The invention relates to a rotor disc for a vacuum pump, in particular a turbo molecular pump, having an inner ring (12). The inner ring (12) is connected to a plurality of wing elements (16) extending radially outward. According to the invention, the inner ring (12) has at least one expansion joint (30). For assembly, the inner ring (12) can be surrounded by a retaining ring (32) and arranged on a hollow cylindrical carrier element (22) as applicable.
The invention relates to a vacuum pump system comprising a vacuum pump (10), in particular in the form of a screw pump. Said system is used for evacuating a chamber (16). When a desired set pressure in the chamber (16) is reached, the vacuum pump system can be operated in a standby mode. To this end, an outlet conduit (22) is connected to an inlet conduit (30) via a bypass conduit (24). In standby mode, the inlet valve (18) is closed and a bypass valve (26) is open, such that medium in the circuit can be conveyed by the vacuum pump (10). As a result, the vacuum pump is maintained substantially at operating temperature.
F04C 28/06 - Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids specially adapted for stopping, starting, idling or no-load operation
F04C 25/02 - Adaptations for special use of pumps for elastic fluids for producing high vacuum
F04C 28/02 - Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids specially adapted for several pumps connected in series or in parallel
F04C 28/08 - Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids characterised by varying the rotational speed
A device for preventing the negative feeding of electrical energy from an electrically driven rotor in a DC voltage network supplying the rotor drive is provided with a negative feeding prevention device (D1) and a bridging device (S1) for switchably electrically bridging the negative feeding prevention device (D1) so as to allow selective negative feeding.
A control method for an acceleration of a vacuum pump, in particular a turbomolecular pump, having an electric motor and a control device in which, in a first acceleration phase, the input current of the control device increases up to a maximum value Is,max and, in a second acceleration phase, the control device is operated at the maximum value Is,max of the input current.
A cold head for cryogenic machines comprises a displacer (72, 76) mounted in a working chamber (38, 40, 46) of a housing (34, 36). The cold head also has a high-pressure connection (64) for supplying highly compressed refrigerant and a low-pressure connection (60) for discharging expanded refrigerant. Also provided is a control valve arrangement (58) for controlling the supply and discharge of refrigerant. According to the invention there is a bypass channel (80) connecting the high-pressure connection to the low-pressure connection.
F25B 9/14 - Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point characterised by the cycle used, e.g. Stirling cycle
A rotor device for a vacuum pump comprises a rotor shaft (10) and at least one rotor element (12) on the rotor shaft (10). According to the invention, the at least one rotor element (12) contains aluminum, titanium and/or CFRP, while the rotor shaft (10) contains a chromium-nickel steel. This makes it in particular possible to join the at least one rotor element (12) to the rotor shaft (10) at room temperature using a pressing process.
In a separating wall (16), which separates a vacuum region (18) from a region (20) under atmospheric pressure, pins (24) are provided as a current lead-through. The pins (24) are cast in, for example, glass (26). According to the invention, a plug-in contact (28) is arranged on a separate carrier plate (30) in order to prevent force or stresses, which can occur in particular because of tolerances, from being introduced into the glass. The carrier plate (30) is connected to the control device (12) by means of a flexible cable (32).
F04C 18/02 - Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents
F04C 23/00 - Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluidsPumping installations specially adapted for elastic fluidsMulti-stage pumps specially adapted for elastic fluids
F04C 25/02 - Adaptations for special use of pumps for elastic fluids for producing high vacuum
8.
SUPPORT ELEMENT FOR TUBULAR ELEMENTS OF A HOLWECK STAGE
A support element for at least one tubular element (26) of a Holweck stage has an inner part (12) for connecting to a rotor shaft (14). A disc-shaped retaining part (18) is connected to the inner part (12). For each tubular element (26), a projection (22) for receiving the tubular element (26) is connected to the retaining element (18). In order to improve the connection between the tubular element (18) and the projection (22) even when there are cyclic thermal changes, the retaining element (18) has a recess (30) in the region of each projection (22).
The invention relates to a vacuum pump comprising a rotor shaft (10), which bears one or more rotor elements (20, 22). The rotor shaft (10) is driven by an electrical driving device (30). A stator device (24) is arranged between the rotor elements (20, 22). The rotor shaft (10) is supported by bearings (32). The highly heat-generating components such as the driving device (30) and the stator device (24) are connected to a second housing part (28) in particular by means of a support part (36). Heat-sensitive components such as the bearing (32) are supported by means of a separate first housing part (34). The two housing parts can be kept at different temperatures, for example by means of separate cooling devices. Thus, the operating temperature of the in particular pressure-side bearing (32) can be reduced, and therefore the service life can be extended.
The invention relates to a vacuum pump housing comprising a pump housing which forms a suction chamber. A cooling element is arranged on an outer face of the pump housing. Furthermore, a fastening element is connected to the pump housing. According to the invention, the cooling element is connected to the fastening element and rests against the outer face of the pump housing.
F04B 37/14 - Pumps specially adapted for elastic fluids and having pertinent characteristics not provided for in, or of interest apart from, groups for special use to obtain high vacuum
The invention relates to a rotor element for a vacuum pump, in particular a Holweck stage, having a cylindrical rotor part (16) made of a highly heat-conductive material such as aluminum. The rotor part (16) is reinforced on one surface (18) by means of a reinforcing layer. The reinforcing layer has a carbon fiber-reinforced material in particular.
The stator disk has an inner ring and an outer ring. The outer ring and the inner ring are interconnected by a plurality of vanes, the transitions from the vanes to the inner ring and/or outer ring being substantially closed.
The invention relates to a vacuum pump, particularly a rotary vane pump, having a pump housing (10) which is arranged in a suction chamber (12). A conveying element (14, 16) is arranged in the suction chamber (12). According to the invention, there is a non-return valve (28) at an inlet (22) of the suction chamber (12). To close the non-return valve (28) in the case of prevailing low pressures in the region of the inlet (22), a fluid device (36) is arranged adjacent to a spiral spring (34). Upon deactivation of the vacuum pump, a switch piston (40) is moved to a position in which fluid flows through the feed channel (42) into the connection channel (38), so that the non-return valve (28) closes via the flowing into the inlet channel (42).
F04C 25/02 - Adaptations for special use of pumps for elastic fluids for producing high vacuum
F04C 28/06 - Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids specially adapted for stopping, starting, idling or no-load operation
F04C 18/344 - Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups , , , , , or having the characteristics covered by one of these groups together with some other type of movement between co-operating members having the movement defined in group or and relative reciprocation between the co-operating members with vanes reciprocating with respect to the inner member
F04C 28/24 - Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids characterised by using valves controlling pressure or flow rate, e.g. discharge valves
A vacuum-pump system has a first vacuum pump (10), which is not sensitive to particles. A second vacuum pump (12), which is connected to the first vacuum pump (10), is sensitive to particles. The connecting element (14) between the two vacuum pumps (10, 12) is designed in such a way that the connecting element establishes a rigid connection and supports the first vacuum pump (10). Furthermore, the connecting element (14) is connected to filter elements (18, 20). The provision of a steel frame that supports the vacuum pumps is not required.
F01C 21/00 - Component parts, details, or accessories, not provided for in groups
F04B 37/14 - Pumps specially adapted for elastic fluids and having pertinent characteristics not provided for in, or of interest apart from, groups for special use to obtain high vacuum
F04C 23/00 - Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluidsPumping installations specially adapted for elastic fluidsMulti-stage pumps specially adapted for elastic fluids
F04C 25/02 - Adaptations for special use of pumps for elastic fluids for producing high vacuum
F04D 19/04 - Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
An analyzing device such as a mass spectrometer has a plurality of vacuum chambers (12, 14, 6, 18, 20, 22) in particular arranged in series. In a device housing (10) is provided an insertion recess (28) into which a multi-inlet vacuum pump (30) can be inserted. In order to improve the tightness in the region of intermediate inlets (56, 58, 60, 62), sealing surface pairs (70, 72) are provided which extend substantially perpendicularly relative to a pump longitudinal axis (74).
A vacuum pump such as a turbo-molecular pump has a rotor shaft (10) which bears at least one rotor element. The rotor shaft (10) is mounted in a prestressed fashion by means of two bearing elements (10, 14), in particular in the case of vacuum pumps rotating at high speeds. For example during the switching of valves it is possible for axial movements to occur despite the prestress. In particular, when a highly rigid magnetic bearing is used as a bearing element, it is necessary to ensure that only a very small axial deflection of the rotor shaft (20) is possible. For this purpose, a stop element (10) which limits the axial movement of the rotor shaft (10) is provided. In order to reduce the occurrence of friction between the stop element and the rotor shaft (10) or a stop part (26) connected to the rotor shaft (10), the stop element (20) has a rotatable limiting element (28, 48, 62).
The invention relates to a method for cleaning a vacuum pump, in particular a Holweck pump, wherein the rotor element to be cleaned is vibrated. This occurs by actuating an electromagnet (38) using a control device (40), wherein the electromagnet (38) is in particular an electromagnet of a magnetic bearing (16) which bears the rotor shaft (12) in a housing (10).
A vacuum pump, particularly a turbomolecular pump, comprises a rotor shaft (10), which is arranged in a pump housing (11) and supported by two bearing assemblies (12). One of the bearing assemblies, in particular the pressure-side bearing assembly (12), comprises a rolling-element bearing. In order to enable a pendular motion (16) of the rotor shaft, an attachment (28) that protrudes into a fluid chamber (30) is connected to an outer bearing shell (23) of the rolling-element bearing.
F16F 15/023 - Suppression of vibrations of non-rotating, e.g. reciprocating, systemsSuppression of vibrations of rotating systems by use of members not moving with the rotating system using fluid means
F16C 27/04 - Ball or roller bearings, e.g. with resilient rolling bodies
A vacuum pump such as a rotary-lobe pump has a pump chamber (10) in which pump elements (12) are arranged. A pressure side (30) is connected to a suction side (20) of the pump chamber (10) via a connecting duct (22). Furthermore, a valve device (24) is arranged in a passage opening (32) of the connecting duct (22). To vary the effective cross-sectional area of the passage opening (32), the valve device (24) is, in one of the preferred embodiments, assigned an adjustable aperture device (42).
F04C 18/12 - Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
F04C 28/26 - Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids characterised by using valves controlling pressure or flow rate, e.g. discharge valves using bypass channels
F04C 29/12 - Arrangements for admission or discharge of the working fluid, e.g. constructional features of the inlet or outlet
A Roots pump comprises a plurality of multi-toothed rotary pumps, each forming a pump stage, and connection channels connecting respective adjacent pump stages. The invention provides that the connection channels are arranged in partitioning walls separating the adjacent pump stages.
F04C 18/12 - Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
F04C 23/00 - Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluidsPumping installations specially adapted for elastic fluidsMulti-stage pumps specially adapted for elastic fluids
F04C 25/02 - Adaptations for special use of pumps for elastic fluids for producing high vacuum
F04C 18/08 - Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
22.
PUMPING UNIT FOR PUMPING LIGHT GASES, AND USE OF THE PUMPING UNIT
A pumping unit for pumping light gases has a first dry vacuum pump (12) which is connected to the chamber (10) to be evacuated and a second dry vacuum pump (14) which is connected to the first dry vacuum pump (12). The pumping unit likewise has further dry vacuum pumps which are arranged in parallel or in series with respect to said pumps. According to the invention, they are dry vacuum pumps in order to avoid contamination of the light gases on account of the provision of oil-sealed pumps or on account of the provision of purge gas, which dry vacuum pumps are sealed hermetically with respect to the surroundings, with the result that low process pressures can be generated in the chamber (10) to be evacuated.
F04B 37/14 - Pumps specially adapted for elastic fluids and having pertinent characteristics not provided for in, or of interest apart from, groups for special use to obtain high vacuum
F04B 37/18 - Pumps specially adapted for elastic fluids and having pertinent characteristics not provided for in, or of interest apart from, groups for special use for specific elastic fluids
A vacuum pump system for evacuating a chamber (10) has a main pump system (12, 14) which is connected to the chamber (10). An auxiliary pump system (20) is connected to the main pump system (12, 14), wherein the auxiliary pump system (20) has an ejector pump. Regulating of the rotational speed of the at least one pump of the main pump system (12, 14) takes place with the aid of the method according to the invention depending on a pressure which is measured at the outlet (16) or at the inlet (50) of the main pump system (12, 14).
F04C 23/00 - Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluidsPumping installations specially adapted for elastic fluidsMulti-stage pumps specially adapted for elastic fluids
F04C 25/02 - Adaptations for special use of pumps for elastic fluids for producing high vacuum
F04C 28/02 - Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids specially adapted for several pumps connected in series or in parallel
F04C 28/08 - Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids characterised by varying the rotational speed
A vacuum pump, particularly a rotary vane pump with a high pumping capacity, has a pump chamber (12) in a housing (10). A pump element (14) is arranged in the pump chamber (12). The pump element (14) is supported by a rotor shaft (22). The rotor shaft (22) is connected to a belt pulley (24) arranged outside of the pump housing (10). The pump also has a motor (26) arranged outside of the pump housing (10). The drive shaft (28) of the motor (10) carries a drive pulley (30). The drive pulley (30) is connected to the rotor pulley (24) via a belt (32). To simplify assembly, the drive pulley (30) and/or the rotor pulley (24) are formed of multiple parts.
F04C 23/02 - Pumps characterised by combination with, or adaptation to, specific driving engines or motors
F04C 29/00 - Component parts, details, or accessories, of pumps or pumping installations specially adapted for elastic fluids, not provided for in groups
In a pump housing (12), a vacuum pump, such as, in particular, a turbomolecular pump, has a rotor shaft (10) which is mounted by two bearing arrangements (14). One of the two bearing arrangements (14) has an anti-friction bearing (16). In order to make a radial movement (30) of the anti-friction bearing (16) possible, it is surrounded by a sleeve (22). The sleeve (22) is arranged such that it can be displaced radially in the pump housing (12) as a result of the provision of rolling bodies (28).
A method for reducing the development of noise in a vacuum pump (10) which is operated with a frequency converter and which has a pump motor (12) which is driven by a frequency converter (14) is characterized in that the motor current is measured and the switching frequency which is allocated to the motor (12) by the frequency converter (14) is set as a function of the motor current in such a way that the development of noise in the vacuum pump (10) is reduced.
F04B 17/03 - Pumps characterised by combination with, or adaptation to, specific driving engines or motors driven by electric motors
H02P 27/08 - Arrangements or methods for the control of AC motors characterised by the kind of supply voltage using variable-frequency supply voltage, e.g. inverter or converter supply voltage using DC to AC converters or inverters with pulse width modulation
H02P 7/00 - Arrangements for regulating or controlling the speed or torque of electric DC motors
F04D 19/04 - Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
F04D 25/06 - Units comprising pumps and their driving means the pump being electrically driven
F04D 27/00 - Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
F04D 29/66 - Combating cavitation, whirls, noise, vibration, or the likeBalancing
A vacuum-type rotary slide pump has a pump chamber (12) in a housing (10). A rotor (14) is eccentrically mounted in the pump chamber (12). Slides (18) are connected in a displaceable manner to the rotor (14). Furthermore, a discharge duct (30) is connected to the pump chamber (12) and to an oil chamber (32). Between the discharge duct (30) and the oil chamber (32) there is arranged a valve device (38) for preventing a return flow of medium from the oil chamber (32) into the pump chamber (12). According to invention, at least one compensation duct (50, 72) is provided which is connected to the discharge duct (30) and to the oil chamber (32) and which is integrated into the valve device (38).
F04C 18/344 - Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups , , , , , or having the characteristics covered by one of these groups together with some other type of movement between co-operating members having the movement defined in group or and relative reciprocation between the co-operating members with vanes reciprocating with respect to the inner member
A turbomolecular pump has a rotor element (18) in a housing (16). The rotor element (18) is arranged on a rotor shaft (10). The rotor shaft (10) is supported by two bearing elements (12, 14) in the housing (16). The bearing element (12) on the high-vacuum side is constructed as a roller bearing. In order to guarantee a pressure in the area of the bearing element (12) that is acceptable for the bearing element (12) constructed as a roller bearing, the bearing element (12) is arranged in a chamber (36). Said chamber is connected via a channel (46) to the pre-vacuum area (38) and sealed relative to the high-vacuum area (34) by a gasket.
A Roots pump has a plurality of multiple-tooth rotary piston pairs (10, 48, 49) which form in each case one pump stage (50, 52, 54, 56, 58, 60). Adjacent pump stages (50, 52, 54, 56, 58, 60) are connected to one another via connecting ducts (30, 34, 77, 84, 86, 88, 90). In order to reduce the production costs, it is provided according to the invention to arrange the connecting ducts (30, 34, 77, 84, 86, 88, 90) in intermediate walls (74, 76, 78, 80, 82) which separate adjacent pump stages (50, 52, 54, 56, 58, 60) from one another.
F04C 18/12 - Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
F04C 23/00 - Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluidsPumping installations specially adapted for elastic fluidsMulti-stage pumps specially adapted for elastic fluids
30.
LEAK DETECTION DEVICE AND METHOD FOR CHECKING OBJECTS FOR FLUID TIGHTNESS BY MEANS OF A LEAK DETECTION DEVICE
A leak detection device has a test chamber (10) which, for evacuation, is connected to an evacuation pump device (14). Moreover, the test chamber (10) is connected by a test gas line (20) to a test gas pump device (18). The test gas pump device (18) is connected, at its main inlet (28), to a test gas detector (30), such that a detection of test gas can take place using the counter-current principle. A valve device (38) is arranged in the test gas line (20). This valve device (38) has a test gas chamber (44) for temporary storage of test gas removed from the test chamber (10).
G01M 3/20 - Investigating fluid tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
31.
CONVERSION COATING-FREE COMPONENTS OF VACUUM PUMPS
Bearing arrangement for rapidly rotating shafts of vacuum pumps, in particular turbomolecular pumps, having two bearing elements (12) which mount the shaft (10). At least one of the two bearing elements (12) has a bearing (16) having a bearing outer ring (20) which surrounds the rolling bodies (22). A damping element (32) is arranged between a pump housing (14) and the bearing outer ring (20). Furthermore, a holding element (28) which fixes the at least one damping element (32) is connected to the pump housing (14).
A stator element for a high-vacuum pump is arranged downstream of the last rotor element in the pumping direction (26). The stator element has a housing element (28), which is connected to a housing (12) of the high-vacuum pump. A plurality of stator webs (32), which are distributed regularly in the circumferential direction, are arranged on an inner surface (30) of the housing element (28).
A leakage search device has a backing pump connected to a test chamber (42) via a test gas line (48). Furthermore provided is a high-vacuum pump (10), at the inlet (36) of which a test gas detector (38) is arranged. The outlet (34) is connected to the backing pump (40). The test gas line (44) is connected, via a connecting line (48), to an intermediate region (50) arranged between the inlet (36) and the outlet (34) of the high-vacuum pump (10) for a non-detailed investigation of the object. A counter-flow path of the test gas, which extends from the intermediate region (50) to the inlet (36) is here shorter than the main flow path from the inlet (36) to the outlet (34) of the high-vacuum pump (10). Furthermore, a gas expansion device (44) for expanding the test gas to a pressure that is matched to the internal pressure level and suction capability of the high-vacuum pump (10) in the intermediate region (50) is arranged in the connecting line (48).
G01M 3/20 - Investigating fluid tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
F04D 19/04 - Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
The invention relates to a screw vacuum pump comprising screw rotors (12, 14) disposed in a suction chamber (10). The screw rotors (12, 14) are each supported by means of two bearing elements (20) in the pump housing and comprise a ratio of rotor length (I) to rotor axis spacing (d) that is greater than 3.0. The screw rotors (12, 14) further comprise a variable pitch, at least 7 turns, and an integral compression ratio of at least 4.5. The pitch after half of the turns is less than twice the pitch on the pressure side rotor outlet (24).
F04C 18/16 - Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons with helical teeth, e.g. chevron-shaped, screw type
F04C 18/08 - Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
F04C 25/02 - Adaptations for special use of pumps for elastic fluids for producing high vacuum
The service life of turbomolecular pumps comprising rotors that are mounted on mechanical rolling bearings, is frequently limited by the rolling bearings. In order to increase the service life of the rolling bearings, according to the invention a bearing cage (12) is provided, which, in addition to the openings (14) that are used to receive rolling elements, comprises recesses (18) for providing lubricant. The recesses are open at least partially in the direction of the rolling element opening.
The invention relates to a rolling bearing arrangement that is especially suitable for high-speed shafts of turbomolecular pumps. The rolling bearing arrangement comprises a plurality of rolling elements (10) that are positioned between a shaft (18) and a housing element (20) by means of a bearing cage (16). If a lubricating film between the rolling elements (10) and the bearing cage (16) tears, depending on the material of the rolling elements (10) and of the bearing cage (16) static electrical charges can be caused. By means of a voltage detection device (24), the static electrical charges of the rolling elements (10) and/or of the bearing cage (16) are detected in order to be able to detect the appearance of bearing damage at an early stage.
The present invention relates to the field of hot-traps, devices used together with vacuum pump systems to clean the gases exhausted from the treatment area. Particularly, the present invention discloses modifications of hot-trap devices. Furthermore, vacuum pump systems comprising such inline hot-trap devices are disclosed.
C23C 16/44 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
C23C 16/455 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into the reaction chamber or for modifying gas flows in the reaction chamber
C23C 16/48 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating by irradiation, e.g. photolysis, radiolysis, particle radiation
The invention relates to a vacuum roller bearing arrangement, in particular suitable for vacuum pumps, comprising a roller bearing (28) having an outer bearing race (36). A retaining sleeve (42) is disposed between the outer bearing race (36) and a housing element (40, 50). In order to improve the heat dissipation from the bearing (28), the retaining sleeve comprises a shoulder (52). The in particular radially extending annularly implemented shoulder (52) thus forms at least one additional heat transfer surface (56, 58).
The invention relates to a vacuum pump system comprising two vacuum pumps (12, 35) connected to each other. In order to provide a compact vacuum pump system, the two vacuum pumps are connected by connection elements (22, 38) connected directly to the pump housing and forming connection points (34), and the outlet flange (46) of the top pump (35) is placed directly on the inlet flange (14) of the bottom pump (12), without large forces or moments being transferred by same.
In order to provide an improved multistage oil separator, in particular for the use with compressors in cryogenics, the oil separator comprises a housing (10) having a gas inlet (18) and a gas outlet (20), and at least two filter elements (26, 28) arranged as a cascade in the housing between the gas inlet (18) and the gas outlet (20).
The invention relates to a vacuum pump comprising pump elements (14) in a suction chamber (12). One of the pump elements (14) is driven by an electric motor (24). A frequency converter (30) is provided for changing the rotational speed of the electric motor (24). The frequency converter (30) is arranged in a frequency converter housing (32) connected directly to the pump housing (10). An air cooler (34) and a liquid cooler (36) are arranged inside the frequency converter housing (32), for cooling the frequency converter (30).
The invention relates to a vacuum pump, such as a turbomolecular pump, comprising a pump element (14), which is carried by a shaft (12). The shaft (12) is supported in a pump housing (10) by means of a first bearing arrangement (24) and a second bearing arrangement (26). In order to compensate different thermal expansions of the shaft (12) and of the pump housing (10) occurring during operation, the first bearing arrangement (24) comprises a compensating element (32) for at least partially compensating axial movements.
The invention relates to a vacuum pump housing consisting of grey iron or nodular graphite iron and comprising a housing element (10) in which a cooling pipe (12) is cast for guiding a cooling medium therethrough. In order to ensure good heat transfer between the housing element (10) and the cooling medium in the cooling pipe, at least one holding element (18) is provided on an outer side (14) of the cooling pipe (12), for fixing the cooling pipe (12) in position in the housing element (10).
B22D 19/16 - Casting in, on, or around, objects which form part of the product for making compound objects cast of two or more different metals, e.g. for making rolls for rolling mills
The invention relates to a vacuum pump housing produced especially from grey iron or nodular graphite iron, cast aluminium or special steel casting and comprising a plurality of webs (12, 14) on an outer side of the housing. Said housing is also provided with a covering element extending over at least two webs (12, 14). A cooling channel (16) for guiding a coolant is formed by an inner side (22) of the covering element (18) and two opposing lateral walls (26) of adjacent webs (12, 14).
A vacuum pump housing has a pump housing (26) that forms a suction chamber. Pump elements are located in the suction chamber. A cooling element (10) is situated on a flat outer face (30) of the pump housing (26). The cooling element (10) has at least one cooling channel (12) that opens towards the outer face (30) of the pump housing (26). The invention also relates to a cooling element set comprising several cooling elements (10, 42, 44, 46) with different external dimensions.
The invention relates to a screw-type vacuum pump which is used, in particular, for compressing in relation to atmospheric pressure, comprising a suction chamber (12) which is arranged in a pump housing (10). Two screw-type rotors (14) which engage with each other are arranged in the suction chamber (12). Said pump also comprises a pressure relief outlet (26) which comprises several pressure relief openings (28) arranged in a lateral wall (24) of the suction chamber (12).
F04C 18/16 - Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons with helical teeth, e.g. chevron-shaped, screw type
48.
ROUGHING PUMP METHOD FOR A POSITIVE DISPLACEMENT PUMP
The invention relates to a simple and energy efficient roughing pump method for a positive displacement pump (10), used to produce a maximum differential pressure (ΔPmax) between the inlet (18) and the outlet (20) of the positive displacement pump (10), in which the rotational speed (Ω) of the positive displacement pump (10) is adapted to the maximum differential pressure (ΔPmax) to be generated, such that the power consumption (3, 4) of the positive displacement pump (10) is close to the minimum power (2) required for gas compression for producing the maximum difference pressure (ΔPmax).
F04C 18/12 - Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
F04C 28/08 - Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids characterised by varying the rotational speed
The invention relates to a multi-inlet vacuum pump having a first pump device (10) and a second pump device (12). The first pump device (10) comprises a first rotor element (18) having a plurality of first rotor discs (20, 21) arranged consecutively in the delivery direction (36). The second rotor disc comprises a second rotor element (26) having a plurality of second rotor discs (28) arranged consecutively in the delivery direction (36). A first fluid flow (34) is suctioned through a main inlet (32) by the first pump device (10) and delivered in the direction of the second pump device (12). A second fluid flow (40) is suctioned through an intermediate inlet (38) by the second pump device and delivered in the direction of a pump outlet. According to the invention, the diameter of the last rotor disc (21) of the first pump (10) substantially corresponds to the diameter of the first rotor (28) of the second pump device (12).
The invention relates to a multi-inlet vacuum pump having a first pump device (10) provided with a first rotor element (18) comprising several first rotor disks (20) which are arranged successively in the conveying direction (36), and a second pump device (12) provided with a second rotor element (26) comprising several second rotor disks (28) which are arranged successively in the conveying direction (36). The diameter of the second rotor disks (28) is at least partially greater than the diameter of the first rotor disks (20). The claimed multi-inlet vacuum pump also comprises a main inlet (32) through which a first fluid flow (34) is suctioned by the first pump device (10) and is conveyed in the direction of the second pump device ( 12). Furthermore, said pump comprises an intermediate inlet (38) through which a second fluid flow (40) is suctioned by the second pump device (12) and is conveyed in the direction of a pump outlet. Both fluid flows (34, 40) are joined inside the second pump device (12), in particular between two adjacent rotor disks (28) of the second pump device (12).
The invention relates to a vacuum pump, such as a helical vacuum pump, having pump elements (12) arranged in a crest space. Said helical line shaped pump elements (12) are each borne by a rotor shaft (14). The rotor shaft (14) is mounted on both sides. In order to enable cleaning of the rotor shafts (14) in a simple manner without removal being required, the housing (10) according to the invention comprises at least one side cover (26, 28) extending substantially parallel to the long axis (30) of said rotor shaft (14).
F01C 21/10 - Outer members for co-operation with rotary pistonsCasings
F04C 18/16 - Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons with helical teeth, e.g. chevron-shaped, screw type
F04C 25/02 - Adaptations for special use of pumps for elastic fluids for producing high vacuum
The invention relates to a vacuum pump, particularly a screw-vacuum pump, having a pump housing (14) wherein pump elements (10) are arranged. The pump housing (14) has a first flange (48) that is connected to a second flange (50) of a pump element (10), such as a transmission housing. There is a sealing groove (54) in one of the two flange surfaces (52) of the flange connection (44) in which a sealing element, such as an o-ring, is arranged. There is a circumferential protective channel (60) within the sealing groove (54). The protective channel (60) is connected via a gas channel (62) and a connection channel (64), such as to a gas source or a vacuum shaft. The protection channel (60) protects the sealing element arranged in the sealing groove (54).
F04C 18/16 - Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons with helical teeth, e.g. chevron-shaped, screw type
The invention relates to a vacuum pump, particularly a Holweck vacuum pump, comprising a pump housing (34), in which a rotor element (24, 36) is arranged. The rotor element comprises at least two tube-shaped conveying elements (24), which are arranged concentrically with each other and which are connected to a disk-shaped holding element (36). A stator element (26) is arranged between two adjacent conveying elements (24). According to the invention, a single helical channel (28) is formed by the stator element.
The invention relates to a vacuum pump comprising at least one pump element (12) arranged in a housing (10). The pump element is supported by a shaft (14). A fastening flange (20) is connected to the housing (10) in order to fasten the pump to a holding element (24). The fastening flange comprises fastening holes arranged along a circular line (26). Said fastening holes are designed to absorb energy in the event of bursting as elongated holes (28). The longitudinal axes (32) of the elongated holes (28) have an angle (α) to the tangent lines (34) on the circular line (26) that is not equal to zero.
An adsorber for separating a gas from an auxiliary fluid in a gas compressor has a pressure tank (1) for the gas/auxiliary-fluid mixture which is to be separated, wherein, for the purpose of separating the auxiliary fluid from the gas, the pressure tank (1) contains granules (3) through which the mixture can flow and which are enclosed by a filter, containing at least one filter element (5), and an inner wall of the pressure tank (1), it being possible for the gas or the mixture to flow through the filter. For the purpose of improving the separation of the gas and auxiliary fluid, the filter is a filter cartridge with a surround which retains the filter elements (5).
F25B 43/00 - Arrangements for separating or purifying gases or liquidsArrangements for vaporising the residuum of liquid refrigerant, e.g. by heat
F25B 43/02 - Arrangements for separating or purifying gases or liquidsArrangements for vaporising the residuum of liquid refrigerant, e.g. by heat for separating lubricants from the refrigerant
A turbomolecular pump comprises a rotor element (12) disposed in a pump housing (18). The rotor element (12) is surrounded by a stator element (24). An intermediate chamber (36) is provided between the stator element (24) and the pump housing (18). An energy absorption element (44) is disposed in the intermediate chamber (36) for the purposes of absorbing energy in case of a bursting of the rotor element (12).
F04D 19/04 - Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
F04D 29/52 - CasingsConnections for working fluid for axial pumps
F01D 21/04 - Shutting-down of machines or engines, e.g. in emergencyRegulating, controlling, or safety means not otherwise provided for responsive to undesired position of rotor relative to stator, e.g. indicating such position
A vacuum pump rotor, particularly a turbomolecular pump rotor, comprises a plurality of separate rotor elements (10). Each rotor element (10) comprises at least one rotor disc (18). The rotor disc (18) is connected to a cylindrical projection (12, 14) that forms a shaft section of the rotor. The projections (12, 14) of the rotor elements (10, 12) are connected to each other such that the projections (12, 14) form a rotor shaft.
In a method for operating an oil-tight vacuum pump, the total suction pressure present in a suction channel (22) of the vacuum pump is measured in a first step. In order to minimize the danger of a backflow of oil vapor into a vacuum region connected to the suction channel, the rotational speed of the vacuum pump is controlled as a function of the measured total suction pressure within a predetermined pressure range. The invention further relates to an oil-tight vacuum pump, wherein the suction channel (22) of the vacuum pump connected to the pump chamber is designed in a curved manner directly in front of an inlet (36) opening.
F04C 23/00 - Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluidsPumping installations specially adapted for elastic fluidsMulti-stage pumps specially adapted for elastic fluids
F04C 25/02 - Adaptations for special use of pumps for elastic fluids for producing high vacuum
F04C 28/08 - Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids characterised by varying the rotational speed
The invention relates to an effective method for cleaning a vacuum pump (10) comprising a pump chamber (12) with at least one pump rotor (14), characterized by the steps of: a) filling the pump chamber (12) with a cleaning fluid (28), b) distributing the cleaning fluid (28) in the pump chamber (12), c) dissolving impurities using the cleaning fluid (28) and d) draining the cleaning fluid (28) from the pump chamber (12).
B08B 3/08 - Cleaning involving contact with liquid the liquid having chemical or dissolving effect
B08B 9/00 - Cleaning hollow articles by methods or apparatus specially adapted thereto
F04C 29/00 - Component parts, details, or accessories, of pumps or pumping installations specially adapted for elastic fluids, not provided for in groups
LEIBNIZ-INSTITUT FÜR FESTKÖRPER- UND WERKSTOFFFORSCHUNG DRESDEN e.V. (Germany)
Inventor
Siegert, Lothar
Täschner, Christine
Abstract
The present invention relates to an apparatus for the condensation and/or adsorption of gases, particularly in a high vacuum, characterized in that nano-structured carbon particles obtained in particular by way of a CVD or plasma CVD method are connected in a heat-conducting manner to a refrigeration reservoir, which in particular has a temperature of ≤ 20 K.
F04B 37/02 - Pumps specially adapted for elastic fluids and having pertinent characteristics not provided for in, or of interest apart from, groups for evacuating by absorption or adsorption
F04B 37/08 - Pumps specially adapted for elastic fluids and having pertinent characteristics not provided for in, or of interest apart from, groups for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps
F04B 37/04 - Selection of specific absorption or adsorption materials
B01D 53/02 - Separation of gases or vapoursRecovering vapours of volatile solvents from gasesChemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases or aerosols by adsorption, e.g. preparative gas chromatography
A vacuum pump, such as for example, a Roots- or screw-type pump, features several pump elements (14) arranged in a suction chamber (12). At least one of the pump elements (14) is supported by a shaft (22). The shaft (22) extends from the suction chamber out into a motor space (26) and is connected to a drive motor (30). Outside of the motor space (26) there is a ventilator for cooling of a motor housing (20). According to the invention, the ventilator (32) is connected to the shaft (22) via a contactless drive mechanism (46, 48).
A stator-rotor arrangement for a vacuum pump, in particular for a turbomolecular pump, comprises a plurality of stator discs (18) that cooperate with a rotor element (14), said stator discs being disposed between rotor discs (16). The stator discs (18) are held by way of stator rings (20, 22). At least two of the stator rings (20) comprise protrusions (24) that are connected together by way of support elements (28, 30). This makes pre-installation of the rotor-stator arrangement (12) or placement of the rotor-stator arrangement (12) in a housing (10) possible, wherein the protrusions (24) are disposed in the area of corners (32) of the housing (10).
A rolling-element bearing for bearing rotating components in vacuum devices comprises a plurality of rolling elements (10) arranged between bearing elements (12, 14). A bearing compartment (26) is for example closed by sealing elements (22, 24) on both sides. Said sealing elements (22, 24) have a minor sealing gap (s). The rolling-elements bearing according to the invention are used in vacuum sections in which a pressure of less than 10-3 mbar prevails.
A method for determining an overall leakage rate of a vacuum system can be operated continuously or cyclically. The vacuum system comprises at least one process chamber (10) and a pumping device (16) connected to the process chamber (10). In a cyclical determination method according to the invention, the following steps are taken: suppressing a process gas feed to the process chamber (10), feeding a carrier gas to the process chamber (10), conveying the carrier gas and a leakage gas using the pumping device (16), measuring an amount of a gas component in the pumped gas, and determining the overall leakage rate of the vacuum system based on the measured amount of the gas component.
G01M 3/20 - Investigating fluid tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
G01M 3/22 - Investigating fluid tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material for pipes, cables, or tubesInvestigating fluid tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material for pipe joints or sealsInvestigating fluid tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material for valves
A vacuum pump, in particular a turbomolecular pump or a multi-inlet pump, comprises a rotor shaft (12) that supports at least one rotor device (14). The rotor shaft (12) is mounted on the pressure side by way of a bearing arrangement (56) and on the suction side by way of a bearing arrangement (30). According to the invention, the suction side bearing arrangement (30) is disposed in a high vacuum area (22) and comprises an electromagnetic bearing – preferably, a coil (32) of the electromagnetic bearing is disposed in a recess (38) of a housing element (40). The recess (38) is pressure-encapsulated, in particular by way of a tubular closure element (42).
The invention relates to a vacuum pump, in particular, a Roots type pump, comprising a lobe (12) arranged in a suction chamber (10). The pressure side (30) of the pump is connected to the suction side (20) by means of a connecting channel (22). A valve (24) is arranged in the connecting channel (22), which closes a through opening (32). On exceeding a set pressure difference between the pressure side (30) and the suction side (20) the valve opens automatically. In order to reduce the necessary space and to reduce the switching noise from the valve the valve body is embodied as a flap valve (28).
F04C 18/12 - Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
F04C 28/26 - Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids characterised by using valves controlling pressure or flow rate, e.g. discharge valves using bypass channels
A shaft arrangement for fast-rotating shafts, such as are used as rotor shafts for turbomolecular pumps in particular, comprises two separate shaft journals (10) that are connected together. A roller bearing (12) is disposed at each of the two shaft journals (10). By separating the shaft into at least two parts, or two shaft journals, it is possible to provide running surfaces (22) for rolling elements (18) of the roller bearings (12) directly on a surface (20) of the shaft journals.
Vacuum pumps comprise pump elements disposed in a suction chamber formed from a housing. Dirt builds up at the pump elements and at the walls of the suction chamber. To clean the vacuum pump, a container comprising a cleaning fluid is connected to the suction chamber. Also provided is a control device that is connected to at least one sensor element. At least one pump parameter is detected by the sensor element and sent to the control unit for further processing. The control unit comprises a monitoring program for further processing. The monitoring program is adapted to initiate a cleaning program as a function of at least one triggering parameter stored in the control unit, wherein the cleaning program feeds cleaning fluid to the suction chamber on a time and/or amount basis and automatically repeats the process as necessary. The cleaning fluid can be completely used up. Also, it is possible to filter solids from the cleaning fluid.
F04C 29/00 - Component parts, details, or accessories, of pumps or pumping installations specially adapted for elastic fluids, not provided for in groups
The invention relates to a multi-stage vacuum pump, comprising a plurality of rotor elements (14, 16) disposed on a common shaft (10) in a pump housing (12) for configuring multiple pump stages (18, 24, 26). The shaft is driven by an electric motor (40). An inner bearing element (42) is disposed between two rotor elements (14, 16) such that a mechanically favorable bearing arrangement is implemented using a simple configuration of the bearing elements (42, 44) as roller bearings. This is possible in particular due to the separation into two rotor elements (14, 16).
A vacuum pump has a suction chamber (12), in which multiple pump elements (14) are disposed. The suction chamber (12) is connected to a container (28) for receiving a cleaning liquid. Sound waves can be generated via noise generators (34, 36, 40) to clean the pump elements (14) and/or an inner wall (46) of the suction chamber (12). According to a method according to the invention, the introduction of the sound waves is performed in particular after the suction chamber (12) has already been filled completely with cleaning liquid.
F04C 29/00 - Component parts, details, or accessories, of pumps or pumping installations specially adapted for elastic fluids, not provided for in groups
F04D 19/04 - Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
B08B 3/12 - Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration by sonic or ultrasonic vibrations
The invention relates to a pump stator (10) and a pump rotor (11). The pump rotor (11) contains a transponder (14) that can be read out by a reader of the pump stator. The pump rotor (11) also contains sensors (26) for determining operating data (BD), and a memory (27). The memory (27) stores either the history of the measured operating data (BD) or a service life characteristic (LDK). In this way, the rate of wear of the respective rotor is determined and stored in the rotor, and the rotor therefore contains all of the information relating to maintenance. The rotor-related information remains in the rotor even if the rotor is used in another vacuum pump.
The invention relates to a pump stator (10) and a pump rotor (11). Said pump rotor (11) contains a transponder (14) that can be read out by means of a reader (12) of the pump stator. The pump rotor (11) also contains an identity protection memory (25) in which rotor information is stored. A control unit (20) generates the running of the motor (21) of the vacuum pump only when the related pump rotor (11) is authorised and adapted to the pump stator (10), thereby preventing the use of unauthorised (copied) rotors. Furthermore, it is ensured that the pump rotors cannot be exchanged during maintenance work and rotors can be operated without any risk of damage until the end of the period of use or the end of the service life is signalled.
The invention relates to a fluid-sealed or fluid-lubricated vacuum pump (10) having a pumping path (30) that runs through the vacuum pump (10) and containing an auxiliary fluid (20) for sealing or lubricating the vacuum pump (10). To improve the start behaviour of said pump and to reduce the energy consumption, a valve (100), which is actuated by an expansion material element (120), is provided, said element (120) being located in such a way that the valve (100) is actuated when the temperature of the expansion material sinks below a predetermined value. The valve (100) is arranged in such a way that once said valve is actuated below the predetermined value, the drive torque of the pump (10) is reduced.
F04C 18/344 - Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups , , , , , or having the characteristics covered by one of these groups together with some other type of movement between co-operating members having the movement defined in group or and relative reciprocation between the co-operating members with vanes reciprocating with respect to the inner member
F04C 28/06 - Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids specially adapted for stopping, starting, idling or no-load operation
A vacuum exhaust-gas line system for removing toxic and/or combustible gases has a first line section (10), at least one central line section (12) and a last line section (14). Flange connections (28) have two annular sealing elements (32, 34), between which a sealing chamber (36) is formed. The sealing chamber is connected via pipes (38, 48, 50, 52, 54) to a pressure device (40) for feeding in nitrogen or another inert gas. Exceeding or undershooting limiting values for the pressure and/or the throughflow can be detected by means of a monitoring device which preferably has a pressure sensor (58) and a throughflow sensor (60). A warning signal is generated and/or the plant is switched off via a control device (64).
F16L 23/16 - Flanged joints characterised by the sealing means
G01M 3/28 - Investigating fluid tightness of structures by using fluid or vacuum by measuring rate of loss or gain of fluid, e.g. by pressure-responsive devices, by flow detectors for pipes, cables, or tubesInvestigating fluid tightness of structures by using fluid or vacuum by measuring rate of loss or gain of fluid, e.g. by pressure-responsive devices, by flow detectors for pipe joints or sealsInvestigating fluid tightness of structures by using fluid or vacuum by measuring rate of loss or gain of fluid, e.g. by pressure-responsive devices, by flow detectors for valves
The invention relates to a turbo molecular pump, comprising a rotor (12) connected to a drive shaft (10). The rotor (12) has multiple rotor blades (16). The rotor (12) is surrounded by stator rings (26), wherein one stator ring (26) is provided for each rotor blade (16). In order to enable radial expansion of the rotor blade during operation, the stator rings (26) have annular grooves (32).
A vacuum pump, in particular a Roots vacuum pump, has a pump chamber (12) which is formed by a pump housing (10). Pump elements (14) which are driven by a drive motor are arranged in the pump chamber (12). A medium is pumped by the pump elements from the pump inlet (18) through the pump chamber (12) and from the latter through the pump outlet (20). In order to avoid overheating, a flow channel (24) is provided, through which at least if required medium can be returned from the pump outlet (20) to the pump inlet (18). A valve device (30) is provided in the flow channel. According to the invention, the valve device (30) can be regulated and, to this end, is connected to a regulating device (52). Furthermore, the invention relates to a method for operating the vacuum pump.
F04C 18/12 - Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
F04C 28/26 - Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids characterised by using valves controlling pressure or flow rate, e.g. discharge valves using bypass channels
The invention relates to a turbomolecular pump (10) having a pump housing (14) and multiple separate stator blade ring discs (16), which form a ring disc packet (18) together. A cylindrical friction bush (20) is disposed directly between the ring disc packet (18) and the pump housing (14). An axial gap (22) is provided axially between the ring disc packet (18) and the pump housing (14), so the ring disc packet (18) can be rotated.
The invention relates to a multi-stage pump rotor (10) for a turbo molecular pump. The pump rotor (10) has at least two separate blade disk rings (17), each having a rotor ring (12) and at least one blade disk (14). A cylindrical reinforcement pipe (18), which surrounds the rotor rings (12) of the blade disk rings (17) on the outside without clearance, is provided between the blade disks (14) of adjacent blade disk rings (17). The reinforcement pipe (18) absorbs a large part of the tangential forces occurring during operation such that the pump rotor (10) has improved stability at high rotor speeds.
An air supply device for printing machines comprises a pressure tank (24). A plurality of connecting lines (22, 26) are connected to the pressure tank (24) for providing pressure to handling organs (20). A pressure generation device (28) for generating pressure in the pressure tank (24) is further provided. According to the invention, the pressure generation device (28) is disposed inside the pressure tank.
The invention relates to a vacuum pump (10) having a pump rotor (16), and active magnetic bearing (20,21), a safety bearing (22,23) associated with the magnetic bearing (20,21), an electric drive motor (18) having a motor stator having a plurality of stator coils (191,192,193) for driving the pump rotor (16), a brake relay (42) having a plurality of changers each having a base contact (62,63,64), a brake contact (44,45,46) and an operational contact (47,48,49), and a short circuit point (60) by way of which all brake contacts (44,45,46) of the brake relay (42) are directly connected to each other. All stator coils (191,192,193) are connected to the base contacts (62,63,64) of the changer, and can be connected directly to each other by way of the brake contacts (44,45,46) of the brake relay (42) and by way of the short circuit point (60), and can be connected to an inverter module (32) by way of the operational contacts (47,48,49).
A vacuum pump, which in particular is a vane-type rotary pump or a screw-type pump, comprises a compression chamber (20). The compression chamber (20) is provided with a chamber inlet (22) and a chamber outlet (26). Furthermore, the compression chamber (20) is connected to a gas ballast inlet (32). In order to ensure consistent gas flow through the gas ballast inlet (32) when the pressures within the compression chamber (20) vary, the gas ballast inlet (32) is connected to a gas ballast chamber (36). Gas is stored under pressure in the gas ballast chamber (36). The pressure is higher than the atmospheric pressure and/or higher than the pressure in the compression chamber (20). Thus, excess heating of the vacuum pump can be prevented.
F04C 18/344 - Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups , , , , , or having the characteristics covered by one of these groups together with some other type of movement between co-operating members having the movement defined in group or and relative reciprocation between the co-operating members with vanes reciprocating with respect to the inner member
F04C 18/16 - Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons with helical teeth, e.g. chevron-shaped, screw type
The invention relates to a turbomolecular pump (10) having a rotor (18) which is mounted on a housing (12) by means of at least one rolling bearing (16). The rolling bearing (16) has a non-rotating bearing shell (20) and a rotating bearing shell (22). The non-rotating bearing shell (20) is mounted on the housing (12) by means of an elastic vibration ring (14). The vibration ring (14) is of anisotropic design, such that the spring stiffness is non-uniform over the periphery.
The vacuum pump has a housing (10) which is closed by way of a vacuum lid (20). A printed circuit board (16) is situated as current leadthrough between an end wall (14) of the housing (10) and the vacuum lid (20). The printed circuit board is sealed by way of two seals (15, 21) of different diameter, with the result that an annular part region (22) is exposed to atmospheric pressure on the outside and to the vacuum on the inside. It is avoided that the printed circuit board (16) projects laterally beyond the contour of the housing (10).
The invention relates to a pump bearing arrangement suitable particularly for rapidly rotating pumps, such as turbomolecular pumps, having a pump rotor (10) connected to a rotor shaft. The rotor shaft (14) is supported in a shaft housing (20) by two bearing devices (12). Each bearing device (12) has an inner bearing ring (16) connected to the rotor shaft (14) and an outer bearing ring (22) connected to the shaft housing (20). Bearing supports (24) are disposed between the two bearing rings. According to the invention, at least one vibration element (26) is provided between the outer bearing ring (22) and the shaft housing (20), serving for damping and further having a thermal conductivity of at least 0.3 W/mK for dissipating heat.
The invention relates to a mass spectrometer arrangement (10) comprising a housing (86) which encompasses a mass spectrometer forevacuum chamber (20) equipped with a mass spectrometer forevacuum outlet (30), at least two mass spectrometer high-vacuum chambers (21, 22, 23), and an integrated turbomolecular pump (12) that is connected to the high-vacuum chambers (21, 22, 23) and has a forevacuum outlet (89). The two forevacuum outlets (30, 89) extend into a common forevacuum space (98) in the housing (86), said forevacuum space (98) extending into a housing outlet (88).
The invention relates to a turbomolecular pump (12) with a circular suction opening (16) distal from an inlet rotor stage (18). The suction opening (16) has at least two opening sections (41,42,43) separated from each other.
A method for determining the fatigue of a pump rotor of a gas turbopump has the following method steps: continuous detection of the rotor rotational speed (n) of the pump rotor, detection of the local rotational-speed maxima and minima of a temporal rotational-speed profile under consideration, association of the rotational-speed maxima and minima with one another to form pairs, detection of a pair fatigue value (L) for each of the rotational-speed pairs, and accumulation of all pair fatigue values (L) to form an overall fatigue value (Ltot). It becomes possible in this way to detect the cycle loading for the pump rotor of a vacuum pump and to incorporate it into the calculation of an overall fatigue value.
The invention relates to a vacuum line (10) comprising two line parts (12, 13) connected by a vibration damper (14). The vibration damper (14) is formed by a vertical outer tube (18) and a vertical inner tube (20), the inner tube (20) being at a distance from the outer tube (18). A flexible traction collar (30) is fixed between the opening edges (19, 42) of the outer tube (18) and the inner tube (20), said collar connecting the two opening edges (19, 42) between the inner tube (20) and the outer tube (18) in a vacuum-tight manner. In this way, a vibration damper with good damping properties is created.
The invention relates to a rapidly rotating vacuum pump comprising a magnet-mounted rotor driven by an electric drive motor and having a fixed constant nominal rotational frequency (fnom). The rotor and the rotor bearing are embodied in such a way that the critical counter-rotational resonance frequency (fcrit ) is between 3 % and a maximum of 30 % above the nominal rotational frequency (fnom), thereby preventing an overspeed.
The invention relates to a method for determination of resonant frequencies of a rotor using magnetic bearings, in particular of a rotor of a turbomolecular vacuum pump. While the rotor is stationary or the rotor is rotating at a relatively low rotation frequency, mechanical oscillations of the rotor are generated by electromagnets in the magnetic bearing. The rotor oscillations are detected by rotor-position sensors in the magnetic bearing. The resonant frequencies of the rotor are determined from the detected rotor-position oscillations.
The invention relates to a fast rotating vacuum pump for generating a high vacuum. Fast rotating vacuum pumps could be combined together with fast rotating high vacuum pumps, for example turbomolecular pumps, to form single shaft vacuum pumps which can compress from high vacuum or ultra high vacuum to atmospheric pressure. For this purpose, the inventive vacuum pump (10) has a suction stage (12) and a centripetal compressor stage (21) placed thereafter in line, with radially extending compression chambers (33), the outlet cross section of which is smaller than 0.4 times the cross section of the inlet. The centripetal compressor is not a displacement machine and can therefore be operated at high rotational speeds and can compress gases from pre-vacuum pressures to atmospheric pressure at high rotational speeds. This creates the possibility of generating a high vacuum or ultra high vacuum with only one single shaft fast rotating vacuum pump.
F04D 17/02 - Radial-flow pumps specially adapted for elastic fluids, e.g. centrifugal pumpsHelico-centrifugal pumps specially adapted for elastic fluids having non-centrifugal stages, e.g. centripetal
F04D 17/16 - Centrifugal pumps for displacing without appreciable compression
F04D 19/04 - Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
A process gas (38), possibly comprising reactive particles (40), is suctioned into a vacuum pump device. Oxygen in form of air or pure oxygen is supplied in a controlled manner via an oxygen intake (26, 26a, 26b) into the vacuum pump device. Controlled oxidation thus takes place in the compression chamber (24) such that the dust cannot self-ignite in case of sudden ventilation.
F04C 29/00 - Component parts, details, or accessories, of pumps or pumping installations specially adapted for elastic fluids, not provided for in groups
The invention relates to a vacuum pump (10) having a vacuum-tight housing (12) and having a gas-tight electrical leadthrough (20) for producing an electrical connection between an electrical component (14, 16, 18) within the housing (12) and the housing outer side. The leadthrough (20) is formed by a housing opening (22), by a sealing compound body (24) which is seated on the opening, by an electrical line in the sealing compound body (24), by a sealing ring (26) between the opening edge of the housing opening (22) and the sealing compound body (24), and by a fixing (32) for fastening the sealing compound body (24) to the housing (12).
The invention relates to a method for determining a statement of a state of a turbomolecular pump and a turbomolecular pump, wherein a vibration curve is determined with a vibration sensor (10) connected to the turbomolecular pump. The determined vibration curve is transferred to an evaluation device (12), wherein vibrations are detected by a filter (16) in the evaluation device (12) and then compared to comparative values. If a threshold value is exceeded, a warning signal is transferred to a monitoring system (30) by a remote data transfer device (28). The method allows for online-monitoring of turbomolecular pumps.
The invention relates to a vacuum pump (10) with an electric drive motor (12) which has a motor-rotor (30) and a motor-stator (28). According to the invention, the motor-stator (28) is arranged inside a vacuum-sealed motor housing (24) in the vacuum. The motor-stator (28) is cast in a casting-compound body (43) and in this way is hermetically insulated against the vacuum. The casting compound (44) acts as an electrical insulator which prevents voltage discharges between coil windings, and additionally acts as a good thermal conductor which allows the heat generated in the motor-stator (28) to be dissipated. Both the motor-rotor (30) and the motor-stator (28) are arranged in the vacuum such that there is no need for a spacer can. The drive motor (12) thus has a high efficiency and a high power factor.
F04C 29/00 - Component parts, details, or accessories, of pumps or pumping installations specially adapted for elastic fluids, not provided for in groups
The invention relates to a vacuum pump in which the gas bearing is coated with a hard layer and to a method of producing this gas bearing of a vacuum pump.
The invention relates to a method for producing the rotors or stators of a turbomolecular pump having rotor blades that are produced from a special aluminum alloy.
C22C 21/14 - Alloys based on aluminium with copper as the next major constituent with silicon
C22F 1/057 - Changing the physical structure of non-ferrous metals or alloys by heat treatment or by hot or cold working of aluminium or alloys based thereon of alloys with copper as the next major constituent
C22C 21/14 - Alloys based on aluminium with copper as the next major constituent with silicon
C22F 1/057 - Changing the physical structure of non-ferrous metals or alloys by heat treatment or by hot or cold working of aluminium or alloys based thereon of alloys with copper as the next major constituent
A vacuum line (100) has a vibration damper for reducing the transmission of vibrations from one part (114) to another part (116). The vibration damper is formed by a gas damper.
F16L 23/22 - Flanged joints characterised by the sealing means the sealing means being rings made exclusively of a material other than metal
F16L 25/00 - Construction or details of pipe joints not provided for in, or of interest apart from, groups
F16L 55/04 - Devices damping pulsations or vibrations in fluids
F04B 39/00 - Component parts, details, or accessories, of pumps or pumping systems specially adapted for elastic fluids, not otherwise provided for in, or of interest apart from, groups
F04D 29/66 - Combating cavitation, whirls, noise, vibration, or the likeBalancing
A Roots vacuum pump (10) has two rotary pistons (16, 17) which rotate about parallel rotational axes (14, 15). A housing (12) encloses a pump chamber (11), and has a gas inlet opening (30) and, situated opposite, a gas outlet opening (40). The inlet opening (30) and the outlet opening (40) are in each case delimited by control edges (50,51,52,53) which are aligned at an inlet angle (α1) and at an outlet angle (α2) respectively with respect to a rotational axis plane (58). The inlet angle (α1) is greater than the outlet angle (α2). In this way, a good filling degree of the moving pump chamber (26) is obtained on the one hand, and as a result of the late opening, the return flow losses are kept low. In this way, the volumetric efficiency of the Roots vacuum pump (10) is improved.
F04C 18/08 - Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
F04C 18/12 - Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
F04C 29/12 - Arrangements for admission or discharge of the working fluid, e.g. constructional features of the inlet or outlet
patents
