A ring-shaped gasket for making high-purity fluid pathway connections between opposing fluid delivery apparatus elements having at least one simple flat surface in contact with the gasket. The face of at least one apparatus element typically has a circular counterbore depression to receive the gasket, but is not required. The gasket has a body, pierced through by a hole creating a fluid pathway and defining a radial inner surface, and additionally having a radial outer surface, a first axial end surface and a second axial end surface. At least one of the first and second axial end surfaces has a stress concentration feature radially adjacent to a gasket sealing region, the sealing region constructed to be in contact with a face surface of a corresponding fluid conduit port. The stress concentration feature may be a groove or a plurality of cavities disposed adjacent the gasket axial end surface sealing region.
A fluid substrate comprising a manifold including a circular opening, a tube stub plug coupled with the manifold at the circular opening, wherein an anti-rotation feature prevents the tube stub plug from rotating with respect to the manifold.
A delivery system can comprise a modular flow substrate comprising an i-Block (203) and an i-Bridge (205). The i-Block (203) can comprise a first i-Block conduit port (209), a second i-Block conduit port (211), a plurality of mounting apertures (215), a connection depression (219), at least one i-Block connection aperture and a fluid pathway extending between the first i-Block conduit port and the second i-Block conduit port. The i-Bridge (205) can comprise an i-Bridge conduit port (223), a manifold connection conduit port, at least one connection aperture (225), at least one mounting aperture (227), a connection protrusion (229), and a fluid pathway extending between the i-Bridge conduit port and the manifold connection conduit port. The connection protrusion can be sized and configured to fit within the connection depression of the i-Block.
F16K 27/00 - Construction of housingsUse of materials therefor
H01L 21/67 - Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereofApparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components
A delivery system can comprise a modular flow substrate comprising an i-Block and an i-Bridge. The i-Block can comprise a first i-Block conduit port, a second i-Block conduit port, a plurality of mounting apertures, a connection depression, at least one i-Block connection aperture and a fluid pathway extending between the first i-Block conduit port and the second i-Block conduit port. The i-Bridge can comprise an i-Bridge conduit port, a manifold connection conduit port, at least one connection aperture, at least one mounting aperture, a connection protrusion, and a fluid pathway extending between the i-Bridge conduit port and the manifold connection conduit port. The connection protrusion can be sized and configured to fit within the connection depression of the i-Block.
F16L 41/03 - Branch units, e.g. made in one piece, welded, riveted comprising junction pieces for four or more pipe members
H01L 21/67 - Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereofApparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components
A gasket retainer that is absent sharp corners, has apertures of reasonable dimensional tolerance, and may be conveniently made by a variety of manufacturing processes. The retainer is made from thin flat springy material that readily returns to form after slight bending. Representative gasket capturing apertures are of smoothly non-convex outline with major dimension sufficiently large to allow passage of a ring shaped gasket turned on edge and minor dimension sufficiently small to engage, on approximately opposite circular segments that each engage along less than one third of a gasket circumference, a cavity or groove on the outside diameter periphery of the gasket turned flat parallel to the retainer material sheet. Fasteners may be retained by similar apertures.
F16L 5/10 - Sealing by using sealing rings or sleeves only
F16J 15/12 - Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces with non-metallic packing with metal reinforcement or covering
6.
Ultra-seal gasket for joining high purity fluid pathways
A ring-shaped gasket for making high-purity fluid pathway connections between opposing fluid delivery apparatus elements having at least one simple flat surface in contact with the gasket. The face of at least one apparatus element typically has a circular counterbore depression to receive the gasket, but is not required. The gasket has a body, pierced through by a hole creating a fluid pathway and defining a radial inner surface, and additionally having a radial outer surface, a first axial end surface and a second axial end surface. At least one of the first and second axial end surfaces has a stress concentration feature radially adjacent to a gasket sealing region, the sealing region constructed to be in contact with a face surface of a corresponding fluid conduit port. The stress concentration feature may be a groove or a plurality of cavities disposed adjacent the gasket axial end surface sealing region.
A flow substrate mounting structure comprising a fastener aperture and an alignment feature, wherein the alignment feature comprises at least one of an alignment pin removably coupled with the flow substrate mounting structure, an alignment slot, and an alignment step. A structure for coupling a plurality of flow substrates comprising a flow substrate mounting structure comprising a first fastener aperture, and a second fastener aperture, wherein the first fastener aperture is configured to couple with a first fastener and the second fastener aperture is configured to couple with a second fastener, wherein an alignment fixture is used to align the flow substrate mounting structure with the plurality of flow substrates.
C23C 16/455 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into the reaction chamber or for modifying gas flows in the reaction chamber
F16L 3/00 - Supports for pipes, cables or protective tubing, e.g. hangers, holders, clamps, cleats, clips, brackets
F16L 41/02 - Branch units, e.g. made in one piece, welded, riveted
F16L 41/03 - Branch units, e.g. made in one piece, welded, riveted comprising junction pieces for four or more pipe members
An apparatus for controlling flow through a flow body comprising an intake opening and an output opening in the flow body, a cavity with a first cross-sectional shape and an opening, a diaphragm or a bellows, wherein the diaphragm or the bellows seals the opening of the cavity and the diaphragm or the bellows includes a hole, a plunger with the cross-sectional shape corresponding to the cavity, wherein the plunger is longitudinally movable within the cavity and a plunger portion forms an orifice with cavity portion, and a rod coupled with the plunger for facilitating the longitudinal movement of the plunger, wherein the rod comprises a rod cross section that corresponds to the hole in the diaphragm or the bellows.
F16K 5/18 - Special arrangements for separating the sealing faces or for pressing them together for plugs with cylindrical surfaces
F16K 31/145 - Operating meansReleasing devices actuated by fluid for mounting on, or in combination with, hand-actuated valves the fluid acting on a diaphragm
A gasket retainer that is absent sharp corners, has apertures of reasonable dimensional tolerance, and may be conveniently made by a variety of manufacturing processes. The retainer is made from thin flat springy material that readily returns to form after slight bending. Representative gasket capturing apertures are of smoothly non-convex outline with major dimension sufficiently large to allow passage of a ring shaped gasket turned on edge and minor dimension sufficiently small to engage, on approximately opposite circular segments that each engage along less than one third of a gasket circumference, a cavity or groove on the outside diameter periphery of the gasket turned flat parallel to the retainer material sheet. Fasteners may be retained by similar apertures.
F16L 5/10 - Sealing by using sealing rings or sleeves only
F16J 15/12 - Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces with non-metallic packing with metal reinforcement or covering
F16J 15/06 - Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces
F01N 13/18 - Construction facilitating manufacture, assembly or disassembly
F16J 15/08 - Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces with exclusively metal packing
10.
Ultra-seal gasket for joining high purity fluid pathways
A ring-shaped gasket for making high-purity fluid pathway connections between opposing fluid delivery apparatus elements having at least one simple flat surface in contact with the gasket. The face of at least one apparatus element typically has a circular counterbore depression to receive the gasket, but is not required. The gasket has a body, pierced through by a hole creating a fluid pathway and defining a radial inner surface, and additionally having a radial outer surface, a first axial end surface and a second axial end surface. At least one of the first and second axial end surfaces has a stress concentration feature radially adjacent to a gasket sealing region, the sealing region constructed to be in contact with a face surface of a corresponding fluid conduit port. The stress concentration feature may be a groove or a plurality of cavities disposed adjacent the gasket axial end surface sealing region.
A fluid substrate comprising a manifold including a circular opening, a tube stub plug coupled with the manifold at the circular opening, wherein an anti-rotation feature prevents the tube stub plug from rotating with respect to the manifold.
A flow substrate comprising a substrate body formed from a solid block of a first material, the substrate body having a first surface and a second surface opposing the first surface, a plurality of pairs of component conduit ports defined in the first surface of the substrate body, a plurality of fluid pathways extending between each respective pair of component conduit ports and in fluid communication with each component conduit port of the respective pair of component conduit ports, each respective fluid pathway being formed in the second surface of the substrate body; and at least one cap formed from a second material, the at least one cap having a first cap surface that is constructed to seal at least one fluid pathway, and a second cap surface opposing the first surface, wherein the substrate body includes an opening configured to couple with the at least one cap.
A flow substrate comprising a substrate body formed from a solid block of a first material, the substrate body having a first surface and a second surface opposing the first surface, a plurality of pairs of component conduit ports defined in the first surface of the substrate body, a plurality of fluid pathways extending between each respective pair of component conduit ports and in fluid communication with each component conduit port of the respective pair of component conduit ports, each respective fluid pathway being formed in the second surface of the substrate body; and at least one cap formed from a second material, the at least one cap having a first cap surface that is constructed to seal at least one fluid pathway, and a second cap surface opposing the first surface, wherein the substrate body includes an opening configured to couple with the at least one cap.
A flow substrate comprising a substrate body formed from a solid block of a first material, the substrate body having a first surface and a second surface opposing the first surface, a plurality of pairs of component conduit ports defined in the first surface of the substrate body, a plurality of fluid pathways extending between each respective pair of component conduit ports and in fluid communication with each component conduit port of the respective pair of component conduit ports, each respective fluid pathway being formed in the second surface of the substrate body; and at least one cap formed from a second material, the at least one cap having a first cap surface that is constructed to seal at least one fluid pathway, and a second cap surface opposing the first surface, wherein the substrate body includes an opening configured to couple with the at least one cap.
A fluid substrate comprising a manifold including a circular opening, a tube stub plug coupled with the manifold at the circular opening, wherein an anti -rotation feature prevents the tube stub plug from rotating with respect to the manifold.
A fluid substrate comprising a manifold including a circular opening, a tube stub plug coupled with the manifold at the circular opening, wherein an anti -rotation feature prevents the tube stub plug from rotating with respect to the manifold.
A ring-shaped gasket for making high-purity fluid pathway connections between opposing fluid delivery apparatus elements having at least one simple flat surface in contact with the gasket. The face of at least one apparatus element typically has a circular counterbore depression to receive the gasket, but is not required. The gasket has a body, pierced through by a hole creating a fluid pathway and defining a radial inner surface, and additionally having a radial outer surface, a first axial end surface and a second axial end surface. At least one of the first and second axial end surfaces has a stress concentration feature radially adjacent to a gasket sealing region, the sealing region constructed to be in contact with a face surface of a corresponding fluid conduit port. The stress concentration feature may be a groove or a plurality of cavities disposed adjacent the gasket axial end surface sealing region.
A gasket retainer that is absent sharp corners, has apertures of reasonable dimensional tolerance, and may be conveniently made by a variety of manufacturing processes. The retainer is made from thin flat springy material that readily returns to form after slight bending. Representative gasket capturing apertures are of smoothly non-convex outline with major dimension sufficiently large to allow passage of a ring shaped gasket turned on edge and minor dimension sufficiently small to engage, on approximately opposite circular segments that each engage along less than one third of a gasket circumference, a cavity or groove on the outside diameter periphery of the gasket turned flat parallel to the retainer material sheet. Fasteners may be retained by similar apertures.
F16J 15/12 - Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces with non-metallic packing with metal reinforcement or covering
F16J 15/06 - Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces
F16J 15/08 - Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces with exclusively metal packing
19.
Ultra-seal gasket for joining high purity fluid pathways
A ring-shaped gasket for making high-purity fluid pathway connections between opposing fluid delivery apparatus elements having at least one simple flat surface in contact with the gasket. The face of at least one apparatus element typically has a circular counterbore depression to receive the gasket, but is not required. The gasket has a body, pierced through by a hole creating a fluid pathway and defining a radial inner surface, and additionally having a radial outer surface, a first axial end surface and a second axial end surface. At least one of the first and second axial end surfaces has a stress concentration feature radially adjacent to a gasket sealing region, the sealing region constructed to be in contact with a face surface of a corresponding fluid conduit port. The stress concentration feature may be a groove or a plurality of cavities disposed adjacent the gasket axial end surface sealing region.
A flow substrate mounting structure comprising a fastener aperture and an alignment feature, wherein the alignment feature comprises at least one of an alignment pin removably coupled with the flow substrate mounting structure, an alignment slot, and an alignment step. A structure for coupling a plurality of flow substrates comprising a flow substrate mounting structure comprising a first fastener aperture, and a second fastener aperture, wherein the first fastener aperture is configured to couple with a first fastener and the second fastener aperture is configured to couple with a second fastener, wherein an alignment fixture is used to align the flow substrate mounting structure with the plurality of flow substrates.
C23C 16/455 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into the reaction chamber or for modifying gas flows in the reaction chamber
F16L 3/00 - Supports for pipes, cables or protective tubing, e.g. hangers, holders, clamps, cleats, clips, brackets
F16L 41/02 - Branch units, e.g. made in one piece, welded, riveted
F16L 41/03 - Branch units, e.g. made in one piece, welded, riveted comprising junction pieces for four or more pipe members
H01L 21/67 - Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereofApparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components
A flow substrate mounting structure (1002) comprising a fastener aperture (1004A, 1004B) and an alignment feature, wherein the alignment feature comprises at least one of an alignment pin (1016A) removably coupled with the flow substrate mounting structure, an alignment slot, and an alignment step. A structure for coupling a plurality of flow substrates comprising a flow substrate mounting structure comprising a first fastener aperture (1004A), and a second fastener aperture (1004B), wherein the first fastener aperture is configured to couple with a first fastener (1014A) and the second fastener aperture is configured to couple with a second fastener, wherein an alignment fixture is used to align the flow substrate mounting structure with the plurality of flow substrates.
A flow substrate mounting structure (1002) comprising a fastener aperture (1004A, 1004B) and an alignment feature, wherein the alignment feature comprises at least one of an alignment pin (1016A) removably coupled with the flow substrate mounting structure, an alignment slot, and an alignment step. A structure for coupling a plurality of flow substrates comprising a flow substrate mounting structure comprising a first fastener aperture (1004A), and a second fastener aperture (1004B), wherein the first fastener aperture is configured to couple with a first fastener (1014A) and the second fastener aperture is configured to couple with a second fastener, wherein an alignment fixture is used to align the flow substrate mounting structure with the plurality of flow substrates.
An apparatus for controlling flow through a flow body comprising an intake opening and an output opening in the flow body, a cavity with a first cross-sectional shape and an opening, a diaphragm or a bellows, wherein the diaphragm or the bellows seals the opening of the cavity and the diaphragm or the bellows includes a hole, a plunger with the cross-sectional shape corresponding to the cavity, wherein the plunger is longitudinally movable within the cavity and a plunger portion forms an orifice with cavity portion, and a rod coupled with the plunger for facilitating the longitudinal movement of the plunger, wherein the rod comprises a rod cross section that corresponds to the hole in the diaphragm or the bellows.
F16K 31/145 - Operating meansReleasing devices actuated by fluid for mounting on, or in combination with, hand-actuated valves the fluid acting on a diaphragm
An apparatus for controlling flow through a flow body (100) comprising an intake opening (102) and an output opening (108) in the flow body, a cavity with a first cross-sectional shape and an opening, a diaphragm (114) or a bellows, wherein the diaphragm or the bellows seals the opening of the cavity and the diaphragm or the bellows includes a hole, a plunger (106A) with the cross- sectional shape corresponding to the cavity, wherein the plunger is longitudinally movable within the cavity and a plunger portion (106B) forms an orifice with cavity portion, and a rod (104A) coupled with the plunger for facilitating the longitudinal movement of the plunger, wherein the rod comprises a rod cross section that corresponds to the hole in the diaphragm or the bellows.
An apparatus for controlling flow through a flow body (100) comprising an intake opening (102) and an output opening (108) in the flow body, a cavity with a first cross-sectional shape and an opening, a diaphragm (114) or a bellows, wherein the diaphragm or the bellows seals the opening of the cavity and the diaphragm or the bellows includes a hole, a plunger (106A) with the cross- sectional shape corresponding to the cavity, wherein the plunger is longitudinally movable within the cavity and a plunger portion (106B) forms an orifice with cavity portion, and a rod (104A) coupled with the plunger for facilitating the longitudinal movement of the plunger, wherein the rod comprises a rod cross section that corresponds to the hole in the diaphragm or the bellows.
A ring-shaped gasket for making high-purity fluid pathway connections between opposing fluid delivery apparatus elements having at least one simple flat surface in contact with the gasket. The face of at least one apparatus element typically has a circular counterbore depression to receive the gasket, but is not required. The gasket has a body, pierced through by a hole creating a fluid pathway and defining a radial inner surface, and additionally having a radial outer surface, a first axial end surface and a second axial end surface. At least one of the first and second axial end surfaces has a stress concentration feature radially adjacent to a gasket sealing region, the sealing region constructed to be in contact with a face surface of a corresponding fluid conduit port. The stress concentration feature may be a groove or a plurality of cavities disposed adjacent the gasket axial end surface sealing region.
A ring-shaped gasket for making high-purity fluid pathway connections between opposing fluid delivery apparatus elements having at least one simple flat surface in contact with the gasket. The face of at least one apparatus element typically has a circular counterbore depression to receive the gasket, but is not required. The gasket has a body, pierced through by a hole creating a fluid pathway and defining a radial inner surface, and additionally having a radial outer surface, a first axial end surface and a second axial end surface. At least one of the first and second axial end surfaces has a stress concentration feature radially adjacent to a gasket sealing region, the sealing region constructed to be in contact with a face surface of a corresponding fluid conduit port. The stress concentration feature may be a groove or a plurality of cavities disposed adjacent the gasket axial end surface sealing region.
A ring-shaped gasket for making high-purity fluid pathway connections between opposing fluid delivery apparatus elements having at least one simple flat surface in contact with the gasket. The face of at least one apparatus element typically has a circular counterbore depression to receive the gasket, but is not required. The gasket has a body, pierced through by a hole creating a fluid pathway and defining a radial inner surface, and additionally having a radial outer surface, a first axial end surface and a second axial end surface. At least one of the first and second axial end surfaces has a stress concentration feature radially adjacent to a gasket sealing region, the sealing region constructed to be in contact with a face surface of a corresponding fluid conduit port. The stress concentration feature may be a groove or a plurality of cavities disposed adjacent the gasket axial end surface sealing region.
A gasket retainer that is absent sharp corners, has apertures of reasonable dimensional tolerance, and may be conveniently made by a variety of manufacturing processes. The retainer is made from thin flat springy material that readily returns to form after slight bending. Representative gasket capturing apertures are of smoothly non-convex outline with major dimension sufficiently large to allow passage of a ring shaped gasket turned on edge and minor dimension sufficiently small to engage, on approximately opposite circular segments that each engage along less than one third of a gasket circumference, a cavity or groove on the outside diameter periphery of the gasket turned flat parallel to the retainer material sheet. Fasteners may be retained by similar apertures.
F16J 15/12 - Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces with non-metallic packing with metal reinforcement or covering
F16J 15/06 - Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces
F16J 15/08 - Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces with exclusively metal packing
30.
Ultra-seal gasket for joining high purity fluid pathways
A ring-shaped gasket for making high-purity fluid pathway connections between opposing fluid delivery apparatus elements having at least one simple flat surface in contact with the gasket. The face of at least one apparatus element typically has a circular counterbore depression to receive the gasket, but is not required. The gasket has a body, pierced through by a hole creating a fluid pathway and defining a radial inner surface, and additionally having a radial outer surface, a first axial end surface and a second axial end surface. At least one of the first and second axial end surfaces has a stress concentration feature radially adjacent to a gasket sealing region, the sealing region constructed to be in contact with a face surface of a corresponding fluid conduit port. The stress concentration feature may be a groove or a plurality of cavities disposed adjacent the gasket axial end surface sealing region.
F16L 17/06 - Joints with packing adapted to sealing by fluid pressure with sealing rings arranged between the end surfaces of the pipes or flanges or arranged in recesses in the pipe ends or flanges
F16J 15/08 - Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces with exclusively metal packing
31.
Ultra-seal gasket for joining high purity fluid pathways
A ring-shaped gasket for making high-purity fluid pathway connections between opposing fluid delivery apparatus elements having at least one simple flat surface in contact with the gasket. The face of at least one apparatus element typically has a circular counterbore depression to receive the gasket, but is not required. The gasket has a body, pierced through by a hole creating a fluid pathway and defining a radial inner surface, and additionally having a radial outer surface, a first axial end surface and a second axial end surface. At least one of the first and second axial end surfaces has a stress concentration feature radially adjacent to a gasket sealing region, the sealing region constructed to be in contact with a face surface of a corresponding fluid conduit port. The stress concentration feature may be a groove or a plurality of cavities disposed adjacent the gasket axial end surface sealing region.
A gasket retainer that is absent sharp corners, has apertures of reasonable dimensional tolerance, and may be conveniently made by a variety of manufacturing processes. The retainer is made from thin flat springy material that readily returns to form after slight bending. Representative gasket capturing apertures are of smoothly non-convex outline with major dimension sufficiently large to allow passage of a ring shaped gasket turned on edge and minor dimension sufficiently small to engage, on approximately opposite circular segments that each engage along less than one third of a gasket circumference, a cavity or groove on the outside diameter periphery of the gasket turned flat parallel to the retainer material sheet. Fasteners may be retained by similar apertures.
A fluid delivery system that includes flow substrates and manifolds that minimize the number of fluid conduit ports and seals needed to build standardized fluid delivery sticks. Each flow substrate has a component attachment surface with one or more component conduit ports and an associated plurality of fastener apertures. Some flow substrates incorporate a transverse manifold connection conduit port on a surface opposite the component attachment surface. Fastener apertures associated with the transverse manifold connection conduit port are accessible adjacent to installed fluid handling components. Transverse connection between fluid delivery sticks use a welded assembly of fluid conduits to provide a transverse connecting lower layer which is sealingly retained by fasteners inserted from above through apertures associated with the transverse manifold connection conduit port. Flow substrates for each fluid delivery stick are fastened to a standardized bracket and each fluid delivery stick arrangement can be assembled and tested as an integrated subassembly.
F16K 11/10 - Multiple-way valves, e.g. mixing valvesPipe fittings incorporating such valvesArrangement of valves and flow lines specially adapted for mixing fluid with two or more closure members not moving as a unit
34.
Extreme flow rate and/or high temperature fluid delivery substrates
A flow substrate including a body having a first surface and a second opposing surface, a plurality of pairs of ports defined in the first surface of the body, a plurality of fluid pathways extending between each respective pair of ports and in fluid communication with each port of the respective pair of ports, and at least one cap. Each fluid pathway is formed in the second surface of the body. The at least one cap has a first surface constructed to seal at least one fluid pathway, and a second opposing surface. At least one of the body and the at least one cap includes a weld formation formed in at least one of the second surface of the body and the second surface of the at least one cap constructed to surround the at least one fluid pathway and facilitate welding of the at least one cap to the body along the weld formation.
F16K 1/00 - Lift valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces
patents
