Abstract

This substrate treatment device is equipped with: a treatment chamber for holding multiple glass substrates, on each of which a multi-layer film, comprising any one of copper-indium, copper-gallium, or copper-indium-gallium is formed; a reaction tube that is formed so as to define the treatment chamber; a cassette that is configured so as to be insertable into the treatment chamber, arranges the primary surfaces of the multiple glass substrates so as to face each other at a predetermined distance, and has a pair of sidewalls which cover the outer primary surfaces of the outermost glass substrates among the arranged multiple glass substrates; a gas supply pipe for introducing a selenium-containing gas or a sulfur-containing gas into the treatment chamber; an exhaust tube for exhausting the atmosphere in the treatment chamber; a heating section that is provided so as to surround the reaction tube; and fans for forcibly convecting the atmosphere in the treatment chamber in the short-side direction of the multiple glass substrates at the respective primary surfaces of the multiple glass substrates.

IPC Classes  ?

• H01L 21/365 - Deposition of semiconductor materials on a substrate, e.g. epitaxial growth using reduction or decomposition of a gaseous compound yielding a solid condensate, i.e. chemical deposition
• H01L 31/04 - SEMICONDUCTOR DEVICES NOT COVERED BY CLASS - Details thereof adapted as photovoltaic [PV] conversion devices

Goods & Services

Electric resistor Heating elements

Abstract

A firing furnace in which the risk of contaminating a material to be fired is extremely low even if it is not placed in a firing container, or the like, and a firing furnace by which uniform firing can be ensured with a simple structure and reduced power consumption. The vertical firing furnace comprises a tube arranged vertically, a heating source arranged around the tube, a unit arranged above the tube in order to dropping a material to be fired into the tube, a unit for feeding atmospheric gas from the upper end of the tube, and a unit for pulling out exhaust gas containing the atmospheric gas from the lower end of the tube, and discharging it after cooling.

IPC Classes  ?

• F27B 1/08 - Shaft or like vertical or substantially vertical furnaces heated otherwise than by solid fuel mixed with charge
• C04B 35/46 - Shaped ceramic products characterised by their compositionCeramic compositionsProcessing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxides based on titanium oxides or titanates
• C04B 35/64 - Burning or sintering processes
• F27B 1/09 - Shaft or like vertical or substantially vertical furnaces heated otherwise than by solid fuel mixed with charge heated electrically