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2023
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Invention
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Coaxial microwave plasma torch. This coaxial microwave plasma torch comprises: a body 1 having a ... |
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Invention
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Variable reactance circuit and impedance matching device provided with such circuit.
An impedanc... |
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2021
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Invention
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High frequency power source allowing arbitrary setting of temporal change pattern for high freque... |
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2019
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Invention
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Impedance matching device provided in high-frequency power system. Provided is an impedance match... |
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2013
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Invention
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Cavity resonator of microwave plasma generating apparatus. b made of non-magnetic metal meshes ar... |
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Invention
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Microwave plasma emitter device cavity resonator. Provided is a cavity resonator, comprising a co... |
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2007
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Invention
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Plasma processing system. A plasma processing system comprises a reaction pipe line (4) extending... |
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2006
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Invention
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Microwave line plasma generation system with two power supply. A microwave line plasma generation... |
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Invention
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Microwave plasma generation method and microwave plasma generator. A microwave plasma generator i... |
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Invention
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Method of microwave plasma treatment and apparatus therefor. It is intended to generate a plasma ... |
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2005
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Invention
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Method of low-temperature dry sterilization and apparatus therefor.
A method of low temperature ... |
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Invention
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Method of low-temperature dry sterilization and apparatus therefor. A method of low-temperature s... |
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Invention
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Coaxial microwave plasma torch. A coaxial microwave plasma torch, comprising, an outside conducto... |
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Invention
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Coaxial microwave plasma torch. A coaxial microwave plasma torch, comprising an outside conductor... |
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Invention
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Coaxial microwave plasma torch. A coaxial microwave plasma torch, comprising, an outside co... |
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2003
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Invention
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Plasma generator, ozone generator, substrate processing apparatus, and method for manufacturing s... |
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2002
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Invention
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Object processing apparatus and plasma facility comprising the same. 4 can effectively be decompo... |
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1998
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Invention
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System for impedance matching and power control for apparatus for high frequency plasma treatment... |
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1997
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Invention
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Plasma source for generating inductively coupled, plate-shaped plasma, having magnetically permea... |
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1993
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Invention
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High frequency plasma power source and impedance matching device for supplying power to a semicon... |
