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2024
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Invention
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Mercury probe apparatus with improved safety.
An semiconductor wafer measurement apparatus inclu... |
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Invention
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Inspection of microled arrays with noncontact field effect electroluminescense. Systems and metho... |
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Invention
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Semiconductor doping characterization method using photoneutralization time constant of corona su... |
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2022
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Invention
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Topside contact device and method for characterization of high electron mobility transistor (hemt... |
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2019
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G/S
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Scientific instruments in the field of semiconductor manufacturing, namely, metrology instruments... |
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G/S
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Electrical metrology devices, namely, metrology devices used in manufacturing control and develop... |
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2018
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Invention
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Micro photoluminescence imaging with optical filtering. A method that includes: illuminating a wa... |
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Invention
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Micro photoluminescence imaging. In an example implementation, a method includes illuminating a w... |
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Invention
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Charge metrology for integrated measurement.
A method for measuring charging of a semiconductor ... |
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2016
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Invention
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Measuring semiconductor doping using constant surface potential corona charging. An example metho... |
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2012
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Invention
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Accurate measurement of excess carrier lifetime using carrier decay method. A method is described... |
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2007
|
Invention
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Methods for monitoring ion implant process in bond and cleave, silicon-on-insulator (soi) wafer m... |
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|
Invention
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Method and apparatus for silicon-on-insulator material characterization.
A method and apparatus ... |
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Invention
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Probes and methods for semiconductor wafer analysis.
A probe adapted for characterization of a s... |
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2006
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Invention
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Method and apparatus for forming an oxide layer on semiconductors.
A method and apparatus for fo... |
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Invention
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Apparatus and method of measuring defects in an ion implanted wafer by heating the wafer to a tre... |
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2004
|
Invention
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Methods for integrated implant monitoring. The invention relates to a method for real-time in-sit... |
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2003
|
Invention
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Real-time in-line testing of semiconductor wafers. An apparatus and method for the real-time, in-... |
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2001
|
Invention
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Apparatus and method for rapid photo-thermal surfaces treatment. An apparatus for surface treatin... |
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Invention
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Steady state method for measuring the thickness and the capacitance of ultra thin dielectric in t... |
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2000
|
Invention
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Method for fast and accurate determination of the minority carrier diffusion length from simultan... |
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|
Invention
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Method for real-time in-line testing of semiconductor wafers. An apparatus and method for the rea... |
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|
Invention
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Method and apparatus for simulating a surface photo-voltage in a substrate. This invention relate... |
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1998
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Invention
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Apparatus and method for rapid photo-thermal surface treatment. An apparatus for surface treating... |
