Abstract

The invention relates to a device for movement transmission, torque transmission, force transmission and/or enabling movement, more particularly for forming a gear and/or guidance mechanism and for usage in a vacuum. The device comprises at least one notch/engagement part mechanism, which is formed by at least one notch (10, 10') and at least one engagement part (20, 20'). The device further comprises at least two contact surfaces (F1, F2), at least one contact surface (F1) being able to roll along the other contact surface (F2).

IPC Classes  ?

• F16H 55/08 - Profiling
• C23C 14/24 - Vacuum evaporation
• F16H 25/16 - Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms for interconverting rotary motion and oscillating motion
• F16H 57/02 - GearboxesMounting gearing therein

Abstract

The invention relates to a wall element (100) that is arranged for thermal insulation of a vacuum system (1), comprising a planar heat-resistant insulating material and at least one reflective layer, which is arranged on at least one side of the insulating material, wherein the insulating material comprises a self-supporting foam body (10), the at least one reflective layer comprises at least one film (20, 21) fastened to at least one surface of the foam body (10), and engaging elements (30) designed for connection to a further wall element are provided on an edge surface (11) of the wall element (100). The invention also relates to an encapsulation that is configured for thermal insulation of a vacuum system and to a method for operating a vacuum system.

IPC Classes  ?

• F16L 59/08 - Means for preventing radiation, e.g. with metal foil
• E04B 1/80 - Heat insulating elements slab-shaped
• F16L 59/16 - Arrangements specially adapted to local requirements at flanges, junctions, valves, or the like

Abstract

The invention relates to a closure device (100) for an evaporator cell (200), comprising a cover plate (11) that is movable relative to the evaporator cell, that forms a barrier for a vapor stream (1) coming from the evaporator cell in a shut-off position and that releases the vapor stream (1) in an open position. Said closure device also comprises a side wall arrangement (12), which laterally shields an environment of the evaporator cell from the vapor stream (1) and is connected to the cover plate (11), such that a collecting chamber (10) and a flow chamber (20) are formed. The collecting chamber (10) is open at a collecting opening (13) on a lower face of the closure device, is closed on an upper face by the cover plate (11) and is installed such that in the shut-off position the vapor stream (1) enters the collecting chamber (10) through the collecting opening (13), and the flow chamber (20) is open on the lower face at an inlet opening (21) and on the upper face at an outlet opening (22) of the cover plate (11) and is installed such that in the open position the vapor stream (1) passes through the inlet and outlet openings. The invention further relates to an evaporator cell, to a coating plant and a method for the operation thereof.

IPC Classes  ?

• C23C 14/24 - Vacuum evaporation
• C30B 19/06 - Reaction chambersBoats for supporting the meltSubstrate holders
• C30B 23/06 - Heating of the deposition chamber, the substrate, or the materials to be evaporated
• C23C 14/56 - Apparatus specially adapted for continuous coatingArrangements for maintaining the vacuum, e.g. vacuum locks
• C30B 25/14 - Feed and outlet means for the gasesModifying the flow of the reactive gases
• C23C 14/26 - Vacuum evaporation by resistance or inductive heating of the source
• C23C 14/30 - Vacuum evaporation by wave energy or particle radiation by electron bombardment

Abstract

The invention relates to a device for low-friction movement transfer, torque transfer, power transfer and/or movement enabling, in particular for forming a joint, a transmission, a bearing and/or a guide which is suitable for use in a vacuum. The device according to the invention comprises at least one notch (10) which has a notch base (11) and at least one engaging part (20') which has a face region (21'), wherein the notch base (11) and the face region (21') are designed for operative movable interaction with each other.

IPC Classes  ?

• F16H 25/16 - Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms for interconverting rotary motion and oscillating motion
• F16H 55/08 - Profiling

Abstract

An evaporator cell (100), in particular for evaporating a high-melting material like Si, comprises a first crucible (10) being adapted for receiving the material to be evaporated and providing a first evaporation volume, and a heating device (30) being arranged for heating the first crucible (10), wherein the first crucible (10) is arranged in a second crucible (20) surrounding the first crucible (10), so that a spacing (25) is formed between the first and second crucibles (10, 20), wherein the spacing (25) provides a second evaporation volume. Furthermore, a coating installation provided with at least one evaporator cell and a process for evaporating a high-melting material using the evaporator cell (100) are described.

IPC Classes  ?

• C23C 14/24 - Vacuum evaporation

Abstract

An evaporator cell (100) which is equipped for evaporating, in particular, a high-melting evaporation material, comprises a crucible (10) for receiving the evaporation material, which crucible comprises a crucible base (11), a side wall (12) which extends in an axial direction of the crucible (10) and a crucible opening (13), and a heating device (20) having a heating resistor (21) which comprises a multiplicity of heating zones (21.1, 21.2) which are arranged on an outside of the crucible (10) and extend along the axial direction of the crucible (10), wherein the heating zones (21.1, 21.2) are equipped for multi-side resistance heating and/or electron beam heating of the crucible (10), and wherein the heating zones (21.1, 21.2) are constructed in such a manner that a heating current through the heating resistor (21) which is formed, for example by a resistance sleeve, flows in parallel and in the same sense through all heating zones (21.1, 21.2). A process for operation of the evaporator cell is also described.

IPC Classes  ?

• C23C 14/24 - Vacuum evaporation
• C23C 14/26 - Vacuum evaporation by resistance or inductive heating of the source
• C23C 14/30 - Vacuum evaporation by wave energy or particle radiation by electron bombardment
• C30B 23/06 - Heating of the deposition chamber, the substrate, or the materials to be evaporated