• All sections
  • H - Electricity
  • H01L - Semiconductor devices not covered by class
  • H01L 21/68 - Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereofApparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components for positioning, orientation or alignment

Patent holdings for IPC class H01L 21/68

Total number of patents in this class: 3671

10-year publication summary

247
283
311
320
290
303
254
292
298
149
2017 2018 2019 2020 2021 2022 2023 2024 2025 2026

Principal owners for this class

Owner
All patents
This class
Applied Materials, Inc.
20514
258
Tokyo Electron Limited
13884
242
Taiwan Semiconductor Manufacturing Company, Ltd.
48629
165
Nikon Corporation
7229
152
Lam Research Corporation
5676
111
Samsung Electronics Co., Ltd.
158605
98
Screen Holdings Co., Ltd.
3198
92
Disco Corporation
1957
58
ASML Netherlands B.V.
7987
57
EV Group E. Thallner GmbH
427
55
Samsung Display Co., Ltd.
38914
51
Semes Co., Ltd.
1679
45
KLA Corporation
1871
42
Canon Inc.
44134
37
Boe Technology Group Co., Ltd.
44484
34
Brooks Automation US, LLC
333
34
Cowles Semi, LLC
70
31
Kawasaki Heavy Industries, Limited
1687
28
ASM IP Holding B.V.
2419
28
Changxin Memory Technologies, Inc.
4932
25
Other owners 2028