A torsional gyroscope is provided that includes: a pickup tine and a drive tine of piezoelectric material, pickup electrodes disposed along the pickup tine, drive electrodes disposed along the drive tine, and a drive mass. The drive tine has a first end attached to the pickup tine and is transverse to the drive tine. The drive mass is attached to a second end of the drive tine opposite the first end of the drive tine. An electric field applied to the drive electrodes induces a rotational oscillation of the drive tine causing the drive tine to rotate about the first axis, inducing the drive mass to rotate about the first axis. Angular rotation of the drive mass along a third axis induces a torque in the pickup tine that induces an electric field in the pickup tine that induces an electrical charge to build up in the pickup electrodes.
G01C 19/56 - Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
G01C 19/5607 - Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating tuning forks
G01C 19/5719 - Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
G01C 19/5642 - Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating bars or beams
Techniques are provided for reducing mount vibration in an inertial rate sensor (IRS). For example, if oscillation in an IRS's vibratory members, vibrating along a first axis, cause displacement in the IRS's mount along a second axis, the vibratory members can be aligned so that the vibratory members have some component of movement along the second axis during oscillation. This component of movement can help reduce the displacement of the IRS's mount along the second axis. It can further reduce sensitivity to changes in the boundary conditions of an IRS (e.g., vibrations and other movements at the mount from forces external to the IRS). Vibratory members further can have portions of increased mass at the vibratory members' tips, which can impact the alignment of the vibratory members. These examples, however, are not exhaustive.
G01C 19/56 - Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
G01C 19/5607 - Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating tuning forks
G01C 19/5719 - Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
3.
Solid state switching device with integral heatsink
Solid state switching device having a heatsink, a solid state switching element in heat conductive relationship with the heatsink, and an enclosure having ventilation openings adjacent to the heatsink through which air can flow to remove heat from the heatsink. In some disclosed embodiments, the heatsink has fins and ducts aligned with ventilation openings in the enclosure for removing heat by radiation and convection. In others, the heatsink is a generally planar baseplate, with ventilation openings in a side wall of the enclosure next to the baseplate for removing heat from the device. Spacers project laterally from the devices and permit a plurality of the devices to mounted side-by-side with space between the devices through which air can flow.
Hybrid power relay for making and breaking an electrical circuit which includes electromagnetically operated contacts for making and breaking the circuit, a solid state switch connected across the contacts, a control circuit responsive to a control signal for actuating the solid state switch and the contacts such that the solid state switch closes before the contacts to make the circuit and the contacts open before the solid state switch to break the circuit, and a protective circuit for monitoring the temperature of the solid state switch and opening the switch in the event of a rise in temperature produced by abnormal current flow in the switch due to failure of the contacts to make and maintain the circuit.
H02H 3/00 - Emergency protective circuit arrangements for automatic disconnection directly responsive to an undesired change from normal electric working condition, with or without subsequent reconnection
5.
INERTIAL SENSOR WITH DUAL CAVITY PACKAGE AND METHOD OF FABRICATION
lnertial sensor having a body with first and second cavities on opposite sides thereof, a sensing element in the first cavity, electronic circuitry in the second cavity, electrical conductors interconnecting the sensing element and the circuitry, and leads connected electrically to the circuitry and extending from the body for mounting the sensor and making connections with the circuitry.
B81C 1/00 - Manufacture or treatment of devices or systems in or on a substrate
H01L 23/057 - ContainersSeals characterised by the shape the container being a hollow construction and having an insulating base as a mounting for the semiconductor body the leads being parallel to the base
Described herein is the sensor assembly and method for rapidly obtaining accurate readings of a variable. The sensor assembly comprises a plurality of sensors which are connected to a microcontroller that processes the signals of the individual transducers to the microcontroller. The microcontroller contains software that maximizes the refresh rate and/or minimizes the time it takes to process the outputs of each of the transducers. The microcontroller that is coupled to the sensor assembly selectively measures the outputs of each transducer so as to speed up the refresh rate of the sensor.
Described herein is the sense element assembly for a capacitive pressure sensor and method for creating same that has increased sensitivity despite the parasitic capacitance that is created. The capacitive sensor element assembly, comprises a first semiconductive layer, and a first conductive layer, a first dielectric layer into which a cavity has been formed, the dielectric layer lying between the first semiconductive layer and the first conductive layer, wherein an electrical connection is made to the second conductive layer. A preferred method for fabricating a capacitive sensor assembly of the present invention comprises the steps of forming a dielectric layer on top of a conductive handle wafer; creating at least one cavity in the dielectric layer, bonding a thin semiconductive layer to the dielectric layer and connecting an operational amplifier to the input of the capacitive sensor assembly to overcome the parasitic capacitance formed during fabrication.
Described herein is the sense element assembly for a capacitive pressure sensor and method for creating same that has increased sensitivity despite the parasitic capacitance that is created. The capacitive sensor element assembly, comprises a first semiconductive layer, and a first conductive layer, a first dielectric layer into which a cavity has been formed, the dielectric layer lying between the first semiconductive layer and the first conductive layer, wherein an electrical connection is made to the second conductive layer. A preferred method for fabricating a capacitive sensor assembly of the present invention comprises the steps of forming a dielectric layer on top of a conductive handle wafer; creating at least one cavity in the dielectric layer, bonding a thin semiconductive layer to the dielectric layer and connecting an operational amplifier to the input of the capacitive sensor assembly to overcome the parasitic capacitance formed during fabrication.
Described herein is the sense element assembly for a capacitive pressure sensor and method for creating same that has increased sensitivity without additional size. The sense element assembly and method includes fabricating an off-centered elliptically shaped center electrode, at least one elliptical annular-like electrode around the center electrode, a ground electrode and a method for fusing the layers together to optimize sensitivity.
G01L 9/12 - Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by electric or magnetic pressure-sensitive elementsTransmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in capacitance
Described herein is the sense element assembly for a capacitive pressure sensor and method for creating same that has increased sensitivity without additional size. The sense element assembly and method includes fabricating an off-centered elliptically shaped center electrode, at least one elliptical annular-like electrode around the center electrode, a ground electrode and a method for fusing the layers together to optimize sensitivity.
G01L 9/12 - Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by electric or magnetic pressure-sensitive elementsTransmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in capacitance
11.
MICROMACHINED ACCELEROMETER AND METHOD WITH CONTINUOUS SELF-TESTING
Micromachined accelerometer and method in which a proof mass is suspended above a substrate for movement in response to acceleration, electrodes form capacitors which change in capacitance in response to movement of the proof mass, processing circuitry responsive to the changes in capacitance provides an output signal corresponding to movement of the proof mass, a test signal is applied to the electrodes during use of the accelerometer to produce additional movement of the proof mass and a corresponding test signal component in the output signal, and the output signal is monitored to determine whether the accelerometer is operating normally by the presence of the test signal component in the output signal. The test signal may be varied, or may have several frequency components.
G01P 15/125 - Measuring accelerationMeasuring decelerationMeasuring shock, i.e. sudden change of acceleration by making use of inertia forces with conversion into electric or magnetic values by capacitive pick-up
G01P 21/00 - Testing or calibrating of apparatus or devices covered by the other groups of this subclass
Described herein is an integrated pressure sensor assembly. The integrated pressure sensor assembly includes a printed circuit board assembly comprising a plurality of boards; a pressure die mounted on at least a portion of the printed circuit board assembly; and a housing engaged to the printed circuit board assembly. The printed circuit board assembly includes at least one pressure transmission channel and at least one electrical transmission channel.
G01L 9/06 - Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by electric or magnetic pressure-sensitive elementsTransmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers of piezo-resistive devices
Micromachined accelerometer having one or more proof masses (16, 36, 37, 71, 72) mounted on one or more decoupling frames (17, 38, 39) or on a shuttle (73) such that the proof mass(es) can move along a first (y) axis in response to acceleration along the first axis while being constrained against movement along a second (x) axis and for torsional movement about a third (z) axis perpendicular to the first and second axes in response to acceleration along the second axis. Electrodes (26, 53, 54, 78, 79) that move with the proof mass(es) are interleaved with stationary electrodes (27, 56, 57, 81, 82) to form capacitors (A - D) that change in capacitance both in response to movement of the proof mass(es) along the first axis and in response to torsional movement of the proof mass(es) about the third axis, and circuitry (31 - 34) connected to the electrodes for providing output signals corresponding to acceleration along the first and second axes. The capacitances of two capacitors on each side of the second axis change in the same direction in response to acceleration along the first axis and in opposite directions in response to acceleration along the second axis. Signals from the capacitors that change capacitance in opposite directions both in response to acceleration along the first axis and in response to acceleration along the second axis are differentially combined to provide first and second difference signals, and the difference signals are additively and differentially combined to provide output signals corresponding to acceleration along the first and second axes.
G01P 15/125 - Measuring accelerationMeasuring decelerationMeasuring shock, i.e. sudden change of acceleration by making use of inertia forces with conversion into electric or magnetic values by capacitive pick-up
G01P 15/18 - Measuring accelerationMeasuring decelerationMeasuring shock, i.e. sudden change of acceleration in two or more dimensions
A wireless data transmission system incorporates a process sensor (10) providing an output for process monitoring data with a transmitter (8) connected to the output of the sensor and transmitting the data in time gated intervals. A receiver (24) receives the data from the transmitter and a determination is made if new data is received at a gated time interval. A processor (28) connected to the receiver calculates process parameters based on the data received and a set of the calculated process parameters is stored. The processor estimates process parameters based on the stored set of calculated process parameters responsive to a signal from the determination that data packets have not been received at the gated interval. The process parameters from actual data, if present, or from the estimates made by the processor are then output for process control. A counter (222) responsive to the determination of lost data, provides an emergency stop signal (32) upon reaching a predetermined number of counts.
G05B 19/418 - Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM]
15.
MULTI-AXIS MICROMACHINED ACCELEROMETER AND RATE SENSOR
Multi-axis micromachined accelerometer and rate sensor having first and second generally planar masses disposed side-by-side and connected together along adjacent edge portions thereof for torsional movement about axes parallel to a first axis in response to acceleration along a second axis and for rotational motion about axes parallel to the second axis in response to acceleration along the first axis. The masses are driven to oscillate about the axes parallel to the second axis so that Coriolis forces produced by rotation about a third axis result in torsional movement of the masses about the axes parallel to the first axis. Sensors monitor the movement of the mass about the axes, and signals from the sensors are processed to provide output signals corresponding to acceleration along the first and second axes and rotation about the third axis.
G01P 15/125 - Measuring accelerationMeasuring decelerationMeasuring shock, i.e. sudden change of acceleration by making use of inertia forces with conversion into electric or magnetic values by capacitive pick-up
G01P 15/18 - Measuring accelerationMeasuring decelerationMeasuring shock, i.e. sudden change of acceleration in two or more dimensions
G01C 19/56 - Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
16.
DITHERING MECHANISM FOR ELIMINATING ZERO-RATE BIAS IN A GYROSCOPE
Dithering mechanism and method for eliminating the effects of zero-rate bias in a rate sensor or gyroscope. Both continuously moving and indexing embodiments are disclosed. The mechanism includes a first part (11) mounted in a fixed position centered about a dither axis perpendicular to the input axis of the gyroscope, a second part (12) disposed coaxially of the first part and affixed to the sensing element of the gyroscope, and a plurality of piezoelectrically driven quartz flexure beams (16) extending radially between the first and second parts for dithering the second part about the dither axis. In some embodiments, the dithering mechanism is formed separately from and affixed to the sensing element of the gyroscope, and in others it is formed integrally with the sensing element. In the indexing embodiments, radial arms and fixed stops (63, 64) limit movement of the mechanism between two fixed positions, and drive signals and holding potentials are applied alternately to dither the mechanism between the two positions and to hold it alternately in those positions during successive data acquisition periods.
Dithering mechanism and method for eliminating the effects of zero-rate bias in a rate sensor or gyroscope. Both continuously moving and indexing embodiments are disclosed. The mechanism includes a first part mounted in a fixed position centered about a dither axis perpendicular to the input axis of the gyroscope, a second part disposed coaxially of the first part and affixed to the sensing element of the gyroscope, and a plurality of piezoelectrically driven quartz flexure beams extending radially between the first and second parts for dithering the second part about the dither axis. In some embodiments, the dithering mechanism is formed separately from and affixed to the sensing element of the gyroscope, and in others it is formed integrally with the sensing element. In the indexing embodiments, radial arms and fixed stops limit movement of the mechanism between two fixed positions, and drive signals and holding potentials are applied alternately to dither the mechanism between the two positions and to hold it alternately in those positions during successive data acquisition periods.
A preformed sensor housing including a conduit having an inside; a plug disposed within the conduit; and a deposit covering a portion of the plug and a portion of the conduit. A method is also disclosed for creating a thin film diaphragm on a housing including the step of inserting a sacrificial element into the housing; depositing a diaphragm material onto the sacrificial element and the housing; and removing the sacrificial element.
Angular rate sensor for detecting rotation about first and second mutually perpendicular axes which has first and second masses coupled together for torsional drive mode oscillation of equal amplitude and opposite phase about third axes which are perpendicular to the first and second axes. The first mass is mounted for oscillation about the second axis in response to Coholis forces produced by rotation about the first axis, and the second mass is mounted for oscillation about the first axis in response to Coholis forces produced by rotation about the second axis. In some disclosed embodiments, the rate sensor also includes a pair of accelerometer masses which are connected together for torsional movement of equal amplitude and opposite phase about axes parallel to the third axes in response to acceleration along the second axis and for torsional movement of equal amplitude and opposite phase about axes parallel to the second axis in response to acceleration along the third axes.
G01P 9/00 - Measuring speed by using gyroscopic effect, e.g. using gas or using electron beam (using turn-sensitive devices or angular rate sensors using vibrating masses G01C 19/56)
20.
INERTIAL MEASUREMENT SYSTEM AND METHOD WITH BIAS CANCELLATION
System having one or more inertial sensors in which one or more of the sensor input axes are modulated in orientation about an axis substantially perpendicular to the input, or sensitive, axis of the sensor and, in some embodiments, by also enhancing the accuracy of such a system to provide improved signal to noise ratio and reduced sensitivity to errors in alignment of the sensor axes to the dither axes.
G01P 15/08 - Measuring accelerationMeasuring decelerationMeasuring shock, i.e. sudden change of acceleration by making use of inertia forces with conversion into electric or magnetic values
G01C 19/56 - Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
21.
Multiple channel RVDT with dual load path and fail-safe mechanism
An angular displacement sensor. The input shaft is supported by a housing and fixed to a main gear. A plurality of secondary gears are arranged around and meshed with the primary gear. A plurality of displacement sensors are integrally coupled with the secondary gears. Advantageously, the main shaft is formed with a shear notch. Further, each of the secondary gears are coupled to the displacement sensors so as to break free in case of a jam.
G01B 5/24 - Measuring arrangements characterised by the use of mechanical techniques for measuring angles or tapersMeasuring arrangements characterised by the use of mechanical techniques for testing the alignment of axes
G01D 21/00 - Measuring or testing not otherwise provided for
Multi-axis micromachined accelerometer which, in some disclosed embodiments, has a proof mass suspended above a substrate for movement in response to acceleration along first and second axes, a first detection electrode connected to the proof mass and constrained for movement only along the first axis, and a second detection electrode connected to the proof mass and constrained for movement only along the second axis. In another embodiment, the proof mass is also movable in response to acceleration along a third axis which is perpendicular to the substrate, and a third detection electrode is mounted on the substrate beneath the proof mass for detecting movement of the proof mass in response to acceleration along the third axis. In other embodiments, two proof masses are mounted above a substrate for torsional movement about an axis perpendicular to the substrate in response to acceleration along a first axis and for rotational movement about a second axis parallel to the substrate in response to acceleration along second axis perpendicular to the substrate, a first detector having input electrodes connected to the proof masses and constrained for movement only along the first axis for detecting acceleration along the first axis, and detection electrodes mounted on the substrate beneath the proof masses for detecting rotational movement of the proof masses and acceleration along the second axis.
G01P 15/125 - Measuring accelerationMeasuring decelerationMeasuring shock, i.e. sudden change of acceleration by making use of inertia forces with conversion into electric or magnetic values by capacitive pick-up
A dual rate force transducer is disclosed. A spring is machined to have a first spring portion with a first spring rate, a second spring portion with a second spring rate, and a platen between the spring portions. A pair of flanges are affixed to the distal ends of the spring portions. At least one sensor is affixed to one of the flanges, and at least one other sensor is affixed to another one of the flanges. Mounting hardware is used to couple the springs, flanges and platen together, including at least one mechanical stop to limit displacement of the spring.
A dual rate force transducer is disclosed. A spring is machined to have a first spring portion with a first spring rate, a second spring portion with a second spring rate, and a platen between the spring portions. A pair of flanges are affixed to the distal ends of the spring portions. At least one sensor is affixed to one of the flanges, and at least one other sensor is affixed to another one of the flanges. Mounting hardware is used to couple the springs, flanges and platen together, including at least one mechanical stop to limit displacement of the spring.
G01N 22/00 - Investigating or analysing materials by the use of microwaves or radio waves, i.e. electromagnetic waves with a wavelength of one millimetre or more
G01L 1/04 - Measuring force or stress, in general by measuring elastic deformation of gauges, e.g. of springs
25.
Voice coil actuator with embedded capacitive sensor for motion, position and/or acceleration detection
A voice coil actuator having a capacitive sensor. A magnetic housing contains at least one magnet, and has a wall that defines a first cavity. A magnetic core is coupled to the magnetic housing and extend from an interior surface of the magnetic housing in a direction of a center axis of the wall of the magnetic housing. A coil assembly has a wall defining a second cavity that at least partly envelops the magnetic core, disposed at least partly inside the first cavity, and adapted to move linearly with respect to the magnetic housing. The coil assembly forms a capacitive sensor with the magnetic core, the capacitive sensor adapted to measure at least one of position, velocity and acceleration of the coil assembly with respect to the magnetic housing.
G01R 27/26 - Measuring inductance or capacitanceMeasuring quality factor, e.g. by using the resonance methodMeasuring loss factorMeasuring dielectric constants
Rate sensor comprising two generally planar proof masses, means for driving the masses to oscillate in phase opposition about parallel drive axes in the planes of the masses, an input axis perpendicular to the drive axes, sense axes perpendicular to the drive axes and the input axis, means mounting the masses for torsional movement about the sense axes in response to Coriolis forces produced by rotation of the masses about the input axis, means constraining the two masses for anti-phase movement about both the drive axes and the sense axes, sensing frames coupled to the masses for movement in response to the torsional movement of the masses about the sense axes, and means responsive to movement of the sensing frames for monitoring rate of rotation about the input axis.
Rate sensor having a plurality of generally planar masses, means for driving the masses to oscillate about a drive axis in the planes of the masses, an input axis perpendicular to the drive axis, sense axes perpendicular to the drive axis and the input axis, means mounting the masses for torsional movement about the sense axes in response to Coriolis forces produced by rotation of the masses about the input axis, and means responsive to the torsional movement about the sense axis for monitoring rate of rotation about the input axis.
Rate sensor comprising a plurality of generally planar masses, a drive axis in the plane of each of the masses, means for driving the masses to oscillate about the drive axes, an input axis perpendicular to the drive axes, sense axes perpendicular to the drive axes and the input axis, means mounting the masses for torsional movement about the sense axes in response to Coriolis forces produced by rotation of the masses about the input axis, and means responsive to the torsional movement about the sense axis for monitoring rate of rotation about the input axis.
A pressure sensor system for measuring the pressure of a corrosive media includes a silicon plate forming a diaphragm and a glass plate or ring bonded to said silicon plate with an opening over the diaphragm. The diaphragm has resistive areas of different orientations to provide first resistive areas which have increased resistance with diaphragm deflection, and other areas which have decreased or little change in resistance with diaphragm deflection. The resistive areas may be formed by doping the silicon plate. The resistive areas have broad doped connectors extending outward to areas beyond the seal between the glass plate or ring, to wire bond areas on the silicon plate. Accordingly, the wire bond pads are not exposed to the corrosive media.
G01L 9/00 - Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by electric or magnetic pressure-sensitive elementsTransmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
patents
