Abstract

Turbomolecular vacuum pump (1) intended to be fluidically connected to a process chamber (101) of an equipment device (100), the vacuum pump (1) having a control unit (30) configured to control a heating device (21) and a cooling device (22) of the vacuum pump (1) and to communicate with a command unit (104) of the equipment device (100) in order to initiate a cleaning step (201), when requested by the equipment device (100), said cleaning step (201) comprising a heating phase (202), in which the control unit (30) controls the heating device to increase the internal temperature of the vacuum pump (1) for a heating duration (Tc), and a cooling phase (203), which follows the heating phase (202) and in which the control unit (30) controls the cooling device to lower said temperature for a cooling duration (Tr).

IPC Classes  ?

• F04D 19/04 - Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
• F04D 27/02 - Surge control
• F04D 29/58 - CoolingHeatingDiminishing heat transfer
• F04D 29/70 - Suction gridsStrainersDust separationCleaning

Goods & Services

Valves as machine components; vacuum valves being parts of machines; angle valves being parts of machines; gate valves being parts of machines; butterfly valves being parts of machines; pendulum valves being parts of machines; ball valves being parts of machines; electric actuated valves being parts of machines; isolation vacuum valves being parts of machines; hydraulic valve actuators; parts of oilfield wellhead machines, namely, check valves; safety valves being part of machines; Servo-valves; engine valves for introducing fuel-air mixtures into the combustion chambers of internal combustion engines; motorized valves as machine components; pneumatically operable valves as machine components; power operated valves as machine components; valves for pumps; valves for engines, machines and their parts, namely, valves being engine parts for introducing fuel-air mixtures into the combustion chambers of internal combustion engines; drivers for valves being parts of machines; clack valves as machine components; valves as machines components; compressed air pilot valves being parts of machines and switch valves being parts of machines; pump control valves as parts of machines; regulating valves as parts of machines; valves being parts of machines for use in vacuum systems; valves being parts of machines for use in vacuum supply devices; valves being parts of machines for sealing vacuum chambers; pressure regulating valves being parts of machines as parts of vacuum systems and supply devices

Goods & Services

Valves as machine components; vacuum valves being parts of machines; angle valves being parts of machines; gate valves being parts of machines; butterfly valves being parts of machines; pendulum valves being parts of machines; ball valves being parts of machines; electric actuated valves being parts of machines; isolation vacuum valves being parts of machines; parts of oilfield wellhead machines, namely, check valves; safety valves being part of machines; Servo-valves; engine valves for introducing fuel-air mixtures into the combustion chambers of internal combustion engines; motorized valves as machine components; pneumatically operable valves as machine components; power operated valves as machine components; valves for pumps; valves for engines, machines and their parts, namely, valves being engine parts for introducing fuel-air mixtures into the combustion chambers of internal combustion engines; drivers for valves being parts of machines; clack valves as machine components; valves as machines components; compressed air pilot valves being parts of machines and switch valves being parts of machines; pump control valves as parts of machines; regulating valves as parts of machines; valves being parts of machines for use in vacuum systems; valves being parts of machines for use in vacuum supply devices; valves being parts of machines for sealing vacuum chambers; pressure regulating valves being parts of machines as parts of vacuum systems and supply devices

Abstract

A plate within the valve pivots about a shaft to cause the plate to transition between an open position and a closed position within a bore passing through the housing of the valve. The plate has a perimeter seal thereon which abuts against a tapering seat of the bore when the throttle plate is in a closed orientation. The seal has a curving form over a recess and an energy source, such as the toroidal spring in the recess, to energize the seal and allow it to maintain secure contact against the seat. The shaft is offset from the centerline of the bore and the plate is mounted to the shaft at a location offset from the center point of the plate, so that rotation of the plate causes the plate to swing somewhat into a closed position, minimizing abrasive contact between the seat and seal during closing.

IPC Classes  ?

• F16K 1/228 - Movable sealing bodies
• F16K 1/16 - Lift valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces with pivoted closure members
• F16K 1/18 - Lift valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces with pivoted closure members with pivoted discs or flaps
• F16K 1/20 - Lift valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces with pivoted closure members with pivoted discs or flaps with axis of rotation arranged externally of valve member
• F16K 1/22 - Lift valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces with pivoted closure members with pivoted discs or flaps with axis of rotation crossing the valve member, e.g. butterfly valves
• F16K 1/226 - Shape or arrangement of the sealing
• F16K 11/052 - Multiple-way valves, e.g. mixing valvesPipe fittings incorporating such valvesArrangement of valves and flow lines specially adapted for mixing fluid with all movable sealing faces moving as one unit comprising only lift valves with pivoted closure members, e.g. butterfly valves

Goods & Services

ELECTRICAL ADAPTIVE PRESSURE CONTROLLERS COUPLED TO VALVES FOR CONTROLLING FLUID PRESSURE, ESPECIALLY IN HIGH VACUUM AND ULTRA HIGH VACUUM SYSTEMS

Goods & Services

MODULAR HIGH AND ULTRA HIGH VACUUM HANDLING COMPONENT SYSTEMS, MADE PRIMARILY OF METAL, COMPRISED OF EXTENSIONS, ELBOWS, TEES, 4-WAY CROSSES, 5-WAY CROSSES, 6-WAY CROSSES, ADAPTERS, CLAMPING DEVICES, NAMELY CLAMPS FOR ATTACHING TOGETHER SEPARATE COMPONENTS OF THE VACUUM HANDLING SYSTEM, AND VALVES, ALL SOLD AS A UNIT AND USED IN THE SEMI-CONDUCTOR MANUFACTURING INDUSTRY