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2011
|
Invention
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Holder for silicon wafers, and method for treating said wafers. The invention relates to a holder... |
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2010
|
Invention
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Method for boron doping silicon wafers. The invention relates to a method for p-type boron doping... |
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2006
|
Invention
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Device for transferring flat components by packets from a loading to unloding station. The invent... |
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2005
|
Invention
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Electrostatic holding device having a number of supply sources. The invention relates to an elect... |
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2004
|
Invention
|
Covertible pad support for receiving at least two pads of different dimensions.
The convertible ... |
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|
Invention
|
Convertible pad support for receiving at least two pads of different dimensions. The convertible ... |
|
|
Invention
|
Electrostatic bonding chuck with integrated radio frequency electrode and thermostatic means.
Th... |
|
|
Invention
|
Electrostatic bonding chuck with integrated radio frequency electrode and thermostatic means. The... |
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2003
|
Invention
|
Electrostatic device for holding an electronic component wafer. A device for holding a wafer, an ... |
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2002
|
Invention
|
Device for loading and unloading silicon wafers in an oven from a multiple-cassette station. The ... |
|
|
Invention
|
Method and device for doping, diffusion and oxidation of silicon wafers under reduced pressure. T... |
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2001
|
Invention
|
Electrostatic device for holding an electronic component wafer. The invention concerns a device f... |
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1999
|
Invention
|
Process for electrostatic stabilization and device for implementing the said process. The inventi... |
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|
Invention
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Electrostatic maintaining device. The invention concerns an electrostatic maintaining device part... |
