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2022
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Invention
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Mems resonator. A MEMS (microelectromechanical system) resonator assembly (100), comprising a sup... |
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Invention
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Mems resonator. oo values of the resonator assembly (100) are in the range from 12 Ω mm2MHz to 83... |
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Invention
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Temperature-stable mems resonator. A MEMS (microelectromechanical system) resonator (150) compris... |
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2021
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Invention
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Coupled mems resonator. A microelectromechanical resonator assembly includes a first rectangular ... |
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Invention
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Mems resonator with high quality factor and its use. A MEMS (microelectromechanical system) reson... |
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Invention
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Mems resonator and manufacturing method. A MEMS (microelectromechanical system) resonator, compri... |
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Invention
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Microelectromechanical system resonator assembly. A silicon microelectromechanical system, MEMS, ... |
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2020
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Invention
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Microelectromechanical resonator. A microelectromechanical (MEMS) resonator, comprising a spring-... |
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Invention
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Mems resonator. A microelectromechanical (MEMS) resonator includes a resonator structure having a... |
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Invention
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Mems resonator. A microelectromechanical (MEMS) resonator, comprising a resonator structure havin... |
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2019
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G/S
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Electrical components; resonators; semiconductor elements. |
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G/S
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Electrical components, namely, radio frequency filters; resonators; semiconductor elements, namel... |
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Invention
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Coupled mems resonator. A microelectromechanical resonator includes a support structure, a resona... |
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2018
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Invention
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Oven-controlled frequency reference oscillator and method of fabricating thereof. A temperature-c... |
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Invention
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Frequency reference oscillator device and method of stabilizing a frequency reference signal. A f... |
