2024
|
Invention
|
Dual scan beam separation with independent angle of incidence defect scanner and optical inspecto... |
2023
|
Invention
|
Time domain multiplexed defect scanner. An optical scanning system includes a first radiating sou... |
2022
|
Invention
|
Scanning micro profiler. An optical scanning system includes a radiating source capable of output... |
|
Invention
|
Surface contour measurement. An optical scanning system includes a radiating source capable of ou... |
|
Invention
|
Angle independent optical surface inspector. An angle independent optical surface inspector capab... |
|
Invention
|
Slope, p-component and s-component measurement. An optical scanning system including a radiating ... |
|
Invention
|
Region prober optical inspector. An optical scanning system including a radiating source that out... |
2020
|
Invention
|
Region prober optical inspector. An optical scanning system, including: a radiating source that o... |
|
Invention
|
Scattered radiation defect depth detection. An optical scanning system including a radiating sour... |
2019
|
Invention
|
Scattered radiation optical scanner. An optical scanning system includes a radiating source capab... |
|
Invention
|
Phase retardance optical scanner. An optical scanning system includes a radiating source capable ... |