Provided is a magnetic microscope that can observe the vitality of individual cells. The present invention is a magnetic microscope in which conventional GSR sensors are made smaller and densely arranged on a magnetic sensor element grid substrate to manufacture a magnetic sensor grid, the magnetic sensor grid is placed under a petri dish when observing cells and measures the magnetic field emitted by the cells, and the distribution of current elements flowing in the cells can be calculated and displayed as an image diagram on a PC image. By combining this magnetic microscope with an optical microscope, it is possible to easily observe the mechanical movements and shape-changing movements of cells, as well as the activation level of each of the cells, in real time.
G01N 27/74 - Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating magnetic variables of fluids
C12M 1/00 - Apparatus for enzymology or microbiology
C12M 1/34 - Measuring or testing with condition measuring or sensing means, e.g. colony counters
G01R 33/02 - Measuring direction or magnitude of magnetic fields or magnetic flux
[Problem] When forming GSR elements directly onto an integrated circuit substrate (ASIC), it has been difficult to form micro-coils because of a) the method of forming inverted trapezoidal grooves, b) unevenness in the ASIC substrate surface, and c) the placement of openings in the ASIC substrate. [Solution] a) A positive-resist resin film is applied onto an ASIC substrate, and is simultaneously exposed and developed with grooves for installing magnetic wires and with a plurality of alignment-mark recesses to form inverted trapezoidal grooves, b) the primary bases are flattened by a two-layer resin method to eliminate the unevenness, and c) partial exposure for only the grooves for installing magnetic wires is added to form inverted trapezoidal and bilaterally-symmetrical grooves. GSR elements having a micro-coil pitch of 3 μm or less can thereby be manufactured directly onto ASIC substrates.
G01R 33/02 - Measuring direction or magnitude of magnetic fields or magnetic flux
H01L 21/822 - Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components the substrate being a semiconductor, using silicon technology
H01L 27/04 - Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being a semiconductor body
[Problem] When a magnetic field detection element is formed on an Si substrate, reducing the coil pitch inside an inverted-trapezoidal groove makes it easier for the step at an upper part of the groove or the edge of a bottom surface of the groove to cause disconnection and makes it difficult to form an upper coil and a lower coil that constitute a detection coil. [Solution] The present invention involves applying a negative resist resin coating film to a groove part and performing a curing heat treatment on the negative resist resin coating film to give a groove bottom part an R shape and thereby prevent disconnection of a lower coil. The present invention also involves applying a positive resist resin coating film to the step between an upper part of the groove and a magnetic wire and performing a curing heat treatment on the positive resist resin coating film to form a smoother shape and thereby prevent disconnection of an upper coil.
[Problem] The present invention provides a technique for enabling a robot operation by incorporating a sensor in a guide wire, facilitating a treatment operation and reducing the time of irradiation by X-ray. [Solution] The position and orientation of a tip part of a guide wire are calculated using a Cr-Ni-based stainless magnet positioned at the tip part and an external magnetic vector sensor grid system. The contact pressure applied to the tip part is measured by attaching a strain gauge to a wire. The torque on the driver side and the feed quantity and rotation amount of the wire are measured by installing a torque sensor, a torquer rotation quantity measuring sensor and an azimuth meter in a driver. The treatment with the guide wire can be automatically controlled using these measurement values.
[Problem] To form a weld part with excellent weld strength, ensuring high magnetic attraction force and sufficient magnetic shielding, while also simplifing processing. [Solution] A cap 1 houses a permanent magnet 2 and comprises a Cr magnetic stainless steel. A shield plate 3 that is a lid for a recessed opening of the cap 1 comprises an outer edge 32 formed from a non-magnetic part comprising a non-magnetically modified 18Cr-8Ni stainless steel and a part 31 constituting the rest, i.e. other than the outer edge, of the shield plate 3 and comprising a 18Cr-8Ni stainless steel magnet. A weld part is formed by laser welding at the boundary between the cap 1 and the outer edge 32 (non-magnetic part) of the shield plate 3. A keeper 102 comprises a Cr soft magnetic stainless steel, and a Cr diffusion layer is formed on a suction face thereof.
The magnetometers possess detector part with a magnetic wire sensitive to magnetic field consisting of a domain structure of the surface domain with circular spin alignment and core domain with longitudinal spin alignment and micro coil surrounding its magnetic wire to pick up the change of longitudinal magnetizing caused by spin rotation in surface domain with circular spin alignment called as GSR effect excited by pulse with frequency of 0.5 GHz to 4 GHz. Peak coil voltage is detected by a circuit characterized with pulse generator, GSR element, Buffer circuit, sample holding circuit, amplifier circuit and means to invert it to external magnetic field. The induced coil voltage caused by parasitic coil capacitance and wiring loop is vanished by combination coil of right and left turn coil. The magnetometers can provide lower noise, wide measuring range with a small size detector part and is applied to smartphones, wearable computer and so on.
The magnetometers possess a detector part with a magnetosensitive material sensitive to the magnetic field and coil surrounding its magnetosensitive material to pick-up the magnetic field, a pulse generator circuit supplies pulse current to the magnetic material, a sample holding circuit including with an electronic switch synchronized with pulse timing for switching on/off and holding capacitance to charge electricity produced by the pickup coil during the switch on period, and an amplifier circuit amplifies the holding capacitance voltage. Magnetometers possess a Buffer circuit connecting the output side of the pickup coil with the input side of the Buffer circuit and connects the output side of the Buffer circuit with the input side of the electronic switch to transfer the pulse signal voltage induced in the pickup coil from the input side to the output side keeping the pulse signal voltage of the outside at the same level as the inside.
Provided is a technique for reducing the coil pitch and increasing the number of coil turns of an MI element and making enhanced sensitivity and compactness possible. An MI element comprises a magnetic wire and a coil wrapped therearound that are disposed on an electrode wiring substrate. In the production of the coil, focusing on a three-layer structure comprising a recessed lower coil portion, a protruding upper coil portion, and a through-hole portion connecting the two coil portions and a thin-film coil wire formed through a vapor-deposition process makes it possible to make the coil pitch less than or equal to 14 µm.
This magnetism detection device (1) is provided with: a magnetically sensitive section (10) comprising a magnetically sensitive body (11) and a detection coil (12) wound around the periphery of the magnetically sensitive body; a pulse transmission circuit (20) that transmits a pulse current supplied to the magnetically sensitive body; a sample holding circuit (40) comprising an electronic switch (41), which turns on/off at a timing in accordance with the transmission of the pulse current, and a holding capacitor (42), which charges when the electronic switch is on; and an amplifier circuit (50) that amplifies the holding voltage held by the holding capacitor when the electronic switch is off, and outputs the result. The magnetism detection device (1) is characterized by being further provided with a buffer circuit (30) of which the input side is connected to the detection coil side and the output side is connected to the electronic switch side, and that conveys a signal voltage from the input side to the output side by generating an output signal voltage that tracks an input signal voltage comprising a pulse-shaped induced voltage generated by the detection coil.
G01R 33/02 - Measuring direction or magnitude of magnetic fields or magnetic flux
H01L 43/00 - Devices using galvano-magnetic or similar magnetic effects; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof
10.
ROTARY INFORMATION COMPUTATION METHOD, ROTARY INFORMATION COMPUTATION PROGRAM, MAGNETIC GYROSCOPE, AND MOVING BODY
Provided is a rotary information computation method that can eliminate measurement lag of a magnetic gyroscope. This rotary information computation method determines the angular velocity vector of a moving body divided into the magnitude and direction (rotational axis vector) thereof. Also, the method for computing the rotational axis vector is altered depending on whether the rotational mode of the moving body is a stationary-axis rotational mode or a free-axis rotational mode. In the case of the stationary-axis rotational mode, the rotational axis vector is determined by means of the cross product of two difference vectors. In the case of the free-axis rotational mode, the determination is made by calculating the cross product of a difference vector and a radius vector on the basis of a set instantaneous rotational coordinate system. At such a time, the rotational axis vector (ni-1) calculated at a particular time (ti-1) is used (i.e. as feedback) to compute the rotational axis vector (ni) at the immediately following time (ti (= ti-1+Δt)).
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