|
2023
|
Invention
|
Optical detection method. An optical detection method. A substrate (100) is placed at a predeterm... |
|
|
Invention
|
Exposure projection objective lens and lithography machine. Provided in the present invention are... |
|
|
Invention
|
Projection objective and mask aligner. The present invention provides a projection objective and ... |
|
|
Invention
|
Laser annealing energy control method and laser annealing device. The present invention provides ... |
|
|
Invention
|
Safety shutter and lithography machine. Provided in the present invention are a safety shutter an... |
|
|
Invention
|
Substrate transfer mechanism and exposure platform system. The present invention relates to the t... |
|
|
Invention
|
Measurement system and measurement method for focal plane of laser spot. A measurement system and... |
|
|
Invention
|
Substrate heating device and semiconductor apparatus. Provided in the present invention are a sub... |
|
|
Invention
|
Wafer conveying system, wafer conveying method, and defect detection device. The present inventio... |
|
|
Invention
|
Workpiece table system and working method thereof. A workpiece table system and a working method ... |
|
|
Invention
|
Detection formula configuration and optimization method and apparatus, electronic device and stor... |
|
|
Invention
|
Suction disc assembly, silicon wafer suction device, exposure apparatus, and warping silicon wafe... |
|
|
Invention
|
Measurement apparatus and measurement method. Provided in the present invention are a measurement... |
|
|
Invention
|
Photolithography projection objective lens and photolithography machine. 123455 of the fifth lens... |
|
|
Invention
|
Detection and positioning method and system for alignment mark of silicon wafer, and electronic d... |
|
2022
|
Invention
|
Wafer pre-alignment apparatus and wafer pre-alignment method. Provided in the present invention a... |
|
2020
|
Invention
|
Displacement measuring apparatus, displacement measuring method and photolithography device. A di... |
|
|
Invention
|
Displacement measuring apparatus, displacement measuring method and photolithography device. Disc... |
|
|
Invention
|
Maglev motor and control method therefor. The present invention provides a maglev motor and a con... |
|
|
Invention
|
Air-float cushion structure. An air-float cushion structure, comprising an air-float cushion body... |
|
|
Invention
|
Wave aberration measurement device, measurement method, and photolithography machine. The present... |
|
|
Invention
|
Protruding plate detection device for mask plate, transmission system, and lithography apparatus.... |
|
|
Invention
|
Optical alignment apparatus and photoetching system. Provided are an optical alignment apparatus ... |
|
|
Invention
|
Objective lens device. An objective lens device (00), comprising a light transmission unit (110),... |
|
2019
|
Invention
|
Silicon wafer adsorption device and laser annealing apparatus. Disclosed are a silicon wafer adso... |
|
|
Invention
|
Lithography projection objective. Provided a lithography projection objective includes: first len... |
|
|
Invention
|
Defect detection device. A defect detection device, comprising: a workpiece carrier (110) configu... |
|
|
Invention
|
Photoetching projective objective. A photoetching projective objective, comprising a first lens g... |
|
|
Invention
|
Laser annealing device for sic substrate. Disclosed is a laser annealing device for an SiC substr... |
|
|
Invention
|
Mask attitude monitoring method and apparatus and mask particle size measurement device. A mask a... |
|
|
Invention
|
Mounting device and mounting method for grating ruler, grating measurement system and lithography... |
|
|
Invention
|
Device, method and photolithography machine for detecting wave aberration of projection objective... |
|
|
Invention
|
Object surface detection device and detection method. An object surface detection device and dete... |
|
|
Invention
|
Multi-station flexible tape exposure device and exposure method. Provided are a multi-station fle... |
|
|
Invention
|
Exposure apparatus for flexible tapes using two workpiece platforms and exposure method. An expos... |
|
|
Invention
|
Mask plate and stitching exposure method. Disclosed are a mask plate and a stitching exposure met... |
|
|
Invention
|
Chip encapsulation method. Disclosed are a chip encapsulation method and an encapsulated chip. Th... |
|
2018
|
Invention
|
Projection objective. A projection objective, used for projecting an object space to an image spa... |
|
|
Invention
|
Linear module and operating method thereof. The present invention provides a linear module, which... |
|
|
Invention
|
Mask transfer system and transfer method.
A mask transfer system and transfer method, including ... |
|
|
Invention
|
Exposure equipment and exposure method. An exposure apparatus and method. The exposure apparatus ... |
|
|
Invention
|
Semiconductor manufacturing apparatus. A semiconductor manufacturing apparatus, including a chip ... |
|
|
Invention
|
Mask fork for transferring mask, and corresponding mask box and mask transferring method. A mask ... |
|
|
Invention
|
Heat exchange apparatus, and heat exchange method therefor and vapour deposition device thereof. ... |
|
|
Invention
|
Spin coating device and method. A spin coating device and method. The spin coating device include... |
|
|
Invention
|
Silicon wafer processing device and method. Disclosed is a silicon wafer processing device; a pre... |
|
|
Invention
|
Wafer holder and wafer transfer apparatus, system and method. A wafer holder and a wafer transfer... |
|
|
Invention
|
Vertical control method for use in lithography machine. A method for vertical control of a lithog... |
|
|
Invention
|
Photoetching apparatus and method. The lithography apparatus includes at least two exposure devic... |
|
2017
|
Invention
|
Chip defect detection device and detection method. An apparatus and method for die defect detecti... |
|
2008
|
G/S
|
Electronic industrial equipment, namely, machines for manufacturing semiconductors; optical cold ... |
|
|
G/S
|
Electronic industrial equipment; optical cold working tool;
electrostatic industrial equipment; ... |
