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2019
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Invention
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Brazing processes for joining ceramics and metals, and semiconductor processing and industrial eq... |
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2018
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Invention
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Semiconductor processing equipment with high temperature resistant nickel alloy joints and method... |
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Invention
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Electrical connector with ceramic insulator and aluminum sleeve and method for manufacturing same... |
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Invention
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Semiconductor substrate support with multiple electrodes and method for making same. A method for... |
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Invention
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Method for joining quartz pieces and quartz electrodes and other devices of joined quartz. A meth... |
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Invention
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Ceramic material assembly for use in highly corrosive or erosive semiconductor processing applica... |
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Invention
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Ceramic material assembly for use in highly corrosive or erosive industrial applications. A compo... |
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2016
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Invention
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Electrostatic chuck for clamping in high temperature semiconductor processing and method of makin... |
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Invention
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Temperature sensing device and method for making same. A temperature sensing device for use with ... |
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Invention
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Method for repairing an equipment piece used in semiconductor processing. A method for the repair... |
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2015
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Invention
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High temperature method for joining materials and devices utilizing same. A method for the joinin... |
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2014
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Invention
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Multiple zone heater. A wafer chuck including a shaft having an axis and a plate joined to an end... |
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2013
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Invention
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Compressible conductive element for use in current-carrying structure.
An electrostatic chuck is... |
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2012
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Invention
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Method for joining materials and plate and shaft device and multi-layer plate formed therewith. A... |
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Invention
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Hermetically joined plate and shaft devices.
A method for the joining of ceramic pieces with a h... |
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Invention
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Method for manufacturing and repairing semiconductor processing equipment and equipment produced ... |
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2009
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Invention
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Electrostatic chuck with dielectric inserts.
An electrostatic chuck with dielectric inserts prov... |
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2008
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Invention
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Chamber mount for high temperature application of ain heaters.
A susceptor for high temperature ... |
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2007
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Invention
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Advanced ceramic heater for substrate processing. Susceptors are provided that employ layers of C... |
