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2012
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Invention
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Composition for forming a developable bottom anti-reflective coating. The present invention provi... |
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Invention
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Negative-type photosensitive siloxane composition. [Problem] To provide a photosensitive siloxane... |
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Invention
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Nanocomposite negative photosensitive composition and use thereof. The present invention relates ... |
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Invention
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Nanocomposite positive photosensitive composition and use thereof. The present invention relates ... |
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Invention
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Composition for forming fine resist pattern and pattern forming method using same. [Problem] To p... |
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Invention
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Compositions of neutral layer for directed self assembly block copolymers and processes thereof. ... |
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Invention
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Composition for forming tungsten oxide film and method for producing tungsten oxide film using sa... |
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Invention
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Composition for forming fine pattern and method for forming fined pattern using same. [Problem] T... |
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Invention
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An underlayer composition and process thereof. The present invention relates to an underlayer com... |
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Invention
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Bottom antireflective coating compositions and processes thereof. The present invention relates t... |
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Invention
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Upper surface antireflective film forming composition and pattern forming method using same. [Pro... |
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Invention
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Antireflective coating composition and process thereof. The invention relates to an antireflectiv... |
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Invention
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Lithography rinsing fluid and pattern formation method using same. [Problem] Provided are a litho... |
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Invention
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Composition for forming low-refractive-index film, method of forming low-refractive-index film, a... |
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Invention
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Method for forming insulating film. [Problem] To provide a method for forming an insulating film ... |
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Invention
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Method for producing silicon dioxide film. [Problem] To provide a method with which it is possibl... |
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Invention
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Underlayer coating composition and process for manufacturing a microelectronic device. The invent... |
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2011
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Invention
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Underlayer developable coating compositions and processes thereof. The present invention relates ... |
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Invention
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Nanocomposite negative photosensitive composition and use thereof.
The present invention relates... |
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Invention
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Nanocomposite positive photosensitive composition and use thereof.
The present invention relates... |
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Invention
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Edge bead remover for coatings. The invention relates to an edge bead remover composition for an ... |
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Invention
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Formation method for silicon oxynitride film, and substrate having silicon oxynitride film manufa... |
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Invention
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Rinse liquid for lithography and method for forming pattern using same. [Problem] To provide a ri... |
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Invention
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A composition for coating over a photoresist pattern. The present invention relates to an aqueous... |
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Invention
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Silicon oxynitride film formation method and substrate equipped with silicon oxynitride film form... |
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Invention
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Method for forming silicon oxynitride film, and substrate having silicon oxynitride film produced... |
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Invention
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Bottom antireflective coating compositions.
Antireflective coating compositions are discussed. |
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Invention
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Antireflective coating composition and process for manufacturing microelectronic device. The inve... |
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Invention
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Antireflective coating composition and process thereof.
The invention relates to an antireflecti... |
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Invention
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Antireflective compositions and methods of using same. A novel antireflective coating composition... |
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2010
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Invention
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Underlayer developable coating compositions and processes thereof.
The present invention relates... |
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Invention
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Antifeflective composition for photoresists. The invention relates to an antireflective coating c... |
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Invention
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Method for producing siliceous film and polysilazane coating treatment liquid used therefor. Prov... |
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Invention
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Liquid etchant and method for forming trench isolation structure using same. Disclosed are a liqu... |
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2009
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Invention
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A photosensitive composition. The present invention relates to a novel photosensitive composition... |
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Invention
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Method for forming resist pattern. Provided is a pattern forming method wherein generation of sur... |
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Invention
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Positive-working photoimageable bottom antireflective coating. The present invention relates to a... |
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Invention
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Positive-working photoimageable bottom antireflective coating. The invention relates to a photoim... |
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Invention
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Coating compositions. An antireflective coating composition comprises a polymer having a dye or c... |
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Invention
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Positive-working photoimageable bottom antireflective coating.
The present invention relates to ... |
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Invention
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Spin on organic antireflective coating composition comprising polymer with fused aromatic rings. ... |
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Invention
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A hardmask process for forming a reverse tone image using polysilazane. The present invention rel... |
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Invention
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A photoresist image-forming process using double patterning. A process for forming a double photo... |
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Invention
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An antireflective coating composition comprising fused aromatic rings. The present invention rela... |
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Invention
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Dipping solution for use in production of siliceous film and process for producing siliceous film... |
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2008
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Invention
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Photosensitive composition.
The present invention relates to a novel photosensitive composition ... |
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Invention
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Antireflective coating composition comprising fused aromatic rings.
The present invention relate... |
