• All sections
  • H - Electricity
  • H01L - Semiconductor devices not covered by class
  • H01L 21/68 - Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereofApparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components for positioning, orientation or alignment

Patent holdings for IPC class H01L 21/68

Total number of patents in this class: 3369

10-year publication summary

177
248
285
312
320
293
295
244
289
56
2016 2017 2018 2019 2020 2021 2022 2023 2024 2025

Principal owners for this class

Owner
All patents
This class
Applied Materials, Inc.
18082
223
Tokyo Electron Limited
12278
209
Nikon Corporation
7121
176
Taiwan Semiconductor Manufacturing Company, Ltd.
41238
153
Lam Research Corporation
5078
97
Samsung Electronics Co., Ltd.
140991
71
Screen Holdings Co., Ltd.
2694
56
EV Group E. Thallner GmbH
398
54
Disco Corporation
1826
53
ASML Netherlands B.V.
7236
49
Samsung Display Co., Ltd.
33362
37
KLA Corporation
1447
35
Semes Co., Ltd.
1361
34
Boe Technology Group Co., Ltd.
39745
32
Brooks Automation US, LLC
351
32
Cowles Semi, LLC
70
31
Shanghai Micro Electronics Equipment (Group) Co., Ltd.
251
30
Canon Inc.
38689
27
Kawasaki Heavy Industries, Limited
1617
27
Changxin Memory Technologies, Inc.
4927
25
Other owners 1918