Goods & Services

Machines for metal treating, glass working, ceramic processing, plastics processing, semiconductor processing and woodworking and machine tools; Motors and engines (except for land vehicles); Machine coupling and transmission components (except for land vehicles); Precision fine-grinding, lapping, polishing and deburring machines for the metal, electronics, ceramic, glass and semiconductor industries; Functional components for the aforesaid machines, included in class 7; Fittings for machines, in particular lapping, precision grinding and polishing discs, carrier wheels, lapping mandrels, lapping rings and polishing rolls, included in class 7. Scientific, optical, measuring, checking (supervision) and control apparatus and instruments; Apparatus and instruments for conducting, switching, transforming, accumulating, regulating or controlling electricity; Apparatus for recording, transmission or reproduction of sound or images; Magnetic data carriers, recording discs; Compact discs, DVDs and other digital recording media; Calculating machines, Data processing hardware, Computers; Computer hardware and computer software. Material treatment, treatment of metal, glass, ceramic, plastic, semiconductors; Polishing by abrasion, optical glass grinding; Metal plating; Planing, milling, abrasion.

Abstract

Method for the single-sided processing of flat workpieces, each of the workpieces having a first and a second face side, the face sides being opposite to one another, wherein the second face side is to be processed, comprising the following steps: - providing a group of carriers and removably fixing a workpiece to each of the carriers with the first face side of the workpiece such that the second face side of the workpiece is exposed, - inserting each of the carriers with their respective workpiece one by one into a grinding machine, wherein the second face side of each of the workpieces is ground until each of the workpieces have reached a predetermined first thickness, - removably fixing the carriers with their respective ground workpieces on a joint carrier disc such that the second face sides of the workpieces are exposed, - inserting the joint carrier disc into a lapping machine and/or into a polishing machine, wherein the second face side of each of the workpieces is lapped and/or polished until each of the workpieces have reached a predetermined final thickness. The invention also relates to a corresponding device.

IPC Classes  ?

• B24B 7/04 - Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfacesAccessories therefor involving a rotary work-table
• B24B 7/22 - Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfacesAccessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain
• B24B 37/04 - Lapping machines or devicesAccessories designed for working plane surfaces
• B24B 37/10 - Lapping machines or devicesAccessories designed for working plane surfaces characterised by the movement of the work or lapping tool for single side lapping
• B24B 37/30 - Work carriers for single side lapping of plane surfaces

Abstract

The invention relates to a method for machining flat workpieces in a double-sided machining tool, which has an upper and a lower work disk, wherein at least one of the work disks is rotatingly driven and the work disks each have an annular work surface, wherein the work surfaces amongst themselves limit an also annular work gap, in which at least one carrier is located, which guides at least one workpiece in the work gap, so that the at least one workpiece is machined in a double-sided manner between the work surfaces. The distance between the work disks is measured at at least two radially spaced measurement locations of the work gap and in that, from the measured distances, a distance between the work disks is determined at a location of the work gap representing the thickness of the at least one workpiece machined in the work gap.

IPC Classes  ?

• B24B 37/08 - Lapping machines or devicesAccessories designed for working plane surfaces characterised by the movement of the work or lapping tool for double side lapping

Abstract

The invention relates to a device (10) and method for determining the position of a working surface (16, 18) of a working disc (12, 14) of a double-sided machine tool, wherein the device comprises an optical measurement device (24) having a radiation source, an optical detector device, and an analysis device, designed for being disposed outside of the working gap, wherein the device comprises a beam guiding device (26) designed for being at least partially inserted in the working gap (20), and the beam guiding device (26) guides the optical radiation emitted by the radiation source substantially parallel to the working surfaces (16, 18) into the working gap (20), deflects said radiation onto a working surface (16, 18) at a measuring point by means of at least one deflecting surface (30), receives radiation reflected from the working surface (16, 18), and guides said radiation back out of the working gap (20) to the optical detector device, and the beam guiding device (26) comprises a fluid inlet (38) connected to a fluid supply, by means of which the at least one measurement area permeated by the optical radiation after exiting the exit opening (32) of the beam guiding device (26) in the working gap (20) can be flushed.

IPC Classes  ?

• B24B 7/17 - Single-purpose machines or devices for grinding end faces, e.g. of gauges, rollers, nuts or piston rings for simultaneously grinding opposite and parallel end faces, e.g. double disc grinders
• B24B 49/12 - Measuring or gauging equipment for controlling the feed movement of the grinding tool or workArrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation involving optical means

Abstract

The invention relates to a device (10) for the double-sided processing of flat work pieces, comprising an upper working disk (40) and a lower working disk, wherein facing each other between the working surfaces (46) thereof, the working disks (40) form a working gap for processing the work pieces, and wherein at least one of the working disks comprises a plurality of bores (48) extending through the working surface for feeding a liquid working medium into the working gap. The bores (48) are combined in several groups, wherein each group of bores (48) is connected to a separate pressurized supply line (36) for the working medium. At least one pressure control apparatus (35) is provided, which makes it possible to control the pressure of the working medium in the supply lines (36) separately from one another.

IPC Classes  ?

• B24B 49/16 - Measuring or gauging equipment for controlling the feed movement of the grinding tool or workArrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation taking regard of the load
• B24B 55/02 - Equipment for cooling the grinding surfaces, e.g. devices for feeding coolant

Abstract

The invention relates to a method for machining flat work pieces in a double-sided machine tool comprising an upper and a lower working disc, wherein at least one of the working discs is rotationally driven and each of the working discs comprise an annular working surface, wherein the working surfaces bound a likewise annular working gap therebetween, in which at least one carrier, guiding at least one workpiece into the working gap, is located, so that the at least one workpiece is machined on both sides between the working surfaces. According to the invention, the distance between the working discs is measured at at least two radially offset measurement locations of the working gap, and a distance between the working discs is determined at a location of the working gap representing the thickness of the at least one workpiece being machined in the working gap, particularly at a location radially offset from the measurement locations, and the thickness of the at least one workpiece machined in the working gap is derived from the distance thus determined.

IPC Classes  ?

• B24B 37/04 - Lapping machines or devicesAccessories designed for working plane surfaces
• B24B 49/10 - Measuring or gauging equipment for controlling the feed movement of the grinding tool or workArrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation involving electrical means
• G01B 7/15 - Measuring arrangements characterised by the use of electric or magnetic techniques for measuring distance or clearance between spaced objects or spaced apertures being regularly spaced

Abstract

The invention relates to a method for the grinding or polishing machining of very flat work pieces (38) that are releaseably fastened on flat carriers (28). The work pieces (38) are inserted together with the carriers (28) into the recesses (23) of at least one rotor disc (22) of a double side grinding machine (10) and are moved along cycloid paths between the working surfaces of the double side grinding machine (10). The removal rate on the working surfaces of the double side grinding machine (10) is either the same, or the removal rate on one working surface is substantially less than the removal rate on the opposite working surface, or no material removal is carried out on one of the working surfaces. In an embodiment, two work pieces (38) are releaseably fastened on a carrier (28), that is to say on the top side and the bottom side.

IPC Classes  ?

• B24B 7/17 - Single-purpose machines or devices for grinding end faces, e.g. of gauges, rollers, nuts or piston rings for simultaneously grinding opposite and parallel end faces, e.g. double disc grinders
• B24B 49/12 - Measuring or gauging equipment for controlling the feed movement of the grinding tool or workArrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation involving optical means
• B24B 7/22 - Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfacesAccessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain

Abstract

The invention relates to a device for grinding both sides of flat workpieces, having an upper and a lower working disc, each comprising a working surface having a grinding coating, wherein the working surfaces form a working gap between them, in which gap workpieces can be ground, wherein at least one of the working discs can be rotationally driven by means of a drive, and further comprising a device for guiding the workpieces in the working gap. According to the invention, deburring means are disposed on at least one of the working discs and are designed for deburring the workpieces during the machining thereof in the device.

IPC Classes  ?

• B24B 7/17 - Single-purpose machines or devices for grinding end faces, e.g. of gauges, rollers, nuts or piston rings for simultaneously grinding opposite and parallel end faces, e.g. double disc grinders
• B24B 7/22 - Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfacesAccessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain
• B24B 9/00 - Machines or devices designed for grinding edges or bevels on work or for removing burrsAccessories therefor
• B24D 13/14 - Wheels having flexibly-acting working parts, e.g. buffing wheelsMountings therefor acting by the front face

Abstract

The invention relates to a method for measuring the thickness of disc-shaped work pieces for integrated circuits machined in a machine tool, wherein the machine tool comprises an upper working disc driven in a rotating manner and having an annular working surface facing a lower working surface, and wherein the working surfaces form a working gap between them, in which a plurality of rotor discs are arranged which receive work pieces in recesses and which can be rotated by means of a rolling device, thereby causing the rotor discs and the tools received therein to move along a cycloid path. According to the invention, the thickness of at least one work piece present in the machine tool is measured using an optical measuring method. The invention further relates to a corresponding machine tool.

IPC Classes  ?

• G01B 11/06 - Measuring arrangements characterised by the use of optical techniques for measuring length, width, or thickness for measuring thickness
• B24B 37/04 - Lapping machines or devicesAccessories designed for working plane surfaces
• B24B 49/12 - Measuring or gauging equipment for controlling the feed movement of the grinding tool or workArrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation involving optical means

Abstract

The invention relates to a method for measuring the thickness of a discoidal workpiece serving as a substrate for electronic components, comprising the steps: Infrared radiation is applied to the top surface of the workpiece, wherein a first radiation component is reflected at the top surface and a second radiation component penetrates the workpiece thickness, is reflected at the bottom surface of the workpiece, and exits the top surface of the workpiece again, the first and the second radiation components interfere with each other forming an interference pattern, and the optical workpiece thickness between the top surface and bottom surface of the workpiece is determined using the interference pattern. According to the invention, the mechanical workpiece thickness is determined from a measurement of the intensity of the reflected and/or transmitted infrared radiation, considering the optical workpiece thickness.

IPC Classes  ?

• H01L 21/66 - Testing or measuring during manufacture or treatment
• B24B 37/04 - Lapping machines or devicesAccessories designed for working plane surfaces
• G01B 11/06 - Measuring arrangements characterised by the use of optical techniques for measuring length, width, or thickness for measuring thickness

Abstract

A two-side working machine, comprising an upper and a lower working disc which hold on, and are fixed to, an upper and a lower carrier disc, and which are disposed coaxially with each other and are adapted to be rotationally driven relative to each other by a working motor via a driving shaft, wherein the working discs have formed therebetween a working gap in which flat workpieces are processed on both sides, and a distance measuring device which measures the distance between working discs in at least two radially spaced points of the working gap, whereby the upper carrier disc is suspended on a supporting ring which is connected to the upper working shaft so as to be fixed for rotation, an annular portion of the carrier disc and means which are externally controllable by the supporting ring and via which a radial force is applied to the circumference of the carrier disc about the circumference of the supporting ring by means of a force generator, and control means are provided which adjust the force on the force generator in dependence on the distance values measured by the distance measuring device or the pressure values measured by a force sensing device, respectively.

IPC Classes  ?

• B24B 49/00 - Measuring or gauging equipment for controlling the feed movement of the grinding tool or workArrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation