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2024
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Invention
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Vacuum pump and inflow guide component used in same. [Problem] To improve back pressure dependenc... |
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Invention
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Vacuum pump, protective net, and contact part.
A vacuum pump that is small in height (length) is... |
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Invention
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Vacuum pump, rotary body of vacuum pump, and rotary blade on upstream side of vacuum pump. [Probl... |
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Invention
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Vacuum pump, fixed disk, and retrofitted component. [Problem] To provide a vacuum pump in which e... |
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Invention
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Vacuum pump. [Problem] To propose a vacuum pump that offers excellent back pressure performance e... |
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Invention
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Abnormality detection device for vacuum pump, vacuum pump system, and abnormality detection metho... |
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Invention
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Vacuum exhaust system and vacuum pump. Provided is a vacuum exhaust system (10) for exhausting pr... |
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Invention
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Vacuum evacuation device. [Problem] To provide a vacuum evacuation device that can favorably perf... |
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Invention
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Vacuum pump and hermetic connector. [Problem] To achieve a hermetic connector with a small size a... |
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Invention
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Vacuum pump and vacuum pump control device. [Problem] To provide a vacuum pump capable of keeping... |
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Invention
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Vacuum pump and fixed disk. [Problem] To provide a vacuum pump and a fixed disk with which moveme... |
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Invention
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Vacuum pump and method for operating vacuum pump. To make it possible to detect the presence or a... |
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Invention
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Vacuum pump and vacuum pump control device. [Problem] To provide a vacuum pump and a vacuum pump ... |
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Invention
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Vacuum pump and method for changing evacuation performance of vacuum pump. The present invention ... |
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Invention
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Vacuum pump and magnetic bearing control device. [Problem] To propose a vacuum pump and a magneti... |
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Invention
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Vacuum pump, magnetic bearing control device, and compression/decompression method. [PROBLEM] To ... |
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Invention
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Vacuum pump, control device, and temperature rising time control method. [Problem] To provide a v... |
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Invention
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Vacuum pump. [Problem] To provide a vacuum pump capable of providing further improved safety. [So... |
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Invention
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Evacuation device and plasma generator. [Problem] To provide an evacuation device which can be ea... |
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2023
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Invention
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Vacuum pump. [Problem] To provide a vacuum pump capable of stably controlling the temperature of ... |
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Invention
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Vacuum pump and foreign-matter sensor. [Problem] To provide a vacuum pump with which it is possib... |
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Invention
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Vacuum pump and fixed component. [Problem] To provide a vacuum pump and a fixed component by whic... |
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Invention
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Vacuum exhaust system and cleaning method. [Problem] To provide a vacuum exhaust system capable o... |
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Invention
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Vacuum pump.
Provided is a vacuum pump in which deformation of a peripheral part fastened to an ... |
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Invention
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Vacuum pump, rotating body for vacuum pump, and method for manufacturing vacuum pump.
A vacuum p... |
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2022
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Invention
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Vacuum pump and control device.
A vacuum pump including: a current measuring means that measures... |
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Invention
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Vacuum pump and control device.
A vacuum pump that allows for the identification of the noise im... |
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Invention
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Vacuum pump, vacuum pump bearing protection structure, and vacuum pump rotating body.
A vacuum p... |
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Invention
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Vacuum pump and insulation member for use in vacuum pump.
A vacuum pump and a heat insulating me... |
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Invention
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Detoxification device and nozzle scraper.
A detoxifying device of a structure wherein the deposi... |
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Invention
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Abatement device, deposited material removing means, and deposited material removing method.
In ... |
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Invention
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Magnetic bearing device and vacuum pump.
A magnetic bearing device and a vacuum pump configured ... |
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Invention
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Vacuum pump.
A vacuum pump includes a contact portion that contacts a jig used to adjust the hei... |
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Invention
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Vacuum pump.
A vacuum pump, which prevents adhesion of products even when a rotating body is sto... |
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Invention
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Vacuum pump.
To obtain a vacuum pump which appropriately performs temperature management of a ga... |
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Invention
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Gas treatment system.
A gas treatment system includes: a main exhaust line for guiding exhaust g... |
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Invention
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Turbomolecular pump.
A turbomolecular pump is obtained in which a gas absorbing substance is pla... |
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Invention
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Vacuum pump, vacuum pump controller, and remote controller.
A vacuum pump, a vacuum pump control... |
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Invention
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Vacuum pump. A vacuum pump is provided with which, even in the event of breakage of a rotor blade... |
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Invention
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Vacuum pump and vacuum exhaust apparatus.
A vacuum pump capable of improving cleaning performanc... |
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Invention
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Vacuum pump.
A vacuum pump that limits accumulation of deposits while providing a satisfactory p... |
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Invention
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Vacuum pump and rotating body for vacuum pump.
A vacuum pump which can reduce a stress generated... |
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Invention
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Vacuum pump and spacer.
There are proposed a vacuum pump capable of suppressing a temperature in... |
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Invention
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Vacuum pump and rotating body thereof. There are provided a vacuum pump which can effectively pre... |
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Invention
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Vacuum pump, rotating body, cover portion, and manufacturing method of rotating body.
A vacuum p... |
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2021
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Invention
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Vacuum pump and control device. A vacuum pump and a control device, on a pump side, performs heat... |
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Invention
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Vacuum pump.
There is obtained a vacuum pump which suppresses an influence on external piping ca... |
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Invention
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Vacuum pump and rotating cylinder provided in vacuum pump. A lower portion of a cylindrical porti... |
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Invention
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Vacuum pump.
A vacuum pump that includes: an outer cylinder having an inlet port and an outlet p... |
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2019
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G/S
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Vacuum pumps; turbomolecular pumps; compound molecular pumps being turbomolecular pumps; semicond... |
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G/S
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Vacuum pump installations, vacuum pump apparatus and vacuum
pump machines; vacuum pumps; turbomo... |
