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2023
|
Invention
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Chemical vapor deposition reactor in polysilicon production process. A chemical vapor deposition ... |
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2018
|
Invention
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Hydrochlorination heater and related methods therefor.
The systems and method of the invention i... |
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2017
|
Invention
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Method of making large surface area filaments for the production of polysilicon in a cvd reactor.... |
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2016
|
Invention
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Chemical vapor deposition method and apparatus.
A method of forming a filament assembly of a che... |
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2014
|
Invention
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Cold filament ignition system and method of silicon rods. A method and system of igniting one or ... |
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|
Invention
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Reverse circulation fluidized bed reactor for granular polysilicon production. A reverse fluidize... |
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|
Invention
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Reactor filament assembly with enhanced misalignment tolerance. A tubular filament assembly for a... |
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2013
|
Invention
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Radiation shielding for a cvd reactor. A reaction chamber includes an enclosure having an interio... |
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2012
|
Invention
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Purification of trichlorosilane. Systems and methods for removing boron-containing contaminants f... |
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2011
|
Invention
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Apparatus and methods for conversion of silicon tetrachloride to trichlorosilane. The invention r... |
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|
Invention
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Heater and related methods therefor. The invention relates generally to heaters and methods of us... |
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2009
|
Invention
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Systems and methods of producing trichlorosilane. The present invention is directed to systems an... |
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2006
|
Invention
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Increased polysilicon deposition in a cvd reactor. A method and process for the production of bul... |
