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2024
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Invention
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Molybdenum precursor composition, molybdenum-containing film using same, and method for manufactu... |
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Invention
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Method for forming silicon-containing film, and composition and silicon precursor compound used t... |
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2023
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Invention
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Molybdenum precursor compound, method for producing same, and method for depositing molybdenum-co... |
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Invention
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Hafnium precursor compound, composition for forming hafnium-containing film, comprising same, and... |
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Invention
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Film depositing composition including group 4 metal element-containing precursor compound and met... |
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Invention
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Thermally stable ruthenium precursor composition, and method for forming ruthenium-containing fil... |
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Invention
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Ruthenium precursor composition, preparation method therefor, and formation method for ruthenium-... |
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2022
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Invention
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Molybdenum precursor compound, method for preparing same, and method for depositing molybdenum-co... |
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Invention
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Aluminum precursor compound, production method therefor, and aluminum containing layer forming me... |
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Invention
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Silicon precursor compound, composition for forming silicon-containing film including the same, a... |
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Invention
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Method for forming silicon-containing film, and silicon-containing film formed thereby.
A method... |
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Invention
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Method for forming silicon-containing film, and silicon-containing film formed thereby. The prese... |
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Invention
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Silicon precursor compound, silicon-containing film formation composition comprising same, and me... |
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Invention
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Silicon precursor compound, composition for forming silicon-containing film comprising same, and ... |
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Invention
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Molybdenum precursor compound, preparation method therefor, and method for depositing molybdenum-... |
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Invention
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Yttrium/lanthanide metal precursor compound, composition for forming film including the same, and... |
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2021
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Invention
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Thin film forming method using top-surface modifier. This application relates to a top-surface mo... |
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Invention
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Niobium precursor compound, film-forming precursor composition comprising same, and method for fo... |
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Invention
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Silicon precursor compound, preparation method therefor, and silicon-containing film formation me... |
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Invention
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Aluminum precursor compound, production method therefor, and aluminum-containing layer forming me... |
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Invention
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Silicon precursor compound, composition for forming silicon-containing film, comprising same, and... |
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Invention
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Aluminum compounds and methods of forming aluminum- containing film using the same. The present d... |
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2020
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Invention
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Yttrium/lanthanide metal precursor compound, composition comprising same for forming film, and me... |
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Invention
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Group 4 metal element-containing compounds, method of preparing the same, precursor compositions ... |
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2019
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Invention
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Aluminum compounds and methods of forming aluminum-containing film using the same. The present di... |
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Invention
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Group 5 metal compound, method for preparing the same, precursor composition for depositing layer... |
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Invention
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Group iv metal element-containing compound, preparation method therefor, precursor composition co... |
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2018
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Invention
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Liquid precursor compositions, preparation methods thereof, and methods for forming layer using t... |
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2017
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Invention
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Group 4 metal element-containing alkoxy compound, preparing method thereof, precursor composition... |
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Invention
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Group 5 metal compound, preparation method therefor, film deposition precursor composition compri... |
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Invention
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Group 4 metal element-containing alkoxy compound, preparation method therefor, film deposition pr... |
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Invention
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Group 4 metal element-containing compound, method of preparing the same, precursor composition in... |
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Invention
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Group 4 metal element-containing compound, method for preparing same, precursor composition conta... |
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2016
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Invention
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Tantalum compound, preparation method therefor, film deposition precursor composition containing ... |
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Invention
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Ge(ii)-containing precursor composition and method for forming germanium-containing film using pr... |
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Invention
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Indium-containing film and composition for forming the same.
The present invention relates to an... |
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Invention
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Copper metal film, method for preparing the same, and method for forming copper interconnect for ... |
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Invention
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Aluminum compound and method for forming aluminum-containing film using same. The present inventi... |
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2015
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Invention
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Ruthenium compound, preparation method therefor, precursor composition for film deposition contai... |
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2014
|
Invention
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Deposition method for tungsten-containing film using tungsten compound, and precursor composition... |
