Components, systems, assemblies, and methods related thereto are described for spreading powder in a die (12). These include a bridge (14) removably mountable on the die and spanning the interior (47) of the die when the bridge (14) is mounted on the die (12), a shaft support (24) connected to the bridge (14) in which the elevation of the shaft support (24) is adjustable relative to the interior of the die (12), a shaft (32) rotatably mounted to the shaft support (24) and movable with the shaft support (24) as the elevation of the shaft support (24) is adjusted. The shaft (32) includes a blade (34) extending from the distal end of the shaft (32), wherein the elevation of the shaft support (24) is adjusted to place the blade (34) in contact with the powder and the shaft (32) rotated to spread powder in the die (12).
B28B 13/02 - Feeding the unshaped material to moulds or apparatus for producing shaped articles
B22F 12/00 - Apparatus or devices specially adapted for additive manufacturingAuxiliary means for additive manufacturingCombinations of additive manufacturing apparatus or devices with other processing apparatus or devices
Components, systems, assemblies, and methods related thereto for automatic alignment of a temperature measurement device with a die cavity in a sintering process are described. These include monitoring temperature of a location on a die, and include a pyrometer, laser measuring devices mounted to the pyrometer, and projecting a laser beam and measuring distance from the laser measuring device to a location on which the laser beam is projected. Each laser device outputs a signal and an actuator adjusts the pyrometer position in accordance with these signals.
A process for the preparation of a ceramic body, comprising the steps: • a. providing a plurality of particles; • b. providing a device that comprises a sintering chamber (013) bordered by a die (006); • c. introducing the particles into the sintering chamber (013); • d. applying a pressure P in the range from 1 MPa to 80 MPa to the plurality of particles in the sintering chamber (013) to obtain the ceramic body, wherein a temperature in the sintering chamber (013), during preparation of the ceramic body, is controlled so that the temperature at a centre of the sintering chamber (013) is lower than the temperature at an interior surface (005) of the die (006).
B28B 3/02 - Producing shaped articles from the material by using pressesPresses specially adapted therefor wherein a ram exerts pressure on the material in a moulding spaceRam heads of special form
B22F 3/14 - Both compacting and sintering simultaneously
B28B 3/08 - Producing shaped articles from the material by using pressesPresses specially adapted therefor wherein a ram exerts pressure on the material in a moulding spaceRam heads of special form with two or more rams per mould
B28B 11/24 - Apparatus or processes for treating or working the shaped articles for curing, setting or hardening
B28B 17/00 - Details of, or accessories for, apparatus for shaping the materialAuxiliary measures taken in connection with such shaping
B30B 11/02 - Presses specially adapted for forming shaped articles from material in particulate or plastic state, e.g. briquetting presses or tabletting presses using a ram exerting pressure on the material in a moulding space
B30B 15/34 - Heating or cooling presses or parts thereof
B30B 11/04 - Presses specially adapted for forming shaped articles from material in particulate or plastic state, e.g. briquetting presses or tabletting presses using a ram exerting pressure on the material in a moulding space co-operating with a fixed mould
A device having a sintering chamber (013), the sintering chamber (013) being bordered by the following device parts: i. a first punch surface (004) of a first punch (003); ii. a second punch surface (007) of a second punch (008); and iii. an interior surface (005) of a die (006); wherein: the punches (003, 008) are adapted and arranged to apply a pressure of at least 1 MPa along a compression axis (011) to a target in the sintering chamber (013); the first punch (003) and the second punch (008) are connected to an electrical power source (012) adapted and arranged to provide a current of at least 10 kA; the first and second punches (003, 008) comprise at least 50 wt. % carbon, based on the total weight of the punch (003,008); the sintering chamber (013) has a cross-sectional width W perpendicular to the compression axis (011) of at least 300 mm; wherein the die has a surface portion X at least 5 cm2 in area, wherein the surface portion X is located on the interior surface of the die and wherein the surface portion X has a mean surface roughness (Sa) in the range from 1 µm to 8 µm.
B28B 3/02 - Producing shaped articles from the material by using pressesPresses specially adapted therefor wherein a ram exerts pressure on the material in a moulding spaceRam heads of special form
B22F 3/105 - Sintering only by using electric current, laser radiation or plasma
B28B 3/08 - Producing shaped articles from the material by using pressesPresses specially adapted therefor wherein a ram exerts pressure on the material in a moulding spaceRam heads of special form with two or more rams per mould
B28B 11/24 - Apparatus or processes for treating or working the shaped articles for curing, setting or hardening
B30B 11/04 - Presses specially adapted for forming shaped articles from material in particulate or plastic state, e.g. briquetting presses or tabletting presses using a ram exerting pressure on the material in a moulding space co-operating with a fixed mould
B30B 15/34 - Heating or cooling presses or parts thereof
C04B 35/44 - Shaped ceramic products characterised by their compositionCeramic compositionsProcessing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxides based on aluminates
B28B 3/02 - Producing shaped articles from the material by using pressesPresses specially adapted therefor wherein a ram exerts pressure on the material in a moulding spaceRam heads of special form
B28B 3/08 - Producing shaped articles from the material by using pressesPresses specially adapted therefor wherein a ram exerts pressure on the material in a moulding spaceRam heads of special form with two or more rams per mould
B28B 11/24 - Apparatus or processes for treating or working the shaped articles for curing, setting or hardening
B30B 11/04 - Presses specially adapted for forming shaped articles from material in particulate or plastic state, e.g. briquetting presses or tabletting presses using a ram exerting pressure on the material in a moulding space co-operating with a fixed mould
B30B 15/34 - Heating or cooling presses or parts thereof
B22F 3/105 - Sintering only by using electric current, laser radiation or plasma
Disclosed herein is a method for making a sintered ceramic body comprising at least one layer of 99% or greater by volume of polycrystalline yttrium aluminum garnet (YAG) substantially free of unreacted yttrium oxide and yttrium rich phases, by sintering and in-situ reaction of yttria with alumina including fine and coarse particle sizes.
C04B 35/44 - Shaped ceramic products characterised by their compositionCeramic compositionsProcessing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxides based on aluminates
C04B 35/505 - Shaped ceramic products characterised by their compositionCeramic compositionsProcessing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on rare earth compounds based on yttrium oxide
A method of polishing a surface of a polycrystalline sintered ceramic body, the method comprising the steps of: a) providing a sintered ceramic body comprising a polycrystalline material and having a density of from about 99.5% to about 99.999% of the polycrystalline material's theoretical density, wherein the sintered ceramic body has at least one surface; b) grinding the at least one surface until the surface has (I) a flatness of no more than 25 microns on average measured over four quadrants of the at least one surface at angles of 0°, 90°, 180°, and 270° as measured with a spherometer, (ii) an Ra of less than 14 microinches, and (iii) an Rz of less than 160 microinches; c) after the grinding step, lapping the at least one surface with a lapping plate and a lapping media slurry; d) after lapping, successively polishing the at least one surface in a series of polishing steps until the at least one surface exhibits an Ra value of ≤ 2 microinches and an Rz of ≤ 2 microinches and an absolute value for flatness of greater than 15 microns as measured with a spherometer, wherein the polishing is performed with a device comprising a plurality of orbital sanders that vibrate elliptically each of which comprises a polishing pad to contact the at least one surface during polishing, wherein the series of polishing steps comprises: i) a first polishing step wherein the polishing pads are used with a slurry of 4 to 10-micron grit particles; and ii) a second polishing step wherein the polishing pads are used with a slurry of from 1 to 3-micron grit particles.
B24B 37/04 - Lapping machines or devicesAccessories designed for working plane surfaces
B24B 37/10 - Lapping machines or devicesAccessories designed for working plane surfaces characterised by the movement of the work or lapping tool for single side lapping
B24B 7/04 - Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfacesAccessories therefor involving a rotary work-table
B24B 7/22 - Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfacesAccessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain
B24B 1/04 - Processes of grinding or polishingUse of auxiliary equipment in connection with such processes subjecting the grinding or polishing tools, the abrading or polishing medium or work to vibration, e.g. grinding with ultrasonic frequency
C04B 35/44 - Shaped ceramic products characterised by their compositionCeramic compositionsProcessing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxides based on aluminates
8.
MULTILAYER SINTERED CERAMIC BODY AND METHOD OF MAKING
Disclosed is a multilayer sintered ceramic body comprising at least one first layer (100) comprising polycrystalline YAG, wherein the at least one first layer (100) has at least one surface; and at least one second layer (102) comprising magnesium aluminate spinel, wherein the at least one surface of the at least one first layer (100) comprises pores wherein the pores have a maximum size of from 0.1 to 5 pm as measured by SEM, and wherein each of the at least one first layer (100) and the at least one second layer (102) has a coefficient of thermal expansion (GTE), wherein the GTE of the at least one first layer and the GTE of the at least one second layer differ from 0 to 0.6 x 10-6/°C. Methods of making are also disclosed.
H01L 21/683 - Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereofApparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components for supporting or gripping
C04B 38/00 - Porous mortars, concrete, artificial stone or ceramic warePreparation thereof
B28B 3/02 - Producing shaped articles from the material by using pressesPresses specially adapted therefor wherein a ram exerts pressure on the material in a moulding spaceRam heads of special form
9.
UV-ACTIVATED RED CERAMIC BODIES COMPRISING YAG FOR USE IN SEMICONDUCTOR PROCESSING CHAMBERS
Disclosed herein is a sintered ceramic body comprising at least one layer comprising from 90% to 99.8% by volume of polycrystalline yttrium aluminum garnet (YAG) and from 15 ppm to 500 ppm of zirconium, wherein the at least one layer comprises at least one surface, wherein the at least one surface comprises pores having a pore size not exceeding 5 pm and having a maximum pore size of 1.5 pm for at least 95% of the pores, wherein the at least one surface exhibits an L* value of from 50 to 77, and an "a" value of from 6 to 12, wherein the at least one layer has a thickness of from 500 pm to 2 cm, and wherein the values of L* and "a" vary no more than 10% across the at least one surface. Also disclosed are methods of making same.
C04B 35/44 - Shaped ceramic products characterised by their compositionCeramic compositionsProcessing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxides based on aluminates
C04B 35/626 - Preparing or treating the powders individually or as batches
C04B 38/00 - Porous mortars, concrete, artificial stone or ceramic warePreparation thereof
C04B 41/00 - After-treatment of mortars, concrete, artificial stone or ceramicsTreatment of natural stone
H01J 37/00 - Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
H01L 21/00 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid-state devices, or of parts thereof
10.
YTTRIA-ZIRCONIA SINTERED CERAMICS FOR PLASMA RESISTANT MATERIALS
Disclosed is a ceramic sintered body comprising yttrium oxide and zirconium oxide wherein the ceramic sintered body comprises not less than 75 mol % to not greater than 95 mol % yttrium oxide and not less than 5 mol % to not greater than 25 mol % zirconium oxide, wherein the ceramic sintered body comprises porosity in an amount of less than 2% by volume, wherein a density of the ceramic sintered body does not vary by more than 2% relative to theoretical density across a greatest dimension. The ceramic sintered body has a grain size of from 0.4 to less than 2 um as measured according to ASTM E1 12-2010. The ceramic sintered body may be machined into plasma resistant components for use in plasma processing chambers. Methods of making are also disclosed.
C04B 35/505 - Shaped ceramic products characterised by their compositionCeramic compositionsProcessing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on rare earth compounds based on yttrium oxide
Disclosed herein are plasma chamber components that comprise a ceramic sintered body comprising at least one first layer comprising a surface having a surface area and at least one crystalline phase of from 90% to 99.8% by volume of poly crystalline yttrium aluminum garnet (YAG), at least one second layer comprising alumina and zirconia wherein the zirconia comprises at least one of stabilized and partially stabilized zirconia, and optionally, at least one third layer comprising at least one selected from the group consisting of YAG, alumina, and zirconia.
C04B 35/44 - Shaped ceramic products characterised by their compositionCeramic compositionsProcessing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxides based on aluminates
C04B 35/626 - Preparing or treating the powders individually or as batches
H01J 37/00 - Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
Disclosed herein is a multilayer sintered ceramic body comprising at least one first layer comprising poly crystalline YAG, wherein the at least one first layer comprising poly crystalline YAG comprises pores wherein the pores have a maximum size of from 0.1 to 5 μm, at least one second layer comprising alumina and zirconia wherein the zirconia comprises at least one of stabilized and partially stabilized zirconia, and at least one third layer comprising at least one of YAG, alumina, and zirconia, wherein an absolute value of the difference in coefficient of thermal expansion (CTE) between the at least one first, second and third layers is from 0 to 0.75 x 10-6/°C as measured in accordance with ASTM E228-17, wherein the at least one first, second and third layers form a unitary, multilayer sintered ceramic body. Methods of making are also disclosed.
C04B 35/44 - Shaped ceramic products characterised by their compositionCeramic compositionsProcessing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxides based on aluminates
2322, wherein the first crystalline phase is a continuous matrix and the second crystalline phase is dispersed in the continuous matrix, wherein the sintered ceramic body has pores wherein the pores have a maximum pore size of from 0.1 to 5 μm as measured by SEM, wherein sintered ceramic body exhibits a coefficient of thermal expansion of from 6.899 to 9.630 x 10-6/°C across a temperature range of from 25-200 °C to 25-1400 °C as measured in accordance with ASTM E228-17, wherein the sintered ceramic body has a relative density of from 99% to 100% and has a density variation of from 0.2 to less than 5% across a greatest dimension, wherein the greatest dimension is from 200 to 625 mm, and wherein Si is either not present in the sintered ceramic body or it is present in the sintered ceramic body in an amount of 100 ppm or less..
Disclosed is a multilayer sintered ceramic body comprising at least one first layer comprising at least one crystalline phase of YAG, wherein the at least one first layer has at least one surface; and at least one second layer comprising alumina and at least one of stabilized zirconia and partially stabilized zirconia, wherein the at least one surface of the at least one first layer comprises pores wherein the pores have a maximum size of from 0.1 to 5 um as measured by SEM, and wherein each of the at least one first layer and the at least one second layer has a coefficient of thermal expansion (CTE), wherein the CTE of the at least one first layer and the CTE of the at least one second layer differ from 0 to 0.6 x 10-6/°C as measured in accordance with ASTM E228-17. Methods of making are also disclosed.
C04B 35/44 - Shaped ceramic products characterised by their compositionCeramic compositionsProcessing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxides based on aluminates
A spark plasma sintering tool (1). The tool comprises a die (2) including an inner wall having a diameter that defines an inner volume configured to receive a ceramic powder (5), and an upper punch (4) and a lower punch (4') operably coupled with the die, wherein each of the upper and lower punches have an outer wall defining a diameter that is less than the diameter of the inner wall of the die thereby creating a gap from 10 μm to 100 μm wide between each of the punches and the inner wall of the die when at least one of the punches moves within the inner volume of the die. Also disclosed are a method of using the tool to create a large sintered ceramic body and a computer readable medium storing processor-executable instructions adapted to cause one or more computing devices to operate the tool.
B28B 3/02 - Producing shaped articles from the material by using pressesPresses specially adapted therefor wherein a ram exerts pressure on the material in a moulding spaceRam heads of special form
B28B 3/08 - Producing shaped articles from the material by using pressesPresses specially adapted therefor wherein a ram exerts pressure on the material in a moulding spaceRam heads of special form with two or more rams per mould
B28B 11/24 - Apparatus or processes for treating or working the shaped articles for curing, setting or hardening
B30B 11/04 - Presses specially adapted for forming shaped articles from material in particulate or plastic state, e.g. briquetting presses or tabletting presses using a ram exerting pressure on the material in a moulding space co-operating with a fixed mould
B30B 15/34 - Heating or cooling presses or parts thereof
A method of making a sintered ceramic body comprising the steps of disposing a ceramic powder (5) inside an inner volume of a spark plasma sintering tool (1), wherein the tool comprises: a die (2) comprising a sidewall comprising inner and outer walls, wherein the inner wall has a diameter defining the inner volume; upper and lower punches (4,4') operably coupled with the die, wherein each of the punches have an outer wall defining a diameter less than the diameter of the die inner wall, thereby creating a gap (3) between the punches and the inner wall when at least one of the punches are moved within the inner volume, and the gap is from 10 μm to 70 μm wide; creating vacuum conditions inside the inner volume; moving at least one of the punches to apply pressure to the ceramic powder while heating, and sintering; and lowering the temperature of the sintered body.
B28B 3/02 - Producing shaped articles from the material by using pressesPresses specially adapted therefor wherein a ram exerts pressure on the material in a moulding spaceRam heads of special form
B22F 3/14 - Both compacting and sintering simultaneously
B28B 3/08 - Producing shaped articles from the material by using pressesPresses specially adapted therefor wherein a ram exerts pressure on the material in a moulding spaceRam heads of special form with two or more rams per mould
B28B 11/24 - Apparatus or processes for treating or working the shaped articles for curing, setting or hardening
B30B 11/04 - Presses specially adapted for forming shaped articles from material in particulate or plastic state, e.g. briquetting presses or tabletting presses using a ram exerting pressure on the material in a moulding space co-operating with a fixed mould
Disclosed herein is a sintered yttrium oxide body having a total impurity level of 40 ppm or less, a density of not less than 4.93 g/cm3, wherein the sintered yttrium oxide body has at least one grain boundary comprising silica in an amount of not less than 1 to not greater than 10 atoms/nm2 wherein the sintered yttrium oxide body has at least one surface comprising at least one pore, wherein no pore is larger than 5 μm in diameter. A process for making the sintered yttrium oxide body is also disclosed.
C04B 35/505 - Shaped ceramic products characterised by their compositionCeramic compositionsProcessing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on rare earth compounds based on yttrium oxide
H01L 21/687 - Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereofApparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
C04B 38/00 - Porous mortars, concrete, artificial stone or ceramic warePreparation thereof
18.
CERAMIC SINTERED BODY COMPRISING MAGNESIUM ALUMINATE SPINEL
244 having from 90 to 100% by volume of a cubic crystallographic structure and a density of from 3.47 to 3.58 g/cc, wherein the ceramic sintered body is free of sintering aids. A method of making the ceramic sintered body comprising spinel is also disclosed.
Disclosed is a joined ceramic body comprising a first ceramic portion comprising a first ceramic, a second ceramic portion comprising a second ceramic, and a joining layer formed between the first ceramic portion and the second ceramic portion. The joining layer has a bond thickness of from 0.5 to 20 um and comprises silicon dioxide having a total impurity content of 20 ppm and less. A method of making the joined ceramic body and a joining material are also disclosed.
C04B 35/18 - Shaped ceramic products characterised by their compositionCeramic compositionsProcessing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxides based on silicates other than clay rich in aluminium oxide
C04B 35/626 - Preparing or treating the powders individually or as batches
C04B 37/00 - Joining burned ceramic articles with other burned ceramic articles or other articles by heating
20.
HIGH PURITY CORDIERITE MATERIAL FOR SEMICONDUCTOR APPLICATIONS
Disclosed is a cordierite sintered body comprising from 90 to 98% by volume of a cordierite crystal phase as measured using x ray diffraction, SEM and image processing methods wherein the cordierite sintered body has at least one surface comprising pores having a diameter of from 0.1 to 5 um as measured using SEM and image processing methods. The cordierite sintered body has a Young's modulus of about 125 GPa or greater, and volumetric porosity of less than about 4%. Methods of making the cordierite sintered body are also disclosed.
Disclosed herein is a sintered ceramic body comprising from 90% to 99.9% by volume of polycrystalline yttrium aluminum garnet (YAG) as measured using XRD and image processing methods and a volumetric porosity of from 0.1 to 4% as calculated from density measurements performed in accordance with ASTM B962-17. The sintered ceramic body may have a total purity of 99.99% and greater and a grain size of from 0.3 to 8 µm. A method of making the sintered ceramic body is also disclosed.
C04B 35/44 - Shaped ceramic products characterised by their compositionCeramic compositionsProcessing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxides based on aluminates
C04B 35/626 - Preparing or treating the powders individually or as batches
patents