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2024
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Invention
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Temperature controlled substrate carrier and polishing components.
Temperature controlled polish... |
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Invention
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Apparatus and method for in-situ chemical separation and recirculation in a chemical mechanical p... |
|
|
Invention
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Containment and exhaust system for substrate polishing components.
Containment and exhaust syste... |
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Invention
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Apparatus and method for closed loop controlled cooling in a wafer processing system. An apparatu... |
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Invention
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Method and apparatus for insitu adjustment of wafer slip detection during work piece polishing. A... |
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2023
|
Invention
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Carrier for polishing workpieces with flats or voids. Carriers for polishing workpieces with flat... |
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Invention
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Planarized membrane and methods for substrate processing systems.
A method and a system for plan... |
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2022
|
G/S
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Semiconductor wafer processing equipment; semiconductor cleaning systems for removing chemical an... |
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G/S
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semiconductor wafer processing equipment |
|
|
Invention
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Method and apparatus for in-situ monitoring of chemical mechanical planarization (cmp) processes.... |
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|
Invention
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Containment and exhaust system for substrate polishing components. Containment and exhaust system... |
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2021
|
Invention
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Cmp machine with improved throughput and process flexibility.
An apparatus for performing chemic... |
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G/S
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Semiconductor wafer processing equipment. |
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2020
|
Invention
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Temperature controlled substrate carrier and polishing components. Temperature controlled polishi... |
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|
Invention
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Substrate carrier head and processing system. A substrate carrier head is disclosed. In one aspec... |
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2019
|
Invention
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Chemical mechanical planarization carrier system. A system includes a CMP carrier that includes a... |
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2018
|
Invention
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Planarized membrane and methods for substrate processing systems. A method and a system for plana... |
|
|
Invention
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Cmp machine with improved throughput and process flexibility. An apparatus for performing chemica... |
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|
Invention
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Atmospheric plasma in wafer processing system optimization. A method and a system for polishing a... |
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|
G/S
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Semiconductor and rigid substrate manufacturing and processing equipment being semiconductor manu... |
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2013
|
Invention
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Method and apparatus for wafer backgrinding and edge trimming on one machine. A workpiece process... |
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2011
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Invention
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Apparatus and method for surface grinding and edge trimming workpieces. An apparatus for performi... |
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2009
|
G/S
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Surface processing equipment used in the manufacture of semiconductors and rigid substrates such ... |
