|
2025
|
Invention
|
Line narrowing module, narrowed-line laser apparatus, and method for manufacturing electronic dev... |
|
|
Invention
|
Maintenance method.
A maintenance method of a laser apparatus including a laser oscillator confi... |
|
|
Invention
|
Laser device and deterioration determination method of optical element.
A laser device includes ... |
|
|
Invention
|
Laser device, laser control method, and electronic device manufacturing method.
A laser device i... |
|
|
Invention
|
Gas laser apparatus and electronic device manufacturing method.
A gas laser apparatus according ... |
|
|
Invention
|
Laser chamber apparatus, gas laser apparatus, and electronic device manufacturing method.
A lase... |
|
|
Invention
|
Laser device, exposure apparatus, and electronic device manufacturing method.
A laser device inc... |
|
|
Invention
|
Laser apparatus, method of controlling laser apparatus, and method of manufacturing electronic de... |
|
|
Invention
|
Discharge excitation laser apparatus, discharge excitation laser apparatus control method, and el... |
|
|
Invention
|
Gas laser device and electronic device manufacturing method.
A gas laser device includes a chamb... |
|
|
Invention
|
Gas laser device and electronic device manufacturing method.
A gas laser device configured to am... |
|
|
Invention
|
Laser system and electronic device manufacturing method.
A laser system includes a laser oscilla... |
|
|
Invention
|
Gas laser apparatus, laser gas temperature control method, and electronic device manufacturing me... |
|
|
Invention
|
Performance estimation method, and training method.
A performance estimation method for estimati... |
|
|
Invention
|
Deterioration estimation method, laser device, and electronic device manufacturing method.
A det... |
|
|
Invention
|
Semiconductor device manufacturing method and semiconductor device.
A semiconductor device manuf... |
|
|
Invention
|
Display method and display apparatus.
A display method is for displaying estimation result data ... |
|
|
Invention
|
Laser chamber device, gas laser apparatus, and electronic device manufacturing method.
A laser c... |
|
|
Invention
|
Chamber apparatus for laser, gas laser apparatus, and electronic device manufacturing method.
A ... |
|
|
Invention
|
Laser annealing system and laser annealing method.
A laser annealing system for annealing a thin... |
|
|
Invention
|
Time imparting method and laser apparatus.
A time imparting method for imparting a time to two o... |
|
|
Invention
|
Spectrum measurement instrument, laser device, and method of identifying peak position of referen... |
|
|
Invention
|
Target generation device, extreme ultraviolet light generation system, and electronic device manu... |
|
|
Invention
|
Extreme ultraviolet light generation system, control method of extreme ultraviolet light generati... |
|
|
Invention
|
Extreme ultraviolet light generation apparatus and electronic device manufacturing method.
An ex... |
|
|
Invention
|
Laser chamber, gas laser device, and electronic device manufacturing method.
A laser chamber of ... |
|
|
Invention
|
Discharge chamber for gas laser apparatus and electronic device manufacturing method.
A discharg... |
|
|
Invention
|
Laser amplifier, laser apparatus, and electronic device manufacturing method.
A laser amplifier ... |
|
|
Invention
|
Pulse width extension system, laser device, and electronic device manufacturing method.
A pulse ... |
|
|
Invention
|
Laser processing system and electronic device manufacturing method.
A laser processing system ac... |
|
|
Invention
|
Laser processing apparatus, laser processing apparatus control method, and electronic device manu... |
|
|
Invention
|
Laser system, laser processing method, and interposer manufacturing method.
A laser system inclu... |
|
|
Invention
|
Target supply device, extreme ultraviolet light generation apparatus, and electronic device manuf... |
|
|
Invention
|
Edge position determination method, edge position determination apparatus, and edge analysis meth... |
|
|
Invention
|
Laser chamber, discharge electrode, and electronic device manufacturing method.
A laser chamber ... |
|
|
Invention
|
Chamber device of gas laser apparatus, gas laser apparatus, and electronic device manufacturing m... |
|
|
Invention
|
Chamber device, gas laser device, and electronic device manufacturing method.
A chamber device i... |
|
|
Invention
|
Line narrowing module, laser device, and electronic device manufacturing method.
A line narrowin... |
|
|
Invention
|
Laser management server and laser management method.
A laser management server for a laser devic... |
|
|
Invention
|
Extreme ultraviolet light generation system and electronic device manufacturing method.
An extre... |
|
|
Invention
|
Solid target substance replenishment device, extreme ultraviolet light generation apparatus, and ... |
|
|
Invention
|
Controller, laser device, and electronic device manufacturing method.
A controller includes a pr... |
|
|
Invention
|
Laser processing method, laser processing apparatus, and electronic device manufacturing method. ... |
|
|
Invention
|
Gas laser device and electronic device manufacturing method.
A gas laser device is for dischargi... |
|
2022
|
G/S
|
Laser apparatus, namely, a laser machine for semiconductor manufacturing; extreme ultraviolet lig... |
|
|
G/S
|
Laser apparatus for semiconductor manufacturing; extreme
ultraviolet light generation apparatus ... |
|
2018
|
G/S
|
Computer software platforms for managing semi-conductor manufacturing machines; computer software... |
|
|
G/S
|
Computer software platforms used for semi-conductor
manufacturing machines; computer software us... |
|
2016
|
G/S
|
Laser apparatus, namely, a laser machine for semiconductor manufacturing; [ extreme ultraviolet l... |
