The invention relates to a method for manufacturing a valve for a micro-injector for a chromatography device, which comprises: o depositing a polymer layer (20) on a support substrate (10); o a first partial crosslinking treatment of the polymer layer (20); o etching the support substrate (10) to expose a free area (21) of the polymer layer (20); o assembling the support substrate (10) and a fluid distributor (300) via the polymer layer (20), such that:—the free area (21) forms a membrane having two opposite free surfaces (23, 24); and—a bonding area (25) of the polymer layer in rigid contact with the support substrate and with the distributor (300) forms an adhesive interface between the support substrate and the distributor; and o a second treatment comprising a continuation of the crosslinking of the polymer layer (20).
The invention relates to a gas analysis device, comprising: • - a gas-tight enclosure (300), under vacuum or containing an inert atmosphere; • - at least one detector (100, 101, 102) such as an NGD (nano-gravimetric detector) or a TCD (thermal conductivity detector), also referred to as a katharometer, arranged in the enclosure (300); • - a fluidic circuit (110a, 110b, 111a, 111b, 112a, 112b) configured to circulate a gas to be analysed through the detector; • - a cooling interface (200) in thermal contact with the detector (100, 101, 102), the interface being thermally coupled to a cooling device (201) so as to cool the detector by thermal conduction.
The invention relates to a method for manufacturing a valve for a micro-injector for a chromatography device, which comprises: o depositing a polymer layer (20) on a support substrate (10); o a first partial crosslinking treatment of the polymer layer (20); o etching the support substrate (10) to expose a free area (21) of the polymer layer (20); o assembling the support substrate (10) and a fluid distributor (300) via the polymer layer (20), such that: - the free area (21) forms a membrane having two opposite free surfaces (23, 24); and - a bonding area (25) of the polymer layer in rigid contact with the support substrate and with the distributor (300) forms an adhesive interface between the support substrate and the distributor; and o a second treatment comprising a continuation of the crosslinking of the polymer layer (20).
09 - Scientific and electric apparatus and instruments
Goods & Services
Apparatus and instruments for measuring, monitoring,
diagnosis (for non-medical use), namely multi-gas
analyzer-detectors; gas chromatography apparatus for
laboratories.
09 - Scientific and electric apparatus and instruments
Goods & Services
Apparatus and instruments for measuring, monitoring,
diagnosis (for non-medical use), namely multi-gas
analyzer-detectors; gas chromatography apparatus for
laboratories.
09 - Scientific and electric apparatus and instruments
10 - Medical apparatus and instruments
Goods & Services
Apparatus and instruments for measuring, monitoring,
diagnosis (for non-medical use), namely multi-gas
analyzer-detectors. Medical apparatus and instruments, namely respiratory gas
analyzers for medical diagnosis, medical screening or
therapeutic monitoring, analyzers of any other gaseous
species released from the human body for medical diagnosis,
medical screening or therapeutic monitoring purposes.
09 - Scientific and electric apparatus and instruments
Goods & Services
Apparatus and instruments for measuring, monitoring, and diagnosis, for non-medical use, namely multi-gas analyzer-detectors; gas chromatography apparatus for laboratories
The invention relates to a method for analysing hydrocarbons, comprising: - the use of a gas chromatography separation according to a first controlled temperature profile, for separating a sample into a plurality of analytes; - the detection of at least one of said analytes by measurement of a variation in the resonance frequency of at least one nanoelectromechanical system (NEMS) resonator covered with a functional layer vibrated at its resonance frequency, under the effect of an adsorption or desorption of the analyte by the functional layer, said method being characterized in that the resonator is subjected to a second controlled temperature profile, lower than the first profile.
The invention relates to a gas chromatography detector comprising: - a nanoelectromechanical system (NEMS) resonator arranged in a fluid line suitable for the circulation of an analyte originating from a chromatography column, said resonator comprising a functional layer, - a reading device configured so as to make the resonator vibrate at the resonance frequency thereof and to measure a variation of said resonance frequency under the effect of adsorption or of desorption of the analyte by the functional layer, wherein said detector is characterized in that it comprises a chamber in which the resonator is encapsulated, said chamber comprising an inlet orifice and an outlet orifice for the fluid line and a temperature-regulating unit configured for varying the temperature inside the chamber according to a given temperature profile.
09 - Scientific and electric apparatus and instruments
10 - Medical apparatus and instruments
42 - Scientific, technological and industrial services, research and design
Goods & Services
Apparatus and instruments for measuring, monitoring,
diagnosis (for non-medical use), namely multi-gas
analyzer-detectors. Medical apparatus and instruments. Scientific and technological research services in the field
of gas detection and analysis, services provided by
engineers carrying out assessments, estimates, research and
reports in the field of gas detection and analysis; research
and development of new products for others.
09 - Scientific and electric apparatus and instruments
10 - Medical apparatus and instruments
42 - Scientific, technological and industrial services, research and design
Goods & Services
Apparatus and instruments for measuring, monitoring, and diagnosis for non-medical use, namely, multi-gas analyzer-detectors [ Medical apparatus and instruments being breath-based gas analyzers for medical diagnostics, medical screening, or therapeutic monitoring and analyzers of all other gaseous species outgassed from human body for medical diagnostics, medical screening, or therapeutic monitoring ] Scientific and technological research services in the field of gas detection and analysis, services provided by engineers carrying out assessments, estimates, research and reports in the field of gas detection and analysis; research and development of new products for others
16.
Gravimetric gas sensor having a lowered detection limit
COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES (France)
APIX ANALYTICS (France)
Inventor
Matheron, Muriel
Barattin, Regis
Jousseaume, Vincent
Ricoul, Florence
Abstract
A gravimetric detector including a nanoelectronic structure including: a fixed part, at least one part suspended from the fixed part, an excitation device to vibrate the suspended part relative to the fixed part, a detector to detect variations in vibration of the suspended part, and a porous functionalization layer at least partially covering the suspended part, porosity of the functionalization layer being between 3% and 50%.
COMMISSARIAT À L'ÉNERGIE ATOMIQUE ET AUX ÉNERGIES ALTERNATIVES (France)
APIX ANALYTICS (France)
Inventor
Matheron, Muriel
Barattin, Régis
Jousseaume, Vincent
Ricoul, Florence
Abstract
Gravimetric detector including a nanoelectronic structure comprising: a stationary portion (2); at least one portion (4) that is suspended relative to the stationary portion (2); means (8) for exciting the suspended portion so as to make it vibrate relative to the stationary portion; means (10) for detecting variations in the vibration of said suspended portion; and a porous functionalising layer (6) covering at least some of the suspended portion (4), the porosity of said functionalising layer (6) being comprised between 3% and 50%.
COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES (France)
APIX ANALYTICS (France)
CALIFORNIA INSTITUTE OF TECHNOLOGY (USA)
Inventor
Andreucci, Philippe
Colinet, Eric
Duraffourg, Laurent
Myers, Edward
Petitjean, Mélanie
Roukes, Mickael Lee
Whiting, Joshua
Abstract
The invention relates to a gas analysis system comprising: • - a fluidic channel intended for the flow of a gas to be analyzed, • - at least one detector laid out in said fluidic channel and adapted for measuring interactions of the gas with said detector, said detector comprising at least one resonator (100) of the electromechanical microsystem (MEMS) and/or electromechanical nanosystem (NEMS) type, • - an actuation device (101) for vibrationally actuating the resonator according to an excitation signal applied to an input of the detector, and • - a detection device (102) adapted for providing an output electric signal representative of the vibrations of said resonator, • - a read-out device connected to an input of the detector and configured for simultaneously measuring, from the output signal of said at least one detector, the change in resonance frequency and the change in amplitude of the vibrations at the resonance frequency of the resonator, and • - a processing device configured for determining from said changes at least one fluidic characteristic of said gas.
COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES (France)
APIX ANALYTICS (France)
Inventor
Andreucci, Philippe
Barattin, Régis
Colinet, Eric
Duraffourg, Laurent
Puget, Pierre
Abstract
The invention relates to a measurement system including a network of nanoelectromechanical system (NEMS) resonators, characterized in that: each one of said resonators includes: an electrostatic activation device capable of generating a vibration of a beam exposed to said excitation signal, at least one piezoresistive stress gauge made of a doped semiconducting material, extending from the beam so as to detect a movement of said beam, the variation in the electrical resistance of said at least one gauge supplying an output signal; said network includes at least two groups of resonators, each group including at least two resonators having an identical empty resonance frequency, each group of resonators having an empty resonance frequency different from that of each other group; the resonators forming each group are connected in parallel; the groups of resonators forming said network are connected in parallel; said system includes a reading device designed to supply an excitation signal at the network input and to determine the resonance frequency of a group of resonators which is selected by injecting, into said excitation signal, a frequency component corresponding to the empty resonance frequency of each selected group of resonators, and by identifying, in the output signal of the network, a resonance frequency component of the selected group of resonators.
B81B 7/04 - Networks or arrays of similar microstructural devices
G01L 1/18 - Measuring force or stress, in general using properties of piezo-resistive materials, i.e. materials of which the ohmic resistance varies according to changes in magnitude or direction of force applied to the material
H03H 3/007 - Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
The invention relates to an analyser 1 for analysing a fluid 3 comprising at least one substance to be analysed and at least one flammable substance, including: a gas source 9 for providing a flow of diluting gas; an injector 11 for injecting samples of the fluid into the flow of diluting gas and for producing a gas stream; and a detector 7 for analysing the gas stream; the gas source is designed such as to supply a flow of diluting gas containing an oxidiser of the flammable substance, preferably such as to supply a flow of air; the injector is configured to inject samples of the fluid into the flow of diluting gas such that the mean volumetric fraction of the fluid in the gas stream is lower than 1/2,000, preferably lower than 1/20,000; and the detector includes at least one microsensor for detecting the substance to be analysed. The invention also relates to the corresponding method.
