemical capacitor module. [PROBLEMS] To provide an electrochemical capacitor module compr... |
|
|
Invention
|
Process and apparatus for producing powders of metal compound containing oxygen, and the powders ... |
|
|
Invention
|
Production apparatus for producing gallium nitride film semiconductor and cleaning apparatus for ... |
|
2006
|
Invention
|
Chemical vapor deposition apparatus.
A chemical vapor deposition apparatus which comprises a sus... |
|
|
Invention
|
Process for forming zinc oxide film.
A process for forming zinc oxide film over a surface of a s... |
|
|
Invention
|
Vaporizer and apparatus for vaporizing and supplying.
The present invention provides a vaporizer... |
|
2005
|
Invention
|
Electrode sheet and electric double layer capacitor using the same.
An electrode sheet which is ... |
|
|
Invention
|
Processing method of exhaust gas and processing apparatus of exhaust gas.
A processing method of... |
|
|
Invention
|
Processing method of gas and processing apparatus of gas.
A processing method of gas containing ... |
|
|
Invention
|
Ingredient and process for producing copper (i) chloride, adsorbent and adsorbing method for redu... |
|
|
Invention
|
Production apparatus for producing gallium nitride semiconductor film and cleaning apparatus for ... |
|
2004
|
Invention
|
Material for forming insulation film and film-forming method with the use of the material. A mate... |
|
|
Invention
|
Vaporizer. A vaporizer which comprises a vaporization chamber for a CVD material, a CVD material ... |
|
|
Invention
|
Detecting agent and detection method for a gas containing metal compound. A detecting agent for g... |
|
|
Invention
|
Method of recovering a cleaning agent. The invention provides a method of recovering a copper com... |
|
2003
|
Invention
|
Cleaning process of harmful gas. A cleaning process of harmful gas containing at least one kind s... |
|
|
Invention
|
Process for purifying inert gas. A process for purifying inert gas removing impurities such as ox... |
|
|
Invention
|
Process for purifying ammonia. A process for purifying ammonia removing impurities contained in a... |
|
|
Invention
|
Method for clarifying exhaust gas. A cleaning process of exhaust gas which includes the steps of ... |
|
|
Invention
|
Method for clarifying exhaust gas. A method for clarifying an exhaust gas, which comprises contac... |
|
|
Invention
|
Vaporizer and apparatus for vaporizing and supplying. The present invention provides a vaporizer ... |
|
2002
|
Invention
|
Agent and method for detecting germane. An agent for detecting germane which comprises an inorgan... |
|
|
Invention
|
Decomposing agent and method of decomposition treatment for sulfur fluorides. A decomposing agent... |
|
|
Invention
|
Decompositionally treating agent and decompositionally treating method for fluorocarbons. There a... |
|
|
Invention
|
Method for vaporizing and supplying. A vaporizing and supplying method for controlling a liquid C... |
|
|
Invention
|
Chemical vapor deposition apparatus and chemical vapor deposition method. There is disclosed a ch... |
|
|
Invention
|
Chemical vapor deposition apparatus and chemical vapor deposition method. The present invention p... |
|
2001
|
Invention
|
Fluorocarbon decomposer and decomposition methods. A decomposer which comprises as active ingredi... |
|
|
Invention
|
Vaporizer and apparatus for vaporizing and supplying. There are disclosed a vaporizer wherein at ... |
|
|
Invention
|
Chemical vapor deposition apparatus and chemical vapor deposition method. There are disclosed an ... |
|
|
Invention
|
Cleaning process and cleaning agent for harmful gas. There are disclosed a process for cleaning a... |
|
|
Invention
|
Harmful gas purifying column and method. A column for purifying gases by a dry method contains a ... |
|
2000
|
Invention
|
Method of cleaning of harmful gas and cleaning apparatus. Disclosed is a method for cleaning of t... |
|
|
Invention
|
Cleaning agent and cleaning process of harmful gas. A cleaning agent and a cleaning process for c... |
|
1988
|
G/S
|
INDUSTRIAL GAS ABSORBENTS IN BULK FORM AND IN PREPACKED CARTRIDGES FOR USE IN THE SEMICONDUCTOR I... |
