09 - Scientific and electric apparatus and instruments
10 - Medical apparatus and instruments
42 - Scientific, technological and industrial services, research and design
Goods & Services
Machines and machine tools for treatment of materials and for manufacturing; Machines and machine tools for treatment of materials and for manufacturing, related fittings and accessories; Installations for the inspection of materials and components; Installations for the inspection of materials and components through acoustic, wet-chemical and optical processes; Mechanical installations for the cultivation of crystals; Mechanical installations for the cultivation of crystals for the manufacture of semiconductors and solar cells; Mechanical installations for surface treatment with plasma; Mechanical installations for plasma etching; Nitriding installations (machines for surface hardening of materials); Mechanical vacuum installations for pressure sintering, smelting (other than smelting furnaces), casting, soldering and diffusion welding, related fittings and accessories, The aforesaid goods included in class 7. Material testing instruments and machines; Instruments for surveying physical data; Spectrometers; Spectrograph apparatus; Imaging devices for scientific purposes; Hyperspectral chambers; Laboratory optical apparatus; Measuring apparatus and instruments, in particular for determining the properties of wafers and ingots; Ultrasonic microscopes; Software other than the following goods: Software in the field of project, transaction and asset portfolio management; Optical measurement apparatus; Optical apparatus and instruments; Apparatus and instruments for microscopy; Laboratory equipment and utensils (not for medical purposes); Testing apparatus and instruments; Apparatus and instruments for physics; Scientific apparatus and instruments; Optical inspection apparatus for industrial use; Spectroscopes; Machine learning software other than the following goods: Software in the field of project, transaction and asset portfolio management; artificial intelligence software other than the following goods: Software in the field of project, transaction and asset portfolio management; Artificial intelligence software and Machine learning software other than the following goods: Software in the field of project, transaction and asset portfolio management; Downloadable software other than the following goods: Software in the field of project, transaction and asset portfolio management; Web applications and Server software other than the following goods: Web applications and software in the field of project, transaction and asset portfolio management; Big data management software; Image management software; Image recognition software; Computer software for database management; Computer software for organizing and viewing digital images and photographs; Computer software to enable searching and retrieval of data; Computer software to enable retrieval of data; Computer software for creating searchable databases of information and data; Data mining software; Data and image processing software for making three dimensional models; Downloadable computer software for the management of information; Downloadable computer software for the management of data; Downloadable cloud computing software; Software for the integration of artificial intelligence and machine learning in the field of Big Data; Computer software for processing digital images; Data processing software for graphic representations; Software for generating virtual images; Software for processing digital images; Graphic art software; Mechanical engineering software; Adaptive software; Industrial software; Workout logging software; Data and file management and database software; Media and publishing software; Interactive software based on artificial intelligence; Downloadable computer software for collecting, analyzing and organizing data in the field of deep learning; Artificial intelligence software for healthcare; Artificial intelligence software for analysis; Machine learning software; Machine learning software for analysis; Bioinformatics software; Computer software for the control of lighting; Machine control software; Factory automation software; Production support software; Process controlling software; Manufacturing software; Industrial automation software; Computer software for use in processing semiconductor wafers; Software for diagnostics and troubleshooting; Hardware reliability software; Software for monitoring, analysing, controlling and running physical world operations; System and system support software, and firmware; Industrial controls incorporating software. Medical apparatus and instruments; Medical implants; Dental implante; Measuring instruments adapted for medical use, Electronic apparatus for medical purposes; Electronic medical instruments; Photometric instruments for medical use; Photometric analyzers for medical use; Detectors for medical applications; Optomedical examination instruments; Physical analyzers for medical use. Data mining; Software development excluding the following goods: Software development in the field of project, transaction and asset portfolio management; Non-destructive testing services, Scientific and technological services and research and design relating thereto; Industrial analysis; Industrial research; Industrial design; Quality control; Authentification services; Design and development of computer hardware and software; Rental of measuring apparatus; Rental of laboratory apparatus and instruments; Leasing of scientific instruments; Biological research, clinical research and medical research; Analytical services relating to the determination of the chemical content of liquids; Consultation in the field of physics; Chemical research and analysis services; Chemical analysis services for use in the testing of material; Chemical analytical examinations; Analysis of polymeric coatings; Analysis of materials; Conducting of scientific studies; Feasibility studies relating to material analysis; Research in the field of nanobiotechnology; Research in the field of physics; Research and development services in the field of chemistry; Chemical research; Laboratory testing of materials; Scientific analysis; Research and development for the pharmaceutical industry; Inspection of pharmaceuticals; Scientific research and development; Scientific investigations for medical purposes; Engineering services; Engineering services relating to information technology; Engineering services relating to data processing technology; Engineering research; Engineering services relating to computers; Scientific testing services; Development of testing methods; Research and development services; Rental of science and technology equipment; Natural science services; Medical and pharmacological research services; Engineering services; Quality assurance consultancy; Advisory services relating to material testing; Product quality evaluation; Computer aided scientific testing; Quality checking and testing; Development of measuring and testing methods; Inspection of goods for quality control; Material testing; Materials testing and analysing; Materials testing and evaluation; Material testing for fault detection; Material testing services; Product testing; Product quality control testing; Product quality testing; Product failure analysis services; Process monitoring for quality assurance; New products (Testing of -); Testing of raw materials; Testing of paper; Quality assessment; Quality control of partly manufactured goods; Quality control of raw materials; Quality control; Non-destructive testing services; Updating and upgrading of computer software; Cloud computing; Data mining; IT services; Preparation of computer programs for data processing; Research in the field of deep learning; Research relating to data processing; Research in the field of artificial intelligence technology; Research in the field of edge computing; Research relating to the computerised automation of industrial processes; Research relating to the computerised automation of technical processes; Research in the field of information technology; Maintenance of data processing software; Software development, programming and implementation; Testing, authentication and quality control; IT services.
09 - Scientific and electric apparatus and instruments
10 - Medical apparatus and instruments
42 - Scientific, technological and industrial services, research and design
Goods & Services
Maschinen und Werkzeugmaschinen für Materialbearbeitung und Produktion; Maschinen und Werkzeugmaschinen für Materialbearbeitung und Produktion sowie deren Teile und Zubehör; Anlagen zur Inspektion von Material und Bauteilen; Anlagen zur Inspektion von Material und Bauteilen durch akustische, nass-chemische und optische Verfahren; maschinelle Anlagen zur Züchtung von Kristallen; maschinelle Anlagen zur Züchtung von Kristallen zur Herstellung von Halbleitern und Solarzellen; maschinelle Anlagen zur Oberflächenbehandlung mit einem Plasma; maschinelle Anlagen zum Plasmaätzen; Nitrieranlagen (Maschinen zur Oberflächenhärtung von Werkstoffen); maschinelle Vakuumanlagen zum Drucksintern, zum Schmelzen (ausgenommen Schmelzöfen), zum Gießen, zum Löten und zum Diffusionsschweißen, sowie Teile und Zubehör der vorgenannten Anlagen soweit in Klasse 7 enthalten. Materialprüfinstrumente und -maschinen; Instrumente zur Messung physikalischer Daten; Spektrometer; Spektrografen; Bildgebende Geräte für wissenschaftliche Zwecke; Hyperspektralkammern; Optische Apparate für Labore; Messgeräte und -instrumente, insbesondere zur Bestimmung der Eigenschaften von Wafern und Ingots; Ultraschall-Mikroskope; Software ausgenommen Software im Bereich Projekt-, Transaktions- und Asset- Portfolio-Management; Optische Messgeräte; Optische Apparate und Instrumente; Mikroskopie-Apparate und -Instrumente; Laborgeräte und -instrumente, ausgenommen für medizinische Zwecke; Prüfapparate und -instrumente; Physikalische Apparate und Instrumente; Wissenschaftliche Apparate und Instrumente; Optische Prüfgeräte für die Industrie; Spektroskope; Software für maschinelles Lernen ausgenommen Software im Bereich Projekt-, Transaktions- und Asset-Portfolio-Management; Software für künstliche Intelligenz ausgenommen Software im Bereich Projekt-, Transaktions- und Asset-Portfolio-Management; Künstliche Intelligenz-Software und maschinelle Lernsoftware ausgenommen Software im Bereich Projekt-, Transaktions- und Asset-Portfolio-Management; Herunterladbare Software ausgenommen Software im Bereich Projekt-, Transaktions- und Asset-Portfolio-Management; Webanwendungen und Serversoftware ausgenommen Webanwendungen und Software im Bereich Projekt-, Transaktions- und Asset-Portfolio-Management; Big Data-Managementsoftware; Bildverwaltungssoftware; Bilderkennungssoftware; Computersoftware für Datenbankverwaltung; Computersoftware zum Organisieren und Betrachten von digitalen Bildern und Fotografien; Computersoftware zur Datensuche und -abfrage; Computersoftware zur Ermöglichung des Datenabrufs; Computersoftware zur Erstellung von durchsuchbaren Datenbanken mit Informationen und Daten; Data-Mining-Software; Daten- und Bildverarbeitungssoftware zur Anfertigung von 3D-Modellen; Herunterladbare Computersoftware für Informationsverwaltung; Herunterladbare Computersoftware für die Datenverwaltung; Herunterladbare Software für Cloud-Computing-Dienste; Software zur Einbindung von künstlicher Intelligenz und maschinellem Lernen im Bereich von Big Data; Computersoftware für die Verarbeitung von digitalen Bildern; Datenverarbeitungssoftware für grafische Darstellungen; Software für die Erzeugung von virtuellen Bildern; Software für die Verarbeitung von digitalen Bildern; Software für Grafikanwendungen; Software für den Maschinenbau; Adaptive Software; Industriesoftware; Software zum Erfassen von Trainingsdaten; Software für die Daten- und Dateiverwaltung sowie für Datenbanken; Medien- und Veröffentlichungssoftware; Interaktive Software basierend auf künstlicher Intelligenz; Herunterladbare Computersoftware für die Sammlung, Analyse und Organisation von Daten im Bereich Deep Learning; Künstliche Intelligenz-Software für das Gesundheitswesen; Künstliche Intelligenz-Software zur Erstellung von Analysen; Software für maschinelles Lernen; Software für maschinelles Lernen zu Analysezwecken; Bioinformatik-Software; Computersoftware für die Steuerung der Beleuchtung; Maschinensteuerungssoftware; Produktionsautomatisierungssoftware; Produktionsunterstützende Software; Prozesssteuerungssoftware; Software für die Fertigungstechnik; Software für die industrielle Automatisierung; Software zur Verwendung bei der Verarbeitung von Halbleiter-Wafern; Software für Fehlerdiagnosen und -behebungen; Software in Bezug auf die Hardware-Zuverlässigkeit; Software zur Überwachung, Analyse, Steuerung und Ausführung von Vorgängen in der physischen Welt; System- und Systemunterstützungssoftware sowie Firmware; Industriesteuerungen mit integrierter Software. Medizinische Apparate und Instrumente; medizinische Implantate; Dentalimplantate; Messinstrumente für medizinische Zwecke Elektronische Geräte für medizinische Zwecke; Elektronische medizinische Geräte; Fotometrische Instrumente für medizinische Zwecke; Fotometrische Analysegeräte für medizinische Zwecke; Nachweisgeräte für medizinische Anwendungen; Optomedizinische Untersuchungsinstrumente; Physikalische Analysegeräte für medizinische Zwecke. Analyse großer Datenmengen hinsichtlich der Beziehungen der Daten untereinander; Softwareentwicklung ausgenommen Softwareentwicklung im Bereich Projekt-, Transaktions- und Asset-Portfolio-Management; Zerstörungsfreie Prüfverfahren, Wissenschaftliche und technologische Dienstleistungen sowie Forschungsarbeiten und diesbezügliche Designerdienstleistungen; industrielle Analyse; industrielle Forschung; Dienstleistungen eines Industriedesigners; Qualitätskontrolle; Authentifizierungsdienstleistungen; Entwurf und Entwicklung von Computerhardware und -software; Vermietung von Messgeräten; Vermietung von Laborgeräten und -instrumenten; Vermietung von wissenschaftlichen Geräten; Biologische Forschung, klinische Forschung und medizinische Forschung; Analysedienstleistungen bezüglich der Bestimmung der chemischen Inhaltsstoffe in Flüssigkeiten; Beratung auf dem Gebiet der Physik; Chemische Forschung und Analyse; Durchführung chemischer Analysen für die Materialprüfung; Durchführung chemischer analytischer Untersuchungen; Durchführung von Analysen von Polymerbeschichtungen; Durchführung von Materialanalysen; Durchführung wissenschaftlicher Studien; Erstellen von Machbarkeitsstudien über Materialanalysen; Forschung auf dem Gebiet der Nanobiotechnologie; Forschung auf dem Gebiet der Physik; Forschung und Entwicklung im Bereich der Chemie; Forschungen auf dem Gebiet der Chemie; Untersuchung von Materialien in Labors; Wissenschaftliche Analysen; Forschungs- und Entwicklungsdienstleistungen für die pharmazeutische Industrie; Qualitätsprüfung für pharmazeutische Erzeugnisse; Wissenschaftliche Forschung und Entwicklung; Wissenschaftliche Untersuchungen für medizinische Zwecke; Ingenieurdienstleistungen; Ingenieurdienstleistungen bezüglich der Informationstechnologie; Ingenieurdienstleistungen bezüglich der Datenverarbeitungstechnologie; Ingenieurtechnische Forschung; Ingenieurdienstleistungen bezüglich Computern; Durchführung wissenschaftlicher Untersuchungen; Entwicklung von Prüfmethoden; Forschungs- und Entwicklungsdienste; Vermietung von wissenschaftlichen und technologischen Geräten; Naturwissenschaftliche Dienstleistungen; Medizinische und pharmazeutische Forschungsdienstleistungen; Dienstleistungen von Ingenieuren; Beratung in Bezug auf Qualitätssicherung; Beratungsdienste in Bezug auf Materialprüfung; Bewertung der Produktqualität; Computergestützte Durchführung wissenschaftlicher Untersuchungen; Durchführung von Qualitätskontrollen und -prüfungen; Entwicklung von Mess- und Prüfmethoden; Inspektion von Waren für die Qualitätskontrolle; Materialprüfung; Materialprüfung und -analyse; Materialprüfung und -bewertung; Materialprüfung zur Erkennung von Fehlern; Materialprüfungsdienste; Produktprüfung; Produktprüfung zur Qualitätskontrolle; Produktqualitätsprüfung; Produktfehler-Analysedienste; Prozessüberwachung zur Qualitätssicherung; Prüfung neuer Produkte; Prüfung von Rohstoffen; Prüfung von Papier; Qualitätsbewertung; Qualitätskontrolle von Halbfertigerzeugnissen; Qualitätskontrolle von Rohstoffen; Qualitätsprüfung; Zerstörungsfreie Prüfverfahren; Aktualisierung und Upgrading von Computersoftware; Cloud-Computing; Data-Mining; Dienstleistungen im Bereich der Informationstechnologie; Erstellung von Computerprogrammen zur Datenverarbeitung; Forschung im Bereich Deep Learning; Forschung bezüglich Datenverarbeitung; Forschung im Bereich der künstlichen Intelligenz; Forschung im Bereich Edge-Computing; Forschung in Bezug auf die computergestützte Automatisierung von industriellen Verfahren; Forschung in Bezug auf die computergestützte Automatisierung von technischen Prozessen; Forschung im Bereich Informationstechnologie; Wartung von Datenverarbeitungssoftware; Entwicklung, Programmierung und Implementierung von Software; Prüfung, Authentifizierung und Qualitätskontrolle; IT-Dienstleistungen.
A method for obtaining information in realtime from a crystal growth process or crystal growth system in a high temperature environment is shown, such as for growing a silicon carbide crystal, the method comprising the steps of arranging a crystal or crystal seed in a hot zone of said crystal growth system, hermetically sealing said hot zone, providing a probing signal by means of a signal generator and directing said probing signal onto a first surface of said crystal inside said hot zone, analysing a signal response and retrieving at least one process status or process development information.
A PVT method is utilized for production of single crystals in an apparatus, which comprises a growth cell, a process chamber in which the growth cell is located and a heating device surrounding the process chamber for heating the growth cell. In this method, a source material and a seed are introduced into the growth cell, and the process chamber is filled with a process gas and the growth cell is heated, causing the source material to sublimated and resublimated at the seed. An apparatus designed for production of single crystals using the PVT method includes a highly heatable growth cell for accommodation of a source material and a seed, a process chamber accommodating the growth cell with a connection to a process gas source for filling it with a process gas, and a heating device for heating the growth cell.
To allow a reactive gas such as hydrogen to be used as a process gas in a PVT method, special safeguards have to be put in place in order that the method can be carried out in a safe process. An apparatus for carrying out the PVT method consists of a growth cell which can be heated to a high temperature and is arranged in a process chamber with a wall made of a heat-resistant material such as typically quartz glass. An inlet valve is used for filling the process chamber with hydrogen. A heating device consists of an induction coil which surrounds the process chamber at the height of the growth cell and heats the growth cell to over 2000°C to 2400°C. The use of a reactive gas entails the problem however that, in the not entirely preventable event of a rupture of the chamber wall of the process chamber, the reactive gas can mix with the ambient air and thereby produce an ignitable gas mixture, which would immediately ignite on the hot parts of the apparatus. The process chamber is therefore surrounded by a safety vessel which is filled with an inert gas.
C30B 35/00 - Apparatus not otherwise provided for, specially adapted for the growth, production or after-treatment of single crystals or of a homogeneous polycrystalline material with defined structure
6.
PVT METHOD AND APPARATUS FOR PRODUCING SINGLE CRYSTALS IN A SAFE PROCESS
To allow a reactive gas such as hydrogen to be used as a process gas in a PVT method, special safeguards have to be put in place in order that the method can be carried out in a safe process. An apparatus for carrying out the PVT method consists of a growth cell which can be heated to a high temperature and is arranged in a process chamber with a wall made of a heat-resistant material such as typically quartz glass. An inlet valve is used for filling the process chamber with hydrogen. A heating device consists of an induction coil which surrounds the process chamber at the height of the growth cell and heats the growth cell to over 2000°C to 2400°C. The use of a reactive gas entails the problem however that, in the not entirely preventable event of a rupture of the chamber wall of the process chamber, the reactive gas can mix with the ambient air and thereby produce an ignitable gas mixture, which would immediately ignite on the hot parts of the apparatus. The process chamber is therefore surrounded by a safety vessel which is filled with an inert gas.
C30B 35/00 - Apparatus not otherwise provided for, specially adapted for the growth, production or after-treatment of single crystals or of a homogeneous polycrystalline material with defined structure
The invention relates to a method and system for performing VPD-DC on wafer surfaces, wherein the pipette substitutes for the function of the scan tube and is operated such that a bulge of scanning liquid protrudes from the pipette channel and contacts the wafer surface for scanning.
G01N 21/95 - Investigating the presence of flaws, defects or contamination characterised by the material or shape of the object to be examined
G01N 35/10 - Devices for transferring samples to, in, or from, the analysis apparatus, e.g. suction devices, injection devices
H01L 21/67 - Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereofApparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components
8.
PVT-METHOD AND DEVICE FOR PRODUCING SINGLE CRYSTALS IN A SAFE MANNER WITH REGARD TO THE PROCESS
The aim of the invention is to use hydrogen as a process gas in a PVT method. For this purpose, a special safeguard is required in order to be able to carry out the method in a safe manner with regard to the process. A device for carrying out the PVT method consists of a highly heatable growth cell (1) that is arranged in a process chamber (4), the wall of which consists of a heat-resistant quartz glass. The process chamber (4) is filled with hydrogen via an inlet valve (5). A heating device (6) consists of an induction coil (7) which surrounds the process chamber (4) at the height of the growth cell (1), and the growth cell (1) is heated from over 2,000 °C up to 2,400 °C. The use of hydrogen, however, presents the problem of the hydrogen mixing with the oxygen of the ambient air in the event of a possible crack in the quartz glass of the process chamber (4) such that a combustible gas mixture is produced which would be instantly ignited on the hot parts of the device. The process chamber (4) is therefore surrounded by a safety container (8) which is filled with an inert gas.
A crystal support for a crystal pulling system includes two catches that have a respective retaining jaw that is placeable against a thickened neck portion of a crystal. The two catches are moveable into a bearing position in which the two catches bear on the thickened neck portion and into a releasing position in which the two catches are away from the thickened neck portion. In the bearing position, respective contact points of each retaining jaw at which the retaining jaws bear on the thickened neck portion are located on respective sides of a parting plane. The parting plane extends at an angle to at least one of the pivot axes of the catches and, in the bearing position, the respective contact points of each retaining jaw are located on both sides of a crystal plane that extends through an axis of the crystal and parallel to the pivot axes.
A method for pulling a cylindrical crystal from a melt by a crystal pulling unit includes measuring an actual value of a diameter of the crystal at a surface of the melt, comparing the actual value with a setpoint value for the diameter of the crystal, and setting a height of the annular gap as a function of a deviation between the actual value and the setpoint value using a first controller which has a first readjustment time.
A crystal support has two latches (3, 4) with holding clamps (10). In contrast to the previously known plant, the holding clamps (10) do not extend parallel to the pivot axes of the latches, but preferably perpendicularly thereto. This makes it possible to arrange the latches with a steep inclination, since there is no longer a danger of the latches (3, 4) being pushed away laterally by the supporting force. Furthermore, suspension cables can be fastened directly to the latches (3, 4).
C30B 35/00 - Apparatus not otherwise provided for, specially adapted for the growth, production or after-treatment of single crystals or of a homogeneous polycrystalline material with defined structure
12.
METHOD FOR PULLING A CYLINDRICAL CRYSTAL FROM A MELT
According to a method for controlling the diameter of a crystal (5) a constant crystal pulling speed (13) is maintained and in order to control the diameter, heat radiation onto the lower outer surface of the crystal (5) is influenced by varying the height of an annular gap (12) between a heat shield (10) surrounding the crystal (5) and the surface of the melt. This does not only influence the crystal diameter but also results in a vertical temperature gradient that remains constant across the diameter of the crystal, thereby increasing the homogeneity of the crystal (5).
The present invention relates to a sample container for receiving small-volume liquid samples, preferably samples obtained by vapor phase decomposition, wherein the container has an upwardly open receiving region. In accordance with the invention, the receiving region has an outflow opening at its lowest point that is reversibly closed in a liquid-tight manner by an actuator having a closure surface.
The invention relates to a device for melting and/or crystallizing non-ferrous metals, particularly silicon, and a cooling plate for heat dissipation from a melt, to a method for producing such a cooling plate, and to the use of the device for producing multi-crystalline silicon, particularly for photovoltaic applications, according to the vertical gradient freeze method.
C30B 28/06 - Production of homogeneous polycrystalline material with defined structure from liquids by normal freezing or freezing under temperature gradient
B22D 27/04 - Influencing the temperature of the metal, e.g. by heating or cooling the mould
15.
METHOD AND DEVICE FOR PRODUCING VACUUM INTERRUPTERS OR ASSEMBLIES OF VACUUM INTERRUPTERS, AND VACUUM INTERRUPTER
The invention relates to a method for producing vacuum interrupters (7) or assemblies of vacuum interrupters by means of a soldering process chamber (4). In said method, a) at least one preassembled vacuum interrupter (7) or assembly is introduced into a pretreatment chamber (2, 3) connected upstream of the soldering process chamber (4) and is preheated and pre-evacuated; b) the pretreated vacuum interrupter (7) or assembly is transferred into the soldering process chamber (4) and is heated to a soldering temperature (TLöt) in a high vacuum; and subsequently c) the soldered and evacuated vacuum interrupter (7) or assembly is conveyed into a cooling process chamber (5) and is cooled there, wherein the vacuum interrupter is transferred and conveyed under vacuum conditions. The invention further relates to a device for carrying out said method as well as a vacuum interrupter or assembly.
