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2025
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G/S
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printed circuit board processing machines in nature of machines for manufacturing printed circuit... |
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G/S
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machines for the electronics industry in nature of machines for chemical mechanical polishers; Ni... |
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2024
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Invention
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Electrochemical mechanical polishing and planarization apparatus. Disclosed in the present invent... |
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Invention
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System for chemical mechanical polishing and planarization. Disclosed is a system for chemical me... |
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Invention
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Polishing head cleaning method and polishing head cleaning device. A polishing head cleaning meth... |
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Invention
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Detection device and detection method for cmp cleaning and drying module. Disclosed in the presen... |
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Invention
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Polishing device for improving edge grinding uniformity. Disclosed in the present invention is a ... |
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Invention
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Adjustable wafer loading and unloading stage. Disclosed in the present invention is an adjustable... |
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Invention
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Wafer polishing system. A wafer polishing system, comprising: a front-end module (1); a wafer pol... |
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Invention
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Wafer polishing system and wafer processing method. Disclosed in the present invention is a wafer... |
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Invention
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Lifting method for wafer drying. Disclosed in the present invention is a lifting method for wafer... |
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2023
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Invention
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Conductive adsorption film and polishing head. Disclosed in the present invention is a conductive... |
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Invention
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Conductive-type polishing head fixing device and conductive-type polishing head system. Disclosed... |
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Invention
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Polishing pad recycling processing device. Disclosed in the present invention is a polishing pad ... |
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Invention
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Method for dressing groove in polishing pad of cmp device. Disclosed in the present invention is ... |
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Invention
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Electrochemical mechanical polishing and planarization system for cmp equipment. Disclosed in the... |
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Invention
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Wafer polishing system. Disclosed in the present invention is a wafer polishing system, at least ... |
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Invention
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Eddy-current end-point detection apparatus and method. Disclosed in the present invention is an e... |
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Invention
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Online monitoring apparatus for chemical-mechanical polishing. An online monitoring apparatus for... |
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Invention
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Chemical mechanical planarization apparatus and wafer transfer method. Disclosed in the present i... |
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Invention
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Continuous wafer polishing system. A continuous wafer polishing system, comprising a support (1);... |
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G/S
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Electrostatic industrial equipment in nature of electrostatic coating machines; electrostatic gen... |
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G/S
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semi-conductor substrates manufacturing machines; semiconductor substrates manufacturing machines... |
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G/S
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Electrostatic industrial equipment in nature of electrostatic coating machines; machines for the ... |
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Invention
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Electrochemical mechanical polishing and planarization equipment for processing conductive wafer ... |
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Invention
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Wafer polishing system, loading method and using method thereof.
To the Abstract:
To the Abstr... |
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Invention
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Method and system for online inspection of surface condition of polishing pad.
The present appli... |
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Invention
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Wafer rotating mechanism, wafer rotating clamping mechanism and wafer cleaning and drying systems... |
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Invention
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Wafer cleaning and drying module state detection method and apparatus and planarization device. D... |
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Invention
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Wafer polishing system, and loading method and use method therefor. Disclosed in the present inve... |
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Invention
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Online detection method and system for surface condition of polishing pad. An online detection me... |
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2022
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Invention
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Polishing pad conditioning apparatus.
Disclosed in the present invention is a polishing pad cond... |
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Invention
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Wafer polishing system and wafer transfer method.
The invention discloses a wafer polishing syst... |
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Invention
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Standing wafer holder.
Disclosed is a standing wafer holder comprising at least one base unit wh... |
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Invention
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Polishing pad finishing apparatus. Disclosed in the present invention is a polishing pad finishin... |
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Invention
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Wafer polishing system and wafer transfer method. Disclosed in the present invention is a wafer p... |
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Invention
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Standing wafer holder. Disclosed in the present invention is a standing wafer holder, at least co... |
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Invention
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Wafer driving mechanism. Disclosed is a wafer driving mechanism. A notch portion is formed on the... |
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Invention
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Multi-wafer scrubbing device.
Disclosed in the present invention is a multi-wafer scrubbing devi... |
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Invention
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Array-type megasonic cleaning device for cleaning wafers.
An array-type megasonic cleaning devic... |
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Invention
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Wafer alignment device and method and wafer speed calculation method.
Disclosed is a wafer align... |
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Invention
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Position finding apparatus for wafer, position finding method, and wafer speed counting method. D... |
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Invention
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Multi-wafer scrubbing device. Disclosed in the present invention is a multi-wafer scrubbing devic... |
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Invention
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Array-type megasonic cleaning device for cleaning wafers. An array-type megasonic cleaning device... |
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Invention
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Device and method for calibrating working positions of polishing head and transfer station.
The ... |
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Invention
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Device and method for calibrating operation positions of polishing head and loading and unloading... |
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Invention
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Wafer polishing system.
Disclosed in the present invention is a wafer polishing system, comprisi... |
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Invention
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Wafer polishing system. A wafer polishing system, at least comprising one polishing unit (1), whe... |
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Invention
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Method and mechanism for cleaning and drying wafer. Disclosed in the present invention is a metho... |
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Invention
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Wafer polishing device. The present invention discloses a wafer polishing device, which comprises... |
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2021
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Invention
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Wafer position detection device.
The invention discloses a wafer position detection device compr... |
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Invention
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Multi-station clamping device. Disclosed in the present invention is a multi-station clamping dev... |
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2020
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Invention
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Wafer transfer device, wafer transfer method and cleaning module of chemical mechanical planariza... |
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Invention
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Wafer conveying device, chemical mechanical planarization apparatus and wafer conveying method.
... |
