40 - Treatment of materials; recycling, air and water treatment,
Goods & Services
manufacturing services for others in the field of semiconductor tools and semiconductor chamber components; manufacturing services for others in the field of electrostatic chucks, cooling bases, gas distribution plates, nozzles, and liners; manufacturing services for others in the field of hybrid electrostatic chucks with interdigitated electrode design; prototype fabrication of new products for others; technical consulting related to the manufacturing of electrostatic chucks
40 - Treatment of materials; recycling, air and water treatment,
Goods & Services
manufacturing services for others in the field of semiconductor tools and semiconductor chamber components; manufacturing services for others in the field of electrostatic chucks, cooling bases, gas distribution plates, nozzles, and liners; manufacturing services for others in the field of hybrid electrostatic chucks with interdigitated electrode design; prototype fabrication of new products for others; technical consulting related to the manufacturing of electrostatic chucks
40 - Treatment of materials; recycling, air and water treatment,
42 - Scientific, technological and industrial services, research and design
Goods & Services
Custom manufacture of semiconductor wafers; manufacturing services for others in the fields of engineered thermal spray coatings, and anodized and thermal sprayed chamber components, and electrostatic chucks; manufacturing services for others in the field of various chamber components and hybrid electrostatic chucks with interdigitated electrode design; prototype fabrication of new products for others; Custom manufacturing of chamber components for semiconductor process tools; Custom manufacturing of products in the field of precision machined and/or coated components for semiconductor industry in the nature of various chamber components, including liners, windows, gates, electrostatic chucks, baseplates, heaters and other process chamber components used in semiconductor manufacturing requiring engineered or custom advanced thermal spray coatings and/or anodization services; Technical manufacturing process consulting, namely, the process of manufacturing various chamber components for semiconductor process tools; Technical manufacturing process consulting, namely, the process of manufacturing controlled high purity semiconductor chamber components and electrostatic chucks Design of mechanical and micromechanical components, namely, chamber components for semiconductor process tools; Custom design of mechanical and micromechanical components, namely, in the field of precision machined and/or coated components for semiconductor industry in the nature of various chamber components, including liners, windows, gates, electrostatic chucks, baseplates, heaters and other process chamber components used in semiconductor manufacturing requiring engineered or custom advanced thermal spray coatings and/or anodization services; Technical consulting in the field of machinery design, namely, the design of various chamber components for semiconductor process tools
40 - Treatment of materials; recycling, air and water treatment,
42 - Scientific, technological and industrial services, research and design
Goods & Services
Custom manufacture of semiconductor wafers; manufacturing services for others in the fields of engineered thermal spray coatings, and anodized and thermal sprayed chamber components, and electrostatic chucks; manufacturing services for others in the field of various chamber components and hybrid electrostatic chucks with interdigitated electrode design; prototype fabrication of new products for others; Custom manufacturing of chamber components for semiconductor process tools; Custom manufacturing of products in the field of precision machined and/or coated components for semiconductor industry in the nature of various chamber components, including liners, windows, gates, electrostatic chucks, baseplates, heaters and other process chamber components used in semiconductor manufacturing requiring engineered or custom advanced thermal spray coatings and/or anodization services; Technical manufacturing process consulting, namely, the process of manufacturing various chamber components for semiconductor process tools; Technical manufacturing process consulting, namely, the process of manufacturing controlled high purity semiconductor chamber components electrostatic chucks Design of mechanical and micromechanical components, namely, chamber components for semiconductor process tools; Custom design of mechanical and micromechanical components, namely, in the field of precision machined and/or coated components for semiconductor industry in the nature of various chamber components, including liners, windows, gates, electrostatic chucks, baseplates, heaters and other process chamber components used in semiconductor manufacturing requiring engineered or custom advanced thermal spray coatings and/or anodization services; Technical consulting in the field of machinery design, namely, the design of various chamber components for semiconductor process tools
A semiconductor processing member is provided, including a body and a plasma spray coating provided on the body. The coating is an ABO or ABCO complex oxide solid solution composition, where A, B and C are selected from the group consisting of La, Zr, Ce, Gd, Y, Yb and Si, and O is an oxide. The coating imparts both chlorine and fluorine plasma erosion resistance, reduces particle generation during plasma etching, and prevents spalling of the coating during wet cleaning of the semiconductor processing member.
A component for a semiconductor processing chamber, the component including a substrate and a coating layer provided on a surface of the substrate, wherein the coating layer includes at least a first coating layer having a thermal emissivity of more than 0.98 to 1, having plasma resistance, and having a color value L in a range of 35 to 40 through a thickness direction thereof.
C23C 4/12 - Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge characterised by the method of spraying
C04B 35/505 - Shaped ceramic products characterised by their compositionCeramic compositionsProcessing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on rare earth compounds based on yttrium oxide
C09K 5/14 - Solid materials, e.g. powdery or granular
C23C 4/02 - Pretreatment of the material to be coated, e.g. for coating on selected surface areas
C23C 28/04 - Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of main groups , or by combinations of methods provided for in subclasses and only coatings of inorganic non-metallic material
A heated electrostatic chuck is provided, including a base having an upper surface and peripheral side surfaces, a thermal barrier coating formed by plasma deposition directly on at least the upper surface of the base, at least one heating element formed on portions of the thermal barrier coating, an electrically insulating layer formed on the heating element and exposed portions of the thermal barrier coating, at least one chucking electrode formed on at least a portion of the electrically insulating layer, and a protective layer formed on the chucking electrode.
H05B 11/00 - Heating by combined application of processes covered by two or more of groups
H01L 21/683 - Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereofApparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components for supporting or gripping
H01L 21/67 - Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereofApparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components
40 - Treatment of materials; recycling, air and water treatment,
Goods & Services
Providing build to print manufacturing services for others in the field of precision machined components in the nature of electrostatic chucks and heaters used in semiconductor manufacturing, engineered thermal spray coatings, anodized and thermal sprayed electrostatic chucks and heaters used in semiconductor manufacturing; prototype fabrication of new products for others; technical consulting related to the manufacturing of electrostatic chucks and heaters used in semiconductor manufacturing
40 - Treatment of materials; recycling, air and water treatment,
Goods & Services
Providing manufacturing services for others in the field of hybrid electrostatic chucks with interdigitated electrode design; prototype fabrication of new products for others; technical consulting related to the manufacturing of electrostatic chucks
This invention relates to substrate supports, e.g., coated electrostatic chucks, having a dielectric multilayer formed thereon; dielectric multilayers that provide erosive and corrosive barrier protection in harsh environments such as plasma treating vessels used in semiconductor device manufacture; process chambers, e.g., deposition chambers, for processing substrates; methods for protecting substrate supports; and methods for producing substrate supports and electronic devices. The dielectric multilayer comprises (a) an undercoat dielectric layer comprising a metal oxide or metal nitride formed on a surface; and (b) a topcoat dielectric layer comprising a metal oxide formed on the undercoat dielectric layer. The topcoat dielectric layer has an aluminum oxide content of less than about 1 weight percent. The topcoat dielectric layer has a corrosion resistance and/or plasma erosion resistance greater than the corrosion resistance and/or plasma erosion resistance of the undercoat dielectric layer. The undercoat dielectric layer can have a resistivity greater than the resistivity of the topcoat dielectric layer. The topcoat dielectric layer can have a dielectric constant greater than the dielectric constant of the undercoat dielectric layer. The undercoat dielectric layer can have a porosity greater than the porosity of the topcoat dielectric layer. The invention is useful, for example, in the manufacture and protection of electrostatic chucks used in semiconductor device manufacture.
06 - Common metals and ores; objects made of metal
19 - Non-metallic building materials
35 - Advertising and business services
37 - Construction and mining; installation and repair services
40 - Treatment of materials; recycling, air and water treatment,
Goods & Services
(1) Windows, doors namely residential exterior and entrance doors. (1) Manufacturing, sale, installation, servicing and repair of windows and doors namely residential exterior and entrance doors.
06 - Common metals and ores; objects made of metal
19 - Non-metallic building materials
35 - Advertising and business services
37 - Construction and mining; installation and repair services
40 - Treatment of materials; recycling, air and water treatment,
Goods & Services
(1) Windows, doors namely, residential exterior and entrance doors. (1) Manufacturing, sale, installation, servicing and repair of windows and doors namely residential exterior and entrance doors.
06 - Common metals and ores; objects made of metal
19 - Non-metallic building materials
35 - Advertising and business services
37 - Construction and mining; installation and repair services
40 - Treatment of materials; recycling, air and water treatment,
Goods & Services
(1) Windows, doors namely, residential exterior and entrance doors. (1) Manufacturing, sale, installation, servicing and repair of windows and doors namely, residential exterior and entrance doors.
The present invention discloses an electrostatic chuck for clamping work substrates, said chuck comprising three layers, where the dielectric constant of included non-conductive layers is selected to provide overall lower capacitance to the chuck. In the chuck assembly of the present invention, the top dielectric layer that is in contact with a substrate, such as, a wafer, has a dielectric constant that is preferably greater than about 5, with a resistivity that is preferably greater than about 1E6 ohm.m, whereas the bottom dielectric layer has a dielectric constant that is preferably less than about 5 and a resistivity that is preferably greater than about 1E10 ohm.m. The intermediate layer preferably has a conductive layer where the resistivity is less than about 1 ohm.m.
37 - Construction and mining; installation and repair services
Goods & Services
(1) Fiberglass windows; plastic windows; stained glass windows; vinyl windows; wood windows (1) Wholesale store services featuring windows; retail store services featuring windows; online wholesale store services featuring windows; online retail store services featuring windows
(2) Replacement of windows; installation, maintenance and repair of windows
37 - Construction and mining; installation and repair services
Goods & Services
(1) Fiberglass windows; plastic windows; stained glass windows; vinyl windows; wood windows (1) Wholesale store services featuring windows; retail store services featuring windows; online wholesale store services featuring windows; online retail store services featuring windows
(2) Replacement of windows; installation, maintenance and repair of windows
06 - Common metals and ores; objects made of metal
19 - Non-metallic building materials
35 - Advertising and business services
37 - Construction and mining; installation and repair services
40 - Treatment of materials; recycling, air and water treatment,
Goods & Services
(1) Windows. (1) Sale, installation and repair of windows; steel, patio and storm doors; and, siding products, namely, siding, eavestrough, flashing, downspout, elbows, soffit and fascia and window capping.
06 - Common metals and ores; objects made of metal
19 - Non-metallic building materials
35 - Advertising and business services
37 - Construction and mining; installation and repair services
40 - Treatment of materials; recycling, air and water treatment,
Goods & Services
(1) Windows. (1) Sale, installation and repair of windows; steel, patio and storm doors; and, siding products, namely, siding, eavestrough, flashing, downspout, elbows, soffit and fascia and window capping.
