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2025
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G/S
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Plasma generators for use with semiconductor manufacturing
machines; exhaust gas treatment appar... |
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G/S
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Semiconductor manufacturing machines, and part and fittings
therefor; machines for manufacturing... |
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G/S
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Automatic pressure regulators being parts of machines;
pressure regulators being parts of machin... |
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Invention
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Fluid control valve and fluid control device. The present invention comprises: a flow passage blo... |
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Invention
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Flow rate ratio control device.
The present invention provides a structure in which a control bo... |
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Invention
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Process evaluation apparatus, process evaluation method, and process evaluation program.
The pre... |
|
|
Invention
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Fluid control valve and fluid control device. The present invention improves magnetic force by in... |
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Invention
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Fluid control valve and fluid control device.
The present invention reduces seat leakage while i... |
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G/S
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Semiconductor wafer inspection apparatus, namely, inspection machines for the physical inspection... |
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|
G/S
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Semiconductor wafer inspection apparatus; analyzing
apparatus for defect of semiconductor wafers... |
|
|
Invention
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Fluid control device, control method for a fluid control valve, fluid control method, and fluid c... |
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Invention
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Fluid control device, control unit for fluid control device, fluid control method, and fluid cont... |
|
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Invention
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Fluid device.
According to the present invention, it is possible to fix a fluid resistance eleme... |
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Invention
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Vaporizer and vaporization system. This vaporizer vaporizes a liquid material by heating a heatin... |
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Invention
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Gas-liquid mixer and liquid material vaporizer.
To reduce pressure loss in a gas-liquid mixer, p... |
|
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Invention
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Plasma generator and cooling jacket.
A plasma generator includes: a microwave-generating source ... |
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2024
|
Invention
|
End point detection device, etching control system, end point detection method, and end point det... |
|
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Invention
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Liquid material vaporizing device, method for controlling liquid material vaporizing device, and ... |
|
|
Invention
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Pressure flow rate sensor, flow rate calculation device, flow rate calculation method, flow rate ... |
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Invention
|
Cleaning device and substrate processing system. This cleaning device 100 for separating an inflo... |
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|
Invention
|
System and method for enhanced rf power delivery using harmonic waveform synthesis.
The present ... |
|
|
Invention
|
Electrostatic chuck device and cooling plate.
The present invention is an electrostatic chuck de... |
|
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Invention
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Vaporization device, material state determination device, material state determination method for... |
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|
Invention
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Liquid material vaporization apparatus and operation setting method thereof.
A liquid material v... |
|
|
Invention
|
Flow rate measurement mechanism and fluid control apparatus.
A fluid resistance element is dispo... |
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Invention
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Control parameter calculation apparatus, control parameter calculation method, and control parame... |
|
|
Invention
|
Fluid control valve, fluid control device and drive circuit.
A drive circuit of a piezo actuator... |
|
|
Invention
|
Fluid control valve and fluid control device.
In order to configure a fluid control valve to hav... |
|
|
Invention
|
Vaporizer and vaporizing system.
A vaporizer for vaporizing a liquid substance includes: a tank ... |
|
|
Invention
|
Pattern measurement device, pattern measurement program, and pattern measurement method.
The pre... |
|
|
Invention
|
Vaporizer and liquid material vaporizing device.
A vaporizer that heats and vaporizes liquid mat... |
|
|
Invention
|
Capacitive pressure sensor.
The present invention is intended to simplify the configuration of t... |
|
|
Invention
|
Fluid control valve and fluid control device. The present invention improves the durability of a ... |
|
|
Invention
|
Flow rate calculation device and flow rate calculation method.
A flow rate calculation device in... |
|
|
Invention
|
Fluid control valve, fluid control device, and material supply system.
A fluid control valve inc... |
|
|
Invention
|
Fluid control valve, fluid control device, and protection method for fluid control valve. Accordi... |
|
|
Invention
|
Computation device, pressure measurement device, computation method, and computation program. The... |
|
|
Invention
|
Fluid control valve and fluid control device. A fluid control valve improves position stability o... |
|
|
Invention
|
Piezo element diagnosis device, piezo element diagnosis method, piezo element diagnosis program, ... |
|
|
Invention
|
Fluid control device, fluid control system, storage medium storing a program for fluid control de... |
|
|
Invention
|
Concentration control device, raw material vaporization system, concentration control method, and... |
|
|
Invention
|
Wafer temperature control device, wafer temperature control method and wafer temperature control ... |
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|
Invention
|
Flow ratio controller system operating in alternative control modes. A flow ratio controller syst... |
|
2023
|
G/S
|
Semiconductor manufacturing machines, and structural part and fittings therefor; machines for man... |
|
|
Invention
|
Vaporizer and liquid material vaporizing device.
A vaporizer includes a vaporization chamber in ... |
|
|
G/S
|
Hydrogen gas generators for use with measuring or testing
machines and instruments; hydrogen gen... |
|
|
Invention
|
Liquid material vaporization device and liquid material vaporization system. A liquid material va... |
|
|
G/S
|
Machines for manufacturing semiconductor, solar cell, light
emitting diode, display, liquid crys... |
|
|
Invention
|
Wafer temperature control device, wafer temperature control method, and wafer temperature control... |
|
|
Invention
|
Fluid control valve, fluid control device, and method for manufacturing orifice.
The present inv... |
|
|
Invention
|
Fluid control valve, fluid control device, and fluid control valve manufacturing method.
The pre... |
|
|
Invention
|
Concentration measurement device, concentration measurement method, starting material vaporizatio... |
|
2022
|
Invention
|
Flow rate control valve, manufacturing method of flow rate control valve, and flow rate control a... |
|
|
Invention
|
Wafer temperature control device, control method for wafer temperature control device, and progra... |
|
|
Invention
|
Valve control device, valve control method, valve control program, and fluid control device.
To ... |
|
|
Invention
|
Fluid control device |
|
|
Invention
|
Fluid control device, fluid control system, fluid control device program, and fluid control metho... |
|
2021
|
G/S
|
Liquid flow meters |
|
|
G/S
|
Electronic digital liquid flow meters for manufacturing semiconductor devices, solar cells, light... |
|
|
G/S
|
Machines and parts for manufacturing semiconductor, solar
cell, light emitting diode, display, l... |
|
|
G/S
|
Machines and structural parts therefor for manufacturing semiconductors, solar cells, light emitt... |
|
2019
|
G/S
|
Machines and parts for manufacturing semiconductor, solar cell, light emitting diode, display, li... |
|
2018
|
G/S
|
Machines and parts of machines for manufacturing semiconductor, solar cell, light emitting diode,... |
|
|
G/S
|
Machines and structural parts therefor for manufacturing semiconductors, solar cells, light-emitt... |
|
|
G/S
|
Test and measurement machines and instruments, namely, technical measuring, testing and checking ... |
|
2017
|
G/S
|
[ Repair or maintenance of machines and machine parts for manufacturing semiconductors, solar cel... |
|
2013
|
G/S
|
[ Machines and machine parts in the nature of filters, purifiers, vaporizers, liquid supply appar... |
|
2011
|
G/S
|
Fluid flow controllers (parts of machines for manufacturing semiconductor, solar cell, light emit... |
|
2007
|
G/S
|
Mass flow controllers for controlling fluid, mass flow
controllers for controlling gas flow, mas... |
|
1986
|
G/S
|
GAS FLOWMETERS |
|
|
G/S
|
GAS FLOW CONTROLLERS |
|
|
G/S
|
ELECTRONICALLY CONTROLLED FLUID FLOW APPARATUS, NAMELY, GAS FLOW CONTROLLERS, DIGITAL GAS FLOW ME... |
