3REF3RE-O-FREF33RE-O-F33 and RE-O-F are 40 nm to 100 nm. It is also preferable that the average particle diameter of primary particles as observed with a scanning electronic microscope (SEM) is 0.1 µm to 1.0 µm.
C23C 4/04 - Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge characterised by the coating material
100100 value is 1-10 µm, as determined by means of a laser diffraction/scattering particle size distribution measurement method carried out using an ultrasonic wave dispersion treatment. (II) If the true density of the rare earth oxide is taken to be ρ (g/cm3ADTDADTDADTDTD=(1-TD/ρ)×100 (%). (b) The primary particle diameter is not less than 10 nm and less than 100 nm, and (III) and (IV) are satisfied. (III) A numerical value obtained by multiplying the true density (g/cm3) by the volume (cm3/g) of pores having pore diameters of 0.005-100 µm is 3-14. (IV) A numerical value obtained by multiplying the true density (g/cm3) by the volume (cm3/g) of pores having pore diameters of 5-50 nm is 0-2.0.
C23C 4/04 - Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge characterised by the coating material
C23C 24/04 - Impact or kinetic deposition of particles
C23C 4/12 - Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge characterised by the method of spraying
C23C 14/06 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
A sintered body contains perovskite YAlO3 (YAP) as a main phase exhibited in X-ray diffractometry, and has a Vickers hardness of 11 GPa or more. In the case where the sintered body contains a composition other than YAlO3, the composition preferably substantially consists of Y3Al5O12 and Y4Al2O9. The sintered body preferably has an absolute density of 5.1 g/cm3 or more. The sintered body preferably has an open porosity of 1% or less, and also preferably has an average crystal grain size of 10 μm or less.
C04B 35/505 - Shaped ceramic products characterised by their compositionCeramic compositionsProcessing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on rare earth compounds based on yttrium oxide
This material for a sintered body contains an oxyfluoride of a rare earth element represented by REaObFc (where, RE is the rare earth element, b/a is at most 0.9, and c/a is at least 1.1), and has a molar ratio (F/RE molar ratio) of moles of fluorine (F) to moles of the rare earth element (RE) in the entirety of the material is 1.3 to 2.8, and the content of aluminum (Al) is at most 50 mass ppm. The content of silicon (Si) is preferably at most 500 mass ppm.
C04B 35/50 - Shaped ceramic products characterised by their compositionCeramic compositionsProcessing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on rare earth compounds
C04B 35/553 - Shaped ceramic products characterised by their compositionCeramic compositionsProcessing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxides based on fluorides
A powder for coating or sintering exhibits a peak assigned to orthorhombic YAlO3 in an X-ray diffractometry. Of peaks exhibited in the X-ray diffractometry, the peak assigned to the (112) plane of orthorhombic YAlO3 is a peak that has the highest peak intensity. Preferably, the value of the ratio of S2 to S1, S2/S1, is less than 1 in an X-ray diffractometry using CuKα radiation, where SI represents the peak intensity of the peak assigned to the (112) plane of orthorhombic YAlO3 and S2 represents the peak intensity of the peak assigned to the (104) plane of trigonal Al2O3.
3335124299 and preferably has an absolute density of at least 5.1 g/cm3. The sintered body preferably has an open porosity of no more than 1% and an average crystal particle diameter of no more than 10 μm.
C04B 35/44 - Shaped ceramic products characterised by their compositionCeramic compositionsProcessing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxides based on aluminates
C04B 35/505 - Shaped ceramic products characterised by their compositionCeramic compositionsProcessing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on rare earth compounds based on yttrium oxide
A sintered material is provided having a phase of a compound at least containing a rare earth element and fluorine, the sintered material having an L* value of 70 or more in the L*a*b* color space. The crystal grains of the sintered material preferably has an average grain size of 10 μm or less. The sintered material preferably has a relative density of 95% or more. The sintered material preferably has a three-point flexural strength of 100 MPa or more. The sintered material preferably contains no oxygen, or preferably has an oxygen content of 13% by mass or less when containing oxygen. The compound is preferably rare earth element fluoride or oxyfluoride.
C04B 35/50 - Shaped ceramic products characterised by their compositionCeramic compositionsProcessing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on rare earth compounds
3/g or more as determined by a gas absorption method. The powder also preferably has a crystallite diameter of 25 nm or less. The powder also preferably has a repose angle of from 10 to 60°. In the L*a*b* color system, the powder also preferably has a value L of 85 or more, a value a of from −0.7 to 0.7, and a value b of from −1 to 2.5.
C01F 17/34 - Aluminates, e.g. YAlO3 or Y3-xGdxAl5O12
B22F 1/00 - Metallic powderTreatment of metallic powder, e.g. to facilitate working or to improve properties
C04B 35/44 - Shaped ceramic products characterised by their compositionCeramic compositionsProcessing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxides based on aluminates
C22C 1/04 - Making non-ferrous alloys by powder metallurgy
C22C 1/05 - Mixtures of metal powder with non-metallic powder
The coating material according to the present invention is obtained by dissolving, in an organic solvent, a complex of at least one rare-earth element selected from the group consisting of praseodymium, neodymium, samarium, dysprosium, holmium, erbium, thulium, and ytterbium. The rare-earth element is particularly preferably neodymium. The complex preferably has a ligand represented by formula (1). In formula (1), ring A represents a benzene ring or a naphthalene ring, R represents an alkyl group having 1-24 carbon atoms or an alkoxy group having 1-22 carbon atoms, and m represents a number of 0-3.
3512333512351212 is a peak indicating the maximum peak intensity in the X-ray diffraction measurement in the scan field of 2θ=20° to 60° using the CuKα line.
C04B 35/10 - Shaped ceramic products characterised by their compositionCeramic compositionsProcessing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxides based on aluminium oxide
C04B 35/44 - Shaped ceramic products characterised by their compositionCeramic compositionsProcessing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxides based on aluminates
C23C 4/10 - Oxides, borides, carbides, nitrides or silicidesMixtures thereof
C23C 4/04 - Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge characterised by the coating material
C23C 14/06 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
C04B 35/50 - Shaped ceramic products characterised by their compositionCeramic compositionsProcessing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on rare earth compounds
C04B 35/515 - Shaped ceramic products characterised by their compositionCeramic compositionsProcessing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxides
C04B 35/553 - Shaped ceramic products characterised by their compositionCeramic compositionsProcessing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxides based on fluorides
C23C 14/26 - Vacuum evaporation by resistance or inductive heating of the source
C23C 14/35 - Sputtering by application of a magnetic field, e.g. magnetron sputtering
C23C 24/08 - Coating starting from inorganic powder by application of heat or pressure and heat
C04B 111/00 - Function, property or use of the mortars, concrete or artificial stone
A sintered body that has a phase of a compound that includes at least a rare earth element and fluorine, the L* value of the sintered body in L*a*b* color display being at least 70. The average grain size of crystal grains of the sintered body is preferably no more than 10 μm. The relative density of the sintered body is preferably at least 95%. The three-point bending strength of the sintered body is preferably at least 100 MPa. The sintered body preferably does not include oxygen or has an oxygen content of no more than 13 mass%. The compound is preferably a fluoride of a rare earth element or an oxyfluoride.
C04B 35/50 - Shaped ceramic products characterised by their compositionCeramic compositionsProcessing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on rare earth compounds
C04B 35/553 - Shaped ceramic products characterised by their compositionCeramic compositionsProcessing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxides based on fluorides
The material for cold spraying of the present invention comprises a powder of a rare-earth element compound, the powder having a specific surface area, as determined by the one-point BET method, of 30 m2/g or larger. It is preferable that the powder have a volume of pores each having a diameter of 3-20 nm, as determined by a gas adsorption method, of 0.08 cm3/g or greater. The powder has a crystallite diameter of preferably 25 nm or smaller. The powder has an angle of response of preferably 10-60°. In the L*a*b* color system, the value of L is preferably 85 or greater, the value of a is preferably -0.7 to 0.7, and the value of b is preferably -1 to 2.5.
C23C 14/06 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
C23C 4/04 - Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge characterised by the coating material
C04B 35/553 - Shaped ceramic products characterised by their compositionCeramic compositionsProcessing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxides based on fluorides
C04B 35/50 - Shaped ceramic products characterised by their compositionCeramic compositionsProcessing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on rare earth compounds
C23C 4/12 - Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge characterised by the method of spraying
This film-forming material includes an oxyfluoride of yttrium, and has a Fischer diameter of 1.0-10 μm and a TD/AD, which is the ratio of the tapped apparent bulk density TD and the static apparent bulk density AD, of 1.6-3.5. The film-forming material preferably is preferably configured such that the volume of pores having a diameter of 100 μm or less as measured by the mercury penetration method is 1.0 cm3/g or less. This film includes an oxyfluoride of yttrium, wherein the film has a Vickers hardness of 200HV0.01 or higher. The film preferably has a fracture toughness of 1.0 x 102Pa∙m1/2 or higher.
C04B 35/553 - Shaped ceramic products characterised by their compositionCeramic compositionsProcessing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxides based on fluorides
C04B 35/505 - Shaped ceramic products characterised by their compositionCeramic compositionsProcessing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on rare earth compounds based on yttrium oxide
C04B 35/50 - Shaped ceramic products characterised by their compositionCeramic compositionsProcessing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on rare earth compounds
C04B 35/622 - Forming processesProcessing powders of inorganic compounds preparatory to the manufacturing of ceramic products
C04B 35/626 - Preparing or treating the powders individually or as batches
B01J 2/00 - Processes or devices for granulating materials, in generalRendering particulate materials free flowing in general, e.g. making them hydrophobic
7. The sintered body of the present invention preferably contains 50% by mass or more of yttrium oxyfluoride. The sintered body of the present invention has a relative density of preferably 70% or more and an open porosity of preferably 10% or less. Furthermore, the sintered body of the present invention has a three-point bending strength of preferably 10 MPa or more and 300 MPa or less.
C04B 35/50 - Shaped ceramic products characterised by their compositionCeramic compositionsProcessing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on rare earth compounds
H01L 21/67 - Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereofApparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components
C23C 4/04 - Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge characterised by the coating material
This sintering material comprises granules, has a tapped apparent density of 1.0-2.5g/cm3, has a cumulative volume particle diameter of 10-100μm at a cumulative volume of 50vol% as measured by laser diffraction/scattering particle size distribution measurement before ultrasonic dispersion processing, and has a cumulative volume particle diameter of 0.1-1.5μm at a cumulative volume of 50vol% as measured by laser diffraction/scattering particle size distribution measurement after ultrasonic dispersion processing at 300W for 15 minutes. The sintering material is a rare earth metal oxyfluoride of which the maximum peak observed at 2θ=20°-40°, as measured by X-ray diffraction using Cu-Kα rays or Cu-Kα1 rays, is in the form LnOF.
C04B 35/50 - Shaped ceramic products characterised by their compositionCeramic compositionsProcessing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on rare earth compounds
C04B 35/553 - Shaped ceramic products characterised by their compositionCeramic compositionsProcessing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxides based on fluorides
C04B 35/622 - Forming processesProcessing powders of inorganic compounds preparatory to the manufacturing of ceramic products
25.
POWDER FOR FILM FORMATION AND MATERIAL FOR FILM FORMATION
This powder for film formation contains an oxyfluoride of a rare earth element (Ln-O-F). The average particle diameter (D50) of this powder is from 0.1 μm to 10 μm (inclusive), and the volume of pores having a diameter of 10 μm or less as determined by a mercury intrusion method is from 0.1 cm3/g to 0.5 cm3/g (inclusive). In an X-ray diffraction measurement of this powder using a Cu-Kα ray or a Cu-Kα1 ray, the ratio of the maximum peak intensity (S0) of an oxide of a rare earth element (LnxOy) as observed within the range of 2θ = 20-40° to the maximum peak intensity (S1) of the oxyfluoride of a rare earth element (Ln-O-F) as observed within the same range, namely S0/S1 is 1.0 or less.
C23C 4/04 - Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge characterised by the coating material
A sintered body according to the present invention comprises yttrium oxyfluoride. The yttrium oxyfluoride is preferably YOF and/or Y5O4F7. The sintered body according to the present invention preferably comprises 50 mass% or more of the yttrium oxyfluoride. The sintered body according to the present invention preferably has a relative density of 70% or more and an open porosity of 10% or less. The sintered body according to the present invention preferably has a three-point bending strength of 10 to 300 MPa.
C04B 35/553 - Shaped ceramic products characterised by their compositionCeramic compositionsProcessing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxides based on fluorides
C04B 35/50 - Shaped ceramic products characterised by their compositionCeramic compositionsProcessing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on rare earth compounds
A slurry for thermal spraying according to the present invention comprises particles each containing an oxyfluoride of a rare earth element and a dispersion medium, wherein the average particle diameter of the particles is 0.01 to 10 μm. Each of the particles may also contain a fluoride of a rare earth element. It is preferred that, in an X-ray diffraction measurement of the particles using a Cu-Kα line or a Cu-Kα1 line, the ratio (S0/S1) of the intensity (S0) of the maximum peak of an oxide of a rare earth element which appears in the range of 2θ = 20 to 40 degrees to the intensity (S1) of the maximum peak of an oxyfluoride of the rare earth element which appears in the same range is 0.10 or less.
C23C 4/04 - Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge characterised by the coating material
C23C 4/10 - Oxides, borides, carbides, nitrides or silicidesMixtures thereof
A thermal spray material according to the present invention contains granules each containing an oxyfluoride of a rare earth element, has a cumulative volume particle size of 1 to 150 μm at a cumulative volume of 50 vol% as measured by a laser diffraction scattering particle size distribution measurement method before the thermal spray material is subjected to an ultrasonic dispersion treatment, and has a cumulative volume particle size of 10 μm or less as measured in the same manner as mentioned above after the thermal spray material is subjected to an ultrasonic dispersion treatment at 300 W for 15 minutes, wherein the cumulative volume particle size of the thermal spray material after the thermal spray material is subjected to an ultrasonic dispersion treatment is 1/3 or less of that before the thermal spray material is subjected to an ultrasonic dispersion treatment. The thermal spray material has an average aspect ratio of 2.0 or less and a compaction degree of 30% or less. When each of the granules contains a fluoride of a rare earth element as well as the oxyfluoride of the rare earth element, it is preferred that the ratio (S1/S2) of the intensity (S1) of the maximum peak of the oxyfluoride of the rare earth element, which is observed in a range of 2θ = 20 to 40 degrees, to the intensity (S2) of the maximum peak of the fluoride of the rare earth element, which is also observed in the above-mentioned range, is 0.10 or more in an X-ray diffraction measurement using Cu-Kα line or Cu-Kα1 line.
C23C 4/04 - Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge characterised by the coating material
This thermal spray material has granules containing yttrium oxyfluoride (YOF). The granules may also contain yttrium fluoride (YF3). The oxygen content of the granules is preferably 0.3 mass% to 13.1 mass%. The fracture strength of the granules is preferably 0.3 MPa to less than 10 MPa. Some of the yttrium (Y) in the granules may be substituted by at least one rare earth element (Ln) other than yttrium. The mole fraction of Ln in relation to the total of Y and Ln in such an instance is preferably no greater than 0.2.
C23C 4/10 - Oxides, borides, carbides, nitrides or silicidesMixtures thereof
C04B 35/50 - Shaped ceramic products characterised by their compositionCeramic compositionsProcessing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on rare earth compounds
C04B 35/622 - Forming processesProcessing powders of inorganic compounds preparatory to the manufacturing of ceramic products
C23C 4/04 - Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge characterised by the coating material
patents
