Methods of and apparatuses for monitoring a plating bath composition by using voltammetric consolidated designer waveforms. The designer AC waveforms are optimized and consolidated to maximize analytical output of the solitary measurement thus drastically reducing the total time required for a full analysis of a plating bath as compared to traditional analytical techniques. More specifically, the present invention relates to a novel concept of generating of a consolidated designer waveform from the preselected segments of designer AC waveforms. More particularly, the method of present invention relates to determination of segments of designer AC waveforms based on a novel chemometric parameter of Analysis of Variance relative F-ratio.
344); - from 0.015 wt% to 0.2 wt% of a compound chosen from among diethylenetriamine penta(methylene phosphonic acid) (DTPMP), aminotris(methylenephosphonic acid) (ATMP) and mixtures thereof; - water, wherein the weight percentages are expressed relative to the weight of the chemical etching solution, the solution having a pH of 6.5 to 8.6. The invention also relates to a method for chemically etching a layer of a titanium-based material on a microelectronic device by means of the etching solution and to a method for preparing the etching solution.
Methods of and apparatuses for monitoring a plating bath composition by using complex designer voltammetry. The designer waveforms are optimized in order to maximize analytical output of the solitary measurement thus drastically reducing the total time required for a full analysis of a plating bath compared to traditional analytical techniques.
C23C 18/16 - Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coatingContact plating by reduction or substitution, i.e. electroless plating
5.
Chemical composition for removing nickel-platinum alloy residues from a substrate, and method for removing such residues
characterised in that it is prepared by mixing a composition B comprising bromide ions and a composition H comprising hydrogen peroxide such that in the composition C, at the moment of mixing, the molar concentration of bromide ions is comprised between 0.15 mol/L and 0.45 mol/L and the molar ratio of hydrogen peroxide with respect to bromide ions is comprised between 1.1 and 2.
placing the hot chemical composition C and the substrate in contact for a sufficient duration to remove the nickel-platinum alloy residues from the substrate.
The present invention concerns an aqueous chemical composition C for selective hot removal, from a substrate, of nickel-platinum alloy residues containing at least 8% by mass Pt in relation to the total weight of the nickel-platinum alloy, characterised in that it is prepared by mixing a composition B comprising bromide ions and a composition H comprising hydrogen peroxide so that in the composition C, at the time of mixing, the molar concentration of bromide ions is between 0.15 mol/L and 0.45 mol/L and the molar ratio of hydrogen peroxide to bromide ions is between 1.1 and 2. The invention also relates to a method for selectively removing nickel-platinum alloy residues containing at least 8% by mass Pt in relation to the total weight of the nickel-platinum alloy from a substrate, comprising the following steps: - hot preparation of a chemical composition C according to any one of claims 1 to 3, - placing the hot chemical composition and the substrate in contact for a sufficient duration to remove the nickel-platinum alloy residues from the substrate.
A cleaning chemical composition suitable, for removing a passivation layer from a substrate, wherein the passivation layer comprises residues resulting from etching of said Substrate.
01 - Chemical and biological materials for industrial, scientific and agricultural use
Goods & Services
Chemical solutions, powders, salts and alloys for use in plating, immersing, and coating of precious metals and non-precious metals; etchants for use in electronics manufacturing
9.
Solution and method for etching titanium based materials
The invention relates to a solution for etching titanium based materials, comprising from about 27 w % to about 39 w % hydrogen peroxide, from about 0.2 w % to about 0.5 w % potassium hydroxide, and at about 0.002 w % to about 0.02 w % 1,2-Diaminocyclohexane-N,N,N,N Tetra acetic Acid (CDTA), the rest being water, said solution comprising no corrosion inhibitor, and said solution having a pH comprised between about 7 and about 8. The invention further relates to a chemical composition for preparing such a solution by mixing said composition with concentrated hydrogen peroxide, said chemical composition comprising potassium hydroxide from about 5 w % to about 30 w %, C.D.T.A. at a concentration ranging from about 1% to about 5% of the potassium hydroxide concentration, the rest being water. The invention also relates to a method of etching a Titanium, Titanium nitride or Titanium Tungsten barrier layer from a microelectronic device, said method comprising contacting the Titanium, Titanium nitride or Titanium tungsten barrier layer with the solution for a time sufficient to remove the Titanium, Titanium nitride or Titanium tungsten barrier layer.
The present invention concerns a chemical cleaning composition suitable for removing, from a substrate (1A, 1B, 4), a passivation layer (2) comprising etching residues resulting from the etching of said substrate (1A, 1B, 4), comprising: - a weak acid comprising acetic acid, the amount of weak acid being between 20% by weight and 95% by weight, and preferably between 0% by weight and 80% by weight, relative to the weight of the chemical composition, - a strong non-oxidising acid comprising sulfonic methane acid, the amount of strong non-oxidising acid being between 5% by weight and 50% by weight, and preferably between 15% by weight and 50% by weight, relative to the weight of the chemical composition, - hydrofluoric acid, in an amount of between 0.2% by weight and 2% by weight relative to the weight of the chemical composition, - water, in amount of between 2% by weight and 20% by weight relative to the weight of the chemical composition. The invention also concerns a cleaning method for removing, from a substrate (1A, 1B, 4), a passivation layer (2) comprising etching residues resulting from the etching of said substrate (1A, 1B, 4), comprising the following steps: - providing a chemical cleaning composition according to the abovementioned composition, - bringing the chemical cleaning composition into contact with the passivation layer (2) for a period sufficient to remove said passivation layer (2) from the substrate (1A, 1B, 4).
An apparatus for the electrodeposition of metals or metal alloys on semiconductor wafers is described. The apparatus includes plating cell, an anode disposed within the plating cell, a cathode comprising a semiconductor wafer positioned with the surface to be electroplated facing and in spaced-apart relation to the anode, a power supply providing electrical contact between the anode and the cathode, a hollow bar positioned mean the cathode having a series of spaced-apart holes facing the cathode and arranged in a line extending from one end or near one end of the cross bar to the other end or near end of the cross bar and means for rotating either the cathode or the hollow bar about a central axis to spray the surface of the semiconducting wafer to be plated continuously and repeatedly as the cathode or the solution spraying means rotates.
H01L 21/288 - Deposition of conductive or insulating materials for electrodes from a liquid, e.g. electrolytic deposition
H05K 3/10 - Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
The invention relates to a solution for etching titanium based materials, comprising from about 27w% to about 39w% hydrogen peroxide, from about 0.2w% to about 0.5w% potassium hydroxide, and at about 0.002 w% to about 0.02 w% 1,2-Diaminocyclohexane-N,N,N,N Tetra acetic Acid (CDTA), the rest being water, said solution comprising no corrosion inhibitor, and said solution having a pH comprised between about 7 and about 8. The invention further relates to a chemical composition for preparing such a solution by mixing said composition with concentrated hydrogen peroxide, said chemical composition comprising potassium hydroxide from about 5w% to about 30w%, C.D.T.A. at a concentration ranging from about 1% to about 5% of the potassium hydroxide concentration, the rest being water. The invention also relates to a method of etching a Titanium, Titanium nitride or Titanium Tungsten barrier layer from a microelectronic device, said method comprising contacting the Titanium, Titanium nitride or Titanium tungsten barrier layer with the solution for a time sufficient to remove the Titanium, Titanium nitride or Titanium tungsten barrier layer.
H01L 21/02 - Manufacture or treatment of semiconductor devices or of parts thereof
H01L 21/3213 - Physical or chemical etching of the layers, e.g. to produce a patterned layer from a pre-deposited extensive layer
H05K 3/06 - Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding the conductive material being removed chemically or electrolytically, e.g. by photo-etch process
03 - Cosmetics and toiletries; cleaning, bleaching, polishing and abrasive preparations
05 - Pharmaceutical, veterinary and sanitary products
10 - Medical apparatus and instruments
Goods & Services
Perfumery products and perfumes; beauty care and body
cleaning preparations; mineral water sprays for cosmetic
use; cosmetics; cosmetics other than for medical use;
cosmetics in the form of oils; massage creams, other than
for medical use; massage oils; scented lotions [toiletries];
scented body lotions [toiletries]; cleansing foams; cosmetic
foams; shaving foam; shaving foams; pre-shave foams; shower
gels; cleansing gels; soapy gels; shaving gels; bath gels;
moisturizing gels [cosmetics]; cleansing gels and soaps;
after-sun gels [cosmetics]; sun-tanning gels [cosmetics];
bath foaming gels; cosmetic eye contour gels; soaps; liquid
soaps; perfumed soaps; shaving soaps; shower soaps; washes
or deodorants for intimate hygiene; douching preparations
for intimate hygiene, deodorant or for sanitary purposes
[toiletries]; perfumed oils; cosmetic oils; moisturizers
[cosmetics]; sunscreens [cosmetics]; self-tanning products
[cosmetics]; make-up; make-up products; lipstick; perfumes;
perfumes in solid form; perfumes for personal use; shaving
creams; non-medicated hair shampoos; body milks; depilatory
cream; creams for cellulite reduction; cleansing creams;
perfumed creams; exfoliating creams; cosmetic creams. Contraceptive foams; spermicidal gels; gels for sexual
stimulation; vaginal lubricants; sexual lubricants; hygienic
lubricants; hygiene preparations (toiletries) and hygienic
articles, namely napkins, panty liners, tissues, tampons,
diapers. Vibration massage apparatus; massage apparatus for personal
use; condoms; spermicidal condoms; condoms for prophylactic
use; condoms for hygiene use; condoms for medical use;
vibrators being adult sex toys; geisha balls, namely adult
sex toys; electric massage apparatus.
03 - Cosmetics and toiletries; cleaning, bleaching, polishing and abrasive preparations
05 - Pharmaceutical, veterinary and sanitary products
10 - Medical apparatus and instruments
Goods & Services
Perfumery and fragrances; Body cleaning and beauty care preparations; Mineral water sprays for cosmetic purposes; Cosmetics; Non-medicated cosmetics; Cosmetics in the form of oils; Massage creams, not medicated; Massage oils; Perfumed lotions [toilet preparations]; Perfumed body lotions [toilet preparations]; Cleansing foam; Mousses [cosmetics]; Shaving soap; Shower gels; Cleansing gels; Soaps in gel form; Shaving gel; Bath gel; Moisturising gels [cosmetic]; Soaps and gels; After-sun gels [cosmetics]; Foaming bath gels; Cosmetic eye gels; Cakes of toilet soap; Soaps in liquid form; Perfumed soaps; Shower soap; Douching preparations for personal sanitary or deodorant purposes [toiletries]; Oils for perfumes and scents; Oils for cosmetic purposes; Cosmetic moisturisers; Sun protecting creams [cosmetics]; Self-tanning preparations [cosmetics]; Make-up; Lipsticks; Perfumes; Solid perfumes; Fragrances for personal use; Shaving cream; Non-medicated hair shampoos; Body milks; Depilatory creams; Creams for cellulite reduction; Cleansing creams; Perfumed creams; Exfoliant creams; Cosmetic creams. Contraceptive foams; Spermicidal gels; Sexual stimulant gels; Vaginal lubricants; Personal sexual lubricants; Hygienic lubricants; Hygienic preparations and articles. Vibromassage apparatus; Massaging apparatus for personal use; Condoms; Spermicidal condoms; Condoms for prophylactic purposes; Condoms for hygienic purposes; Condoms for medical purposes; Vibrators, being adult sexual aids; Benwa balls, being adult sexual aids; Electrically operated massagers.
03 - Cosmetics and toiletries; cleaning, bleaching, polishing and abrasive preparations
05 - Pharmaceutical, veterinary and sanitary products
10 - Medical apparatus and instruments
Goods & Services
cosmetics; cosmetics other than for medical use; cosmetics in the form of oils; massage creams, other than for medical use; massage oils; [ cosmetic foams; shaving foam; shaving foams; pre-shave foams; ] shower gels; [ shaving gels; ] bath gels; bath foaming gels; [ cosmetic eye contour gels; soaps; liquid soaps; perfumed soaps; shaving soaps; shower soaps; ] washes or deodorants for intimate hygiene; perfumed oils; cosmetic oils; make-up; lipstick; perfumes; [ perfumes in solid form; ] perfumes for personal use; [ shaving creams; non-medicated hair shampoos; body milks; depilatory cream; creams for cellulite reduction; cleansing creams; perfumed creams; exfoliating creams; ] cosmetic creams [ Contraceptive foams; spermicidal gels; ] gels for sexual stimulation; vaginal lubricants; sexual lubricants [ Vibration massage apparatus; massage apparatus for personal use; condoms; spermicidal condoms; condoms for prophylactic use; condoms for hygiene use; condoms for medical use; vibrators being adult sex toys; geisha balls, namely, adult sex toys; electric massage apparatus ]
03 - Cosmetics and toiletries; cleaning, bleaching, polishing and abrasive preparations
05 - Pharmaceutical, veterinary and sanitary products
10 - Medical apparatus and instruments
Goods & Services
Perfumery and fragrances; Body cleaning and beauty care preparations; Mineral water sprays for cosmetic purposes; Cosmetics; Non-medicated cosmetics; Cosmetics in the form of oils; Massage creams, not medicated; Massage oils; Perfumed lotions [toilet preparations]; Perfumed body lotions [toilet preparations]; Cleansing foam; Mousses [cosmetics]; Shaving soap; Shaving soap; Shaving soap; Shower gels; Cleansing gels; Soaps in gel form; Shaving gel; Bath gel; Moisturising gels [cosmetic]; Soaps and gels; After-sun gels [cosmetics]; After-sun gels [cosmetics]; Foaming bath gels; Cosmetic eye gels; Soaps; Soaps in liquid form; Perfumed soaps; Shaving soap; Shower soap; Douching preparations for personal sanitary or deodorant purposes [toiletries]; Douching preparations for personal sanitary or deodorant purposes [toiletries]; Oils for perfumes and scents; Oils for cosmetic purposes; Cosmetic moisturisers; Sun protecting creams [cosmetics]; Self-tanning preparations [cosmetics]; Make-up; Make-up; Lipstick; Perfumery; Solid perfumes; Fragrances for personal use; Shaving cream; Non-medicated hair shampoos; Body milks; Depilatory creams; Creams for cellulite reduction; Cleansing creams; Perfumed creams; Exfoliant creams; Creams (Cosmetic -). Contraceptive foams; Spermicidal gels; Sexual stimulant gels; Vaginal lubricants; Personal sexual lubricants; Hygienic lubricants; Hygiene preparations and articles. Vibromassage apparatus; Massaging apparatus for personal use; Condoms; Spermicidal condoms; Condoms for prophylactic purposes; Condoms for hygienic purposes; Condoms for medical purposes; Vibrators, being adult sexual aids; Benwa balls, being adult sexual aids; Electrically operated massagers.
The invention, concerns conductive coatings for use in the manufacture of for example, electrical connectors, LED arrays, and lead frames used in the computer industry. The coatings are composed of silver, antimony, and a protective layer composed of a fluoropolymer.
The invention provides an electroplating composition, method, and improved apparatus, which enables electroplating tin-silver alloys at high speed and without burning. The composition is an aqueous acidic solution including salts of stannous tin and a monovalent silver, and a complexing agent selected from the group consisting of thiocarbazides and thiohydrazides, and optionally an aldehyde and/or dialdehyde organic brightener compound. A sulfonic acid and a surfactant may also be included. The improved apparatus provides a protective structure substantially surrounding the anode(s) to decrease turbulence and the problematic silver displacement reaction.
01 - Chemical and biological materials for industrial, scientific and agricultural use
07 - Machines and machine tools
Goods & Services
chemical preparations, namely, solutions, powders, salts and alloys for use in plating, immersing and coating of precious metals and non-precious metals; chemical preparations, namely, powders and chemicals for use in the manufacture of photovoltaic and solar cells, modules and devices; chemicals for use in the manufacture of photovoltaic and solar cells, modules and devices Machines for metal finishing, namely, for electroplating parts, electroless plating parts, anodizing parts, electrocoating parts, phosphating parts, cleaning, etching and electropolishing parts, chromating parts and electroforming parts; machines for the processing and electrodeposition of solar cells and semiconductors
20.
COMPOSITION OF SOLUTIONS AND CONDITIONS FOR USE ENABLING THE STRIPPING AND COMPLETE DISSOLUTION OF PHOTORESISTS
The present invention relates to the formulation of a chemical, comprised of an ether solvent as the principal solvent, an ether or non-ether cosolvent, an acid, optionally a surfactant and optionally a corrosion inhibitor, dedicated to the complete and selective stripping by pure dissolution of photoresists (novolac and semi-novolac) of all thicknesses used in microelectronic component integration processes. Said solution is optimized to dissolve the polymer matrix while ensuring and protecting the physicochemical integrity of exposed materials such as metal interconnections (copper, aluminum), dielectrics (SiO2, MSQ, etc.) and adhesion and diffusion barriers (TiN, Ti, Ta, TaN, etc.). Furthermore, the singular cleaning properties and performance characteristics of these solutions make it possible to envisage the use thereof in a variety of industrial applications such as single wafer, batch, immersion and/or spray by simple adjustment of process time and temperature.
C23G 5/024 - Cleaning or de-greasing metallic material by other methodsApparatus for cleaning or de-greasing metallic material with organic solvents using organic solvents containing hydrocarbons
21.
ELECTRO-DEPOSITING METAL LAYERS OF UNIFORM THICKNESS
The invention is an apparatus and method for forming highly uniform layers of metal on a substrate by electro-deposition. The substrate is electroplated in a bath composed of a quiescent (i.e., no external agitation) electrolyte solution using an effective constant current density carefully selected to match the chemical composition of the electrolyte.
01 - Chemical and biological materials for industrial, scientific and agricultural use
02 - Paints, varnishes, lacquers
03 - Cosmetics and toiletries; cleaning, bleaching, polishing and abrasive preparations
07 - Machines and machine tools
09 - Scientific and electric apparatus and instruments
Goods & Services
chemical solutions, powders, salts and alloys for use in plating, immersing, and coating of precious metals and non-precious metals chemical solutions, powders, and salts for use in preventing tarnish of precious metals and non-precious metals chemical solutions, powders, and salts for use in cleaning and stripping of precious metals and non-precious metals machines for metal finishing, namely, for electroplating parts, electroless plating parts, anodizing parts, electrocoating parts, phosphating parts, cleaning, etching and electropolishing parts, chromating parts and electroforming parts; machines for the processing and electrodeposition of solar cells and semiconductors computer programs for use in operating and monitoring machines for electroplating parts, electroless plating parts, anodizing parts, electrocoating parts, phosphating parts, cleaning, etching and electropolishing parts, chromating parts and electroforming parts and machines for the processing and electrodeposition of solar cells and semiconductors
Machines for metal finishing, namely, for electroplating parts, electroless plating parts, anodizing parts, electrocoating parts, phosphating parts, cleaning, etching and electropolishing parts, chromating parts and electroforming parts
01 - Chemical and biological materials for industrial, scientific and agricultural use
Goods & Services
Chemical solutions for use in the manufacture of electronic components, namely, electronic connectors, lead frames, light emitting diodes, integrated circuits and semiconductor components
The invention relates to a metallized solar cell and the method of making thereof that includes depositing a metal or metals such as silver, nickel, copper, tin, indium, gallium, or selenium or their alloys on solar cells in a manner to form more substantial and robust electrical contacts that can carry current more efficiently and effectively or to provide the active layers required to convert sunlight into electricity. These deposits also protect the underlying metallic materials from corrosion, oxidation or other environmental changes that would deleteriously affect the electrical performance of the cell. The invention also relates to the use of specialized electroplating chemistries that minimize residual stress and/or are free of organic sulfonic acids to minimize chemical attack on solar cell substrates or prior metallizations that include organic and/or inorganic binders or related materials for depositing the initial metallic portions of the cell.
01 - Chemical and biological materials for industrial, scientific and agricultural use
Goods & Services
CHEMICAL COMPOSITION FOR A TARNISH PREVENTATIVE SILVER, SILVER ELECTROPLATE, COPPER, COPPER ALLOYS, BRASS AND GOLD PLATED SILVER AND GOLD PLATED COPPER
01 - Chemical and biological materials for industrial, scientific and agricultural use
Goods & Services
COMPOSITIONS AND MIXTURES OF PALLADIUM AND SALTS THEREOF (( USEFUL IN PROCESSES FOR THE DEPOSITION OF BRIGHT COATINGS OF PALLADIUM FOR USE IN THE ELECTRONICS AND DECORATIVE COATING INDUSTRIES AND WHENEVER A SURFACE COATING OF PALLADIUM IS DESIRED ))