A vacuum slide gate valve with a drive unit that is formed in such a way that a closure plate, by displacement of at least one valve rod along a longitudinal axis, is displaceable from an open position into an intermediate position, and, by displacement of said valve rod along a transverse axis running at right angles to the longitudinal axis, is displaceable from the intermediate position into a closing position. The valve rod is rigidly connected to a sliding part, which is guided between a first position and a second position parallel to the longitudinal axis, and between the second position and a third position parallel to the transverse axis. A displacement member is mechanically coupled to the sliding part via an inclined connection to displace the sliding part from the first position into the second position and from the second position into the third position.
F16K 3/16 - Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing facesPackings therefor with special arrangements for separating the sealing faces or for pressing them together
F16K 51/02 - Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
F16K 3/18 - Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing facesPackings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members
2.
Vacuum valve and closure member for closing a flow path in a gas-tight manner by means of a linear movement
A vacuum valve closes a flow path in a gas-tight manner using a linear movement and includes a closure member, a first sealing surface of the valve housing that encloses the opening, and a corresponding second sealing surface of the closure member. In the closed position, the second sealing surface is in sealing contact with the first sealing surface. In the region between the opening and the first sealing surface, the valve housing includes a first sloped surface that encloses the opening, and the closure member includes a corresponding, parallel second sloped surface. The sloped surfaces, which have a sloping angle between 3 and 15 degrees relative to the geometric adjustment axis, are located such that, in the closed position of the closure member, the second sloped surface is arranged in a parallel position opposite the first sloped surface at a distance of 0 and 0.6 mm.
F16K 3/30 - Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing Details
F16K 3/18 - Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing facesPackings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members
F16K 51/02 - Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
F16K 3/314 - Forms or constructions of slidesAttachment of the slide to the spindle
A vacuum valve having a valve rod (11) which has a longitudinal axis (20) and which carries at least one closing member (9, 10) for closing at least one valve orifice (2, 3) and which can be displaced by a longitudinal drive (18), in a longitudinal direction (21) lying parallel to the longitudinal axis (20) of the valve rod (11), from an initial position, in which the vacuum valve is open, into an intermediate position and can be displaced by a transverse drive (19) from the intermediate position to at least one end position in which the vacuum valve is closed. A transmission piece (23) which is guided displaceably in the longitudinal direction (21) by at least one guide part (24) is secured to the valve rod (11). At least one transverse drive part (26) of the transverse drive (19) engages on the guide part (24), the guide part (24) being displaceable in the transverse direction (22) by the transverse drive (19) via the at least one transverse drive part (26), and the guide part (24), during its displacement in the transverse direction (22), taking along the transmission piece (23).
A valve, in particular a vacuum valve, in which, in order to close a passage opening, in particular of the valve, at least one closure member can be moved by a valve drive, starting from a maximum open position, in which the closure member opens the passage opening at least partially, first on a first partial path into an intermediate position, and the closure member can be moved, starting from the intermediate position, on at least one second partial path which is angled away from the first partial path into a closed position, in which the closure member closes the passage opening, the valve drive having at least two cylinder spaces which are loadable in each case with a pressure medium, at least one piston being mounted displaceably in each of the cylinder spaces, and the pistons being supported on one another by way of at least one prestressing element.
F16K 31/122 - Operating meansReleasing devices actuated by fluid the fluid acting on a piston
F16K 51/02 - Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
F16K 3/18 - Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing facesPackings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members
A vacuum valve includes a valve housing (1) with at least one valve opening (2, 3), at least one valve plate (10, 11) and a carrying unit (9), which carries the at least one valve plate (10, 11). The at least one valve plate (10, 11) is connected to the carrying unit (9) via at least two connecting devices, each having a connecting part (45), with a neck portion (47) and an enlarged head portion (48), which projects in relation to the neck portion (47), and having a receiving part (46, 56′), with a respective receiving slot (49) into which the neck portion (47) of the connecting part (45). In order to prevent the connecting parts (45) from moving out of the receiving slots (49), at least one of the receiving parts (46′) of the connecting devices can be rotated about an axis of rotation (80) from an introduction position, in which the associated connecting part (45) can be introduced into the receiving slot (49), by way of its neck portion (47), as far as the end position, into a blocking position.
F16K 3/18 - Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing facesPackings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members
A vacuum valve includes a valve housing with first and second valve openings, which have parallel axes, a first and a second valve plate, adjustable between an open position, an intermediate position and a closed position, and a carrying unit, which carries the valve plates between the intermediate position, in which the valve plates cover over the respective valve openings, but are raised up from the valve seat, and the closed position, and each include a cylinder, having at least one cylinder space, and at least one piston, arranged in the cylinder space and has a piston rod, connected to one of the valve plates. The carrying unit has at least first and second carrier rods, to which the cylinders of the drive elements are connected. The cylinders each span an interspace located between the carrier rods, arranged on opposite sides laterally alongside the piston rods of the drive elements.
F16K 3/18 - Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing facesPackings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members
F16K 21/16 - Self-closing valves, i.e. closing automatically after operation closing after a predetermined quantity of fluid has been delivered
F16K 1/54 - Arrangements for modifying the way in which the rate of flow varies during the actuation of the valve
F16K 7/16 - Diaphragm cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat the diaphragm being mechanically actuated, e.g. by screw-spindle or cam
8.
Valve for the substantially gas-tight interruption of a flow path
A valve for the gastight interruption of a flow path is disclosed. A valve housing includes a first opening and a valve seat. A valve disk includes an inner disk portion, which is linearly movable relative to an outer disk portion so that, in a closed setting, a pressure differential acts substantially upon the movable inner disk portion, which is supported on the valve housing. The valve seat has a radially inward pointing first inner face and the outer disk portion has a radially outward pointing first outer face, wherein in the closed setting there exists a radial sealing contact with the first inner face. The outer disk portion has a radially inward pointing second inner face and the inner disk portion has a radially outward pointing second outer face, having a radially sealing contact with the second inner face.
A flap transfer valve is disclosed for the transfer of semiconductor elements or substrates into a semiconductor or substrate processing process chamber having an elongated first opening, which is surrounded in the form of a frame by a first sealing surface on a first sealing plane, and an elongated valve closure beam, having a second sealing surface which corresponds to the first sealing surface, can be brought into gas-tight contact with it, and is located on a second sealing plane. A support is arranged on the rear face of the valve closure beam, which is arranged such that it can pivot through a limited pivoting angle about a tilting axis. The support together with the valve closure beam can pivot about a pivoting axis, which lies on the first sealing plane, and the tilting axis lies on the second sealing plane.
F16K 1/16 - Lift valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces with pivoted closure members
A vacuum valve including a wall (1) having a valve opening (2) surrounded by a valve seat (4), at least one valve plate (5), which is disposed in a vacuum region of the vacuum valve and can be moved from an open position in a longitudinal direction (6) into an intermediate position, and from the intermediate position in a transverse direction (7) perpendicular to the longitudinal direction (6) into a closed position. At least one valve rod (12), which carries the valve plate (5), is led through the vacuum region of the vacuum valve and can be displaced relative to the wall (1) in the longitudinal direction (6) located parallel to the longitudinal axis (14) of the valve rod (12), and also in the transverse direction (7). Longitudinal and transverse drive devices (15, 15′, 16, 16′) are disposed outside of the vacuum region of the vacuum valve, and the drive devices can displace the valve rod (12) in the longitudinal direction (6) and in the transverse direction (7) in order to adjust the valve plate (5). A bearing unit (17, 17′) is provided, which is located outside of the vacuum region of the vacuum valve and rigidly connected to the wall (1) and by which a guide unit (20, 20′) that displaceably guides the valve rod (12) in the longitudinal direction (6) is guided displaceably in the transverse direction (7).
F16K 25/00 - Details relating to contact between valve members and seats
F16K 3/00 - Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
The invention relates to a vacuum valve for interrupting, releasing or controlling a flowing medium in the interior (3) of the vacuum valve (1). A shaft (6) coupled to a valve drive (5) is routed gas-tight from the atmospheric area (4) to the interior (3) through a valve housing (2) by way of a sealing shaft penetration (20) so that a movement produced by the valve drive (5) can be transferred from the atmospheric area (4) to the interior (3) for the purposes of interrupting, releasing or controlling the flow.
F16K 1/22 - Lift valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces with pivoted closure members with pivoted discs or flaps with axis of rotation crossing the valve member, e.g. butterfly valves
A vacuum valve with a valve housing with a valve opening, a closing element, and at least one peripherally closed seal on the closing element with first and second seal main sections and first and second seal connecting sections allocated to corresponding seat main sections and connecting sections. The seal extends in a groove defined by two side walls and a base wall. The first seal main section is arranged on a front end face of the closing element and has a middle part where the seal extends in a straight line. The seal is clamped by a clamping bar at least across part of the middle part, with the clamping bar fixed on the closing element and forming one of the side walls. Through at least one second sub-region of the longitudinal extent of the seal, the two side walls and base wall are formed by the closing element.
A mounting of a valve plate (1) on a valve rod (2) using a cross member (3) extending transversely with respect to the valve rod (2) is provided. The cross member (3) is connected at a central connecting point (4) to the valve rod (2) and is connected at least two lateral connecting points (5, 6), which are situated on both sides of the central connecting point (4), to the valve plate (1). The cross member (3) has a spacing (a) from the valve plate (1) in a central section (17) which comprises the central connecting point (4) and sections of the cross member (3) adjacent to the central connecting point (4) at both sides. By a twisting of the cross member (3), the valve plate (1) can be pivoted relative to the valve rod (2) about a pivot axis (19) which is at right angles to the valve rod.
A flap transfer valve is disclosed. An elongated first opening can be closed by an elongated valve closure beam, which can be pivoted via a pivoting bearing between a closed and open position. A shaft can be rotated by a drive and is operatively connected to the valve closure beam such that rotation of the shaft causes the valve closure beam to pivot. The pivoting bearing is formed by at least three bearing elements which are distributed at a distance from one another along the shaft axis in the valve housing, and on which the valve closure beam and the shaft are mounted. The shaft axis is at a distance from the pivoting axis. First arms are arranged on the shaft to provide a force to the rear face of the valve closure beam to pivot the valve closure beam. According to one development of the invention, the valve closure beam, the pivoting bearing and the shaft are arranged on a valve cover in a gas-tight valve housing, wherein the shaft, the pivoting bearing and the valve closure beam can be decoupled from the valve housing.
F16K 1/16 - Lift valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces with pivoted closure members
F16K 1/20 - Lift valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces with pivoted closure members with pivoted discs or flaps with axis of rotation arranged externally of valve member
H01L 21/67 - Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereofApparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components
F16K 51/02 - Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
A flap transfer valve is disclosed. An elongated first opening can be closed by elongated valve closure beam pivoted between a closed position and an open position. A shaft can be rotated about a shaft axis by a drive and is operatively connected to the valve closure beam to cause the valve closure beam to pivot. The valve closure beam, the pivoting bearing and the shaft are arranged on a valve cover in a gas-tight valve housing. The shaft, the pivoting bearing and the valve closure beam can be decoupled from the valve housing. The pivoting bearing is formed by at least three bearing elements which are distributed at a distance from one another along the shaft axis in the valve housing, and on which the valve closure beam and the shaft are mounted. The shaft axis is at a distance from the pivoting axis.
F16K 1/16 - Lift valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces with pivoted closure members
F16K 1/20 - Lift valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces with pivoted closure members with pivoted discs or flaps with axis of rotation arranged externally of valve member
H01L 21/67 - Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereofApparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components
F16K 51/02 - Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
A closing unit for a vacuum valve includes a first valve plate (7) for closing a first valve opening (2) of the vacuum valve, a second valve plate (8) for closing a second valve opening (3) of the vacuum valve, and a carrier plate (19) that lies between the valve plates (7, 8) to which the valve plates (7, 8) are fastened detachably. For fastening a corresponding valve plate (7, 8) to the carrier plate (19), at least one clamping piece (20, 21) is used by which interacting clamping surfaces (22-26) are clamped with each other. Of the interacting clamping surfaces (22-26), at least one is constructed as an angular surface by which the corresponding valve plate (7, 8) is pressed against the carrier plate (19).
F16K 3/00 - Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
F16K 25/00 - Details relating to contact between valve members and seats
A sliding valve including a valve body (1) with a wall having a valve opening (3) and a valve seat (4) surrounding the valve opening (3), a valve plate (5), at least one valve rod (8) that can move in the axial direction and can be moved for closing the valve starting from a first position in which the valve plate (5) assumes its open position, to a second position in which the valve plate (5) assumes an intermediate position covering the valve opening (3) but lifted from the valve seat (4), into a third position in which the valve plate (5) assumes its closed position. At least one lifting element (10, 11) moves the valve plate (5) from its intermediate position into its closed position, and at least one support unit (12) with at least one front and at least one rear support element (14, 13) that interact in the closed position of the valve plate (5) with at least one valve-body-fixed, front support element and at least one valve-body-fixed, rear support element (16, 15). In the second position of the valve rod (8), either the rear support elements (13, 15) or the front support elements (14, 16) are in engagement and the other of these support elements (14, 16; 13, 15) are spaced apart from each other. When moving the valve rod (8) from its second to its third position, the support unit (12) pivots about a rotational axis (17) from a starting position in which the other support elements (14, 16; 13, 15) are spaced apart from each other into an end position in which the other support elements (14, 16; 13, 15) contact each other.
A method for controlling or regulating a vacuum valve that includes a valve body (1) with a valve opening (2), a closing member (3), an actuator (5) for moving the closing member (3), and a control device (9) by which the actuator (5) is triggered and by which the pressing force acting on the elastic seal (4) in the closed position of the closing member (3) is set. The setting of the pressing force acting on the elastic seal (4) is performed as a function of at least one parameter that can be input by a user.
A method for controlling or regulating a vacuum valve that includes: a valve body (1) with a valve opening (2); a closing member (3) that can be moved between an open position and a closed position over a closing path (s) for closing the vacuum valve and that closes the valve opening (2) in the closed position, in which at least one elastic seal (4) is pressed onto a seal face (35); an actuator (5) for moving the closing member (3); and a control device (9) by which the actuator (5) can be triggered; the point (p) of the closing path (s) at which the elastic seal (4) contacts the seal face (35) and/or a velocity (v) of the closing member (3) at that point is used as a controlling parameter for the control device (9).
A vacuum valve including a valve body with a valve orifice, a closure member for closing the valve orifice, a first piston-cylinder unit, a second piston-cylinder unit, a first control element, and a second control element. When opening the vacuum valve, a pressure medium line, which applies pressure to the opening cylinder space of the second piston-cylinder unit, is blocked during the first part of the opening process, and is released at the end of the first part of the opening process by the first control element. When closing the vacuum valve, a pressure medium line, which applies pressure to the closing cylinder space of the first piston-cylinder unit, is blocked during the first part of the closing process, and is released by the second control element at the end of the first part of the closing process.
F16K 1/16 - Lift valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces with pivoted closure members
A vacuum valve drive for linear displacement of a valve closure along an adjustment axis between an opened and closed position, and a vacuum valve comprising the vacuum valve drive, are provided. The vacuum valve drive comprises a drive housing containing a gas tight working space, a piston inside the working space, and at least one connecting rod which is led from the working space in a gas-tight manner to the valve closure. A static guide rod extends centrally and parallel to the adjustment axis inside the working space and is led through the piston. A precision linear bearing is between the piston and the guide rod. The piston is linearly guided by the guide rod with high precision and centered in the working space so that the valve closure is moved with high precision and pressed onto the valve seat.
The invention relates to a valve, in particular a pendulum or slide gate valve, for essentially gastight closing of a flow path (F). The valve includes a valve housing (1) having a first wall (2) which has a first opening (3) and a first valve seat (4), a valve plate (5) having a closing side (6) with a first sealing ring (7) and at least one drive (8). By action of the drive (8), the valve plate (5) is pivotable or displaceable from an opened position (A) essentially parallel to the first valve seat (4), and the perpendicular distance between the valve plate (5), and the first valve seat (4) can be reduced so that, in the closed position (C), the flow path (F) is closed essentially gastight by an axially sealing contact between the first sealing ring (7) and the first valve seat (4). The valve plate (5) includes support part (9), which is connected to the drive (8) and fixes the first sealing ring (7) in the perpendicular direction to the first valve seat (4), and a sealing part (10) which has an inner circumferential area (11) and which is mounted so as to be movable relative to the support part (9) in a direction (Z) essentially perpendicular to the first valve seat (4). The inner circumferential area (11) encloses the first sealing ring (7) in an essentially gastight way with an inner seal. Thus, in the closed position (C), a pressure difference at the valve plate (5) acts essentially on the sealing part (10) so that sealing part (10), decoupled from the support part (9), is supported perpendicularly on a section of the valve housing (1), in particular the first valve seat (4) or a lateral groove (27).
F16K 1/16 - Lift valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces with pivoted closure members
24.
Valve for essentially gastight closing a flow path
The invention relates to a valve, in particular a shuffle or sliding valve, for essentially gastight closing of a flow path (F). The valve includes a valve housing (1;1a) having a first wall (2) which has a first opening (3) and a first valve seat (4), a valve disk (5) having a closing side (6) with a sealing ring (7) and at least one drive (8). Through the drive (8), the valve disk (5) is pivotable or displaceable from an opened position (A) essentially parallel to the first valve seat (4), and the perpendicular distance between the valve disk (5), and the first valve seat (4) can be reduced so that, in the closed position (C), the flow path (F) is closed essentially gastight by an axially sealing contact between the sealing ring (7) and the first valve seat (4). The valve disk (5) includes an outer disk section (9), which is connected to the drive (8) and fixes the sealing ring (7) in the perpendicular direction to the first valve seat (4), and an inner disk section (10) which has an outer circumferential area (11) and which is mounted so as to be movable relative to the outer disk section (9) in a direction (Z) essentially perpendicular to the first valve seat (4). The outer circumferential area (11) is enclosed essentially gastight with an inner seal by the sealing ring (7). Thus, in the closed position (C), a pressure difference at the valve disk (5) acts essentially on the inner disk section (10) so that the inner disk section (10), decoupled from the outer disk section (9), is supported perpendicularly on a section of the valve housing (1), in particular the first valve seat (4) or a lateral groove (27).
F16K 1/16 - Lift valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces with pivoted closure members
F16K 25/00 - Details relating to contact between valve members and seats
a) having a first wall (2) which has a first opening (3) and a first valve seat (4), a valve disk (5) having a closing side (6) with a sealing ring (7) and at least one drive (8). Through drive (8), the valve disk (5) is pivotable or displaceable from an opened position (A) essentially parallel to the first valve seat (4), and the perpendicular distance between the valve disk (5), and the first valve seat (4) can be reduced so that, in the closed position (C), the flow path (F) is closed essentially gastight by an axially sealing contact between the sealing ring (7) and the first valve seat (4). The valve disk (5) includes an outer disk section (9), which is connected to the drive (8) and fixes the sealing ring (7) in the perpendicular direction to the first valve seat (4), and an inner disk section (10) which has an outer circumferential area (11) and which is mounted so as to be movable relative to the outer disk section (9) in a direction (Z) essentially perpendicular to the first valve seat (4). The outer circumferential area (11) is enclosed essentially gastight with an inner seal by the sealing ring (7). Thus, in the closed position (C), a pressure difference at the valve disk (5) acts essentially on the inner disk section (10) so that the inner disk section (10), decoupled from the outer disk section (9), is supported perpendicularly on a section of the valve housing (1), in particular the first valve seat (4) or a lateral groove (27).
F16K 1/16 - Lift valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces with pivoted closure members
A vacuum valve comprises a conical sealing surface arranged at a valve body, a valve disk at which a conical sealing surface is arranged, and a sealing ring having a first sealing surface and a second sealing surface. The valve disk, the valve body and the sealing ring are made of metal at least in the areas of the sealing surfaces. The valve disk is constructed so as to be curved or angled considered in axial section through the center and encloses an angle of less than 90° with the closing direction in the unloaded state at least in a radial outer portion adjoining the sealing surface. The valve disk has an elasticity such that a displacement of the radial outer edge of the valve disk relative to a point in the center of the valve disk of at least 0.1% of the diameter of the valve disk in direction of the center axis of the valve disk is bought about in the closed position of the valve disk relative to the open position of the valve disk by an elastic deformation of the valve disk.
F16K 31/383 - Operating meansReleasing devices actuated by fluid in which fluid from the conduit is constantly supplied to the fluid motor in which the fluid works directly on both sides of the fluid motor, one side being connected by means of a restricted passage and the motor being actuated by operating a discharge from that side the fluid acting on a piston
patents