A linear motor system includes a coil assembly and a magnet assembly disposed adjacent to the coil assembly. The coil assembly includes a plurality of coil windings and a sealing material to seal and to prevent moisture and/or chemical ingress into the coil windings. The magnet assembly includes a plurality of magnets, a magnet housing disposed to house, cover and seal the plurality of magnets within the magnet housing, a plate to cover the plurality of magnets, a sealing element disposed between the plate and the magnet housing to seal the magnet assembly, and a groove formed to receive the sealing element between the plate and the magnet housing.
H02K 5/10 - Casings or enclosures characterised by the shape, form or construction thereof with arrangements for protection from ingress, e.g. of water or fingers
H02K 41/03 - Synchronous motorsMotors moving step by stepReluctance motors
H02K 5/16 - Means for supporting bearings, e.g. insulating supports or means for fitting bearings in the bearing-shields
A linear motor system includes a coil assembly, a movable magnet assembly, and a bearing assembly coupled to facilitate movement of one of the magnet assembly and the coil assembly with respect to the other. The bearing assembly includes a single bearing rail, wherein the single bearing rail is a separate component from the coil assembly and the magnet assembly and is mounted to the magnet assembly on a major face thereof opposite the major face thereof adjacent to which the coil assembly is disposed. The single bearing rail is narrower than the coil assembly and the magnet assembly. The single bearing rail includes a profiled rail configured to hold the magnet assembly on the coil assembly while allowing the magnet assembly to move along the coil assembly.
H02K 5/10 - Casings or enclosures characterised by the shape, form or construction thereof with arrangements for protection from ingress, e.g. of water or fingers
H02K 41/03 - Synchronous motorsMotors moving step by stepReluctance motors
H02K 5/16 - Means for supporting bearings, e.g. insulating supports or means for fitting bearings in the bearing-shields
Systems and methods of providing support to a mirror assembly including a high-stiffness, low mass structure. An L-shaped support, in conjunction with a shelf member and a plurality of fingers, provides support to a chuck upon which an operation (such as a wafer inspection) can be carried out. Materials such as ALBEMET and INVAR can be used to reduce mass and increase stiffness to avoid resonance in the system. Sensors and actuators can be employed to sense input energy and adjust the structure, respectively, if resonance is deemed likely.
G02B 7/182 - Mountings, adjusting means, or light-tight connections, for optical elements for prismsMountings, adjusting means, or light-tight connections, for optical elements for mirrors for mirrors
B23B 31/10 - Chucks characterised by the retaining or gripping devices or their immediate operating means
Motion control components and systems, namely, linear motors, linear and rotary position stages, servo controllers, positioning XY gantries, air bearing positioning stages, vacuum compatible positioning systems, servo amplifiers, encoders, polymer composite, and integrated motion control systems.
Motion control components and systems, namely, linear motors, linear and rotary positioning stages, servo controllers, positioning XY gantries, air bearing positioning stages, vacuum compatible positioning systems, servo amplifiers, encoders, polymer composite, and integrated motion control systems.
