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2025
|
Invention
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Method and device for producing micro- and/or nanostructures.
A method for producing micro- and/... |
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2024
|
Invention
|
Method for permanent connection of two metal surfaces.
A process for the production of a permane... |
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Invention
|
Method and device for transferring components.
A method for the transfer of components from a se... |
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Invention
|
Method for prefixing of substrates.
A method and a device for prefixing substrates, whereby at l... |
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Invention
|
Device and method for bonding of substrates.
A method and a corresponding device for bonding a f... |
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Invention
|
Method and device for bonding of chips.
A method and device for bonding chips onto a substrate o... |
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Invention
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Arrangement for providing a die element, die element for an arrangement of this type, bearing dev... |
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Invention
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Device and method for preventing edge defects by means of an edge coating. The invention relates ... |
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Invention
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Method, device and soft stamp for nanoimprinting. The invention relates to a method and a device ... |
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2023
|
Invention
|
Method for transferring a functional unit, donor substrate and an apparatus for carrying out such... |
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|
Invention
|
Method for assessing a quality of a bond between a first substrate and a second substrate in a su... |
|
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Invention
|
Method for transferring a functional unit, donor substrate and apparatus for carrying out such a ... |
|
|
Invention
|
Method for bonding a first substrate to a second substrate, device for bonding and assembly of a ... |
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Invention
|
Method for bonding a first substrate to a second substrate, device for bonding, substrate holder ... |
|
|
Invention
|
Method and device for adjusting electro-optical elements on a substrate. The invention relates to... |
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|
Invention
|
Method for using a hard stamp to produce a soft stamp. The invention relates to a method and a de... |
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Invention
|
Roll device and system and method for introducing a surface structure in an object. The invention... |
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|
Invention
|
Method for separating a total substrate into a first substrate and a second substrate, and device... |
|
|
Invention
|
Device and method for bonding substrates.
A method for bonding a contact surface of a first subs... |
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Invention
|
Method for surface treatment of a substrate and method for bonding such a substrate to a further ... |
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Invention
|
Mould insert for an injection-moulding system, carrier substrate for such a mould insert, injecti... |
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Invention
|
Method for determining displacement maps, method for adjusting parameters for a bonding process, ... |
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Invention
|
Device and method for processing a substrate in an evacuated processing chamber. Disclosed are a ... |
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2022
|
Invention
|
Method and device for bonding substrates. The invention relates to a method and device for bondin... |
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|
Invention
|
Method for separating a first substrate layer, device for carrying out such separating, and subst... |
|
|
Invention
|
Method and device for influencing a bonding wave during bonding. The invention relates to a metho... |
|
|
Invention
|
Vacuum substrate holder with optimised vacuum seal. The invention relates to a vacuum substrate h... |
|
|
Invention
|
Multi-layer system from thin layers for temporary bonding. The invention relates to a method for ... |
|
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Invention
|
Method and substrate system for the separation of carrier substrates.
The invention relates to a... |
|
|
Invention
|
Process and substrate system for separating carrier substrates. The invention relates to a proces... |
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|
Invention
|
Device and method for fixing a substrate. The invention relates to a method and a device for fixi... |
|
2021
|
Invention
|
Method and device for the alignment of a substrate.
The invention relates to a method and a devi... |
|
|
Invention
|
Device and method for adjusting a detection means.
The invention relates to a method and a devic... |
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|
Invention
|
Device and method for bonding.
The present invention relates to a device for bonding a first sub... |
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|
Invention
|
Method and device for compensating for distortions.
The invention relates to a method and a devi... |
|
|
Invention
|
Method and device for transferring and preparing components.
The invention relates to a method a... |
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|
Invention
|
Method and device for producing and preparing electronic components.
The invention relates to a ... |
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|
Invention
|
Method for applying a protective coating material.
The invention relates to method for applying ... |
|
|
Invention
|
Method for the separation of structures from a substrate.
A method and a device for the separati... |
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|
Invention
|
Substrate holder and method for producing a substrate holder for bonding.
The present invention... |
|
2020
|
Invention
|
Substrate holder device and method for bonding.
The invention relates to a substrate holder devi... |
|
|
Invention
|
Method and device for the exposure of a photosensitive coating.
The invention relates to a metho... |
|
|
Invention
|
Method and device for producing micro- and/or nanostructures. A method for producing micro- and/o... |
|
|
Invention
|
Device and method for the alignment of substrates. The invention relates to a device and a method... |
|
|
Invention
|
Method and device for bonding substrates.
A substrate holder for curving a substrate
... |
|
|
Invention
|
Carrier substrate, method for producing a carrier substrate, and method for transferring a transf... |
|
|
Invention
|
Method and device for transferring a transfer layer. The invention relates to a device for the tr... |
|
2019
|
Invention
|
Device and method for embossing micro- and/or nanostructures.
The present invention relates to a... |
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|
Invention
|
Device and method for joining substrates. A method and device for bonding a first substrate to a ... |
|
2011
|
G/S
|
Semiconductor wafer processing machines and equipment Computer software for use in processing equ... |
|
|
G/S
|
Semiconductor wafer processing machines and equipment. Computer software for use in processing eq... |
|
2010
|
G/S
|
Electronic apparatus for separation of semiconductor wafers
used in industry and science. |
|
|
G/S
|
Electronic apparatus for separation of semiconductor wafers used in industry and science |
|
2007
|
G/S
|
Machines and apparatus for producing, aligning, adjusting, bonding, coating, developing, cleaning... |
|
|
G/S
|
Machines and apparatus for producing and/or aligning and/or
adjusting and/or bonding and/or coat... |
|
|
G/S
|
Machines and machine tools for microelectronics, for medial
equipment techniques, biotechnology,... |
|
|
G/S
|
Machines and structural parts therefore, for the production, treatment, transport and processing ... |
|
2004
|
G/S
|
Machines and structural parts therefor, for the production, treatment, transport and processing o... |
|
|
G/S
|
Machines and mechanical devices and parts therefor, for the manufacture, treatment and processing... |
|
2001
|
G/S
|
Machines and apparatus as well as parts thereof for
microelectronics, medical technology, biotec... |
|
|
G/S
|
Machines and apparatus as well as parts thereof for
microelectronic, medical technology, biotech... |
|
|
G/S
|
machines and structural parts therefor, for the production, treatment, transport and processing o... |
|
|
G/S
|
MACHINES AND STRUCTURAL PARTS THEREFOR, FOR THE PRODUCTION, TREATMENT, TRANSPORT AND PROCESSING O... |
|
2000
|
G/S
|
Machines and machine tools for microelectronics, for medial equipment techniques, biotechnology, ... |
