Abstract

The present invention relates to a system (10) for interferometrically measuring a distance between a reference surface (20) and a target surface (22); comprising a tunable radiation source (12) for generating a coherent radiation emission having a wavelength as a function of a modulation parameter; a control module (14) configured to control the modulation parameter such that the wavelength of the generated radiation emission is modulated periodically between a first and a second reference wavelength; an interferometer module (16) configured to generate a first reflection at the reference surface (20) on the basis of a first part of the radiation emission and to generate a second reflection at the target surface (22) on the basis of a second part of the radiation emission, such that an interference signal is generated by way of the first reflection and the second reflection; a detector module (26) configured to capture the interference signal; and an evaluation module (28) configured to perform a phase measurement between the first and the second reference wavelengths on the basis of the captured interference signal and to determine the distance between the reference surface (20) and the target surface (22) on the basis of the phase measurement. The invention also relates to a corresponding method.

IPC Classes  ?

• G01B 9/02004 - Interferometers characterised by controlling or generating intrinsic radiation properties using two or more frequencies using frequency scans
• G01B 9/02055 - Reduction or prevention of errorsTestingCalibration
• G01B 9/02056 - Passive reduction of errors

Abstract

The present invention relates to a method for referencing a near-field measurement, e.g. in a scanning probe microscope.

IPC Classes  ?

• G01Q 60/22 - Probes, their manufacture or their related instrumentation, e.g. holders
• G01Q 30/04 - Display or data processing devices

Abstract

The present invention relates to a method for measuring the dielectric properties of a sample with a scanning probe microscope. In particular, the invention relates to highly-localized optical imaging and spectroscopy on a sample surface using an atomic force microscope (AFM) probe mechanically driven at two oscillation frequencies, referred to herein as “active bimodal operation”, and a modulated source of electromagnetic radiation.

IPC Classes  ?

• G01Q 60/34 - Tapping mode
• G01Q 30/02 - Non-SPM analysing devices, e.g. SEM [Scanning Electron Microscope], spectrometer or optical microscope
• G01Q 60/30 - Scanning potential microscopy
• G01Q 60/36 - DC mode
• G01Q 60/38 - Probes, their manufacture or their related instrumentation, e.g. holders

Abstract

The present invention relates to a method for referencing a near-field measurement, e.g. in a scanning probe microscope.

IPC Classes  ?

• G01Q 60/22 - Probes, their manufacture or their related instrumentation, e.g. holders
• G01Q 30/04 - Display or data processing devices

Abstract

A system for providing a magnetic field for a sample includes a first contact surface for thermally contacting the sample and a second contact surface, which is in thermal contact with at least one magnetic element.

IPC Classes  ?

• H01F 6/00 - Superconducting magnetsSuperconducting coils
• G01R 33/3815 - Systems for generation, homogenisation or stabilisation of the main or gradient magnetic field using electromagnets with superconducting coils, e.g. power supply therefor
• G02F 1/09 - Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulatingNon-linear optics for the control of the intensity, phase, polarisation or colour based on magneto-optical elements, e.g. exhibiting Faraday effect

Goods & Services

Scientific apparatus and instruments, in particular for scientific research in laboratories; electrical and electronic control apparatus; precision positioning systems, adjusting and positioning systems, in particular with piezo drives as parts of control and measuring instruments; electrically controlled mechanical adjusting devices in the form of control and regulation units; control and regulation units for adjusting devices, micro-positioning tables, in particular for optical waveguides and fibre optics; apparatus for moving mirrors in microscopes; control apparatus for microscopes, in particular for scanning atomic force microscopes, magnetic force microscopes, laser scanning microscopes and scanning electron microscopes; measuring instruments, in particular electronic and electronic optical measuring apparatus; precision measuring apparatus; distance measuring apparatus, in particular integrated path sensors for mechanical positioning systems; interferometric sensors; microscopes, precision microscopes, in particular for use at low temperatures; magnetic force microscopes; atomic force microscopes; laser scanning microscopes; scanning electron microscopes (SEM); scanning near field microscopes; detection modules for microscopes and spectrometers; illuminations for microscopes and spectrometers; spectrometers; observation instruments; optical apparatus and instruments, in particular optical sensors; surface measuring apparatus being optoelectronic and operating without contact; cryostats for laboratory use; data processing apparatus; peripheral units adapted for use with computers; computers and computer software, in particular for operating adjusting and positioning systems.

Goods & Services

Scientific apparatus and instruments, in particular for scientific research in laboratories; electrical and electronic control apparatus; precision positioning systems, adjusting and positioning systems, in particular with piezo drives as parts of control and measuring instruments; electrically controlled mechanical adjusting devices in the form of control and regulation units; control and regulation units for adjusting devices, micro-positioning tables, in particular for optical waveguides and fibre optics; apparatus for moving mirrors in microscopes; control apparatus for microscopes, in particular for scanning atomic force microscopes, magnetic force microscopes, laser scanning microscopes and scanning electron microscopes; measuring instruments, in particular electronic and electronic optical measuring apparatus; precision measuring apparatus; distance measuring apparatus, in particular integrated path sensors for mechanical positioning systems; interferometric sensors; microscopes, precision microscopes, in particular for use at low temperatures; magnetic force microscopes; atomic force microscopes; laser scanning microscopes; scanning electron microscopes (SEM); scanning near field microscopes; detection modules for microscopes and spectrometers; illuminations for microscopes and spectrometers; spectrometers; observation instruments; optical apparatus and instruments, in particular optical sensors; surface measuring apparatus being optoelectronic and operating without contact; cryostats for laboratory use; data processing apparatus; peripheral units adapted for use with computers; computers and computer software, in particular for operating adjusting and positioning systems.

Goods & Services

(1) Scientific apparatus and instruments, in particular for scientific research in laboratories, namely, microscopes, precision microscopes, spectrometers, optical sensors, integrated path sensors, interferometric sensors, interferometric displacement sensors, liquid level sensors, motion sensors, thermal sensors, vibration sensors, acceleration sensors, positioning sensors, rotation sensors, cryostats, nanopositioners, integrated circuits, photonic integrated circuits, spectroscopes, microspectroscopes and electro-optical converters; Precision positioning systems and precision adjusting and positioning systems for determining the location of an object consisting of sensors for determining position, computers, computer software, transmitters, receivers and network interface devices, with piezo drives as parts of the systems; Electronic and electric controllers and regulators for use in adjusting micro-positioning tables in the fields of optical waveguides and fibre optics; Programmable electronic control apparatus and electrical control systems for moving mirrors in microscopes; Electronic and electrical control systems, electronic and electrical controllers, automatic controllers and control panels for microscopes, in particular for scanning atomic force microscopes, magnetic force microscopes, laser scanning microscopes and scanning electron microscopes; Measuring instruments, in particular electronic and electronic optical measuring apparatus, namely, photonic integrated circuits, spectrometers, spectroscopes and microspectroscopes; Precision measuring apparatus, namely, photonic integrated circuits, spectrometers, spectroscopes and microspectroscopes; Distance measuring apparatus, in particular integrated path sensors for mechanical positioning systems; Interferometric sensors; Microscopes, precision microscopes, in particular for use at low temperatures; Magnetic force microscopes; Atomic force microscopes; Laser scanning microscopes; Scanning electron microscopes (SEM); Scanning near field microscopes; Detection modules for microscopes and spectrometers; Illuminations for microscopes and spectrometers; Spectrometers; Observation instruments, namely, microscopes, precision microscopes, spectrometers, optical sensors, integrated path sensors, interferometric sensors, interferometric displacement sensors, liquid level sensors, motion sensors, thermal sensors, vibration sensors, acceleration sensors, positioning sensors, and rotation sensors; Optical apparatus and instruments, in particular optical sensors; Contactless surface measuring apparatus, namely optical sensors, electromagnetic measuring detectors, for use in the field of optoelectronics; Cryostats for laboratory use; Computer hardware for data processing; Computer peripherals, namely, digital cameras, webcams, keyboards, mouse, scanners, video recorders and graphic cards; Computers; Computer software for operating precision positioning systems and precision adjusting and positioning systems for determining the location of an object, in the fields of nanotechnology, particle physics, optics, photonics and chemistry

Goods & Services

(1) Scientific apparatus and instruments, in particular for scientific research in laboratories, namely, microscopes, precision microscopes, spectrometers, optical sensors, integrated path sensors, interferometric sensors, interferometric displacement sensors, liquid level sensors, motion sensors, thermal sensors, vibration sensors, acceleration sensors, positioning sensors, rotation sensors, cryostats, nanopositioners, integrated circuits, photonic integrated circuits, spectroscopes, microspectroscopes and electro-optical converters; Precision positioning systems and precision adjusting and positioning systems for determining the location of an object consisting of sensors for determining position, computers, computer software, transmitters, receivers and network interface devices, with piezo drives as parts of the systems; Electronic and electric controllers and regulators for use in adjusting micro-positioning tables in the fields of optical waveguides and fibre optics; Programmable electronic control apparatus and electrical control systems for moving mirrors in microscopes; Electronic and electrical control systems, electronic and electrical controllers, automatic controllers and control panels for microscopes, in particular for scanning atomic force microscopes, magnetic force microscopes, laser scanning microscopes and scanning electron microscopes; Measuring instruments, in particular electronic and electronic optical measuring apparatus, namely, photonic integrated circuits, spectrometers, spectroscopes and microspectroscopes; Precision measuring apparatus, namely, photonic integrated circuits, spectrometers, spectroscopes and microspectroscopes; Distance measuring apparatus, in particular integrated path sensors for mechanical positioning systems; Interferometric sensors; Microscopes, precision microscopes, in particular for use at low temperatures; Magnetic force microscopes; Atomic force microscopes; Laser scanning microscopes; Scanning electron microscopes (SEM); Scanning near field microscopes; Detection modules for microscopes and spectrometers; Illuminations for microscopes and spectrometers; Spectrometers; Observation instruments, namely, microscopes, precision microscopes, spectrometers, optical sensors, integrated path sensors, interferometric sensors, interferometric displacement sensors, liquid level sensors, motion sensors, thermal sensors, vibration sensors, acceleration sensors, positioning sensors, and rotation sensors; Optical apparatus and instruments, in particular optical sensors; Contactless surface measuring apparatus, namely optical sensors, electromagnetic measuring detectors, for use in the field of optoelectronics; Cryostats for laboratory use; Computer hardware for data processing; Computer peripherals, namely, digital cameras, webcams, keyboards, mouse, scanners, video recorders and graphic cards; Computers; Computer software for operating precision positioning systems and precision adjusting and positioning systems for determining the location of an object, in the fields of nanotechnology, particle physics, optics, photonics and chemistry

Goods & Services

Precision positioning systems comprised of precision instruments for manipulation and positioning of microscopic objects, in particular with piezo drives as parts of control and measuring instruments; Adjusting and positioning systems comprised of precision instruments for manipulation and positioning of microscopic objects, in particular with piezo drives as parts of control and measuring instruments; electrically controlled mechanical adjusting devices in the form of control and regulation units, namely, control units for regulating microscopes, and electron microscopes; control and regulation units, namely, apparatus and instruments for conveying, distributing, transforming, storing, regulating or controlling electric current for adjusting devices, micropositioning tables, in particular for optical waveguides and fiber optics; microscope parts, namely, apparatus for moving mirrors in microscopes; control apparatus for microscopes, namely, microscope parts for scanning atomic force microscopes, magnetic force microscopes, laser scanning microscopes and scanning electron microscopes; measuring instruments for measuring the scale of microscopic particles, in particular electronic and electronic optical measuring apparatus; precision measuring apparatus for measuring the scale of microscopic particles; distance measuring apparatus, in particular integrated path sensors for mechanical positioning systems; interferometric optical sensors; microscopes, precision microscopes, in particular for use at low temperatures; magnetic force microscopes; atomic force microscopes; laser scanning microscopes; scanning electron microscopes (SEM); scanning near field microscopes; microscope and spectrometer parts, namely, detection modules for microscopes and spectrometers; microscope and spectrometer parts, namely, illuminations for microscopes and spectrometers; spectrometers; observation instruments, namely, apparatus for transmitting and reproducing nanoscale images; non-medical imaging devices for nanoscale imaging; optical apparatus and instruments, in particular optical sensors; surface measuring apparatus being optoelectronic and operating without contact, namely, optical readers and optical imaging readers; cryostats for laboratory use; downloadable computer software for nanoscale imagery, in particular for operating, adjusting and positioning systems in the field of nanoscale analytics

Goods & Services

Scientific apparatus and instruments, in particular for scientific research in laboratories, namely, microscopes and parts thereof, electron microscopes and parts thereof; scanning electron microscopes and parts thereof and transmission electron microscopes and parts thereof; electrical and electronic control apparatus, namely, apparatus and instruments for conveying, distributing, transforming, storing, regulating or controlling electric current; precision positioning systems comprised of precision instruments for manipulation and positioning of microscopic objects, adjusting and positioning systems comprised of precision instruments for manipulation and positioning of microscopic objects, in particular with piezo drives as parts of control and measuring instruments; electrically controlled mechanical adjusting devices in the form of control and regulation units in the nature of microscope parts, namely, control units for regulating microscopes, and electron microscopes; control and regulation units, namely, apparatus and instruments for conveying, distributing, transforming, storing, regulating or controlling electric current for adjusting devices, micro-positioning tables, in particular for optical waveguides and fibre optics; microscope parts, namely, apparatus for moving mirrors in microscopes; microscope parts, namely, control apparatus for microscopes, in particular for scanning atomic force microscopes, magnetic force microscopes, laser scanning microscopes and scanning electron microscopes; scientific measuring instruments for measuring the scale of microscopic particles, in particular electronic and electronic optical measuring apparatus; scientific precision measuring apparatus for measuring the scale of microscopic particles; distance measuring apparatus, in particular integrated path sensors for mechanical positioning systems; interferometric optical sensors; microscopes, precision microscopes, in particular for use at low temperatures; magnetic force microscopes; atomic force microscopes; laser scanning microscopes; scanning electron microscopes; scanning near field microscopes; microscope and spectrometer parts, namely, detection modules for microscopes and spectrometers; microscope and spectrometer parts, namely, illuminations for microscopes and spectrometers; spectrometers; photo electron spectrometers; microscope illuminating devices; observation instruments, namely, apparatus for transmitting and reproducing nanoscale images; non-medical imaging devices for nanoscale imaging of microscopic particles; optical apparatus and instruments, in particular optical sensors; surface measuring apparatus being optoelectronic and operating without contact, namely, optical readers and optical imaging readers; cryostats for laboratory use; data processing apparatus; computer peripherals being peripheral units adapted for use with computers; computers and downloadable computer software for nanoscale imagery, in particular for operating adjusting and positioning systems; data processing apparatus in the field of nanoscale analytics; computer peripherals being peripheral units adapted for use with computers in the field of nanoscale analytics; computers and downloadable computer software for nanoscale imagery, in particular for operating adjusting and positioning systems in the field of nanoscale analytics

Abstract

An electromechanical actuator includes a base part and an oscillation resonator having the shape of a rod. The electromechanical actuator further includes amount for mounting the oscillation resonator to the base part. The mount is configured to bear the oscillation resonator so as to be rotatable around an axis of the oscillation resonator rod relative to the base part. A driver member is mechanically coupled to the oscillation resonator. A slider or a rotator is configured to be moved by the driver member when the oscillation resonator is excited.

IPC Classes  ?

• H01L 41/09 - Piezo-electric or electrostrictive elements with electrical input and mechanical output
• F04B 19/00 - Machines or pumps having pertinent characteristics not provided for in, or of interest apart from, groups
• F04B 43/04 - Pumps having electric drive
• H02N 2/00 - Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
• H02N 2/02 - Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuatorsLinear positioners
• H02N 2/10 - Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
• H01L 41/083 - Piezo-electric or electrostrictive elements having a stacked or multilayer structure

Abstract

The invention relates to a table having a tabletop and including a refrigerating machine, at least one section of the tabletop being coolable by means of the refrigerating machine via a thermal contact; an upper vacuum chamber, which can be evacuated, for thermally insulating the thermal contact from a surrounding area of the table, said chamber connecting an upper face of the refrigerating machine facing the tabletop and the section to be cooled, and which has at least one flexible upper chamber section; a lower vacuum chamber, which can be evacuated, which is connected to a lower face of the refrigerating machine facing away from the tabletop, and which has at least one flexible lower chamber section; and a rigid stiffening structure, which is connected to the refrigerating machine via the flexible upper chamber section and via the flexible lower chamber section.

IPC Classes  ?

• F25D 19/00 - Arrangement or mounting of refrigeration units with respect to devices
• A47B 13/08 - Table topsRims therefor

Abstract

Disclosed is a stick-slip drive comprising a base and a rotor which are in contact with one another via a friction surface and are coupled to one another in such a way that the rotor can perform an inertial motion relative to the base, characterized in that two materials, a noble metal and a ceramic material, are paired up on the friction surface between the base and the rotor.

IPC Classes  ?

• H02N 2/02 - Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuatorsLinear positioners
• H02N 2/00 - Electric machines in general using piezoelectric effect, electrostriction or magnetostriction

Abstract

The invention relates to a coolable optical table with a table top and at least three table legs. Securing means for securing objects such as optical elements are provided in a table surface of the table top. The table legs are equipped with a damping device for damping vibrations.

IPC Classes  ?

• F25D 3/10 - Devices using other cold materialsDevices using cold-storage bodies using liquefied gases, e.g. liquid air
• G01M 11/04 - Optical benches therefor
• F25B 9/14 - Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point characterised by the cycle used, e.g. Stirling cycle
• F25B 19/00 - Machines, plants or systems, using evaporation of a refrigerant but without recovery of the vapour
• F25B 21/00 - Machines, plants or systems, using electric or magnetic effects
• F25D 19/00 - Arrangement or mounting of refrigeration units with respect to devices
• G01M 11/00 - Testing of optical apparatusTesting structures by optical methods not otherwise provided for
• G01M 11/02 - Testing optical properties

Abstract

wherein the measurement elements are thermally coupled to the wall of the housing (21) made of heat-conducting material.

IPC Classes  ?

• G01B 11/02 - Measuring arrangements characterised by the use of optical techniques for measuring length, width, or thickness
• G01B 11/14 - Measuring arrangements characterised by the use of optical techniques for measuring distance or clearance between spaced objects or spaced apertures
• G01B 9/02 - Interferometers
• G03F 7/20 - ExposureApparatus therefor

Abstract

An electromechanical actuator includes an oscillation resonator having the shape of a rod. The oscillation resonator is divided by a dividing plane that is not parallel to the longitudinal direction of the oscillation resonator into a first resonator portion and a second resonator portion. At least the first resonator portion includes electromechanical means which, when activated, are configured to generate a 3-dimensional acoustic bulk wave are with a mode shape asymmetric with respect to the dividing plane.

IPC Classes  ?

• H01L 41/09 - Piezo-electric or electrostrictive elements with electrical input and mechanical output
• F04B 43/04 - Pumps having electric drive
• H02N 2/00 - Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
• H02N 2/02 - Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuatorsLinear positioners
• H02N 2/10 - Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
• F04B 19/00 - Machines or pumps having pertinent characteristics not provided for in, or of interest apart from, groups
• H01L 41/083 - Piezo-electric or electrostrictive elements having a stacked or multilayer structure

Abstract

The invention relates to a table (1) having a tabletop (9) and comprising - a refrigerating machine (20), at least one section (10) of the tabletop (9) being coolable by means of the refrigerating machine (20) via a thermal contact (22); - an upper vacuum chamber (50), which can be evacuated, for thermally insulating the thermal contact (22) from a surrounding area (100) of the table (1), said chamber connecting an upper face (26) of the refrigerating machine (20) facing the tabletop (9) and the section (10) to be cooled, and which has at least one flexible upper chamber section (51); - a lower vacuum chamber (60), which can be evacuated, which is connected to a lower face (27) of the refrigerating machine (20) facing away from the tabletop (9), and which has at least one flexible lower chamber section (61); and - a rigid stiffening structure (30), which is connected to the refrigerating machine (20) via the flexible upper chamber section (51) and via the flexible lower chamber section (61).

IPC Classes  ?

• F25D 19/00 - Arrangement or mounting of refrigeration units with respect to devices

Abstract

The invention relates to coolable optical table (1) comprising a table top (9) and at least one table leg. The surface of the table top is provided with securing means for securing objects such as optical elements. The table legs are provided with a damping device (5) for damping vibrations.

IPC Classes  ?

• F25D 3/10 - Devices using other cold materialsDevices using cold-storage bodies using liquefied gases, e.g. liquid air

Abstract

Disclosed is a stick-slip drive comprising a base and a rotor which are in contact with one another via a friction surface and are coupled to one another in such a way that the rotor can perform an inertial motion relative to the base, characterized in that two materials, a noble metal and a ceramic material, are paired up on the friction surface between the base and the rotor.

IPC Classes  ?

• H02N 2/02 - Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuatorsLinear positioners
• H02N 2/00 - Electric machines in general using piezoelectric effect, electrostriction or magnetostriction

Abstract

The invention relates to an interferometer (10) for real-time measurement of absolute distances and/or relative position movements between a first and a second machine part, comprising a measurement unit (20) and a reflector unit (40). The measurement unit (20) comprises a housing (21) having at least one wall that consists of a heat-conducting material, a plurality of measurement elements being arranged inside the housing (21). Said measurement elements comprise: a laser source (22), a Peltier element (24) and a digital control (23), and are thermally coupled to the wall of the housing (21) that consists of a heat-conducting material.

IPC Classes  ?

• G01B 21/16 - Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring distance or clearance between spaced objects
• G01B 9/02 - Interferometers
• G01B 11/06 - Measuring arrangements characterised by the use of optical techniques for measuring length, width, or thickness for measuring thickness

Abstract

The present invention relates to a method for measuring the near-field signal of a sample in a scattering type near-field microscope and to a device for conducting said method.

IPC Classes  ?

• G01Q 60/18 - SNOM [Scanning Near-Field Optical Microscopy] or apparatus therefor, e.g. SNOM probes
• H04B 5/00 - Near-field transmission systems, e.g. inductive or capacitive transmission systems
• G01N 21/47 - Scattering, i.e. diffuse reflection

Abstract

A device for absolute distance measurement includes a first tunable light source for emitting a first wavelength light of a first tunable frequency modulated by a first modulating frequency and a second light source for emitting a second wavelength light of a second frequency modulated by a second modulating frequency. An optical coupler couples the first wavelength light and the second wavelength light into an interferometer cavity. An interferometer detector provides an interference measurement signal based on a detected interference pattern. A demodulator unit generates a first demodulation signal based on the interference measurement signal by demodulation with the first modulating frequency and a second demodulation signal based on the interference measurement signal by demodulation with the second modulating frequency. A computation unit computes an absolute distance by evaluating the first demodulation signal acquired during a sweep of the first tunable frequency and the second demodulation signal.

IPC Classes  ?

• G01B 9/02 - Interferometers
• G01B 11/00 - Measuring arrangements characterised by the use of optical techniques

Goods & Services

Engines (except for land vehicles), in particular piezo motors and electric motors; electric motor and piezoelectric drives for single and multi-axial positioning systems. Scientific apparatus and instruments, in particular for scientific research in laboratories; electrical and electronic control apparatus; precision positioning systems, adjusting and positioning systems, in particular with piezo drives as parts of control and measuring instruments; electrically controlled mechanical adjusting devices in the form of control and regulation units; control and regulation units for adjusting devices, micro-positioning tables, in particular for optical waveguides and fibre optics; apparatus for moving mirrors in microscopes; control apparatus for microscopes, in particular for scanning atomic force microscopes, magnetic force microscopes, laser scanning microscopes and scanning electron microscopes; measuring instruments, in particular electronic and electronic optical measuring apparatus; precision measuring apparatus; distance measuring apparatus, in particular integrated path sensors for mechanical positioning systems; interferometric sensors; microscopes, precision microscopes, in particular for use at low temperatures; magnetic force microscopes; atomic force microscopes; laser scanning microscopes; scanning electron microscopes (SEM); observation instruments; optical apparatus and instruments, in particular optical sensors; surface measuring apparatus being optoelectronic and operating without contact; cryostats; data processing apparatus; peripheral units adapted for use with computers; computers and computer software, in particular for operating adjusting and positioning systems.

Goods & Services

Engines (except for land vehicles), in particular piezo motors and electric motors; electric motor and piezoelectric drives for single and multi-axial positioning systems. Scientific apparatus and instruments, in particular for scientific research in laboratories; electrical and electronic control apparatus; precision positioning systems, adjusting and positioning systems, in particular with piezo drives; electrically controlled mechanical adjusting devices; control and regulation units for adjusting devices, micro-positioning tables, in particular for optical waveguides and fibre optics; apparatus for moving mirrors in microscopes; control apparatus for microscopes, in particular for scanning atomic force microscopes, magnetic force microscopes, laser scanning microscopes and scanning electron microscopes; measuring instruments, in particular electronic and electronic optical measuring apparatus; precision measuring apparatus; distance measuring apparatus, in particular integrated path sensors for mechanical positioning systems; interferometric sensors; microscopes, precision microscopes, in particular for use at low temperatures; atomic force microscopes; magnetic force microscopes; laser scanning microscopes; scanning electron microscopes (SEM); observation instruments; optical apparatus and instruments, in particular optical sensors; surface measuring apparatus being optoelectronic and operating without contact; cryostats; data processing apparatus; peripherals adapted for use with computers; computers and computer software, in particular for operating adjusting and positioning systems.

Goods & Services

Engines (except for land vehicles), in particular piezo motors and electric motors; electric motor and piezoelectric drives for single and multi-axial positioning systems. Scientific apparatus and instruments, in particular for scientific research in laboratories; electrical and electronic control apparatus; precision positioning systems, adjusting and positioning systems, in particular with piezo drives; electrically controlled mechanical adjusting devices; control and regulation units for adjusting devices, micro-positioning tables, in particular for optical waveguides and fibre optics; apparatus for moving mirrors in microscopes; control apparatus for microscopes, in particular for scanning atomic force microscopes, magnetic force microscopes, laser scanning microscopes and scanning electron microscopes; measuring instruments, in particular electronic and electronic optical measuring apparatus; precision measuring apparatus; distance measuring apparatus, in particular integrated path sensors for mechanical positioning systems; interferometric sensors; microscopes, precision microscopes, in particular for use at low temperatures; magnetic force microscopes; atomic force microscopes; laser scanning microscopes; scanning electron microscopes (sem); observation instruments; optical apparatus and instruments, in particular optical sensors; surface measuring apparatus being optoelectronic and operating without contact; cryostats; data processing apparatus; peripherals adapted for use with computers; computers and computer software, in particular for operating adjusting and positioning systems.

Goods & Services

Engines, not for land vehicles, namely, piezo motors and electric motors; electric motor and piezoelectric drives for single and multi-axial positioning systems Scientific apparatus and instruments for scientific research in laboratories, namely, interferometric sensors, positioning systems comprised of linear positioners, rotators for positioning purposes, and goniometers; cryogenic probe stations; fiber cables for microscopes; electronic control systems for machines and engines; precision positioning systems and adjusting and positioning systems for piezo drives comprised primarily of linear positioners, rotators for positioning purposes, goniometers and scanners; electric controlling devices for adjusting machines; electronic controlling devices for adjusting micro-positioning tables, optical waveguides and optical fiber waveguides; apparatus for moving mirrors in microscopes; electronic control apparatus for microscopes, in particular for scanning atomic force microscopes, magnetic force microscopes, laser scanning microscopes and scanning electron microscopes; measuring instruments, namely, electric and electronic optical measuring apparatus for measuring positions, angles, distances, velocities and accelerations of a sample within a microscope or cryogenic probe station; precision measuring apparatus for measuring positions, angles, distances, velocities and accelerations of a sample within a microscope or cryogenic probe station; distance measuring apparatus that includes integrated path sensors for mechanical positioning systems; interferometric sensors; microscopes; precision microscopes for use at low temperatures; atomic force microscopes; magnetic force microscopes; laser scanning microscopes; scanning electron microscopes; optical apparatus and instruments, namely, optical sensors; non-contact electro-optical instruments for use in the measurement of scientific specimens and industrial components; cryostats; data processing apparatus; peripherals adapted for use with computers; computers and computer software for operating adjusting and positioning systems

Goods & Services

Engines, not for land vehicles, namely, piezo motors and electric motors; electric motor and piezoelectric drives for single and multi-axial positioning systems Scientific apparatus and instruments for scientific research in laboratories, namely, interferometric sensors, positioning systems comprised of linear positioners, rotators for positioning purposes, and goniometers; cryogenic probe stations; fiber cables for microscopes; electronic control systems for machines and engines; precision positioning systems and adjusting and positioning systems for piezo drives comprised primarily of linear positioners, rotators for positioning purposes, goniometers and scanners; electric controlling devices for adjusting machines; electronic controlling devices for adjusting micro-positioning tables, optical waveguides and optical fiber waveguides; apparatus for moving mirrors in microscopes; electronic control apparatus for microscopes, in particular for scanning atomic force microscopes, magnetic force microscopes, laser scanning microscopes and scanning electron microscopes; measuring instruments, namely, electric and electronic optical measuring apparatus for measuring positions, angles, distances, velocities and accelerations of a sample within a microscope or cryogenic probe station; precision measuring apparatus for measuring positions, angles, distances, velocities and accelerations of a sample within a microscope or cryogenic probe station; distance measuring apparatus that includes integrated path sensors for mechanical positioning systems; interferometric sensors; microscopes; precision microscopes for use at low temperatures; atomic force microscopes; magnetic force microscopes; laser scanning microscopes; scanning electron microscopes; optical apparatus and instruments, namely, optical sensors; non-contact electro-optical instruments for use in the measurement of scientific specimens and industrial components; cryostats; data processing apparatus; peripherals adapted for use with computers; computers and computer software for operating adjusting and positioning systems

Goods & Services

Engines, not for land vehicles, namely, piezo motors and electric motors; electric motor and piezoelectric drives for single and multi-axial positioning systems Scientific apparatus and instruments for scientific research in laboratories, namely, interferometric sensors, positioning systems comprised of linear positioners, rotators for positioning purposes, and goniometers; cryogenic probe stations; fiber cables for microscopes; electronic control systems for machines and engines; precision positioning systems and adjusting and positioning systems for piezo drives comprised primarily of linear positioners, rotators for positioning purposes, goniometers and scanners; electric controlling devices for adjusting machines; electronic controlling devices for adjusting micro-positioning tables, optical waveguides and optical fiber waveguides; apparatus for moving mirrors in microscopes; electronic control apparatus for microscopes, in particular for scanning atomic force microscopes, magnetic force microscopes, laser scanning microscopes and scanning electron microscopes; measuring instruments, namely, electric and electronic optical measuring apparatus for measuring positions, angles, distances, velocities and accelerations of a sample within a microscope or cryogenic probe station; precision measuring apparatus for measuring positions, angles, distances, velocities and accelerations of a sample within a microscope or cryogenic probe station; distance measuring apparatus that includes integrated path sensors for mechanical positioning systems; interferometric sensors; microscopes; precision microscopes for use at low temperatures; atomic force microscopes; magnetic force microscopes; laser scanning microscopes; scanning electron microscopes; optical apparatus and instruments, namely, optical sensors; non-contact electro-optical instruments for use in the measurement of scientific specimens and industrial components; cryostats; data processing apparatus; peripherals adapted for use with computers; computers and computer software for operating adjusting and positioning systems

Goods & Services

Engines (except for land vehicles), In particular piezo motors and Electric motors; Electric motor and piezoelectric drives for single and multi-axial positioning systems. Scientific apparatus and instruments, In particular for scientific research in laboratories; Electrical and electronic control apparatus; Precision positioning systems, adjusting and positioning systems, in particular with piezo drives; Electrically controlled mechanical adjusting devices; Control and regulation units for adjusting devices, micro-positioning tables, in particular for optical waveguides and fibre optics; Apparatus for moving mirrors in microscopes; Control apparatus for microscopes, in particular for scanning atomic force microscopes, magnetic force microscopes, laser scanning microscopes and scanning electron microscopes; Measuring instruments, In particular electronic and electronic optical measuring apparatus; Precision measuring apparatus; Distance measuring apparatus, In particular integrated path sensors for mechanical positioning systems; Interferometric sensors; Microscopes, Precision microscopes, in particular for use at low temperatures; Atomic force microscopes; Magnetic force microscopes; Laser scanning microscopes; Scanning Electron Microscopes (SEM); Observation instruments; Optical apparatus and instruments, In particular optical sensors; Surface measuring apparatus being optoelectronic and operating without contact; Cryostats; Data processing apparatus; Peripherals adapted for use with computers; Computers and computer software, In particular for operating adjusting and positioning systems.

Goods & Services

Engines (except for land vehicles), In particular piezo motors and Electric motors; Electric motor and piezoelectric drives for single and multi-axial positioning systems. Scientific apparatus and instruments, In particular for scientific research in laboratories; Electrical and electronic control apparatus; Precision positioning systems, adjusting and positioning systems, in particular with piezo drives; Electrically controlled mechanical adjusting devices; Control and regulation units for adjusting devices, micro-positioning tables, in particular for optical waveguides and fibre optics; Apparatus for moving mirrors in microscopes; Control apparatus for microscopes, in particular for scanning atomic force microscopes, magnetic force microscopes, laser scanning microscopes and scanning electron microscopes; Measuring instruments, In particular electronic and electronic optical measuring apparatus; Precision measuring apparatus; Distance measuring apparatus, In particular integrated path sensors for mechanical positioning systems; Interferometric sensors; Microscopes, Precision microscopes, in particular for use at low temperatures; Magnetic force microscopes; Atomic force microscopes; Laser scanning microscopes; Scanning Electron Microscopes (SEM); Observation instruments; Optical apparatus and instruments, In particular optical sensors; Surface measuring apparatus being optoelectronic and operating without contact; Cryostats; Data processing apparatus; Peripherals adapted for use with computers; Computers and computer software, In particular for operating adjusting and positioning systems.

Abstract

The invention relates to a device for conducting near-field optical measurements of a specimen, a method for conducting near-field optical measurements and the use of the device.

IPC Classes  ?

• G01Q 60/06 - SNOM [Scanning Near-field Optical Microscopy] combined with AFM [Atomic Force Microscopy]
• G01Q 60/22 - Probes, their manufacture or their related instrumentation, e.g. holders
• B82Y 35/00 - Methods or apparatus for measurement or analysis of nanostructures
• B82Y 20/00 - Nanooptics, e.g. quantum optics or photonic crystals

Abstract

Device and method for acquiring position with a confocal Fabry-Perot interferometer. In a general aspect, the device for acquiring position may include an arrangement for acquiring position where the acquiring arrangement has a confocal Fabry-Perot interferometer. In another general aspect, a method for acquiring position may include generating an interference pattern dependent on a position of an object by a confocal Fabry-Perot interferometer; detecting the interference pattern to obtain a measuring signal; and evaluating the measuring signal.

IPC Classes  ?

• G01B 11/02 - Measuring arrangements characterised by the use of optical techniques for measuring length, width, or thickness
• G01B 9/02 - Interferometers

Abstract

An apparatus for position finding, including a light source to produce a wave field in a measurement section, a wave field variation device to generate a variation of a wavelength of the wave field over time, an interferometer to produce an interference pattern for the wave field which is dependent on the length of the measurement section, a detector to produce a measurement signal on the basis of the detected interference pattern, and an evaluation circuit to evaluate the measurement signal on the basis of the variation over time.

IPC Classes  ?

• G01B 9/02 - Interferometers

Abstract

The invention relates to a device for position detection, comprising a length measurement (102) applied to a measured section and a length measurement variation unit (B) for the temporal variation of the length measurement. A detector (108) observes the length measurement (102) as a function of the measured section length and variation, and generates a measurement signal. Said measurement signal is evaluated as a function of the temporal variation of the length measurement.

IPC Classes  ?

• G01B 9/02 - Interferometers
• G01B 11/02 - Measuring arrangements characterised by the use of optical techniques for measuring length, width, or thickness

Abstract

A positioning device has a first unit and a second unit arranged so as to be displaceable relative to the first unit. A slip-stick drive acts between the first unit and the second unit to produce a translatory movement (P) of the two units. The positioning device has a solid-body joint which is coupled to the first unit and the slip-stick drive and which mechanically protects a translation shaft of the slip-stick drive against rotation and/or lateral displacement.

IPC Classes  ?

• H01L 41/09 - Piezo-electric or electrostrictive elements with electrical input and mechanical output

Goods & Services

Motors, piezo motors and electric motors, other than for land vehicles; electromotive and piezoelectric drives for one and multiple axial positioning systems, as far as in this class. Electric and electronic measuring and control units; scientific apparatuses, equipment and instruments, especially precision positioning systems, adjustment and positioning systems with piezo drives, electronically controllable mechanical adjusting units as well as open loop control units and closed loop control units for the aforementioned adjusting units, micro positioners for fibre optic cables and fibre optics, integrated position sensors for mechanical positioning systems; microscopes, especially precision microscopes, scanning probe microscopes and confocal microscopes; equipment for electronic optical measurements, especially equipment for moving mirrors in the application of microscopics and lasers; optical apparatuses and instruments; optoelectronic and non-contact operational surface measurement equipment; data processing equipment; computers and computer software for the operation of adjustment and positioning systems. Development of computer software; services of engineers; physical research; research in the area of technology, especially scientific and industrial research; execution of technical measurements; search and development services regarding new products for third parties.

Goods & Services

Motors for microscopic positioning and scanning instruments, piezo motors and electric motors for instruments; electromotive and piezoelectric drives for one and multiple axial positioning systems Electric and electronic measuring and control units for microanalysis and nanoanalysis; scientific apparatuses, equipment and instruments, namely, precision positioning systems comprised of linear positioners, rotators, goniometers and scanners, adjustment and positioning systems comprised of linear positioners, rotators, goniometers and scanners with piezo drives, electronically controllable mechanical adjusting units as well as open loop control units and closed loop control units for the aforementioned adjusting units; micro positioners for fiber optic cables and fiber optics; integrated position sensors for mechanical positioning systems; microscopes, especially precision microscopes, scanning probe microscopes and confocal microscopes; equipment for electronic optical measurements, namely, equipment for moving mirrors in the application of microscopics and lasers, namely, piezo-electric controllers; optical apparatuses and instruments, namely, microscopes and their parts; optoelectronic and non-contact operational surface measurement equipment, namely, confocal microscopes, atomic force microscopes, scanning near-field optical microscopes and scanning tunneling microscopes; data processing equipment, namely, low temperature physics measurement electronic systems; computers and computer software for the operation of adjustment and positioning systems [Development of computer software; services of engineers in the field of microscopics and nanotechnology; physical research in the field of microscopics and nanotechnology; research in the area of technology, especially scientific and industrial research; execution of technical measurements; search and development services regarding new products for third parties]

Abstract

A positioning device has a first unit (1’) and a second unit (4) which is arranged such that it can be moved in relation to the first unit. A slip-stick drive (2, 3, 4) acts between the first unit (1’) and the second unit (4) in order to generate a translatory movement (P) of the two units (1’, 4). The positioning means has a fixed-body joint (12, 13) which is coupled to the first unit (1’) and to the slip-stick drive (2, 3, 4) and mechanically secures the translation shaft (3) of the slip-stick drive (2, 3, 4) against rotation and/or lateral displacement.

IPC Classes  ?

• H01L 41/09 - Piezo-electric or electrostrictive elements with electrical input and mechanical output
• B23Q 5/50 - Feeding other members supporting tools or work, e.g. saddles, tool-slides, through mechanical transmission feeding step by step