Abstract

The purpose of the invention is to efficiently perform the work of changing stacked objects, which are stacked in one container with one pitch, to another pitch and storing same in the stacked form in another container. Multiple workpieces (51) are juxtaposed in a stacked form with a prescribed pitch and attachment pads (25) for attaching the workpieces are provided on base plates (3). The pitch between the base plates can be varied by rotating variable spacers (17), which work in concert with a drive shaft (31). An airtight communicating channel (28), which communicates with the attachment pads, is formed within a group of base plates. The communicating channel (28) is formed by the consecutive installation of an expandable elastic packing (15) between the through holes of adjacent base plates. The elastic packing and the variable spacers move in concert with the base plates. The base plates are provided with springs (9) for releasing the fixing of an inter-base plate pitch. Areas of differing thickness are formed on the circumferential surface of the variable spacers (17).

IPC Classes  ?

• B65H 31/28 - Bands, chains, or like moving receivers
• H01L 21/677 - Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereofApparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components for conveying, e.g. between different work stations