Aspects relate to a self-calibrated and self-referenced spectral sensor. The spectral sensor includes an optical head that includes a light source configured to produce input light, an optical window above the light source and through which the input light is directed towards a sample in a sample measurement mode, and a reflection flag (for self-calibration and self-referencing) that is moveable between a first position beneath the optical window within a light path of the input light in a reference measurement mode and a second position away from the light path in the sample measurement mode. The spectral sensor further includes an optical core module and a processor configured to produce a reference PSD in the reference measurement mode and a sample PSD in the sample measurement mode. The processor is further configured to correct the sample PSD based on the reference PSD to produce a sample spectrum.
G01N 21/27 - ColourSpectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands using photo-electric detection
G01N 21/25 - ColourSpectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
2.
OPTICAL SPECTROSCOPY WITH CONTROLLED PATH LENGTH FOR NON-INVASIVE MEASUREMENT THROUGH SKIN
Aspects relate to mechanisms to control the effective optical path length through skin tissue for non-invasive optical spectroscopy measurements. An apparatus can include a path length control part configured to control the effective optical path length of diffusely scattered light transmitted through skin tissue to produce a target effective optical path length. The apparatus may further include a spectral sensor, a detector, and a light source configured to produce input light directed towards the path length control part or the spectral sensor. The detector is configured to obtain a spectrum of an analyte under test based on the diffusely scattered light. The spectral sensor is configured to either receive the input light, produce modulated light based on the input light, and direct the modulated light to the skin tissue, or to receive the diffusely scattered light from the skin tissue and obtain the spectrum using the detector.
A61B 5/1455 - Measuring characteristics of blood in vivo, e.g. gas concentration or pH-value using optical sensors, e.g. spectral photometrical oximeters
A61B 5/00 - Measuring for diagnostic purposes Identification of persons
A61B 5/145 - Measuring characteristics of blood in vivo, e.g. gas concentration or pH-value
B60K 28/06 - Safety devices for propulsion-unit control, specially adapted for, or arranged in, vehicles, e.g. preventing fuel supply or ignition in the event of potentially dangerous conditions responsive to conditions relating to the driver responsive to incapacity of driver
3.
DIFFUSE MULTI-REFLECTION OPTICAL DEVICE WITH LIGHT RE-DIRECTION FOR SPECTROMETER COLLECTION
Aspects relate to mechanisms for enhancing the coupling of scattered light from a sample under test into a spectrometer. An optical device can include a reflective surface positioned apart from the sample and configured to receive a first portion of scattered light from the sample and to redirect the first portion of the scattered light back to one or more discrete spots on the sample in a non-random manner to produce redirected scattered light from the sample. The spectrometer may then be configured to receive coupled light from the sample including at least a portion of the redirected scattered light.
Aspects of the disclosure relate to an apparatus including an opto-electrical probe card platform for wafer-level testing of optical micro-electro-mechanical-systems (MEMS) structures. The probe card platform includes an electrical probe card including alignment needles for aligning with an optical MEMS structure during testing thereof. The probe card platform further includes an optical head configured to direct input light to towards the optical MEMS structure through the electrical probe card and an optical positioner attached to the electrical probe card and configured to align the optical head. The apparatus may further include a camera and a processor configured to process at least one image obtained by the camera and to generate alignment assistance data to assist the optical positioner in aligning the optical head.
Aspects relate to a spectral modeling system for building chemometrics (calibration) models for spectral devices targeting ultra-wide-scale deployment. The spectral modeling system includes a spectral converter for generating a plurality of artificial spectra using spectral data of a plurality of samples measured by a subset of a plurality of spectral devices and spectral device characteristics representing spectral variations in the plurality of spectral devices. The spectral modeling system further includes a chemometrics engine for generating a chemometrics model for one or more parameters associated with the plurality of samples based on the spectral data and the plurality of artificial spectra.
Aspects relate to on-line compensation of instrumental drifts in miniaturized spectrometers due to variations in environmental conditions and due to other sources of instrumental drift. The spectrometer may include a light modulator, a detector, and a processor. The spectrometer may further include a sensor configured to obtain a value of a condition contributing to instrumental drifts in the spectrometer. The processor may be configured to extract a set of correction parameters from a correction matrix associating a plurality of sets of correction parameters with sensor values based on the value and to apply the set of correction parameters to an output of the detector to produce a corrected spectrum of a sample under test. The correction matrix may be generated for the spectrometer or may be based on a global correction matrix fitted to the spectrometer.
G01N 21/31 - Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
Aspects relate to a spectral analyzer that can be used for biological sample detection. The spectral analyzer includes an optical window configured to receive a sample and a spectral sensor including a chassis having various component assembled thereon. Examples of components may include a light source, a light modulator, illumination and collection optical elements, a detector, and a processor. The spectral analyzer is configured to obtain spectral data representative of a spectrum of the sample using, for example, an artificial intelligence (AI) engine. The spectral analyzer further includes a thermal separator positioned between the light modulator and the light source.
Aspects relate to a compact and low-cost gas analyzer that can be used for different types of gas analysis, such as air quality analysis. The gas analyzer can include a light source, a gas cell configured to receive a sample (e.g., a gas under test), a spectral sensor including a spectrometer and a detector, and an artificial intelligence (AI) engine. Light can enter the gas cell and interact with the sample to produce output light that may be measured by the spectral sensor. The resulting spectrum produced by the spectral sensor may be analyzed by the AI engine to produce a result. The gas analyzer further includes a self-calibration component configured to enable calibration of the sample spectrum to compensate for spectral drift of the spectral sensor.
G01N 33/00 - Investigating or analysing materials by specific methods not covered by groups
B81B 7/02 - Microstructural systems containing distinct electrical or optical devices of particular relevance for their function, e.g. microelectro-mechanical systems [MEMS]
G01J 3/10 - Arrangements of light sources specially adapted for spectrometry or colorimetry
G01N 21/3504 - Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light for analysing gases, e.g. multi-gas analysis
Aspects relate to a spectroscopic analyzer device that can be used for biological sample detection, and specifically for virus infection detection. The spectroscopic analyzer device includes a spectrometer, such as a micro-electro-mechanical systems (MEMS) based infrared spectrometer, and an artificial intelligence (AI) for screening of viral samples. In addition, the spectroscopic analyzer device includes a light source and a disposable optical component configured to receive a sample and to facilitate light interaction with the sample.
G01N 21/359 - Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light using near infrared light
Aspects relate to an optical fluid analyzer including a fluid cell configured to receive a sample fluid. The optical fluid analyzer further includes optical elements configured to seal the fluid cell on opposing sides thereof and to allow input light from a light source to be sent through the fluid cell and output light from the fluid cell to be input to a spectrometer. The optical fluid analyzer further includes a machine learning (ML) engine, such as an artificial intelligence (AI) engine, that is configured to generate a result defining at least one parameter of the fluid based on a spectrum produced by the spectrometer.
G01N 21/3504 - Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light for analysing gases, e.g. multi-gas analysis
G01N 21/35 - Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
G01N 33/497 - Physical analysis of biological material of gaseous biological material, e.g. breath
Aspects relate to an optical device providing a large spot size spectrometer. The optical device includes an optical head, an optical window, and a spectrometer. The optical head includes a plastic molded part having an aperture and a plurality of reflectors around the aperture formed therein. Each reflector may include a respective lamp assembled therein. The optical window is configured to receive a sample, to pass input light from the lamps to the sample and to pass scattered light from the sample towards the aperture. The aperture is configured to filter a first portion of scattered light containing unusable sample information and to pass a second portion of the scattered light to the spectrometer.
Aspects relate to an integrated and compact attenuated total internal reflection (ATR) spectral sensing device. The spectral sensing device includes a substrate, a spectrometer, and a detector. The substrate includes an ATR element, a microfluidic channel, and a channel interface at a boundary between the ATR element and the microfluidic channel formed therein. The ATR element is configured to receive input light and to direct the input light to the channel interface for total internal reflection of the input light at the channel interface. An evanescent wave produced by a sample contained within the microfluidic channel based on the total internal reflection of the input light attenuates the light output from the ATR element and the resulting output light may be analyzed using the spectrometer and the detector.
G01J 3/26 - Generating the spectrumMonochromators using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filter
G01N 21/35 - Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
G02B 26/08 - Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
G02F 1/29 - Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulatingNon-linear optics for the control of the position or the direction of light beams, i.e. deflection
Aspects relate to a compact material analyzer including a light source, a detector, and a module including a first optical window on a first side of the module, a second optical window on a second side of the module opposite the first side, and a light modulator. The light source produces input light at a high power that is passed through the first optical window to the light modulator. The light modulator is configured to attenuate the input light, produce modulated light based on the input light, and direct the modulated light through the second optical window to the sample. The modulated light produced by the light modulator is at a lower power safe for the sample. The detector is configured to receive output light from the sample produced from interaction with the modulated light through the second optical window and to detect a spectrum of the output light.
Aspects relate to mechanisms for increasing the field of view of a spectrometer. An optical device may be configured to simultaneously couple light from different locations (spots) on a sample to the spectrometer to effectively increase the spectrometer field of view. The optical device can include a beam combiner and at least one reflector to reflect light beams from respective spots on the sample towards the beam combiner. The beam combiner can combine the received light beams from the different spots to produce a combined light beam that may be input to the spectrometer.
Aspects relate to a miniaturized gas cell that may be implemented into an integrated device for gas analysis. The miniaturized gas cell may be a multi-pass gas cell or a hollow waveguide gas cell. In some aspects, the miniaturized gas cell may include a bottom surface and sidewalls formed in a substrate (e.g., a silicon substrate or silicon on insulator (SOI) substrate). The gas cell further includes at least one gas inlet and at least one gas outlet coupled for injection of a gas into and out of the gas cell, respectively. In addition, the gas cell further includes an optical input and an optical output, each optically coupled to direct light into and out of the gas cell, respectively. In addition, a capping layer may be bonded to the substrate to form a top surface of the gas cell.
Aspects of the disclosure relate to a multi-pass gas cell that includes a set of two or more reflectors, an input collimating optical component, and an output focusing optical component. The input and output optical components are integrated with at least one of the two or more reflectors. For example, the input and output optical components may be integrated on opposite ends of a single one of the reflectors or may be integrated on the same end of a single reflector. The input and output optical components may further be integrated with different reflectors. In some examples, the set of reflectors and optical components may be fabricated within the same substrate.
A shadow mask having two or more levels of openings enables selective step coverage of micro-fabricated structures within a micro-optical bench device. The shadow mask includes a first opening within a top surface of the shadow mask and a second opening within the bottom surface of the shadow mask. The second opening is aligned with the first opening and has a second width less than a first width of the first opening. An overlap between the first opening and the second opening forms a hole within the shadow mask through which selective coating of micro-fabricated structures within the micro-optical bench device may occur.
C23C 14/04 - Coating on selected surface areas, e.g. using masks
C23C 16/04 - Coating on selected surface areas, e.g. using masks
H01L 21/68 - Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereofApparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components for positioning, orientation or alignment
B81C 1/00 - Manufacture or treatment of devices or systems in or on a substrate
B05B 12/20 - Masking elements, i.e. elements defining uncoated areas on an object to be coated
Aspects of the disclosure relate to a self-referenced spectrometer for providing simultaneous measurement of a background or reference spectral density and a sample or other spectral density. The self-referenced spectrometer includes an interferometer optically coupled to receive an input beam and to direct the input beam along a first optical path to produce a first interfering beam and a second optical path to produce a second interfering beam, where each interfering beam is produced prior to an output of the interferometer. The spectrometer further includes a detector optically coupled to simultaneously detect a first interference signal produced from the first interfering beam and a second interference signal produced from the second interfering beam, and a processor configured to process the first interference signal and the second interference signal and to utilize the second interference signal as a reference signal in processing the first interference signal.
Aspects relate to an integrated optical probe card and a system for performing wafer testing of optical micro-electro-mechanical systems (MEMS) structures with an in-plane optical axis. On-wafer optical screening of optical MEMS structures may be performed utilizing one or more micro-optical bench components to redirect light between an out-of-plane direction that is perpendicular to the in-plane optical axis to an in-plane direction that is parallel to the in-plane optical axis to enable testing of the optical MEMS structures with vertical injection of the light.
Aspects of the disclosure relate to an integrated spectral unit including a micro-electro-mechanical systems (MEMS) interferometer fabricated within a first substrate and a light redirecting structure integrated on a second substrate, where the second substrate is coupled to the first substrate. The light redirecting structure includes at least one mirror for receiving an input light beam propagating in an out-of-plane direction with respect to the first substrate and redirecting the input light beam to an in-plane direction with respect to the first substrate towards the MEMS interferometer.
An optical radiation source produced from a disordered semiconductor material, such as black silicon, is provided. The optical radiation source includes a semiconductor substrate, a disordered semiconductor structure etched in the semiconductor substrate and a heating element disposed proximal to the disordered semiconductor structure and configured to heat the disordered semiconductor structure to a temperature at which the disordered semiconductor structure emits thermal infrared radiation.
H01L 49/00 - Solid state devices not provided for in groups and and not provided for in any other subclass; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof
A spectrometer with increased optical throughput and/or spectral resolution includes a plurality of interferometers coupled in parallel. An optical splitter divides a source light beam into a plurality of input beams and directs each of the input beams to a respective one of the plurality of interferometers. One or more detectors are optically coupled to receive a respective output from each of the plurality of interferometers and is configured to detect an interferogram produced as a result of the outputs.
A shadow mask having two or more levels of openings enables selective step coverage of micro-fabricated structures within a micro-optical bench device. The shadow mask includes a first opening within a top surface of the shadow mask and a second opening within the bottom surface of the shadow mask. The second opening is aligned with the first opening and has a second width less than a first width of the first opening. An overlap between the first opening and the second opening forms a hole within the shadow mask through which selective coating of micro-fabricated structures within the micro-optical bench device may occur.
B05B 12/20 - Masking elements, i.e. elements defining uncoated areas on an object to be coated
C23C 14/04 - Coating on selected surface areas, e.g. using masks
C23C 16/04 - Coating on selected surface areas, e.g. using masks
H01L 21/68 - Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereofApparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components for positioning, orientation or alignment
B81C 1/00 - Manufacture or treatment of devices or systems in or on a substrate
24.
Micro-optical bench device with highly/selectively-controlled optical surfaces
A micro-optical bench device is fabricated by a process that provides control over one or more properties of the micro-optical bench device and/or one or more properties of optical surfaces in the micro-optical bench device. The process includes etching a substrate to form a permanent structure including optical elements and a temporary structure. The shape of the temporary structure and gaps between the temporary structure and permanent structure facilitate control of a property of the micro-optical bench and/or optical surfaces therein. The process further includes removing the temporary structure from an optical path of the micro-optical bench device.
G02B 6/12 - Light guidesStructural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
G02B 6/136 - Integrated optical circuits characterised by the manufacturing method by etching
A Micro-Electro-Mechanical System (MEMS) apparatus provides for self-calibration of mirror positioning of a moveable mirror of an interferometer. At least one mirror in the MEMS apparatus includes a non-planar surface. The moveable mirror is coupled to a MEMS actuator having a variable capacitance. The MEMS apparatus includes a capacitive sensing circuit for determining the capacitance of the MEMS actuator at multiple reference positions of the moveable mirror corresponding to a center burst and one or more secondary bursts of an interferogram produced by the interferometer based on the non-planar surface. A calibration module uses the actuator capacitances at the reference positions to compensate for any drift in the capacitive sensing circuit.
G01J 3/453 - Interferometric spectrometry by correlation of the amplitudes
G02B 26/08 - Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
G01B 7/06 - Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width, or thickness for measuring thickness
KING ABDULAZIZ CITY FOR SCIENCE AND TECHNOLOGY (Saudi Arabia)
SI-WARE SYSTEMS (Egypt)
Inventor
Shalaby, Mohamed Yehia
Abdel Salam, Kamal Mohammed Khalil
Afifi, Abdelrahman Emad El-Deen Hussien Mohammed
Khalil, Diaa Abdel Maged
Mohamed Ahmed, Khaled Hassan
Alarifi, Faris Saad
Al-Otaibi, Mohammed Jary
Abstract
An optical rotation sensor includes a Fabry Perot laser having an active gain medium for generating first and second light beams, a closed optical path through which the first and second light beams counter-propagate and first and second mirrors coupled to respective ends of the closed optical path. The first minor is a ring mirror having a complex valued reflectivity that varies with a rotation rate of a frame within which the optical rotation sensor is placed. A detector is coupled to an output of the Fabry Perot laser to measure an output intensity thereof.
G01C 19/72 - Gyrometers using the Sagnac effect, i.e. rotation-induced shifts between counter-rotating electromagnetic beams with counter-rotating light beams in a passive ring, e.g. fibre laser gyrometers
An integrated apertured micromirror is provided in which the micromirror is monolithically integrated with a micro-optical bench fabricated on a substrate using a lithographic and deep etching technique. The micromirror has an aperture therein and is oriented such that the micromirror is optically coupled to receive an incident beam having an optical axis in a plane of the substrate and to at least partially transmit the incident beam therethrough via the aperture.
G02B 6/35 - Optical coupling means having switching means
G02B 26/02 - Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the intensity of light
G02B 6/293 - Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means
B81B 5/00 - Devices comprising elements which are movable in relation to each other, e.g. comprising slidable or rotatable elements
G02B 1/00 - Optical elements characterised by the material of which they are madeOptical coatings for optical elements
28.
Single insertion trimming of highly accurate reference oscillators
A highly integrated monolithic self-compensated oscillator (SCO) with high frequency stability versus temperature variations is described, together with a cost effective single insertion point trimming (SPT) algorithm. The SPT is utilized to adjust the phase and frequency of the SCO to meet frequency stability versus temperature and frequency accuracy requirements for a reference clock. The techniques used in the SPT algorithm provide a robust, fast and low testing cost for the SCO. Moreover, the concepts and techniques utilized in the SCO SPT can be used effectively for any temperature compensated oscillator (TCO) including TCXO, MEMS, FBAR and RC oscillators. Additionally, the described SPT algorithm is capable of measuring the temperature sensitivity of any oscillator, estimating suitable temperature compensation parameters and adjusting the oscillator frequency to the required value simultaneously.
H03L 1/04 - Constructional details for maintaining temperature constant
H03L 7/085 - Details of the phase-locked loop concerning mainly the frequency- or phase-detection arrangement including the filtering or amplification of its output signal
H03L 1/02 - Stabilisation of generator output against variations of physical values, e.g. power supply against variations of temperature only
H03L 7/099 - Details of the phase-locked loop concerning mainly the controlled oscillator of the loop
H03L 7/16 - Indirect frequency synthesis, i.e. generating a desired one of a number of predetermined frequencies using a frequency- or phase-locked loop
A spatial splitting-based optical Micro Electro-Mechanical Systems (MEMS) Interferometer includes a spatial splitter for spatially splitting an input beam into two interferometer beams and a spatial combiner for spatially combining the two interferometer beams. A MEMS moveable mirror is provided to produce an optical path difference between the first interferometer beam and the second interferometer beam.
G02B 26/08 - Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
G02B 27/16 - Beam splitting or combining systems used as aids for focusing
G02B 27/14 - Beam splitting or combining systems operating by reflection only
A Micro-Electro-Mechanical System (MEMS) interferometer provides for self-calibration of mirror positioning of a moveable mirror. The moveable mirror is coupled to a MEMS actuator having a variable capacitance. The MEMS interferometer includes a capacitive sensing circuit for determining the capacitance of the MEMS actuator at two or more known positions of the moveable mirror and a calibration module for using the actuator capacitances at the known positions to compensate for any drift in the capacitive sensing circuit.
G02B 26/08 - Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
G01B 7/06 - Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width, or thickness for measuring thickness
A spectrometer with improved resolution includes a spectral domain modulator having a periodic response in the spectral domain to modulate a wideband source spectrum and cause one or more shifted bursts in the interferogram.
Optical systems with aspherical optical elements are described. The aspherical optical elements have surfaces in which the in-plane radius of curvature spatially varies and the in-plane cross section surface profile is characterized in that the multiplication of the cosine of the incidence angle raised to a non-zero exponent by the in-plane radius of curvature varies less than twenty percent between any two points on the in-plane cross section surface profile.
An LC oscillator tank that generates a tank oscillation at a phase substantially equal to a temperature null phase. The oscillator further includes frequency stabilizer circuitry coupled to the LC oscillator tank to cause the LC oscillator tank to operate at the temperature null phase. In one aspect of the disclosure, a feedback loop may split the output voltage of the LC tank into two voltages having different phases, where each voltage is independently transformed into a current through programmable transconductors, The two currents may be combined to form a resultant current which is then applied to the LC tank. The phase of the resultant current is such that the LC tank operates at an impedance condition that achieves frequency stability across temperature.
H03B 5/08 - Generation of oscillations using amplifier with regenerative feedback from output to input with frequency-determining element comprising lumped inductance and capacitance
34.
Method and apparatus to control the LC tank temperature null characteristic in a highly stable LC oscillator
A substantially temperature-independent LC-based oscillator uses bias control techniques. Temperature independence may be achieved by controlling the harmonic frequency content of the output of the oscillator by controlling the amplitude. Amplitude control may be achieved by inserting a control mechanism in the feedback loop of the oscillator.
Oscillators are described that have a highly stable output frequency versus the variation of supply voltage and different operating conditions such as temperature. The concepts are broadly applicable to various types of oscillators. The highly stable output is achieved with the use of self biasing loops. The circuits associated with providing constant harmonic output current can be used with the concept of a phi-null oscillator to further stabilize the output frequency.
An optical system, such as an integrated monolithic optical bench, includes a three-dimensional curved optical element etched in a substrate such that the optical axis of the optical system lies within the substrate and is parallel to the plane of the substrate.
G02B 26/08 - Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
G02B 6/32 - Optical coupling means having lens focusing means
G02B 6/35 - Optical coupling means having switching means
37.
MEMS based ring laser gyroscope with reduced lock-in
KING ABDULAZIZ CITY FOR SCIENCE AND TECHNOLOGY (Saudi Arabia)
SI-WARE SYSTEMS (Egypt)
Inventor
Khalil, Diaa A. M.
Mohamed Ahmed, Khaled Hassan
Shebl Salem, Ahmed Saeed
Alayed, Mrwan
Aljekhedab, Fahad
Abstract
A ring laser gyroscope (RLG) includes moveable mirrors and a Micro-Electro-Mechanical Systems (MEMS) actuator coupled to the moveable mirrors to cause a respective displacement thereof that induces a phase modulation on counter-propagating light beams relative to one another. The induced phase modulation creates an optical path difference between the counter-propagating light beams corresponding to a virtual rotation that reduces the lock-in of the RLG.
A substantially temperature-independent LC-based oscillator is achieved using an LC tank that generates a tank oscillation at a phase substantially equal to a temperature null phase. The temperature null phase is a phase of the LC tank at which variations in frequency of an output oscillation of the LC-based oscillator with temperature changes are minimized. The LC-based oscillator further includes frequency stabilizer circuitry coupled to the LC tank to cause the LC tank to oscillate at the phase substantially equal to the temperature null phase.
A Micro Electro-Mechanical System (MEMS) interferometer system utilizes a capacitive sensing circuit to determine the position of a moveable mirror. An electrostatic MEMS actuator is coupled to the moveable mirror to cause a displacement thereof. The capacitive sensing circuit senses the current capacitance of the MEMS actuator and determines the position of the moveable mirror based on the current capacitance of the MEMS actuator.
G02B 26/08 - Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
G01B 7/06 - Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width, or thickness for measuring thickness
An interferometer includes a variable optical path length reference mirror to produce a final interferogram from a combination of interferograms. Each of the interferograms is generated at a different optical path length of the reference mirror.
A Mach-Zehnder MEMS interferometer is achieved using two half plane beam splitters formed at respective edges of a first medium. The first beam splitter is optically coupled to receive an incident beam and operates to split the incident beam into two beams, a first one propagating in the first medium towards the second beam splitter and a second one propagating in a second medium. A moveable mirror in the second medium reflects the second beam back towards the second beam splitter to cause interference of the two beams.
An electrostatic comb drive actuator for a MEMS device includes a flexure spring assembly and first and second comb drive assemblies, each coupled to the flexure spring assembly on opposing sides thereof. Each of the first and second comb assemblies includes fixed comb drive fingers and moveable comb drive fingers coupled to the flexure spring assembly and extending towards the fixed comb drive fingers. The comb drive fingers are divided equally between the first and second comb drive assemblies and placed symmetrically about a symmetry axis of the flexure spring assembly. When electrically energized, the moveable comb drive fingers of both the first and second comb drive assemblies simultaneously move towards the fixed comb drive fingers of the first and second comb drive assemblies.
H02N 1/00 - Electrostatic generators or motors using a solid moving electrostatic charge carrier
H01L 41/04 - SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR - Details thereof - Details of piezo-electric or electrostrictive elements
43.
Opto-mechanical optical path retardation multiplier for optical MEMS applications
An optical Micro Electro-Mechanical System (MEMS) device provides an optical path retardation multiplier. The MEMS device includes a moveable corner cube reflector, a fixed minor and a MEMS actuator. The moveable corner cube reflector is optically coupled to receive an incident beam and reflect the incident beam through 180 degrees towards the fixed mirror. The fixed minor is optically coupled to reflect a reflected beam back towards the moveable corner cube reflector along a reverse path of the incident beam. The MEMS actuator is coupled to the moveable corner cube reflector to cause a displacement of the moveable corner cube reflector to extend an optical path length of the reflected beam.
An optical microscanner achieves wide rotation angles utilizing a curved reflector. The optical microscanner includes a moveable mirror for receiving an incident beam and reflecting the incident beam to produce a reflected beam and a Micro Electro-Mechanical System (MEMS) actuator that causes a linear displacement of the moveable mirror. The curved reflector produces an angular rotation of the reflected beam based on the linear displacement of the moveable mirror.
G02B 26/08 - Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
45.
System, method and apparatus for a micromachined interferometer using optical splitting
A micromachined interferometer is achieved using a half plane beam splitter. The beam splitter is optically coupled to receive an incident beam and operates to split the incident beam into two interfering beams, each propagating in a different medium. A fixed mirror embedded in one of the mediums reflects one of the interfering beams back towards the half plane beam splitter through such medium, while a moveable mirror, which is controlled by an actuator, reflects the other interfering beam back towards said half plane beam splitter through the other medium. A detection plane detects an interference pattern produced as a result of interference between the reflected interfering beams.
patents