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2019
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Invention
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A method and apparatus for cleaning a substrate and computer program product. A method and an app... |
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2018
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Invention
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Treatment head, treatment system and method for treating a local surface area of a substrate. A t... |
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Invention
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Device for applying to a substrate a liquid medium which is exposed to uv radiation. An apparatus... |
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Invention
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Device for applying to a substrate a liquid medium which is exposed to uv radiation. The inventio... |
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Invention
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Method and apparatus for cleaning a substrate and computer program product. A method and an appar... |
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2017
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Invention
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Holder for holding and for protecting a side of a photomask or a photomask or a photomask having ... |
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Invention
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Holder for holding and for protecting a side of a photomask or a photomask having pellicle from a... |
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Invention
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Apparatus and method for cleaning a partial area of a substrate. An apparatus and a method for cl... |
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Invention
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Method and apparatus for treating substrates. The application describes several methods and an ap... |
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Invention
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A method and an apparatus for cleaning substrates. Method and apparatus (1) for cleaning substrat... |
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2016
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Invention
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A method for treating substrates with an aqueous liquid medium exposed to uv-radiation. Methods f... |
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Invention
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Device for applying a liquid medium which is exposed to uv radiation to a substrate. An apparatus... |
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Invention
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Device for applying to a substrate a liquid medium that has been charged with uv radiation. An ap... |
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Invention
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Device for applying a liquid medium which is exposed to uv radiation to a substrate. The inventio... |
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Invention
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Device for applying to a substrate a liquid medium that has been charged with uv radiation. A dev... |
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Invention
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Method and an apparatus for cleaning substrates.
A method for cleaning substrates in which at le... |
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2015
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Invention
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Method for treating substrates with an aqueous liquid medium exposed to uv-radiation. Methods for... |
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2013
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Invention
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Method for cleaning photomasks using megasonic energy. A method for cleaning photomasks is descri... |
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2005
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Invention
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Method and device for the thermal treatment of substrates. This invention relates to a method and... |
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Invention
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Method and device for treating substrates and nozzle unit therefor.
A method and device for trea... |
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2003
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Invention
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Method for thermally treating substrates. To increase the temperature homogeneity on the surface ... |
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2001
|
Invention
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Apparatus and method for the treatment of substrates. A device and method for thermally treating ... |
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Invention
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Method and apparatus for treating substrates. To achieve a uniform coating of a substrate, with a... |
